CN2645032Y - Capacitance grating measuring apparatus utilizing phase interpolation and digital circuit - Google Patents
Capacitance grating measuring apparatus utilizing phase interpolation and digital circuit Download PDFInfo
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- CN2645032Y CN2645032Y CN 03276729 CN03276729U CN2645032Y CN 2645032 Y CN2645032 Y CN 2645032Y CN 03276729 CN03276729 CN 03276729 CN 03276729 U CN03276729 U CN 03276729U CN 2645032 Y CN2645032 Y CN 2645032Y
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Abstract
The utility model relates to a capacitive measuring device using phase interpolation and digitizing circuit, belonging to testing technology and instrument specialty and mechantronics technology field. The utility model provides a displacement measuring system, which is commonly used in digital caliper, digital micrometer and other measuring devices and also in digital display and numerical control of measuring instruments and machine tools, comprising a clock, a frequency-dividing driver, a sensor, a preamplifier, a frequency selective amplifier, a shaping synchronizer, a phase modulation divider, a phase detector, and an interpolation control circuit. The utility model as a real-time digital measuring system can implement high frequency multiplication to the grid pitch of capacitive sensor and gain micron and submicron measuring resolution at higher measuring speed, which enables the capacitive sensor to be used in automatic control system conveniently.
Description
Technical field
The utility model is a kind of displacement measurement system, belongs to metrological testing technology and instrument specialty, electromechanical integration technology area.This measuring system is used for measurer video card chi, digital display dial gauge in full, the also digital display of the amount of being used for instrument and lathe, digital control system.The utility model is that capacitor grid transducer is used for real-time automatic control system, has also improved the measuring speed of system when improving Measurement Resolution.The utility model can make and hold the measurement resolution that the grid measuring system obtains micron order and submicron order.
Technical background
Last century, the early seventies capacitance displacement sensor was moving grid and the fixed grid structure after inductosyn and grating sensor, and it is measuring period with pitch, realized the increment type measurement, equally also use average effect and differential technique, successfully solved the displacement measurement of silk level and microstage wide range.The capacitance measurement system of being invented and obtained patent in 1972 by Swiss H.U.Meyer is called the SYLVAC system.The N.I.Andermo of Swede applied for " capacitive displacement measurement mechanism " Swedish patent on Dec 9th, 1977, and the patent No. is SE7714010, and had applied for that on Dec 12nd, 1986 U.S. Pat applied for Chinese patent CN87102624A in 4743902,1987 years.H.U.Meyer has applied for " capacitance measurement method of length and angle " Swiss Patent by name on Dec 21st, 1980, and the patent No. is CH8609/80, and has applied for the CN86107942A Chinese patent again on Dec 20th, 1981.Existing domestic used appearance grid measured chip is the SN6602 that the E78118A, the SH7122 that are produced by 101 of the Ministry of Aerospace Industry, weapons portion 214 and Shanghai Xin Mao semiconductor company produce, and its circuit is similar with the patent of Meyer, Andermo with disposal route.Conclude and get up to have following characteristics:
The first, sensor
Slide rule also can be described as read head, also claims emitter m along the moving direction some groups of transmitting electrodes that distribute, and has a receiving pole at least.Scale is that pitch is the scaleplate of constant.
The second, the feature of drive signal
Produce m road square wave power supply signal, the amplitude of each road signal is identical with frequency, and differs the 360/m degree successively.The pulse width of power supply signal is modulated square wave.
The 3rd, Signal Processing
Received signal is modulated carrier signal, through amplifying the envelope that demodulation obtains carrier signal, promptly reflects the phase-modulated signal of displacement again.Become square wave after the shaping, after the A/D conversion, obtain displacement data.
The output of above-mentioned appearance grid displacement measurement system is timesharing, and output data lags behind displacement, can not be used for real-time control system; Frequency after the displacement signal demodulation of the grid of reflection appearance on the other hand only is 1/20 of drive signal (carrier signal) frequency, has reduced the measuring speed of system; Thirdly be perfect not enough to the subdivide technology that holds grid pitch, the segmentation number is not high, and promptly Measurement Resolution is not high.
The utility model content
The purpose of this utility model:
The first, realize holding the output of grid measuring system real-time digital, make capacitor grid transducer can be used for automatic control system;
The second, realize improving the resolution of holding the grid measuring system to holding the high power segmentation of grid pitch, make resolution reach micron order and submicron order;
The 3rd, do not adopt modulation and countermodulation technology in this measuring system, and improve the speed of holding the grid measuring system with the way that improves the phase-modulation wave frequency.
Technical essential of the present utility model is as shown in Figure 1: adopt real-time digital display circuit, amplitude, the frequency of sensor actuation signal are identical, and phase place is to differ 45 ° eight road square waves successively, and frequency of rectangular wave is clock f
0The n frequency division, the displacement signal that receiving pole obtains is the phase-modulation wave identical with driving signal frequency, the phase modulation wave frequency also is that clock is transferred f
0The n frequency division, n is the segmentation number that holds grid pitch τ, can select arbitrarily, the one-period of phase-modulated signal is a pitch holding grid, with the phase interpolation method pitch is carried out the interpolation segmentation, τ/n is the minimum step pitch of measuring system, obtains real-time dfisplacement pulse from interpolation control circuit output terminal OUT1 and OUT2, pulse equivalency is the minimum step pitch of displacement, and the frequency of output pulse is the speed of sensor displacement.Its rigid structure is: clock f
0Be connected with frequency division driver, phase modulation frequency divider, interpolation control circuit, shaping synchronizer respectively, the frequency division driver is connected with sensor, sensor is connected to phase detector with prime amplifier, frequency-selecting amplifier, shaping synchronizer after connecting, the phase modulation frequency divider is connected with phase detector, interpolation control circuit respectively, and interpolation control circuit has two output terminal OUT
1, OUT
2, OUT
1Output terminal links to each other with the phase modulation frequency divider; Output signal end OUT
1And OUT
2Output adds/subtracts count pulse CP+/CP-, OUT respectively
1And OUT
2Be connected to respectively numerical control CNC system also can, be connected to parallel again decoder driver, the LCD display of inserting behind the up-down counter.
The utility model will hold the grid measuring system and change into real-time measuring system by the measuring system of timesharing, and carry out the high power segmentation to holding grid pitch, thereby improve the resolution of measuring system.Owing to adopt the phase modulating system of upper frequency, also improve measuring speed, the output signal of this circuit is that two-way adds CP+, subtracts the CP-pulse signal, each pulse is the minimum step pitch of measuring system, again by up-down counter 10 count measurement displacements, or send into FEEDBACK CONTROL CNC system 13 and realize control in real time.Technical essential of the present utility model as shown in Figure 1, the f of clock 1
0Realize the n frequency divisions through frequency division driver 2, and to export eight tunnel frequencies be f
0The square wave of/n removes driving sensor 3.Obtaining frequency on sensor 3 receiving pole R still is f
0The phase-modulation wave of/n, phase place are that 2 π x/ τ (wherein τ is a pitch, and x is the displacement of sensor) become with measuring distance x.Phase converter 7 carries out n frequency division output reference and dashes than the traveling wave maser of phase pulse and sensor 3 outputs and enter phase demodulation in the phase detector 8 through prime amplifier 4, frequency-selecting amplifier 5, shaping synchronizer 6, again behind interpolation control circuit 9, at output terminal OUT
1And OUT
2Can obtain to represent the count pulse CP+ and the CP-of positive negative direction.The phase modulation frequency divider is connected with frequency division driver 2, shaping synchronizer 6 respectively.Wherein n can set arbitrarily for holding the segmentation number of grid pitch τ, as 500,1000 ..., 5000 etc., the equivalent of count pulse CP can be 10 μ m, 5 μ m, 1 μ m, 0.5 μ m, 0.1 μ m, the displacement x of count pulse CP and sensor is in real time synchronous.CP can send into up-down counter 10, shows displacement through decoding/driver 11 in LCD display 12, Here it is digital display.Also can directly send in the numerical control CNC system 13.The utility model and existing appearance grid measuring system difference: first point, output pulse signal is real-time, can be used for numerical control; Second point can carry out the measurement of any high power n segmentation realization submicron order to holding grid pitch; Thirdly, the driving signal frequency of sensor is consistent with the frequency of received signal, promptly is both f
0/ n, rather than prevailing system 1/20.
Description of drawings
The utility model specifically describes and embodiment is narrated by following diagram.
Fig. 1. appearance grid measuring system block diagram of the present utility model;
Among the figure: 1-clock, 2-frequency division driver, 3-sensor, 4-prime amplifier, 5-frequency-selecting amplifier, 6-shaping synchronizer, 7-phase converter, 8-phase detector, 9-interpolation control circuit, 10-up-down counter, 11-decoder driver, 12-display, 13-CNC system
Fig. 2. hold the synoptic diagram of grid read heads (slide rule) and scale;
Among the figure: 2-frequency division driver, 3-sensor, 4-prime amplifier
Fig. 3. the driving circuit of sensor and receiving circuit;
Among the figure: 1-clock, 2-frequency division driver, 3-sensor, 4-prime amplifier, 5-frequency-selecting amplifier;
Fig. 4. phase modulation frequency dividing circuit, shaping synchronousing circuit, phase discriminator, interpolation control circuit;
Among the figure: 1-clock, 6-shaping synchronously, 7-phase converter, 8-phase detector, 9-interpolation control circuit.
Embodiment
The utility model is applicable to and holds the grid general purpose transducer, the sensor construction synoptic diagram as shown in Figure 2, E is an emitter, M is a repeller, S is a screening electrode, R is a receiving pole, τ is a pitch of holding grid, M and S are on scale, E and R are on slide rule.Driving circuit of the present utility model is eight road square waves 2, and the amplitude of each road power supply signal is identical with frequency, and phase place differs 45 ° successively.Frequency of rectangular wave is f
0/ n, f
0Be the frequency of clock 1, n is a pitch segmentation number, can set arbitrarily.Its circuit connects as follows: sensor passes through capacitor C
1With preamplifier IC
1Anode connects, IC
1Forward end connects resistance R simultaneously
3, R
3Connect resistance R respectively
1And R
2, R
1Connect power supply, R
2Ground connection; IC
1Negative end connect resistance R respectively
4, R
5, R
5Respectively with IC
1Output terminal and capacitor C
2Connect resistance R
4Other end ground connection; Capacitor C
2The other end connect capacitor C respectively
3And resistance R
6, R
6Other end ground connection, C
3The other end connect capacitor C respectively
4, C
5And resistance R
7, R
7Other end ground connection, C
4Other end selecting audio amplifier IC respectively
2Negative end and resistance R
8, R
8The other end meet IC respectively
2Output terminal and C
5, IC
2Forward end ground connection.What the driving circuit of sensor and receiving circuit produced eight tunnel drive signals as shown in Figure 3 is frequency division driver 2.Clock f
0Behind the 4/n frequency division, insert trigger IC
4Input end of clock, IC
4Q termination D end meet trigger IC again
6Input end of clock, IC
4Q termination trigger IC
5Input end of clock, IC
5Q termination IC
6D end, meet trigger IC again
7Input end of clock, IC
5Q termination trigger IC
8Input end of clock, IC
6Q termination trigger IC
9Input end of clock, IC
6Q termination IC
5D end meet trigger IC again
10Input end of clock, IC
7Q termination IC
8D end, IC
8Q termination IC
7D end, IC
9Q termination IC
10D end, IC
10Q termination IC
9D end; IC
7, IC
8, IC9, IC
10Q and Q end insert sensors as eight tunnel outputs.The output signal of sensor 3 is staircase waveforms, and frequency still is f
0/ n, phase place be 2 π x/ τ wherein x be displacement, behind prime amplifier 4 and frequency-selecting amplifier 5, obtain the sine wave signal sin[27 π (f of phase modulation
0/ n) t ± 2 π x/ τ], t is the time.Amplifier IC among Fig. 3
1Positive termination capacitor C
1And resistance R
3, R
3The other end by R
1And R
2Power amplifier IC among Fig. 3 after the dividing potential drop
2Negative terminal connect capacitor C
4, resistance R
8, R
8Another termination IC
2Output terminal.Capacitor C in the frequency-selecting amplifier 5
3, C
4, C
5And resistance R
7Meet some C altogether
4And R
8A termination IC
2Negative terminal, R
8And C
5Another termination IC
2Output, R
7Other end ground connection, C
3Another termination C
2Output.Shaping and synchronizing circuit are shown in 6 among Fig. 4, and the phase-modulated signal J1 that represents displacement is through C
6Input to amplifier IC
3Negative terminal, resistance R
9One termination IC
3Another termination of negative terminal V
Cc/ 2, IC
3Positive terminating resistor R
10And R
11, R
10Another termination V
Cc/ 2, R
11Another termination IC
3Output terminal is again through resistance R
12Meet Vcc, IC
3Output terminal is held through Sheffer stroke gate IC through the D of ICC
16What obtain the row ripple after the shaping synchronously is transferred to phase detector 8 again than phase pulse.Phase converter 7 is made up of frequency divider, d type flip flop and control gate, output reference than phase pulse and traveling-wave ratio mutually pulse carry out phase demodulation, the signal that makes the output signal of phase detector 8 follow capable ripple all the time changes.The phase detector of being made up of Sheffer stroke gate 8 detects the pulse of traveling-wave ratio phase and benchmark than the phase relation of pulse mutually.Phase detector 8, phase converter 7 and time clock 15.Be transferred to the interpolation control circuit 9 that Sheffer stroke gate is formed, just can be at output terminal OUT
1And OUT
2Obtain representing the count pulse CP+ and the CP-of both forward and reverse directions displacement.Concrete circuit connects as follows: the phase-modulated signal of Displacement Measurement passes through capacitor C
6Be connected to amplifier IC
3Negative end, resistance R
9Also be connected to IC
3Negative end, R
9Other end connecting resistance R
10Connect power Vcc/2 again, R
10Another termination IC
3Forward end, resistance R
11Meet IC
3Forward end, R
11Another termination IC
3Output terminal, resistance R
12Meet IC
3Output terminal, R
12Another termination power; IC
3Output terminal meet trigger IC
11D end, IC
11Q termination IC
12D end, be connected to Sheffer stroke gate IC again
16Input end, trigger IC
12Q end also be connected to trigger IC
16Another input end, IC
11And IC
12Input end of clock meet clock f respectively
0The input circuit connection of phase modulation frequency divider 7 is as follows: output terminal OUT
1Be connected to trigger IC
13Input end of clock, trigger IC
13Q termination D end, OUT
1Termination Sheffer stroke gate IC
17Input end, IC
13Q termination IC
17Another input end, IC
17Output termination Sheffer stroke gate IC
18Input, Sheffer stroke gate IC
26Output termination Sheffer stroke gate IC
18Another input end, IC
18Output signal be connected to trigger IC through 4/n frequency division rear end
14Input end of clock, IC
14Q termination D end, trigger IC
15Input end of clock meet clock f
0, Sheffer stroke gate IC
19Input termination IC
15Q end, IC
19Another input termination IC
15D end meet IC again
14Q end, IC
19Output terminal and IC
16Output terminal insert respectively by Sheffer stroke gate IC
20And IC
21Two input ends of the comparer of forming 8; Sheffer stroke gate IC
22, IC
23, IC
24, IC
25Form interpolation control circuit, IC
24Output terminal output positive-displacement pulse CP+, IC
25Output terminal output negative sense dfisplacement pulse CP-.
The utility model advantage and effect: the utility model is a kind of appearance grid measuring system that adopts phase run and digitizer, as displacement measurement.Be usually used in digital display appliance such as slide calliper rule and clock gauge, also the digital display of the amount of being used for instrument and lathe, digital control system.Existing appearance grid measuring system can only be used for timesharing and show, can not be used for showing in real time and control.Existing digital display calliper resolution is 0.01mm, maximal rate 1.5m/s; When homemade digital display dial gauge resolution was 0.001mm, its speed dropped to 0.3m/s.The utility model can be brought up to micron order and submicron order with the resolution of holding the grid measuring system, and as digital display calliper resolution is brought up to 0.005mm, speed is brought up to 4m/s; When digital display dial gauge resolution was 0.0005mm, its speed was 0.8m/s.Also slide calliper rule can be made the digital display micrometer callipers, resolution reaches 0.001mm.In addition the utility model can also be directly used in digital control system with capacitor grid transducer.Use this digital display and measuring method can make the resolution of holding the grid measuring system bring up to 0.5 micron and 0.1 micron from 1 micron.
The utility model is used for digital display calliper and machine tool digital display unit, and linear measure longimetry resolution is 0.005mm, and measuring speed is 4m/s; The utility model is used for the digital display dial gauge in wide land, and linear measure longimetry resolution is 0.001mm and 0.005mm, and speed is 0.8m/s; The utility model also can be pressed into digital control system with the output pulse CP+ and the CP-of capacitor grid transducer.
Claims (4)
1. adopt the appearance grid measurement mechanism of phase run and digitizer, it is characterized in that adopting real-time digital display circuit, amplitude, the frequency of sensor actuation signal are identical, and phase place is to differ 45 ° eight road square waves successively, and frequency of rectangular wave is clock f
0The n frequency division, the displacement signal that receiving pole obtains is the phase-modulation wave identical with driving signal frequency, the phase modulation wave frequency also is that clock is transferred f
0The n frequency division, n is the segmentation number that holds grid pitch τ, can select arbitrarily, the one-period of phase-modulated signal is a pitch holding grid, with the phase interpolation method pitch is carried out interpolation and segments, τ/n is the minimum step pitch of measuring system, from interpolation control circuit output terminal OUT
1And OUT
2Obtain real-time dfisplacement pulse, pulse equivalency is the minimum step pitch of displacement, and the frequency of output pulse is the speed of sensor displacement, and its rigid structure is: clock f
0Be connected with frequency division driver, phase modulation frequency divider, interpolation control circuit, shaping synchronizer respectively, the frequency division driver is connected with sensor, sensor is connected to phase detector with prime amplifier, frequency-selecting amplifier, shaping synchronizer after connecting, the phase modulation frequency divider is connected with phase detector, interpolation control circuit respectively, and interpolation control circuit has two output terminal OUT
1, OUT
2, OUT
1Output terminal links to each other with the phase modulation frequency divider; Output signal end OUT
1And OUT
2Output adds/subtracts count pulse CP+/CP-, OUT respectively
1And OUT
2Be connected to respectively numerical control CNC system also can, be connected to parallel again decoder driver, the LCD display of inserting behind the up-down counter.
2. the appearance grid measurement mechanism of employing phase run according to claim 1 and digitizer, it is characterized in that prime amplifier is connected in the following manner with frequency-selecting amplifier: sensor passes through capacitor C
1With preamplifier IC
1Anode connects, IC
1Forward end connects resistance R simultaneously
3, R
3Connect resistance R respectively
1And R
2, R
1Connect power supply, R
2Ground connection; IC
1Negative end connect resistance R respectively
4, R
5, R
5Respectively with IC
1Output terminal and capacitor C
2Connect resistance R
4Other end ground connection; Capacitor C
2The other end connect capacitor C respectively
3And resistance R
6, R
6Other end ground connection, C
3The other end connect capacitor C respectively
4, C
5And resistance R
7, R
7Other end ground connection, C
4Other end selecting audio amplifier IC respectively
2Negative end and resistance R
8, R
8The other end meet IC respectively
2Output terminal and C
5, IC
2Forward end ground connection.
3. the appearance grid measurement mechanism of employing phase run according to claim 1 and digitizer is characterized in that eight tunnel drive signals connect in the following manner: clock f
0Insert trigger IC behind the frequency division 4/n
4Input end of clock, IC
4Q termination D end meet trigger IC again
6Input end of clock, IC
4Q termination trigger IC
5Input end of clock, IC
5Q termination IC
6D end, meet trigger IC again
7Input end of clock, IC
5Q termination trigger IC
8Input end of clock, IC
6Q termination trigger IC
9Input end of clock, IC
6Q termination IC
5D end meet trigger IC again
10Input end of clock, IC
7Q termination IC
8D end, IC
8Q termination IC
7D end, IC
9Q termination IC
10D end, IC
10Q termination IC
9D end; IC
7, IC
8, IC
9, IC
10Q and Q end insert sensors as eight tunnel outputs.
4. the appearance grid measurement mechanism of employing phase run according to claim 1 and digitizer is characterized in that sensor output signal is through preamplifier IC
1With frequency-selecting amplifier IC
2Back shaping synchronousing circuit (6) is connected in the following manner with the circuit of phase modulation frequency divider (7): the phase-modulated signal of Displacement Measurement passes through capacitor C
6Be connected to amplifier IC
3Negative end, resistance R
9Also be connected to IC
3Negative end, R
9Other end connecting resistance R
10Connect power Vcc/2 again, R
10Another termination IC
3Forward end, resistance R
11Meet IC
3Forward end, R
11Another termination IC
3Output terminal, resistance R
12Meet IC
3Output terminal, R
12Another termination power; IC
3Output terminal meet trigger IC
11D end, IC
11Q termination IC
12D end, be connected to Sheffer stroke gate IC again
16Input end, trigger IC
12Q end also be connected to trigger IC
16Another input end, IC
11And IC
12Input end of clock meet clock f respectively
0The input circuit connection of phase modulation frequency divider (7) is as follows: output terminal OUT
1Be connected to trigger IC
13Input end of clock, trigger IC
13Q termination D end, OUT
1Termination Sheffer stroke gate IC
17Input end, IC
13Q termination IC
17Another input end, IC
17Output termination Sheffer stroke gate IC
18Input, Sheffer stroke gate IC
26Output termination Sheffer stroke gate IC
18Another input end, IC
18Output signal be connected to trigger IC through 4/n frequency division rear end
14Input end of clock, IC
14Q termination D end, trigger IC
15Input end of clock meet clock f
0, Sheffer stroke gate IC
19Input termination IC
15Q end, IC
19Another input termination IC
15D end meet IC again
14Q end, IC
19Output terminal and IC
16Output terminal insert respectively by Sheffer stroke gate IC
20And IC
21Two input ends of the comparer of forming 8; Sheffer stroke gate IC
22, IC
23, IC
24, IC
25Form interpolation control circuit, IC
24Output terminal output positive-displacement pulse CP+, IC
25Output terminal output negative sense dfisplacement pulse CP-.
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CN 03276729 CN2645032Y (en) | 2003-08-26 | 2003-08-26 | Capacitance grating measuring apparatus utilizing phase interpolation and digital circuit |
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CN 03276729 CN2645032Y (en) | 2003-08-26 | 2003-08-26 | Capacitance grating measuring apparatus utilizing phase interpolation and digital circuit |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104019733A (en) * | 2014-06-18 | 2014-09-03 | 中国一冶集团有限公司 | Chute opening size measuring device for coke oven chute construction |
CN110388870A (en) * | 2018-04-23 | 2019-10-29 | 桂林市晶瑞传感技术有限公司 | Displacement measurement system and displacement measurement method for sensor device |
-
2003
- 2003-08-26 CN CN 03276729 patent/CN2645032Y/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104019733A (en) * | 2014-06-18 | 2014-09-03 | 中国一冶集团有限公司 | Chute opening size measuring device for coke oven chute construction |
CN104019733B (en) * | 2014-06-18 | 2017-01-18 | 中国一冶集团有限公司 | Chute opening size measuring device for coke oven chute construction |
CN110388870A (en) * | 2018-04-23 | 2019-10-29 | 桂林市晶瑞传感技术有限公司 | Displacement measurement system and displacement measurement method for sensor device |
WO2019205847A1 (en) * | 2018-04-23 | 2019-10-31 | 桂林市晶瑞传感技术有限公司 | Displacement measuring system for sensor device and displacement measuring method |
GB2589730A (en) * | 2018-04-23 | 2021-06-09 | Guilin Gemred Sensor Tech Co Ltd | Displacement measuring system for sensor device and displacement measuring method |
GB2589730B (en) * | 2018-04-23 | 2022-07-13 | Guilin Gemred Sensor Tech Co Ltd | Displacement measuring system for sensor device and displacement measuring method |
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