CN2634516Y - Flow type low vacuum gas pressure controller - Google Patents
Flow type low vacuum gas pressure controller Download PDFInfo
- Publication number
- CN2634516Y CN2634516Y CN 03232443 CN03232443U CN2634516Y CN 2634516 Y CN2634516 Y CN 2634516Y CN 03232443 CN03232443 CN 03232443 CN 03232443 U CN03232443 U CN 03232443U CN 2634516 Y CN2634516 Y CN 2634516Y
- Authority
- CN
- China
- Prior art keywords
- vacuum
- needle valve
- type low
- laser
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 claims abstract description 22
- 239000011521 glass Substances 0.000 claims abstract description 6
- 229910052734 helium Inorganic materials 0.000 claims abstract description 5
- 239000001307 helium Substances 0.000 claims abstract description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052754 neon Inorganic materials 0.000 claims abstract description 5
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229920002545 silicone oil Polymers 0.000 claims description 4
- 239000012535 impurity Substances 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract 3
- 239000003921 oil Substances 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 239000000446 fuel Substances 0.000 description 3
- 229910021589 Copper(I) bromide Inorganic materials 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
Landscapes
- Control Of Fluid Pressure (AREA)
Abstract
The utility model discloses a flow-type low vacuum pneumatic control device, which comprises a helium or neon filled high-pressure steel cylinder. The utility model is divided into two paths by a pressure-relief valve and the first high vacuum needle valve.One path passes through a mechanical vacuum meter and the other path connects one end of a glass U-shape tube indexed with millimeter scale and filled with vacuum silicon oil through the second high vacuum needle valve; the other end of the U-shape tube and the mechanical vacuum meter are connected with one end of a laser discharge tube; a mechanical vacuum pump is connected with the other end of the laser discharge tube through the third high vacuum needle valve and a filter. The needle valve is adjusted to change buffer air pressure in the laser discharge tube, and then the pressure value is measured precisely by height difference in oil level between two sides of the U-shape tube with a measurement accuracy of 0.01 megapascal which is about 25 times of accuracy of common mechanical vacuum meters; electromagnetic interference caused by gas discharge can be avoided to ensue accuracy of measurement by using height difference in oil level in the U-shape tube to display the air pressure value, which meets the demand for air pressure precise measurement in flow-type low pressure gas discharge laser and experiments taken with small amount of impurity gas.
Description
Technical field
The utility model relates to a kind of flow-type low vacuum gas pressure intensity control device.
Background technology
For being the flow-type pulsed discharge gas laser (comprising metallic vapor laser) of buffer gas with helium or neon, the pressure of buffer gas has considerable influence to laser output characteristic.There were significant differences to the requirement of buffer gas pressure for dissimilar gas lasers, and some laser instrument can only could obtain laser generation under lower buffer gas pressure, as the He-Hg of pulsed discharge
+Laser instrument, He-Cd
+The copper ion ultraviolet lasers of laser instrument and Ne-CuBr etc., the buffer gas pressure scope of requirement is about 0.3～1.5kPa.
Summary of the invention
The purpose of this utility model provides a kind of flow-type low vacuum gas pressure intensity control device, accurate pilot-gas pressure under flow state.
In order to achieve the above object, the technical solution adopted in the utility model is that it comprises: the high-pressure cylinder that is filled with helium or neon, high-pressure cylinder is divided into two-way through reduction valve, the first high vacuum needle valve, one the tunnel connects an end that indicates a millimeter scale, the glass U-shaped pipe of vacuum silicone oil is housed through mechanical type vacuum meter, another road second high vacuum needle valve, and the other end of U-shaped pipe and mechanical type vacuum meter connect an end of laser tube; Oil-sealed rotary pump connects the other end of laser tube through the 3rd high vacuum needle valve, filtrator.
The said glass U-shaped pipe that indicates millimeter scale, it highly is 45cm.
