CN2492860Y - Phase plate manufactured based on binary optics technology - Google Patents
Phase plate manufactured based on binary optics technology Download PDFInfo
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- CN2492860Y CN2492860Y CN 01246764 CN01246764U CN2492860Y CN 2492860 Y CN2492860 Y CN 2492860Y CN 01246764 CN01246764 CN 01246764 CN 01246764 U CN01246764 U CN 01246764U CN 2492860 Y CN2492860 Y CN 2492860Y
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Abstract
A phase plate produced with the binary optical technology is a phase plate containing a pair of complementary nonopaque positive and negative phase plates of a Talbot phase encoding structure. The positive and negative phase plates with a gap are abreast positioned in parallel and can relatively move in parallel with the central axis of the positive and negative phase plates. S more than or equal to one periodically repeated positive and negative gate lines distributed by the method of positive and negative quadratic phase function are respectively provided on the opposite surfaces of the positive and negative phase plates. Compared with the prior art, the utility model used on an optical scanner can be easily produced with the binary optical technology and is characterized in stable and reliable performance, low power consumption, high efficiency of light beam scanning and high signal-to-noise ratio.
Description
Technical field:
The utility model relates to a kind of phase board with the binary optical technique manufacturing that uses in beam flying (deflection) device, particularly relate to employed phase board in a kind of micro photo-electro-mechanical scanner.
Background technology:
Optical beam scanner has very widely to be used, and as laser printer, televisor etc. optical beam scanner is arranged all.Traditional scanner is that backswing formula or electricity cause swing type mostly.Electricity system swing type need be with automatically controlled with the guides reflected light target, and the backswing formula usually needs the mechanical resonant of minute surface.These frame modes have limited sweep frequency, heaviness, expensive price, poor reliability.No matter for commerce or military use, all need low cost, high reliability, miniaturization and lightweight optical scanner.
Formerly inventor such as U.S. Motamedi provides a kind of optical scanner of micro lens array in the technology.(referring to M.E.Motamedi, A.P.Andrews, W.J.Gunning, M.Khoshnevisan, " Miniaturized micro-optical scanners ", Opt.Eng.33 (11), 3616-3623 (1994)).Problem is that the required high precision micro lens array of this scanner is difficult to make.Only can make limited position phase number of steps and limited live width with binary optical technique, and desirable lens array is smooth continuously, need unlimited position phase number of steps and unlimited thin live width to approach, and can't realize many arbitrarily position phase steps with binary optical technique, can only realize limited position value mutually, so in fact the micro lens array that adopts binary optical to make is not a desirable secondary phase function, what particularly the superfine live width of edge can not be made is fine, during therefore actual the use, performance can reduce, the efficiency of light energy utilization is not high yet, so realize that with the lens array phase board optical beam scanner is the difficulty that technical realization is arranged.
Summary of the invention:
The description of phase board of the present utility model use in optical beam scanner as shown in Figure 1.The 1st, monochromatic source, the 2nd, a pair of paratope phase-plate of the present invention, it contains positive-phase-board 201 and the negative-phase-board 202 that the secondary phase function distributes, O
1O
1Be the central axis of positive-phase-board 201, O
2O
2Be the central axis of negative-phase-board 202, the mobile deflection that will cause light beam between 201 and 202 makes incident beam Gr be deflected to light beam Gp, and the 3rd, shifter, the 4th, inclined to one side process control mobile device, the 5th, detector.
Core of the present utility model is positive negative-phase-board 201, the 202nd, the structure of talbot phase coding, it is a kind of structure of novel secondary phase coding, the coding that is used for positive-phase-board 201 and negative-phase-board 202, can significantly improve the performance of scanner, reduce cost, good practical value is arranged.Introduce talbot phase coding structure, its characteristic distribution and the advantage that is used for the photoscanner below in detail.
