CN2558784Y - Hydrogel actuated micropump - Google Patents
Hydrogel actuated micropump Download PDFInfo
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- CN2558784Y CN2558784Y CN 02234531 CN02234531U CN2558784Y CN 2558784 Y CN2558784 Y CN 2558784Y CN 02234531 CN02234531 CN 02234531 CN 02234531 U CN02234531 U CN 02234531U CN 2558784 Y CN2558784 Y CN 2558784Y
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- laminate
- water gel
- micropump
- fluid chamber
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Abstract
The utility model relates to a hydrogel actuated micropump. The diaphragm of the micropump is actuated by the volume change resulted from expansibility and contractibility of hydrogel so as to drive the liquid to flow in the liquid cavity. The utility model comprises two liquid cavities, a channel for liquid cavity, a first layer plate, a second layer plate, electrodes respectively arranged at the bottom of placing place and a middle plate made of sillical crystal wafer, formed and processed by somatotype micro machinery and provided with two cavity spaces near the two ends. The middle plate is arranged between the first layer plate and the second layer plate, forming the body of the micropump; plates are separated by diaphragm, respectively forming placing place for hydrogel and electrophoretic liquid, a channel for electrophoretic liquid, liquid cavities and the channel for flow cavities. A through hole for liquid is arranged at the first layer plate corresponding to the liquid cavities. The utility model provides a micropump with low operation voltage and low power consumption, but also can improve safety and system integration as well as lead the device more portable.
Description
Technical field
The utility model belongs to a kind of micropump, a kind of water gel actuating type micropump of concrete finger especially.
Technical background
The key element of microfluid system comprises micropump (micropump), little valve, micro-flowmeter, micro channel, Micromixer etc., can utilize micromachined process technique (MEMS) to be integrated into the micro fluid system wafer of difference in functionality, be applied to biotechnology, the Portable environment monitor, accurate fluid control and miniature power system etc., meet light, thin, short, little Design trend, wherein micropump is a critical elements of transmitting fluid in the microfluid system, all little confluence analysis (the micro TotalAnalysis System of system of its purposes and demand one's own views, μ TAS), wafer laboratory (Lab-On-ChiP), medicine supplier (medicine doser), biochip system (biochip system) etc.
Various new material, new processing technique and different application experiment are experienced in the exploitation of micropump, the actuating kenel of micropump is very variation, it consists predominantly of: micropump such as electromagnetic type, electrostatic, piezoelectricity type, marmem, bimetal, respectively have its good and bad characteristics, please refer to table 1.
Table 1
| Activate form | Flow (1/min) | Operating voltage (V) | Consumed power (mV) | Maximum pump pressure (Kpa) |
| Piezoelectricity type | 1300 | 160 | -- | 90 |
| Piezoelectricity type | 40 | 100 | -- | 15 |
| Electrostatic | 850 | 200 | 1 | 31 |
| Hot flow type | 34 | 6 | 2000 | 4 |
| Electromagnetic type | 20 | 3 | 900 | -- |
| Bimetal | 43 | 16 | -- | -- |
| Memory alloy | 50 | -- | 630 | 0.52 |
Generally speaking, the micropump of different kenels always has its restriction or shortcoming, has than puzzlement person that operating voltage is higher, portability is relatively poor (for example electromagnetic type, electrostatic, heat driving type), inefficiency, than the power consumption source and be difficult for and system combination; The higher then power system of operating voltage is complicated, and portability is relatively poor, also is difficult for integrating with control, sensing system; Inefficiency, then use restrictedly continuously than the power consumption source, use also restricted.
Summary of the invention
Main purpose of the present utility model is the micropump that a kind of low operating voltage, low power consumption will be provided, and promotes its portability, Security and system combination.
Another purpose of the present utility model is will disclose a kind of water gel breathing effect of utilizing for activating the method for micropump, and the Volume Changes that is produced owing to water gel breathing effect activates the barrier film of micropump, and reaches the effect of driving fluid chamber inner fluid.
A purpose more of the present utility model, be to disclose a kind ofly to make water gel volume generation breathing effect and activate micropump with electrophoresis method, electrophoresis liquid is owing to electric field action flows to an end, the liquid content of water gel is changed, and cause water gel volume generation breathing effect, have the characteristic of low operating voltage, low power consumption.
Another purpose of the present utility model, be to disclose a kind ofly to produce micropump with build micromachined processing procedure, utilize build micromachined (bulk micromaching) processing procedure to manufacture each element of micropump respectively, be combined into micropump fluid chamber with barrier film, water gel etc. again, have good system combination.
The purpose of this utility model is achieved in that
A kind of water gel actuating type micropump is characterized in that, includes:
Two fluid chamber; And
One fluid chamber's passage is communicated with this two fluid chamber; And
First laminate and second laminate are respectively to establish a containing space corresponding to this fluid chamber place, forming the highly slightly inwardly saddle of collapse between this two containing space, and respectively establish an electrode in the bottom surface of this containing space;
One mesosphere board places between this first laminate and this second laminate, is respectively establishing a cavity space near two ends, forms one between this two cavity space and separates; And
Wherein this mesosphere board places between first laminate and second laminate and is combined into the micropump body, separate between each laminate and with barrier film, form a containing space between this barrier film and the first laminate second layer plate and the structural wood, form the electrophoresis liquid passage between the saddle of this barrier film and first laminate and second laminate, form fluid chamber between this barrier film and the mesosphere board, this barrier film and mesosphere board be separated to form fluid chamber port, this first laminate is provided with a through hole corresponding to this fluid chamber's tapping, but the turnover of mighty torrent body.
This micropump member utilizes build micromachined processing procedure made.
This first laminate and this second laminate utilize build micromachined processing procedure made with chip glass.
This mesosphere board utilizes build micromachined processing procedure made with silicium wafer.
This barrier film is polymer material silica gel film or the poly-imines film of sending out.
This electrode is a platinum electrode.
This electrophoresis liquid includes phosphate solution.
This water gel is that propylene is sent out amine one acrylic acid copolymer Heshui gel.
Form the containing space of water gel and electrophoresis liquid between this first laminate and second laminate.
This mesosphere board, demarcation strip, structural wood, the electrode and second laminate, available one laminate that is provided with alcove replaces.
Working principle of the present utility model is to utilize the micropump of water gel breathing effect for actuating method, and the effect of its driving fluid chamber inner fluid is that the barrier film that the Volume Changes that produced owing to water gel breathing effect activates micropump reaches.This water gel breathing effect is to utilize electrophoresis method to make electrophoresis liquid owing to electric field action flows to an end, the liquid content of water gel is changed, and water gel volume generation breathing is reached.This water gel is that propylene is sent out amine-acrylic acid copolymer Heshui gel.The operating voltage that wherein produces the electrophoresis electric field is not more than 10 volts.This electrophoresis liquid includes phosphate.
Good effect of the present utility model is:
The micropump of a kind of low operating voltage disclosed in the utility model, low power consumption and characteristics such as easy and system combination, clearly, its trend that meets micropump be towards low operating voltage, low power consumption, portability height, easily and system combination, safe direction develop.
Water gel of the present utility model (hydrogel) actuating type micropump, utilize water gel breathing effect for activating the method for micropump, the Volume Changes that is produced owing to water gel breathing effect activates the barrier film of micropump, and reaches the effect of driving fluid chamber inner fluid.
Water gel actuating type micropump of the present utility model, make water gel volume generation breathing effect and activate micropump with electrophoresis (electrophoresis) method, electrophoresis liquid is owing to electric field action flows to an end, the liquid content of water gel is changed, and cause water gel volume generation breathing effect, electrophoresis is a mature technique, be applied to separating, analyze charged material (for example protein), its operation need be asked the above voltage of hundreds of volts originally, but because the microminiaturized effect of micropump, make the distance between the positive and negative electrode of electrophoresis dwindle, thereby the operating voltage of reduction electrophoresis, simultaneously also shorten the response time, the utility model has low operating voltage with principle of electrophoresis operation micropump, the excellent effect of low power consumption.
Water gel actuating type micropump of the present utility model, produce micropump with micromachined processing procedure (MEMS), the micromachined processing procedure conceptive be in conjunction with manufacture of semiconductor technology and precision machinery technology, make the micro-system that micro component and function are integrated, the advantage of micromachined processing procedure has: one, make in batches, on same silicium wafer, can once finish thousands of or hundreds of mechanical components, can reduce production costs; Two, can produce quite little and accurate mechanical component; Also can make electronic component when three, making mechanical component, that is to say that mechanical component and electronic component can be incorporated on the same silicium wafer: the utility model utilizes build micromachined processing procedure to manufacture each element of micropump respectively, thus easily be all system combinations such as little valve that the micromachined processing procedure produces, micro-flowmeter, micro channel, Micromixer.