The utility model is compared with background technology, the useful effect that has is: regulate the high vacuum needle valve as required, change the buffer gas pressure in the laser tube, and accurately record the pressure size by the difference of the fuel head on U-shaped pipe both sides, measuring accuracy reaches 0.01kPa, and it improves about 25 times than the precision of common mechanical vacuum meter; Since utilize the difference of U-shaped pipe fuel head to show gas pressure intensity, when laser works, can avoid electromagnetic interference (EMI) because of the gas discharge generation, thus guarantee measuring accuracy.Satisfied and accurately measured air pressure in the flow-type low pressure discharge gas laser and carry out a small amount of impurity gas experimental requirements.
Description of drawings
Accompanying drawing is a structural representation of the present utility model.
Embodiment
As shown in drawings, the utility model comprises the high-pressure cylinder B that is filled with helium or neon, high-pressure cylinder B is divided into two-way through reduction valve V0, the first high vacuum needle valve V1, one the tunnel connects an end that indicates a millimeter scale, the glass U-shaped pipe UT of vacuum silicone oil is housed through mechanical type vacuum meter M, another road second high vacuum needle valve V2, and the other end of U-shaped pipe UT and mechanical type vacuum meter M connect the end of laser tube LT; Oil-sealed rotary pump P connects the other end of laser tube LT through the 3rd high vacuum needle valve V2, filter F.All connecting tubes are the high vacuum proofed sleeve.
The concrete course of work is as follows:
Inject the high vacuum silicone oil of about 25cm among the U type pipe UT, before the laser instrument discharge, the first high vacuum needle valve V1 closes, open the second high vacuum needle valve V2 and the 3rd high vacuum needle valve V3 needle-valve, whole air-channel system is pumped into low vacuum, then, close the second high vacuum needle valve V2, regulate the air inlet first high vacuum needle valve V1 and the 3rd high vacuum needle valve V3 that bleeds, can change the buffer gas pressure in the laser tube within the specific limits as required, and accurately recording the pressure size by the difference of the fuel head on U-shaped pipe UT both sides, measuring accuracy reaches 0.01kPa, improves about 25 times than the precision of common mechanical vacuum meter.
Claims (2)
1. flow-type low vacuum gas pressure intensity control device, it is characterized in that: comprise the high-pressure cylinder (B) that is filled with helium or neon, high-pressure cylinder (B) is divided into two-way through reduction valve (V0), the first high vacuum needle valve (V1), one the tunnel connects an end that indicates a millimeter scale, the glass U-shaped pipe (UT) of vacuum silicone oil is housed through mechanical type vacuum meter (M), another road second high vacuum needle valve (V2), and the other end of U-shaped pipe (UT) and mechanical type vacuum meter (M) connect an end of laser tube (LT); Oil-sealed rotary pump (P) connects the other end of laser tube (LT) through the 3rd high vacuum needle valve (V2), filtrator (F).
2. a kind of flow-type low vacuum gas pressure intensity control device according to claim 1 is characterized in that: the said glass U-shaped pipe (UT) that indicates millimeter scale, it highly is 45cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03232443 CN2634516Y (en) | 2003-06-20 | 2003-06-20 | Flow type low vacuum gas pressure controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03232443 CN2634516Y (en) | 2003-06-20 | 2003-06-20 | Flow type low vacuum gas pressure controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2634516Y true CN2634516Y (en) | 2004-08-18 |
Family
ID=34291454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03232443 Expired - Fee Related CN2634516Y (en) | 2003-06-20 | 2003-06-20 | Flow type low vacuum gas pressure controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2634516Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102067054B (en) * | 2008-04-21 | 2013-04-03 | 艾默生过程管理调节技术公司 | Valve body with dual sense mechanism |
-
2003
- 2003-06-20 CN CN 03232443 patent/CN2634516Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102067054B (en) * | 2008-04-21 | 2013-04-03 | 艾默生过程管理调节技术公司 | Valve body with dual sense mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |