CN2639998Y - Optical fiber probe having excellent vibration characteristics - Google Patents
Optical fiber probe having excellent vibration characteristics Download PDFInfo
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- CN2639998Y CN2639998Y CNU022929142U CN02292914U CN2639998Y CN 2639998 Y CN2639998 Y CN 2639998Y CN U022929142 U CNU022929142 U CN U022929142U CN 02292914 U CN02292914 U CN 02292914U CN 2639998 Y CN2639998 Y CN 2639998Y
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- optical fiber
- probe
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- fork
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Abstract
The utility model relates to an optical fiber probe with an excellent vibration performance relating to a scanning optical micro-imaging, in particular to an imaging element provided by a scanning near-field optical microscope in near-field optical experimental art. The utility model cuts a prior optical fiber probe into a short probe to make the short probe face and couple to the end face of a long optical fiber which is connected with a photodetector. The short probe optical fiber is positioned on the shaker arm of a vibrating part (such as quartz tuning fork). The long optical fiber is positioned on the fixed arm of the vibrating part. The producing steps comprise pretreating, marking for location, pre-cutting, making the probe, fixing the optical fiber probe, cutting the optical fiber probe into short probe, coupling the long optical fiber and other steps. The novel contactless short probe structure protects the basic frequency of vibration of the vibrating part from disturbance, so the optical fiber probe has a very excellent vibration performance and has little influence on the transmission efficiency of light. The utility model expediently used in the prior near-field optical microscope does not increase cost in manufacturing process.
Description
Technical field:
The utility model relates to the scanning optical micro-imaging technique, particularly the image forming that is provided at the scan type near-field optical microscope in the near field optic experimental technique.
Background technology:
Near-field Optical Microscope (be called for short NSOM) be in the distance range of a wavelength (promptly in the near field) carry out optical measurement, to obtain the spatial resolution of super diffraction limit.Present Near-field Optical Microscope, be to use the molten optical fiber that draws or corrode and plate metallic film and have the optical aperture of 10nm to 100nm diameter dimension as optical probe to form end in its appearance, be installed on the piezoceramic material that to make accurate displacement and scanning probe, control in conjunction with the accurate feedback of height that atomic force microscopy (AFM) is provided, optical probe very accurately is controlled at the height of 1nm to 100nm on the sample surface, but the three dimensions near-field scan that carries out feedback control obtains the image of sample.Optical fiber probe with nanoscale optical aperture both can receive also can launch optical information, can do reflection or transmission to sample, to measure various optics, spectral information, especially the various optical information that obtained are the optical information in nanoscale zone, the little optics to molecular dimension in energy sampling surface, spectral information.In addition, in field of nanometer technology, Near-field Optical Microscope except high spatial resolution can be arranged, in order to the near field optic information that obtains very small region, also can become a kind of new method of the structure of nanoscale on the sample surfaces for a change, and then become nanometer and make important new tool in (nano-fabrication) and nano-photoetching (nano-lithography) technology.Therefore, Near-field Optical Microscope is applied in the research of biology, medical science, semiconductor and various materials etc. in the nanometer technology in a large number and promptly.
The optical space resolution of Near-field Optical Microscope depends primarily on the size of the terminal optical aperture of optical fiber probe.At present, rap the Near-field Optical Microscope of pattern (tapping mode), be that the optical fiber probe that will prepare is bonded to do on front end of raising one's arm of quartz tuning-fork and raps, measure the foundation of the voltage of quartz tuning-fork output as feedback control, optical fiber probe is controlled in the scope near field on the sample surfaces, carries out the scanning survey in the near field range.To rap pattern work, at first to find the fundamental vibration frequency of the quartz tuning-fork that is stained with optical fiber probe, near its resonant frequency, choose a working point, just can make optical fiber probe convergence sample surfaces near-field region, the near field optic signal is obtained by fiber optic probe tip, deliver to photomultiplier through fibre-optic waveguide, deliver to lock-in amplifier again, the signal after the amplification is delivered to the signal of computer as the near field optic picture at last.Therefore, the quartz tuning-fork that is stained with optical fiber probe will have good fundamental vibration frequency characteristic, and this is the prerequisite that obtains better optical signalling.Yet, because the optical fiber probe that is bonded on front end of raising one's arm of quartz tuning-fork has the tail optical fiber of very long transmission near field optic signal to photomultiplier, certainly will very big influence be arranged to quartz tuning-fork fundamental vibration frequency like this, so that be difficult to form the fundamental vibration frequency curve, so system just can not well work, even can not work.
Summary of the invention:
The purpose of this utility model is to provide a kind of optical fiber probe with good vibration frequency curve.