Description of drawings
Fig. 1 and Fig. 2 embodiment's schematic representation of the present utility model;
Fig. 3 and Fig. 4 produce embodiment's schematic representation of the present utility model with build micromachined processing procedure.The piece number explanation:
Barrier film 5 chambers 11,12
Second laminate, 22 mesosphere boards 23
Electrophoresis liquid passage 33 electrodes 41,42
First photoresist layer, 82 second photoresist layers 83
SiO
2Film 84 plating ammonification silicons hide worn-out layer 101,102,103
Silica gel film 104 saddles 211,221
Through hole 212,213 2 ends 231,232
Embodiment
Water gel is a kind of polymer with very fine porous network structure, can promptly absorb weight and be its liquid of tens of times, can make its volumetric expansion after the water gel suction, on the contrary, its volume shrinkage of water gel dehydration back, the moisture ratio that therefore changes water gel just can change its volume.Wherein water gel closes and forms water gel to be sent out amine one acrylic acid copolymer by propylene, its time that is full of suction is very fast, so the time that reaction volume changes is also very fast, inflatable more than 70 times in the fastest water absorbent gel one minute, its expansivity be that each second is more than 1 times.
The operating voltage of electrophoresis generally all is set in hundreds of volts (V), this is because when utilizing the electrophoretic separation charged species, for asking so enough distances that moves need be arranged between the separating effect positive and negative electrode, general electrophoresis (as serum protein electrophoresis) all several centimeters to more than tens of centimetres.
Add an electric field at the electrophoresis liquid two ends during operation electrophoresis, positive ion can flow to negative voltage, and the charge species that moves this moment can affect the solvent in the electrophoresis liquid to move together, and the flow velocity that fluid moves can be used equation (1) expression:
Equation (1)
Wherein v represents the mobility speed of solvent, ε represents the electrical constant of fluid, ξ represents zeta potential, E represents electric field strength, η represents the viscosity of solvent, therefore can find out from equation (1) that the flow velocity of solvent and electric field strength are proportional, therefore, if the distance of electrophoresis is foreshortened to tens of microns (micrometer), 1/1000 of the distance of just general electrophoresis, then must operating voltage can significantly downgrade, still can keep high electric field between its electrode, estimate under the operating voltage of hundreds of millivolts (mV) according to formula, charge particle can move to another electrode from an electrode in 1 second even several ms, if improve the traveling time that operating voltage then shortens electrophoresis liquid.Wherein electrophoresis liquid comprises phosphate, so the high expansion rate of water gel, and under the high voltage electrophoresis speed, the making dynamic frequency and can improve of micropump, and can drive a large amount of fluids and flow basic gel expansion pressing cavity volume, expansion frequency and electrophoresis rate, predicted flow rate are more than the 1000ml/min.
With reference to figure 1, Fig. 2, the utility model is with water gel actuating type micropump, and wherein micropump member system utilizes build micromachined processing procedure made, includes:
Two fluid chamber 11,12;
One fluid chamber's passage 13 is communicated with two fluid chamber;
One mesosphere board 23 places between first laminate and second laminate, is to utilize build micromachined processing procedure to be manufactured with silicium wafer, is respectively establishing a cavity space 11,12 near two ends 231,232, forms a demarcation strip 233 between this two cavity space;
Wherein fluid chamber can also form the combination of two above fluid chamber simultaneously, and also all each is communicated with a chamber passage between each fluid chamber.
Another kind of water gel actuating type pump, for the Lower Half of the micropump of above-mentioned Fig. 1 is omitted mesosphere board 23, demarcation strip 233, structural wood 24, electrode 41,42 and second laminate 22, the laminate that an alcove directly is set below fluid chamber 11,12 replaces.
Wherein electrode 41,42 can be selected the platinum plated film for use; Water gel can select for use propylene to send out amine one acrylic acid copolymer Heshui gel (poly (acrvlamlde-co-acrylic acid) hgdrogels), and the reaction time of its suction-Volume Changes is very fast: electrophoresis liquid can be selected phosphate solution for use; Barrier film 5 materials can be selected from polymer materials such as silica gel film, a poly-imines film, and the silica gel film has good stretchability and biochemical stability, and the poly-imines film of sending out has excellent in chemical and thermal characteristic.
Water gel actuating type micropump of the present utility model, system utilizes the micropump of water gel breathing effect for actuating method, the Volume Changes that is produced owing to water gel breathing effect activates the barrier film of micropump, and reach the effect of driving fluid chamber inner fluid, wherein water gel breathing effect system utilizes electrophoresis method to make electrophoresis liquid owing to electric field action flows to an end, the liquid content of water gel is changed, and make water gel volume generation breathing effect.
For the operation of water gel actuating type micropump of the present utility model is described, please refer to Fig. 1, connect negative supply respectively at electrode 41 by positive supply and electrode 42, then the electrophoresis liquid of the containing space 31 of electrophoresis liquid flows to containing space 32 via leading to 33, water gel reduces relatively because of its water content in the containing space 31, thereby the volume shrinkage of water gel, and traction barrier film 5 inwardly contracts, the space enlargement of fluid chamber 11, fluid is by through hole 212 incoming fluid chambers 11, and is opposite, water gel increases relatively because of its water content in the containing space 32, thereby the volumetric expansion of water gel, and presses against diaphragm 5 is outside, the space of fluid chamber 12 dwindles.
The fluid of fluid chamber 12 is forced out by through hole 213, and consequently the outer fluid of micropump is flowed into by through hole 212, and simultaneously, the fluid in the micropump is discharged by through hole 213.
With reference to figure 2, the both positive and negative polarity of power supply is exchanged, that is, connect negative supply and electrode 42 by positive supply respectively at electrode 41, then the electricity of the containing space 32 of electrophoresis liquid forever liquid flow to containing space 31 via passage 33, water gel reduces relatively because of its water content in the containing space 32, thereby the volume shrinkage of water gel, and draw barrier film 5 and inwardly contract, the space enlargement of fluid chamber 12 is opposite, water gel increases relatively because of its water content in the containing space 31, thereby the volumetric expansion of water gel, and presses against diaphragm 5 is outside, the space of fluid chamber 11 dwindles.
Consequently the fluid of fluid chamber 11 via fluid chamber port 13 incoming fluid chamber 12.
Next, order repeats above-mentioned steps, the space enlargement of fluid chamber 11 consequently, fluid outside the micropump is by the fluid chamber 11 of through hole 212 inflow micropumps, and then, the space of fluid chamber 11 dwindles and the space enlargement of fluid chamber 12, the fluid of fluid chamber 11 is incoming fluid chamber 12 via fluid chamber port 13, then, the space of fluid chamber 12 dwindles, and the fluid in the micropump is discharged by through hole 213.
Water gel actuating type micro motor of the present utility model has the two-way flow working method, in conjunction with other little valve (microvalve) systems, utilizes the combination that ends valve that fluid is flowed in the opposite direction, and also this micropump promptly possesses the bi-directional drive potentiality.Also can with other microcomponents, as little inductor, microcatheter etc., integrate to constitute complete micro-system.
The micromachined processing procedure conceptive be in conjunction with manufacture of semiconductor technology and precision machinery technology, make the micro-system that micro component and function are integrated, wherein build micromachined processing procedure (bulk micromaching) successfully is used in the production of many microcomponents.The utility model is with water gel actuating type micropump, and micropump member system utilizes build micromachined processing procedure made, makes first laminate 21 and second laminate 22 of combined miniature pump, please refer to Fig. 3, and its step includes:
1. plate one deck platinum film 81 as electrode in the surface of wafer glass (glass wafer) 80 2 ends, two platinum plated films are not connected;
2. utilize thick film photoresistance SU8 on chip glass, to form first photoresist layer 82 of a thickness;
3. utilize thick film photoresistance SU8 on part first photoresist layer 82, to form second photoresist layer 83 of a thickness, and form the containing space of water gel;
4. shaping SiO
2Film 84, eating thrown forms through hole.
Make the mesosphere board of combined miniature pump, please refer to Fig. 4, its step includes:
1. choose silicon crystal segment ((100) Si wafer) and be substrate;
2. the two ends plating silicon nitride in silicium wafer hides worn-out layer 101, forms the etching window;
3. make anisotropic etching with alkali liquid, interrupt etching during certain depth;
4. hide worn-out layer 102 in stage casing plating silicon nitride;
5. hide worn-out layer 103 in two ends plating silicon nitride;
6. make anisotropic etching with alkali liquid, to silicium wafer (100) face eating thrown hole and formation inclined-plane (111);
7. with 104 driving fits of silica gel film, form the fluid chamber space.
Claims (10)
1, a kind of water gel actuating type micropump is characterized in that, includes:
Two fluid chamber; And
One fluid chamber's passage is communicated with this two fluid chamber; And
First laminate and second laminate are respectively to establish a containing space corresponding to this fluid chamber place, forming the highly slightly inwardly saddle of collapse between this two containing space, and respectively establish an electrode in the bottom surface of this containing space; And
One mesosphere board places between this first laminate and this second laminate, is respectively establishing a cavity space near two ends, forms one between this two cavity space and separates; And
Wherein this mesosphere board places between first laminate and second laminate and is combined into the micropump body, separate between each laminate and with barrier film, form a containing space between this barrier film and the first laminate second layer plate and the structural wood, form the electrophoresis liquid passage between the saddle of this barrier film and first laminate and second laminate, form fluid chamber between this barrier film and the mesosphere board, this barrier film and mesosphere board be separated to form fluid chamber port, this first laminate is provided with a through hole corresponding to this fluid chamber's tapping, can be for the fluid turnover.
2, water gel actuating type micropump according to claim 1 is characterized in that this micropump member utilizes build micromachined processing procedure made.
3, water gel actuating type micropump according to claim 1 is characterized in that this first laminate and this second laminate utilize build micromachined processing procedure made by chip glass.
4, water gel actuating type micropump according to claim 1 is characterized in that this mesosphere board utilizes build micromachined processing procedure made by silicium wafer.
5, water gel actuating type micropump according to claim 1 is characterized in that, this barrier film is a polymer material silica gel film or the poly-imines film of sending out.
6, water gel actuating type micropump according to claim 1 is characterized in that this electrode is a platinum electrode.
7, water gel actuating type micropump according to claim 1 is characterized in that this electrophoresis liquid includes phosphate solution.
8, water gel actuating type micropump according to claim 1 is characterized in that this water gel is that propylene is sent out amine-acrylic acid copolymer Heshui gel.
9, water gel actuating type micropump according to claim 1 is characterized in that, forms the containing space of water gel and electrophoresis liquid between this first laminate and second laminate.
10, water gel actuating type micropump according to claim 1 is characterized in that, this mesosphere board, demarcation strip, structural wood, and the electrode and second laminate, available one laminate that is provided with alcove replaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02234531 CN2558784Y (en) | 2002-05-08 | 2002-05-08 | Hydrogel actuated micropump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02234531 CN2558784Y (en) | 2002-05-08 | 2002-05-08 | Hydrogel actuated micropump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2558784Y true CN2558784Y (en) | 2003-07-02 |
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ID=33709285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02234531 Expired - Fee Related CN2558784Y (en) | 2002-05-08 | 2002-05-08 | Hydrogel actuated micropump |
Country Status (1)
| Country | Link |
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| CN (1) | CN2558784Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103307317A (en) * | 2012-03-07 | 2013-09-18 | 本田技研工业株式会社 | Valve device and failure detector of hydraulic circuit |
| CN110905787A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110905786A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110902644A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110905785A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110905789A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | MEMS pump |
| US11536260B2 (en) | 2018-09-17 | 2022-12-27 | Microjet Technology Co., Ltd. | Micro-electromechanical system pump |
-
2002
- 2002-05-08 CN CN 02234531 patent/CN2558784Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103307317A (en) * | 2012-03-07 | 2013-09-18 | 本田技研工业株式会社 | Valve device and failure detector of hydraulic circuit |
| CN103307317B (en) * | 2012-03-07 | 2015-05-27 | 本田技研工业株式会社 | Valve device and failure detector of hydraulic circuit |
| CN110905787A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110905786A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110902644A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110905785A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | Method for manufacturing micro-electromechanical pump |
| CN110905789A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | MEMS pump |
| US11536260B2 (en) | 2018-09-17 | 2022-12-27 | Microjet Technology Co., Ltd. | Micro-electromechanical system pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20030702 Termination date: 20100508 |