CN2660175Y - Multi-stage vacuum pump - Google Patents
Multi-stage vacuum pump Download PDFInfo
- Publication number
- CN2660175Y CN2660175Y CN 200320100640 CN200320100640U CN2660175Y CN 2660175 Y CN2660175 Y CN 2660175Y CN 200320100640 CN200320100640 CN 200320100640 CN 200320100640 U CN200320100640 U CN 200320100640U CN 2660175 Y CN2660175 Y CN 2660175Y
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- China
- Prior art keywords
- dividing plate
- air
- flow path
- vacuum pump
- compression chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000007906 compression Methods 0.000 claims abstract description 59
- 230000006835 compression Effects 0.000 claims abstract description 57
- 210000001503 joint Anatomy 0.000 claims description 7
- 229920001971 elastomer Polymers 0.000 claims description 4
- 239000000806 elastomer Substances 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000004087 circulation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The utility model relates to a multi-stage vacuum pump. A compression chamber is respectively formed in a plurality of shells and a clapboard is arranged between every two shells; after compressed by a rotor of a rotating shaft, the air in the former compression chamber can flow into the latter compression chamber through an air channel of the clapboard and then into the next latter compression chamber. The air can directly flow into the latter compression chamber through the air channel of the clapboard after being compressed in each compression chamber, which is different from the traditional model that the air should flow through the air channel encircling the external side of the compression chamber. Therefore, compared with the traditional design, the shell design of the utility model is smaller, that is, the external diameter size and volume of the multi-stage vacuum pump can be effectively reduced and even weight and cost can be relatively reduced.
Description
Technical field
The utility model relates to a kind of multistage vacuum pump, refers to that especially a kind of being applicable to can reduce outside dimension and volume, and the multistage vacuum pump that can reduce weight and reduce cost.
Background technique
In general cleaning preparation equipment, equipment such as the deposition in for example present semiconductor fabrication process, etching, ion implantation, it all must use a vacuum system to supply its operation to vacuumize formation one suitable vacuum environment.
And in above-mentioned vacuum system, must be by a vacuum pump to reach the effect of vacuum, so the quality of vacuum pump is concerning the effect that vacuum system can be reached.
Seeing also Fig. 1 is the sectional drawing of known multistage vacuum pump, shows that wherein so-called multistage vacuum pump 9 is by the housing 911～915 of a plurality of continuous axial windings, repeats alternately to be laminated with a plurality of dividing plates 921～924.
Fig. 2 also shows the wherein three-dimensional exploded view of one-level housing 914, and see also the sectional drawing that Fig. 3 is Fig. 2, wherein, the central interior hollow out of housing 914 is formed with a compression chamber 904, and is equipped with rotor 933,934 on two parallel shafts 931,932 and is meshing with each other to rotate in this compression chamber 904 and carries out the gas compression operation.Wherein, the gas of last compression chamber 904 is to be hidden in the gas flow 900 in the outer wall thickness of ring week in advance and to flow to next compression chamber 903 (seeing also Fig. 1) to carry out the gas compression operation of next stage via one.
Please note the known gas flow 900 shown in Fig. 2 and Fig. 3, it is to be formed at the ring week of housing 914 in the outer wall thickness, that is gas flow 900 is to be surrounded on compression chamber 904 outsides, therefore the external diameter and the volume of known housing 914 have been increased virtually, thereby cause the overall dimensions of known multistage vacuum pump 9 and volume to strengthen, and cause weight to increase.
Summary of the invention
Main purpose of the present utility model provides a kind of multistage vacuum pump, can reduce the outside dimension and the volume of multistage vacuum pump.
Another purpose of the present utility model provides a kind of multistage vacuum pump, can reduce weight, and reduce cost.
For achieving the above object, multistage vacuum pump of the present utility model includes a plurality of housings, a plurality of dividing plate and rotates module.Wherein, a plurality of housings are continuous axial windings each other, and each housing is formed with a compression chamber in the central interior hollow out.
In addition, a plurality of dividing plates are to be preset with a predetermined wall thickness respectively, and it is to be mounted on respectively between above-mentioned two housings with separating adjacent two compression chambers, and have provided two perforations on each dividing plate.
In addition, rotating module is to include two parallel rotating shafts, it is the compression chamber inside that is located in each housing, and pass the perforation of each dividing plate simultaneously, and in two rotating shafts and convex with a plurality of rotors respectively, and the two adjacent and corresponding interior correspondences of rotor are placed in the above-mentioned wherein compression chamber and the rotation that can be meshing with each other, by this compressible internal gas of engagement rotation.
Of the present utility modelly be characterised in that above-mentioned each dividing plate is formed with a front surface and a rear surface respectively, and dig in the inside of its predetermined wall thickness and to be provided with at least one air-flow path that this at least one air-flow path is to be communicated to the rear surface by front surface.
When running, after the rotor compression of gas in the last compression chamber via rotating shaft, can form pressurized gas, that is this compression chamber cognition forms a zone of high pressure relatively, and above-mentioned after compression high pressure air is known from experience via the air-flow path in the dividing plate and is circulated to back one compression chamber, and after this a compression chamber is to form a low pressure area with respect to last compression chamber.Afterwards, entered the gas of back in one compression chamber can be again via the rotor compression of rotating shaft, and be circulated to back one compression chamber again via the air-flow path in one dividing plate of back again, form multistage compression by this.
From the above, when gas in each compression chamber after overcompression, be directly to be circulated to back one compression chamber via the air-flow path in the dividing plate, itself and be different from tradition must be via around the gas flow that is formed at the compression chamber outside, therefore, housing of the present utility model housing than traditional design mode in design is little, that is the outside dimension of multistage vacuum pump of the present utility model and volume can effectively reduce, and can reduce weight relatively and reduce cost.
Description of drawings
Fig. 1 is the sectional drawing of known multistage vacuum pump.
Fig. 2 is the three-dimensional exploded view of the wherein one-level housing of known multistage vacuum pump.
Fig. 3 is the sectional drawing of Fig. 2.
Fig. 4 is the sectional drawing of the utility model multistage vacuum pump.
Fig. 5 is the wherein three-dimensional exploded view of one-level housing of the utility model.
Fig. 6 is the three-dimensional combination figure of the dividing plate of Fig. 5.
Fig. 7 is one of different embodiment's schematic representation of the utility model dividing plate.
Fig. 8 be the utility model dividing plate different embodiment's schematic representation two.
Wherein, description of reference numerals is as follows:
1-multistage vacuum pump; 21～25-housing; 211～251-compression chamber;
The 212-gas outlet; The 252-gas access; The 253-housing groove;
301,302-perforation; 31～34-dividing plate; 311～341-air-flow path;
The 342-front surface; The 343-rear surface; The 344-left clapboard;
The 345-right clapboard; 346-left side air-flow path; The right air-flow path of 347-;
The 348-ring groove; The 351-open front; The 352-after-opening;
4-rotates module; 41,42-rotating shaft; 411, the 421-rotor;
5-synchromesh gear group; 61～64-elastomer; The 7-dividing plate;
701,702-perforation; 71～73-side plate; The 74-air-flow path;
The 8-dividing plate; 801,802-perforation; 81～84-side plate;
The 85-air-flow path; 9-multistage vacuum pump; The 900-gas flow;
903,904-compression chamber; 911～915-housing; 921～924-dividing plate;
931,932-rotating shaft; 933,934-rotor.
Embodiment
For more understanding technology contents of the present utility model, be described as follows especially exemplified by a preferred embodiment.
At first, seeing also Fig. 4 is the sectional drawing of the utility model multistage vacuum pump, and it shows that multistage vacuum pump 1 of the present utility model includes a plurality of housings 21～25, a plurality of dividing plate 31～34 and rotates module 4.Wherein, a plurality of housings 21～25th, continuous axial winding each other, each housing 21～25 is formed with a compression chamber 211～251 in the central interior hollow out, and a plurality of dividing plates 31～34th are preset with a predetermined thickness t respectively, and are mounted on respectively between above-mentioned two housings 21～25 with separating adjacent two compression chambers 211～251.
Please consult Fig. 4, Fig. 5 simultaneously and be the utility model wherein the one-level housing three-dimensional exploded view, and Fig. 6 be the three-dimensional combination figure of the dividing plate of Fig. 5, it shows wherein a dividing plate 34 and with it as an illustration, the structure of other dividing plate 31～33 is then all identical with it.Be to have provided two perforations 301 on aforesaid dividing plate 34,302, and above-mentioned rotation module 4 is to include two parallel rotating shafts 41,42, this two rotating shaft 41, the 42nd, be located in the inside of compression chamber 211～251, and pass the perforation 301 of each dividing plate 31～34,302, and in two rotating shafts 41, on 42 and integrally formedly respectively convex with a plurality of rotors 411,421, two adjacent and corresponding rotors 411, correspondence is placed in the above-mentioned wherein compression chamber 211～251 in 421, simultaneously, one synchronous gear train 5 drives two parallel shafts 41,42 two adjacent rotor 411,421 rotations synchronously also keep not contacting mutually, and can rotate mutually with the compression internal gas.
In addition, aforementioned barriers 34 is formed with a front surface 342, an and rear surface 343 respectively in axial two, and dig in the inside of the predetermined thickness t of dividing plate 34 and to be provided with an air-flow path 341, simultaneously, on front surface 342, offer an open front 351, offer an after-opening 352 on rear surface 343, forward and backward opening 351,352 can communicate with air-flow path 341 respectively, and air-flow path 341 then is communicated to the after-opening 352 of rear surface 343 by the open front 351 of front surface 342.In present embodiment, dividing plate 34 be respectively by a left clapboard 344, and a right clapboard 345 butt joint groups each other establish and form, and in left clapboard 344, be formed with a left air-flow path 346, in right clapboard 345, be formed with a right air-flow path 347, left side air-flow path 346 is that correspondence is communicated in right air-flow path 347 with formation air-flow path 341, and this air-flow path 341 is to be formed between two perforations 301,302 of dividing plate 34.
When running, air is to enter in the compression chamber 251 via the gas access on the housing 25 252 earlier, after rotor 411,421 compressions of gas via rotating shaft 41,42 afterwards, can form pressurized gas, that is this compression chamber 251 can form a zone of high pressure relatively, and the open front 351 that above-mentioned after compression high pressure air is known from experience via dividing plate 34 flows into air-flow paths 341, flow out to back one compression chamber 241 via after-opening 352 again, this last compression chamber 251 is to form a low pressure area with respect to back one compression chamber 241.Afterwards, entered gas in one compression chamber 241 of back can be again via rotor 411,421 compressions of rotating shaft 41,42, and be circulated to back one compression chamber 231 again via the air-flow path 331 in one dividing plate 33 of back again, order is via air-flow path 321,311 circulations according to this, gas after the compression then flows out via the gas outlet 212 of housing 21 at last, so promptly forms multistage compression.
From the above, when gas in each compression chamber 221～251 after overcompression, be directly to be circulated to back one compression chamber 211～241 via the air-flow path 311～341 in the dividing plate 31～34, itself and be different from tradition must be via around the gas flow that is formed at the compression chamber outside, therefore, housing 21～25 of the present utility model can be little compared to the traditional design mode in design, that is the outside dimension of multistage vacuum pump 1 of the present utility model and volume can effectively reduce, and can reduce weight relatively and reduce cost.Please consult simultaneously and comparison diagram 1 and Fig. 4, for obviously showing the size difference of above-mentioned the utility model and traditional design, ratio is made as necessarily in the accompanying drawings hereby, learns that by knowing in the accompanying drawing size of the present utility model and volume are little compared to traditional approach really.
Please consult Fig. 4 more simultaneously, reach Fig. 5, the utility model is concaved with a ring groove 348 in addition on dividing plate 34, and an elastomer 64 is located in (all same group of other dividing plate 31～33 is provided with elastomer 61～63) in this ring groove 348, when dividing plate 34 is mounted on the housing 25, can avoid vibrating noise to produce in order to the gap between seal compression cavity 251 and absorbing septum 34 thickness t and the housing groove 253.
Seeing also Fig. 7 is one of different embodiment's schematic representation of the utility model dividing plate, and it shows that dividing plate 7 of the present utility model can change to be established by three side plate 71～73 butt joint groups each other and forms, and air-flow path 74 is around the periphery that is formed at perforation 701,702 on the dividing plate 7.See also Fig. 8 and be the utility model dividing plate different embodiment's schematic representation two, it shows that dividing plate 8 of the present utility model also can change to be established by four side plate 81～84 butt joint groups each other and forms, and air-flow path 85 is also around the periphery that is formed at perforation 801,802 on the dividing plate 8, and the size of air-flow path 85 also can be the design of different sizes.Therefore, dividing plate described in the utility model is not limited in by two side plates to be formed, and establish and can change multi-disc side plate butt joint group each other into, and the size of air-flow path also can be suitable variation.
The foregoing description only is to give an example for convenience of description, and interest field of the present utility model is as the criterion so that claims are described, but not only limits to the foregoing description.
Claims (10)
1. multistage vacuum pump comprises:
A plurality of housings are continuous axial windings each other, and each housing is formed with a compression chamber in the central interior hollow out;
A plurality of dividing plates are to be preset with a predetermined thickness respectively and to be mounted on respectively between above-mentioned two housings with separating adjacent two compression chambers, on each dividing plate and provided two perforations;
One rotates module, be to include two parallel rotating shafts it is the perforation that is located in described compression chamber inside and passes described dividing plate, also convex with a plurality of rotors respectively in described two rotating shafts, and two adjacent rotors are that correspondence is placed in the above-mentioned wherein compression chamber; And
One synchronous gear train is that the two adjacent rotors that drive two parallel shafts of this rotation module rotate synchronously;
It is characterized in that each dividing plate is formed with a front surface and a rear surface respectively, and dig in the inside of dividing plate and to be provided with at least one air-flow path that this at least one air-flow path is to be communicated to this rear surface by this front surface.