Technical solution of the present utility model is as follows:
The structure of optical fiber probe is: an end is the fine optical fiber that is coated with metallic film of tip-like, be fixed on the vibrating member, it is characterized in that: this optical fiber blocks into the hour hand shape, the truncated position is a flush end, and the flush end of this flush end and the long optical fibers of another section connection photodetector is relative, both are at a distance of 1～50 μ m.
In the such scheme, described vibrating member is a quartz tuning-fork, and described hour hand places on the shaker arm of tuning fork, and described long optical fibers places on the fixed arm of tuning fork.
Particularly, the optical fiber of making hour hand in the utility model generally is the single mode silica fibre, and its core diameter is thin, makes needle-like easily; Institute's metal-coated films is generally the aluminium film, also can adopt other metal (as gold, silver etc.) as required; Long optical fibers then can be single mode or multimode optical fiber; The length of hour hand should adapt with the size of vibrating member (for example quartz tuning-fork), is generally about 3mm; Not contact and to be convenient to being coupled as of light suitable, can be generally about 10 μ m between the end face of hour hand optical fiber and long optical fibers at a distance of 1～50 μ m.Vibrating member can be quartz tuning-fork, piezoelectric ceramics etc., but is good with the effect of quartz tuning-fork.Hour hand should place one of tuning fork to raise one's arm---on the shaker arm of starting of oscillation action usefulness, long optical fibers should place tuning fork another raise one's arm---on the fixed arm that plays the role of positioning.Being connected with bonding between hour hand optical fiber, long optical fibers and the vibrating member (for example quartz tuning-fork) is advisable.With described optical fiber through pre-service, position mark, precut, system pin, fixed fiber pin, fracture into making steps such as hour hand, coupling long optical fibers, can obtain the utility model: 1. the optical fiber of selecting for use is cleaned, goes the pre-service of surrounding layer, the length of the surrounding layer that goes is decided according to the system pin technology of selecting for use; 2. according to the system pin technology of selecting for use, on optical fiber, make suitable position mark, wherein on fiber cores, make a position mark at least; 3. the mark on fiber cores precuts, with a small amount of feed, do not block optical fiber and be advisable; 4. utilize common process system pin, can be (for example: molten drawing or chemical corrosion or the molten post-etching etc. that draws according to the suitable technology of the conditioned disjunction choice of equipment that is had, vacuum coating or ion film plating etc.), made optical fiber pin needle point should with precut mark at a distance of the length (for example 3mm) of a hour hand; 5. the optical fiber pin is fixed on the vibrating member and (for example is bonded on the shaker arm of quartz tuning-fork), make precut mark on vibrating member, be positioned at suitable position, do not influence vibration, be convenient to long optical fibers again and be coupled as suitable with it with hour hand; 6. fracture in precut mark, the optical fiber pin the end face at hour hand, the place of fractureing be the plane; 7. the long optical fibers and the hour hand that end face are cut into the plane are coupled, and long optical fibers is fixed on correct position (for example being bonded on the fixed arm of quartz tuning-fork) on the vibrating member.Both end faces as far as possible mutually near but do not contact (for example about 10 μ m), light can be coupled to the long optical fibers from hour hand.
When optical fiber probe of the present utility model carries out work with the pattern of rapping (the same prior art of method), the nano aperture at hour hand tip detects the optical signalling that feeds back on the sample, be coupled in the long optical fibers through both relative flush ends then, be transferred in processing and the control assembly (for example computer) through photodetector (for example photomultiplier) and subsequent conditioning circuit; Be stained with raising one's arm of optical fiber hour hand and vibrate under rapping, the voltage of measuring vibrations spare (for example quartz tuning-fork) output is as the foundation of feedback control.Since the optical fiber hour hand on raising one's arm not the traction long optical fibers, do not link to each other with photodetector and subsequent conditioning circuit, thereby this vibration of raising one's arm is not subjected to the influence of other any factor, reflects the vibration characteristics that himself is good fully.Like this, the quartz tuning-fork that is stained with hour hand almost vibrates with its natural vibration frequency (a little less than its natural vibration frequency), forms very good vibration frequency curve.
That is to say that the utility model has solved with design cleverly and has been difficult to the difficulty that overcomes in the past, make as the fundamental vibration frequency of the quartz tuning-fork of vibrating member interference-free.The optical fiber probe that is proposed is with one section short fiber probe and another segment length's optical fiber coupling that intercouples, both do not link to each other, the contactless structure of this novelty not only makes optical fiber probe possess very good vibration characteristics, and the transfer efficiency to light does not have much affect, and does not also increase cost in the processing and making process.The utility model can be advantageously used in the existing Near-field Optical Microscope.
Description of drawings:
Fig. 1, the utility model structural representation.
Fig. 2, the utility model manufacturing process (part) synoptic diagram in early stage.
Fig. 3～5, the effect comparison synoptic diagram of the utility model and prior art.Fig. 3, amplitude and frequency that the tuning fork of sticking optical fiber probe is raised one's arm; Fig. 4 is stained with amplitude and frequency that the tuning fork of long optical fibers probe is raised one's arm; Fig. 5 is stained with amplitude and frequency that the tuning fork of short fiber probe is raised one's arm.
NSOM optical waveguide image and the end face afm image that obtains under the optical mode received with the utility model probe in Fig. 6～7.
Photic distribution of current image of the NSOM luminotron that obtains under the optical mode and end face afm image thereof are being sent with the utility model probe in Fig. 8～9.
Embodiment:
1, makes the early stage of optical fiber probe
In earlier stage of optical fiber probe make and adopt following steps: 1. molten drawing or chemical corrosion or moltenly draw post-etching to form fine probe; 2. on fine probe, plate the layer of metal film, make probe tip form the optical aperture of nano-scale.What the utility model specifically adopted is the molten method of drawing of LASER HEATING, and the optical fiber melt-pulling machine that uses is the optical fiber melt-pulling machine of institute of Sutter Instrument company production model as Model P-2000.
At first cut the about 20cm of a segment length, diameter is the single-mode fiber of 0.125mm, locates to utilize the about 30mm of surrounding layer of mechanical optical fiber peeler peeling optical fibre therebetween; Go the one end starting point precontract 3mm of covering place to sentence the oil pen in distance and make first mark (this mark is positioned on the optical fiber jacket), and be labeled as the beginning again toward going the covering prescription to make second mark (this mark is positioned on the exposed fiber cores) to the 15mm place with this.With microscopic examination, the optical fiber that performs mark is placed on the FURUKAWA FITAL S321 fiber cut applicator platform then, streak second mark with diamond cutter after, do not block taking-up.Afterwards this section optical fiber is placed on the optical fiber melt-pulling machine, holder border and clamping with the molten machine drawing of first markers align, after again the other end of optical fiber being clamped on the sliding seat of molten machine drawing, the molten optical fiber that draws of transient heating, form the optical fiber pin, needle point from second mark at a distance of about 3mm (flow process is illustrated as Fig. 2).After optical fiber melt-pulling becomes pin, it is inserted in the plating pin holder of optical fiber coating machine (model is E03-015), insert again and carry out evaporation in the vacuum cavity, plate the layer of aluminum metallic film, make probe tip form the optical aperture of 20nm.
2, near field optic raps the making of the short probe of pattern
After finishing the optical fiber probe plated film, just the optical fiber pin can be made near field optic in conjunction with quartz tuning-fork (commercial product, model are S667) and rap the short probe of pattern.
1) at first of tuning fork 2 is raised one's arm and stick at the square Al of the about 10mm of length and width with commercially available Instant cement (ALTECO, Cyanoacrylate Adhesive)
2O
3On the piezoelectric ceramics pad 1, raising one's arm of tuning fork exceeds pad 3.5mm approximately, waits for about ten minutes.
What 2) manufacture optical fiber probe is that diameter is the single-mode fiber of 0.125mm, and the front end face that quartz tuning-fork is raised one's arm is 0.46mm * 0.33mm, under microscopical observation, in conjunction with multidimensional accurate adjust platform can bonding easily optical fiber probe.Fixed fiber probe at first, then the accurate platform of adjusting of multidimensional is carried out accurate adjustment such as front and back pitching up and down, make optical fiber probe be placed on the raise one's arm appropriate position of front end face of tuning fork---aforementioned second mark doing (being the diamond cutter place of streaking) must be placed the raise one's arm centre of end face of two tuning forks, probe contacts with tuning fork is vertical, dub a spot of glue then and make optical fiber probe and tuning fork bonding, probe sticks at and does not connect on the raising one's arm of piezoelectric ceramics pad.
3) wait is after about four hours, execute an external force with tweezers at optical fiber pin back segment, because optical fiber is mainly silicon dioxide and makes, this action can cause optical fiber, and (i.e. second mark) entirely ruptures and comes that to be divided into two sections and section be the plane at the diamond cutter place of streaking, and probe becomes the hour hand shape.
4) behind the completing steps 3, utilize microscope to cooperate the accurate platform of adjusting of multidimensional equally, with the multimode optical fiber (length as required decide) of another root with the diamond cutter truncation, with same Instant cement its truncation end face is aimed at the burnishing surface of optical fiber hour hand end also behind about 10 μ m, be adhered to another end face of raising one's arm of tuning fork, can use after the wait Instant cement full solidification.Like this, just be stained with the optical fiber hour hand 3 of a very little plated film on the shaker arm of tuning fork 2, and (this is raised one's arm because of being fixed on Al in another fixing raising one's arm
2O
3On the pad 1, do not vibrate) on 4 of long optical fibers play the effect of receiving light, because its optical fiber hour hand with vibration does not contact, can be not influential to the vibration frequency of tuning fork, therefore the quartz tuning-fork that is stained with hour hand is raised one's arm almost with its natural vibration frequency vibration (a little less than its natural vibration frequency), and very good vibration frequency curve is arranged.
Performance verification:
1, the frequency of operation curve ratio
Test employed quartz tuning-fork natural resonant frequency at 32.768KHz, raising one's arm when one is adhered to Al
2O
3During square potsherd, and be set up in and give a driving voltage (5%) in the NSOM system, can obtain the resonant frequency of about 32.5kHz, the about 2.5a.u. of reference amplitude, as shown in Figure 3.When one of the quartz tuning-fork adhesion described long optical fibers probe of one prior art and another arm is fixed in Al of raising one's arm
2O
3During square potsherd, because of probe with to receive light optical fiber one-body molded, tuning fork of its adhesion probe is raised one's arm and need be born the weight of probe and back segment optical fiber; Add that back segment optical fiber and another were fixed in Al when tuning fork was raised one's arm vibration
2O
3Prong on the potsherd has friction, these two resistances are unfavorable for the tuning fork vibration of raising one's arm, make its resonant frequency outside low frequency is moved to 29.6kHz, and need system to offer to raise one's arm 75% driving voltage just can find the resonant frequency of raising one's arm, its reference amplitude is less than 1a.u., and the vibration frequency curve is very bad, as shown in Figure 4.Therefore with the long optical fibers probe during as the probe of scanning samples, but because of the suffered resistance of raising one's arm can't be urged to its reference amplitude the working range of about 2a.u., and present very poor vibration frequency curve.With the short probe structure of contactless optical fiber of the present utility model by comparison, the quartz tuning-fork of vibration is raised one's arm and only need be born the weight of very little short probe, be fixed on the multimode long optical fibers of receiving light action that plays on another arm, because its optical fiber hour hand with vibration does not contact, can be not influential to the vibration frequency of tuning fork, so only need supplying with about 6% the driving voltage of raising one's arm, system just can find the resonant frequency of raising one's arm, as shown in Figure 5, and but reference amplitude can reach the working range of 2a.u., and good vibration frequency curve is arranged.
2, hour hand experimental result
With the optical fiber probe of the short probe of contactless optical fiber of the present utility model as NSOM, 1. adopt the receipts optical mode that optical waveguide has been carried out the near field measurement, be illustrated in figure 6 as optical waveguide near field of light field picture, Fig. 7 is an optical waveguide end face AFM feature image; 2. adopt and send optical mode that the photic electric current of luminotron (LED) has been carried out the near field measurement, be illustrated in figure 8 as the photic distribution of current image that near-field scan send light, Fig. 9 is the end face AFM feature image of scanning area.
Experimental results show that the short probe of contactless optical fiber of the present utility model is effectively, good operational vibration frequency curve can be provided, provide the NSOM image and the afm image of measuring samples preferably.
Claims (2)
1, the good optical fiber probe of a kind of vibration characteristics, its structure comprises that an end is the fine optical fiber that is coated with metallic film of tip-like, be fixed on the vibrating member, it is characterized in that: this optical fiber blocks into hour hand (3) shape, the truncated position is a flush end, and the flush end of this flush end and the long optical fibers (4) of another section connection photodetector is relative, both are at a distance of 1～50 μ m.
2, optical fiber probe as claimed in claim 1 is characterized in that: described vibrating member is quartz tuning-fork (2), and described hour hand (3) places on the shaker arm of tuning fork, and described long optical fibers (4) places on the fixed arm of tuning fork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU022929142U CN2639998Y (en) | 2002-12-23 | 2002-12-23 | Optical fiber probe having excellent vibration characteristics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU022929142U CN2639998Y (en) | 2002-12-23 | 2002-12-23 | Optical fiber probe having excellent vibration characteristics |
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| Publication Number | Publication Date |
|---|---|
| CN2639998Y true CN2639998Y (en) | 2004-09-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU022929142U Expired - Fee Related CN2639998Y (en) | 2002-12-23 | 2002-12-23 | Optical fiber probe having excellent vibration characteristics |
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| CN (1) | CN2639998Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101893539B (en) * | 2009-05-20 | 2012-10-10 | 仁荷大学校产学协力团 | Mechanically-coupled tuning fork-scanning probe vibrating system |
-
2002
- 2002-12-23 CN CNU022929142U patent/CN2639998Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101893539B (en) * | 2009-05-20 | 2012-10-10 | 仁荷大学校产学协力团 | Mechanically-coupled tuning fork-scanning probe vibrating system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |