CN2529385Y - Continuous laser ceramic cutting machine - Google Patents

Continuous laser ceramic cutting machine Download PDF

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Publication number
CN2529385Y
CN2529385Y CN 02215514 CN02215514U CN2529385Y CN 2529385 Y CN2529385 Y CN 2529385Y CN 02215514 CN02215514 CN 02215514 CN 02215514 U CN02215514 U CN 02215514U CN 2529385 Y CN2529385 Y CN 2529385Y
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China
Prior art keywords
laser
water
base plate
pipe
water inlet
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Expired - Fee Related
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CN 02215514
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Chinese (zh)
Inventor
沈冠群
汪秀琳
吴宾初
姜兆华
蔡康泽
张伟
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Shanghai Institute of Laser Technology
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Shanghai Institute of Laser Technology
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Priority to CN 02215514 priority Critical patent/CN2529385Y/en
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Publication of CN2529385Y publication Critical patent/CN2529385Y/en
Anticipated expiration legal-status Critical
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Abstract

The utility model relates to a continuous laser ceramic cutting machine, comprising a laser, an equipment cabinet component, a work-table and a control circuit which is used for controlling the cutting machine to work; wherein the laser comprises a casing, and a reflection membrane, an acousto-optic switch, an optical gat, a spot light cavity and a total reflection membrane which are arranged in the casing and orderly arrayed at a same center line; the laser is arranged above the equipment cabinet component, and the left of the upper part of the inner the equipment cabinet is provided with a laser power supply and an acousto-optic power supply, the middle is provided wit ha main control board, and the right side is provided with an operating board; the work-table is arranged at a side of the equipment cabinet, and an optical focusing device which is corresponding to the laser outlet of the laser is arranged at the top of the work-table, and the middle of work-table is provided with a processing board, and the lower part of the work-table is provided with a driver, cables are respectively connected with the operating board; and the utility model is characterized in that the inner bottom of the equipment cabinet is provided with a double water-cooling temperature control device; a sheet absorbing device is arranged above the processing board, and the side of the utility model is provided with a dust absorption pipe. The continuous laser ceramic cutting machine has the function of producing the continuous laser ceramic cutting machine with steady power, the lining out of the ceramic basal plate is thin, the surface is glabrous, and the section is smooth.

Description

Continuous laser pottery scribing machine
The technology neighborhood
The utility model relates to a kind of continuous laser pottery scribing machine that is used for the ceramic substrate scribing of thick film circuit.
Background technology
Before making thick film circuit, overall dimension, the shape by single circuit carried out scribe marks on ceramic substrate earlier, so that can carry out effective burst behind the circuit that completes thereon at present.Existing following several to the ceramic substrate scribing processing mode of thick film circuit:
Adopt the diamant scribing process the earliest, because the scribing requirement on machining accuracy of the ceramic substrate of process velocity, quality precision, inapplicable thick film circuit is progressively eliminated.
A kind of employing molding sintering, because its intrinsic amount of contraction control precision can not adapt to the required precision of thick film circuit ceramic substrate to size, owing to Mould design cost of manufacture height, incompatibility is used for small lot and trial product simultaneously.
Existing external a kind of large-scale pulsed carbon dioxide laser scribing machine, though this device pulse carbon dioxide laser scribing speed is fast, but poor surface smoothness, the laser scribing line is a dot type, when behind the laser scribing burst, hold the equal toothing of section on limit around it, also need increase match grinding limit technology and equipment.Increase entreprise cost, and cost an arm and a leg, need hundreds of thousands dollar/platform, can not satisfy the demand of China's numerous enterprises.
Existing domestic what a kind of laser scribing process using was arranged is solid impulse type laser, and its repetition rate can only accomplish that because scribing speed is long slow, the laser scribing line is a dot type tens times, the section toothing, and surface quality is poor, does not also reach practical.
Summary of the invention
The purpose of this utility model is to solve the manufacturing deficiency that exists in the ceramic substrate scribing of existing thick film circuit, provides a kind of and can produce continuously that laser is thin to the ceramic substrate line, speed is fast, section is smooth, the continuous laser of any surface finish pottery scribing machine.
The purpose of this utility model is to realize like this, a kind of continuous laser pottery scribing machine, comprise laser, rack parts, workbench and the control circuit of controlling this scribing machine work, described laser comprises shell, be located at reflection diaphragm, acoustooptic switch, optical gate, laser pump cavity, total reflection diaphragm in the shell, sequence interval setting on same center line; Laser is positioned at rack parts top, the left side, top is provided with Laser Power Devices, acousto-optic power supply in the described rack, the centre is provided with master console, the right side is provided with operating desk, described workbench is located at rack one side, and the optical focusing device that the workbench top is provided with is corresponding with the laser laser output, and the middle part is provided with machine table, the machine table below is provided with driver, is connected with operating desk respectively by cable.Be characterized in that described laser pump cavity is made as single oval cavity, is provided with krypton lamp, neodymium-doped yttrium-aluminum garnet rod in its cavity, full immersion in the optically focused cavity, circulation deionization circulating water, the krypton lamp two ends are connected with the Laser Power Devices two ends by cable; Described rack inner bottom part is provided with two water cooling temperature control devices; Described machine table top is provided with inhales the sheet device; Its side is provided with sweep-up pipe.
Above-mentioned continuous laser pottery scribing machine, wherein, described pair of water cooling temperature control device comprises that one-level water circle device and secondary water circle device constitute, and described one-level water circle device comprises particle filter, heat exchanger, deionization groove, water tank, water pump, is interconnected by water pipe; The delivery port of water pump is connected respectively by the water inlet of water pipe with laser pump cavity and acoustooptic switch, and the delivery port of laser pump cavity and acoustooptic switch is connected by water pipe with particle filter; Described secondary water circle device comprises temperature sensor, thermocouple, frequency converter, freezer unit, is connected by cable, and the water inlet of freezer unit is connected respectively by water pipe with water inlet with the delivery port of heat exchanger with delivery port.
Above-mentioned continuous laser pottery scribing machine wherein, is provided with control circuit in the described master console, is connected with Laser Power Devices interface, acousto-optic power interface, table driver interface by cable.
Above-mentioned continuous laser pottery scribing machine, wherein, the panel of described operating desk is provided with action button, is provided with the special-purpose singlechip chip of removable user in the operating desk, is connected with relevant control circuit respectively.