2. multistage vacuum pump as claimed in claim 1, it is characterized in that each dividing plate is to be established by a left clapboard and right clapboard butt joint group each other respectively to form, and in this left clapboard, be formed with a left air-flow path, be formed with a right air-flow path in this right clapboard, this left side air-flow path is that correspondence is communicated in this right side air-flow path to form this air-flow path.
3. multistage vacuum pump as claimed in claim 1, at least one air-flow path that it is characterized in that each dividing plate are to be formed between two perforations of each dividing plate.
4. multistage vacuum pump as claimed in claim 1, at least one air-flow path that it is characterized in that each dividing plate are the peripheries that is formed at two perforations of each dividing plate.
5. multistage vacuum pump as claimed in claim 1 it is characterized in that also being concaved with a ring groove respectively on each dividing plate, and a plurality of elastomer is to be located in respectively in this ring groove.
6. multistage vacuum pump as claimed in claim 1 is characterized in that each dividing plate is to be established and formed by one first side plate, one second side plate, one the 3rd side plate butt joint group each other respectively.
7. multistage vacuum pump as claimed in claim 1 is characterized in that the front surface of each dividing plate offers an open front, the rear surface offers an after-opening, and this forward and backward opening also communicates with this at least one air-flow path respectively.
8. multistage vacuum pump as claimed in claim 1 is characterized in that each dividing plate is to be established by four side plates butt joint group each other to form.
9. multistage vacuum pump as claimed in claim 1, it is characterized in that this synchromesh gear group drive this rotation module two parallel shafts the rotation synchronously of two adjacent rotors and keep not contacting mutually.
10. multistage vacuum pump as claimed in claim 7 is characterized in that gas is that open front via this dividing plate front surface flows into this air-flow path, and flows out via the after-opening of this air-flow path by this dividing plate rear surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320100640 CN2660175Y (en) | 2003-11-17 | 2003-11-17 | Multi-stage vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320100640 CN2660175Y (en) | 2003-11-17 | 2003-11-17 | Multi-stage vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2660175Y true CN2660175Y (en) | 2004-12-01 |
Family
ID=34339353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200320100640 Expired - Lifetime CN2660175Y (en) | 2003-11-17 | 2003-11-17 | Multi-stage vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2660175Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102472285A (en) * | 2009-08-14 | 2012-05-23 | 株式会社爱发科 | Dry pump |
| CN102667163A (en) * | 2009-12-24 | 2012-09-12 | 阿耐思特岩田株式会社 | Multi-stage vacuum pump |
| CN110177947A (en) * | 2017-01-20 | 2019-08-27 | 爱德华兹有限公司 | Multi-stage vacuum booster pump connector |
| WO2020063375A1 (en) * | 2018-09-28 | 2020-04-02 | 党祎贤 | Collection ejector vacuum pump |
| US11578722B2 (en) | 2017-01-20 | 2023-02-14 | Edwards Limited | Multi-stage vacuum booster pump coupling |
| CN116447139A (en) * | 2023-04-24 | 2023-07-18 | 北京通嘉宏瑞科技有限公司 | Stator and vacuum pump |
-
2003
- 2003-11-17 CN CN 200320100640 patent/CN2660175Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102472285A (en) * | 2009-08-14 | 2012-05-23 | 株式会社爱发科 | Dry pump |
| CN102667163A (en) * | 2009-12-24 | 2012-09-12 | 阿耐思特岩田株式会社 | Multi-stage vacuum pump |
| CN102667163B (en) * | 2009-12-24 | 2015-02-04 | 阿耐思特岩田株式会社 | Multi-stage vacuum pump |
| CN110177947A (en) * | 2017-01-20 | 2019-08-27 | 爱德华兹有限公司 | Multi-stage vacuum booster pump connector |
| US11578722B2 (en) | 2017-01-20 | 2023-02-14 | Edwards Limited | Multi-stage vacuum booster pump coupling |
| WO2020063375A1 (en) * | 2018-09-28 | 2020-04-02 | 党祎贤 | Collection ejector vacuum pump |
| CN116447139A (en) * | 2023-04-24 | 2023-07-18 | 北京通嘉宏瑞科技有限公司 | Stator and vacuum pump |
| CN116447139B (en) * | 2023-04-24 | 2024-05-17 | 北京通嘉宏瑞科技有限公司 | Stator and vacuum pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20131117 Granted publication date: 20041201 |