Above-mentioned continuous laser pottery scribing machine, wherein, described suction sheet device comprises base plate, sealing ring, suction bar, gas joint, O RunddichtringO, tracheae, outlet pipe, fluid valve, water inlet pipe, water intaking valve, above machine table, be provided with base plate, be provided with air intake passage in it, air flue one end import is located at the base plate top, and other end outlet is located at the side of base plate; Inhale bar and be located at the base plate top, which is provided with several through holes; Be provided with frame type close joint circle between suction bar and base plate, the gas port of base plate side is provided with the O RunddichtringO, is connected with the gas joint, and the gas joint other end is connected with tracheae; The water inlet of water intaking valve connects water inlet pipe, is connected in series jet injection valve between water inlet pipe and the outlet pipe, and fluid valve top inner chamber is less than lower lumen, and the air entry at fluid valve middle part is connected with tracheae.
The utility model is because single lamp resonant cavity of the laser pump cavity that is provided with in the laser, reflection diaphragm, total reflection diaphragm formation makes the laser delivery efficiency be higher than the dual-lamp structure laser; Owing to be provided with mechanical optical gate, when not in use, can close, prevent that Laser emission from going out, play the safeguard protection effect; Because being provided with the temperature sensor display control unit is connected with the Laser Power Devices interface, when the water tank temperature overtemperature, Laser Power Devices are closed automatically, play the protection laser action; Owing in two water cooling temperature control devices, be provided with thermocouple and frequency converter, regulate control water temperature, can be with in the constant low temperature deionization cold water input laser pump cavity and in the acoustooptic switch lower chamber, by cold water circulation, the heat in the chamber of taking fast, guarantee that laser can obtain the firm power laser energy and export under constant low temperature; Can be owing in operating desk, be provided with according to the different scribing dimensional requirements of user, replaceable corresponding special-purpose single-chip microcomputer, easy to process; Inhale the sheet device owing on workbench, be provided with, workpiece is reliably located, be convenient to operation, guarantee machining accuracy.
Description of drawings
Concrete structure of the present utility model is further provided by following examples and accompanying drawing thereof.
Fig. 1 is the utility model continuous laser pottery scribing machine structural representation.
Fig. 2 is the utility model continuous laser pottery scribing machine action principle block diagram.
Fig. 3 is the two cold water attemperating unit block diagrams of the utility model continuous laser pottery scribing machine.
Fig. 4 is the suction sheet apparatus structure schematic diagram of the utility model continuous laser pottery scribing machine.
Embodiment
See also Fig. 1, a kind of continuous laser pottery scribing machine, comprise laser 1, rack parts 2, workbench 3, laser 1 is positioned at rack parts top, laser 1 comprises shell 11, is located at reflection diaphragm 12, acoustooptic switch 13, optical gate 14, laser pump cavity 15, total reflection diaphragm 16, sequence interval setting on same center line in the shell 11; Laser pump cavity 15 is made as single ellipse, gold-plated in it, be provided with krypton lamp 151, neodymium-doped yttrium-aluminum garnet rod 152 in the cavity, the sealing water flowing shell of laser pump cavity adopts engineering plastics to make, full immersion in the cavity, circulation deionization circulating water, krypton lamp 151 two ends are connected with Laser Power Devices 23 two ends by cable, this cavity body structure, the gathering that can effectively improve single lamp resonant cavity inner laser energy improves efficiency of laser; Acoustooptic switch 13 is connected by the outer acousto-optic power supply 24 of coaxial wire and casing, circulation deionization circulating water in the body of its underpart.
Rack parts 2 comprise rack 21, are provided with two water cooling temperature control devices 22 at rack 21 inner bottom parts, and the left side, top is provided with Laser Power Devices 23 in the rack, acousto-optic power supply 24, and the centre is provided with master console 25, and the right side is provided with operating desk 26,
Please cooperate referring to Fig. 3, two water cooling temperature control devices 22 comprise that one-level water circle device and secondary water circle device constitute, and described one-level water circle device comprises particle filter 221, heat exchanger 222, deionization groove 233, water tank 224, water pump 225; Described secondary water circle device comprises temperature sensor 226, thermocouple 227, frequency converter 228, freezer unit 229.
The delivery port of water pump by water pipe 2210 respectively with laser pump cavity 15, the water inlet of the plastic water pipe of acoustooptic switch 13 connects, the hot water that laser 1 flows out is connected with particle filter 221 water inlets by water pipe 2211, the delivery port of particle filter 221 is connected with heat exchanger 222 water inlets by water pipe 2212, the delivery port of heat exchanger 222 by water pipe 2213 respectively with deionization groove 223, the water inlet of water tank 224 connects, the delivery port of deionization groove 223 is connected by the water inlet of water pipe 2214 with water tank 224, the delivery port of water tank 224 is connected by the water inlet of water pipe 2215 with water pump 225, forms the one-level boiler water circulation like this.In water tank 225, be inserted with temperature sensor 226, thermocouple 227, temperature sensor 226 links by cable and operating desk 26, thermocouple 227 is connected with frequency converter 228 by cable, frequency converter 228 is connected with water pump in being located at freezer unit 229 by cable, by frequency converter 229, the rotating speed of the water pump in the control freezer unit 229, regulate water temperature, be connected with the refrigerator delivery port by water pipe 2217 from the other end water inlet of heat exchanger, water at low temperature is fed in the heat exchanger, the water inlet of refrigerator is connected with the delivery port of heat exchanger by water pipe 2216, form the secondary boiler water circulation, by the two cold water circulations of two-stage, with in the concentrator chamber and the heat of acoustooptic switch take away and remove ion, guarantee laser power stabilize output at low temperatures, its power stability is continuous 8 hours ± 2%.
Be provided with control circuit in the master console 25, connect with Laser Power Devices interface, acousto-optic power interface, table driver interface by cable.
Operating desk 26 panels are provided with action button, are provided with the special-purpose singlechip chip of removable user in the operating desk, are connected with relevant control circuit respectively.
Workbench 3 is located at rack one side, the optical focusing device 31 that workbench 3 tops are provided with is corresponding with laser laser output 17, its side is provided with sweep-up pipe 32, sweep-up pipe one end is provided with blower fan, suction port and machine table 34 corresponding settings, can inhale the waste gas and the dust that produce in processing, but the machine table 34 that the middle part is provided with lateral operation and vertically operates.
Inhaling sheet device 33 is located on the machine table 34, please cooperate referring to Fig. 4, inhaling the sheet device comprises base plate 331, sealing ring 332, inhales bar 333, gas joint 334, O RunddichtringO 335, tracheae 336, outlet pipe 337, fluid valve 338, water inlet pipe 339, water intaking valve 3310, on machine table, be provided with base plate 331, be provided with air intake passage in it, air flue one end import is located at the base plate top, and other end outlet is located at the side of base plate 331; Inhale bar 333 and be located at the base plate top, which is provided with several through holes; Be provided with frame type close joint circle 332 between suction bar 333 and base plate 331, the gas port of base plate side is provided with O RunddichtringO 335, is connected with gas joint 334, and gas joint 334 other ends are connected with tracheae 336; The water inlet of water intaking valve 3310 connects water inlet pipe 339, is connected in series jet injection valve 338 between water inlet pipe 339 and the outlet pipe 337, and fluid valve 338 top inner chambers are less than lower lumen, and the air entry at fluid valve 338 middle parts is connected with tracheae 336.Because water inlet is young, current are fast, and pressure is big; Delivery port is big, and pressure is little, and air entry produces negative pressure, thereby forms air-flow, plays and inhales the sheet effect, and workpiece is reliably located, and is convenient to operation, guarantees machining accuracy.The machine table below is provided with driver 35, is connected with operating desk 26 respectively by cable.
When start is used, open two water cooling temperature control devices, the cold water in the one-level cyclic water tank flows out to particle filter, heat exchanger, deionization groove through laser, makes in the input laser pump cavity and the water in the acoustooptic switch chamber is guaranteed deionized cold water;
Open Laser Power Devices, behind the unlatching master console, provide ceramic substrate pattern processing request, after programming, be provided with: the power (operating current) of scribing speed, acoustooptic switch frequency, laser according to the user;
Can adjust the relative zero-bit of processing of machine table before the processing automatically, in the processing, can adjust the coordinate position of machine table X-Y arbitrarily, so that carry out the segmental machining program;
Master console is passed to operating desk by cable with information, laser power preset and the real work electric current is adjusted, and the setting of the frequency of scribing speed, acoustooptic switch, the operating desk manual operation of single-chip microcomputer that can be by being provided with user's special use, also can be by interface in the master console and corresponding Laser Power Devices, acousto-optic power supply, driver connect to be adjusted automatically;
After every running parameter affirmation to the master console setting, open optical gate, operate by operating desk, can carry out scribing to ceramic substrate, according to the optical power signals that records, control laser current in real time, by regulating the electric current of Laser Power Devices, the depth of score of the scribing of may command laser, when producing continuous laser beam, laser focuses on ceramic base plate surface, because the laser energy of the high-peak power of laser and the exothermic reaction in the ablation process produce high temperature, ablate, dissolve and the ceramic drawn area of vaporizing, become the black cavity groove of overlapping linking at ceramic surface along straight line.
The utility model continuous laser pottery scribing machine, the line of scribing is thin, and any surface finish, section are smooth, can accomplish along the drawn area burst that correctly ruptures, and not produce random fragmentation and the heat baking is split.Guarantee to reach user's processing request.
The utility model structural design novelty, science, rationally, have high-peak power and can produce continuous laser scribing function, the ceramic substrate crudy can avoid reprocessing, cost is lower than external laser scribing means, has application value.

Claims (5)

1, a kind of continuous laser pottery scribing machine comprises laser, rack parts, workbench and the control circuit of controlling this scribing machine work; Described laser comprises shell, is located at reflection diaphragm, acoustooptic switch, optical gate, laser pump cavity, total reflection diaphragm in the shell, sequence interval setting on same center line, and laser is positioned at rack parts top; The left side, top is provided with Laser Power Devices, acousto-optic power supply in the described rack, and the centre is provided with master console, and the right side is provided with operating desk; Described workbench is located at rack one side, and the optical focusing device that the workbench top is provided with is corresponding with the laser laser output, and the middle part is provided with machine table, and the machine table below is provided with driver, is connected with operating desk respectively by cable; It is characterized in that: described laser pump cavity is made as single oval cavity, is provided with krypton lamp, neodymium-doped yttrium-aluminum garnet rod in its cavity, full immersion in the optically focused cavity, and circulation deionization circulating water, the krypton lamp two ends are connected with the Laser Power Devices two ends by cable; Described rack inner bottom part is provided with two water cooling temperature control devices; Described machine table top is provided with inhales the sheet device; Its side is provided with sweep-up pipe.
2, continuous laser pottery scribing machine according to claim 1, it is characterized in that: described pair of water cooling temperature control device comprises that one-level water circle device and secondary water circle device constitute, described one-level water circle device comprises particle filter, heat exchanger, deionization groove, water tank, water pump, be interconnected by water pipe, the delivery port of water pump is connected respectively by the water inlet of water pipe with laser pump cavity and acoustooptic switch, and the delivery port of laser pump cavity and acoustooptic switch is connected by water pipe with particle filter; Described secondary water circle device comprises temperature sensor, thermocouple, frequency converter, freezer unit, is connected by cable, and the water inlet of freezer unit is connected respectively by water pipe with water inlet with the delivery port of heat exchanger with delivery port.
3, continuous laser pottery scribing machine according to claim 1 is characterized in that: be provided with control circuit in the described master console, connected with Laser Power Devices interface, acousto-optic power interface, table driver interface by cable.
4, continuous laser pottery scribing machine according to claim 1, it is characterized in that: the panel of described operating desk is provided with action button, is provided with the special-purpose singlechip chip of removable user in the operating desk, is connected with relevant control circuit respectively.
5, continuous laser pottery scribing machine according to claim 1, it is characterized in that: described suction sheet device comprises base plate, sealing ring, suction bar, gas joint, O RunddichtringO, tracheae, outlet pipe, fluid valve, water inlet pipe, water intaking valve, above machine table, be provided with base plate, be provided with air intake passage in it, air flue one end import is located at the base plate top, and other end outlet is located at the side of base plate; Inhale bar and be located at the base plate top, which is provided with several through holes; Be provided with frame type close joint circle between suction bar and base plate, the gas port of base plate side is provided with the O RunddichtringO, is connected with the gas joint, and the gas joint other end is connected with tracheae; The water inlet of water intaking valve connects water inlet pipe, is connected in series jet injection valve between water inlet pipe and the outlet pipe, and fluid valve top inner chamber is less than lower lumen, and the air entry at fluid valve middle part is connected with tracheae.
CN 02215514 2002-02-01 2002-02-01 Continuous laser ceramic cutting machine Expired - Fee Related CN2529385Y (en)

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CN 02215514 CN2529385Y (en) 2002-02-01 2002-02-01 Continuous laser ceramic cutting machine

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1317112C (en) * 2004-12-29 2007-05-23 西安理工大学 Manual scribing machine
CN102211251A (en) * 2010-04-06 2011-10-12 耐夫诺斯公司 Apparatus for processing a substrate
CN104191043A (en) * 2014-08-04 2014-12-10 东莞市桦徽电子科技有限公司 Double-shaft precise dicing saw
CN108326380A (en) * 2018-03-14 2018-07-27 桐乡市远邦传感器有限公司 A kind of intelligent open cnc device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1317112C (en) * 2004-12-29 2007-05-23 西安理工大学 Manual scribing machine
CN102211251A (en) * 2010-04-06 2011-10-12 耐夫诺斯公司 Apparatus for processing a substrate
CN104191043A (en) * 2014-08-04 2014-12-10 东莞市桦徽电子科技有限公司 Double-shaft precise dicing saw
CN108326380A (en) * 2018-03-14 2018-07-27 桐乡市远邦传感器有限公司 A kind of intelligent open cnc device

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C19 Lapse of patent right due to non-payment of the annual fee
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