The suitable one-period d of each bar grid line in positive grid line 2011 on said positive-phase-board 201 and the negative-phase-board 202 and the negative grid line 2021.The quantity M of cutting apart in the phase d can be calculated by the formula of the phase coding of following talbot's matrix lamp weekly.During for even number M, position phase distribution function is:
During for odd number M, position phase distribution function is
Wherein the characteristic parameter r that distributes mutually of secondary position is determined by following formula:
p×r＝k
r×M+1，………………………(3)
P in the following formula, r and M are the positive integer more than or equal to 1, k
rFor more than or equal to zero positive integer.For any one M and the positive integer p less than M, the position that can be tried to achieve talbot's matrix lamp by top (1)～(3) formula distributes mutually.It is that formula (3) has the sufficient and necessary condition of separating that p and M do not have common factor.M is an even number, and p is that odd number just can be to separate.M is an odd number, and p may also may be odd number for even number, and it just can be separating of formula (3) that p and M do not have common factor.Know that by (3) p and r have interchangeability.P=1, r=1, k
r=0 always a group of formula (3) separate, it also is our situation of normal consideration that this group is separated.Because talbot's matrix lamp position is the quadratic function of parameter k mutually, so use a pair of positive and negative talbot's matrix lamp phase board 201 and 202, just can realize the scan deflection of light beam.List in the table 1 the position phase distribution function (k) of phase board 2 and M and position the part numerical solution between the number of steps L mutually.The position of positive negative-phase-board 201,202 be respectively mutually (k) and- (k).
The odevity difference of cutting apart several M in the cycle d of phase board 2 will cause the different symmetrical property in position, when M is even number, by (1) formula can get the position mutually being distributed symmetrically property be
(M-k)= (k), k=1,2 ..., M/2 ... (4) its symmetry is shown in Fig. 3 (a).When M is odd number, by (2) Shi Kede:
(M-k+1)= (k), k=1,2 ..., (M-1)/2 ... (5) its symmetry distributes shown in Fig. 3 (b).By the position of Fig. 3 (a) and (b) mutually being distributed symmetrically property be to analyze the strong explanation of phase board position phase number of steps L.
As shown in Figure 2, positive-phase-board 201 weekly the thickness of first (k=1) step 2011 of phase section start be h
11Width is d
11, the thickness h of second step
12, width is d
12, the thickness h of k step
1k, width is d
1k, cut apart the thickness h of M step
1M, width is d
1M, the width of all these steps is all equal, i.e. d
11=d
12=d
1k=d
1M=d/M, in one-period the thickness of each step all with the variable thickness sample of adjacent step, but be that symmetric distribution is arranged in one-period, as shown in Figure 3.The variation correspondence of thickness the variation of position phase.The variation in thickness of adjacent step can assign to represent that the neighborhood phasic difference branch of phase board 2 is defined as with the neighborhood phasic difference
Δ (k)= (k+1)- (k), k=1,2 ..., M-1 ... (6) when M is even number, the neighborhood phasic difference is divided into
Shown in Fig. 4 (a).When M was odd number, the neighborhood phasic difference was divided into
Shown in Fig. 4 (b).Promptly, can get the thickness h of second step according to the expression formula of above-mentioned adjacent two step thicknesses differences for positive-phase-board 201
12Deduct the thickness h of first step
11Be (when M is even number)
Wherein λ is the wavelength of incident light wave, and n is the refractive index of phase board substrate.
The width of each step on the negative-phase-board 202 also all equates, and equates with the width of step on the positive-phase-board 201, the phase change amount of each step thicknesses correspondence just in time with the complementation of above-mentioned positive-phase-board.Phase change amount in the comprehensive one-period, corresponding to even number and odd number M, neighborhood difference delta (k) is very clocklike, as Fig. 4 (a), (b) shown in.
From the angle of reality manufacturing phase board, a position phase number of steps L is a very important parameter.Position phase number of steps L is meant the total sum of all unequal position phases on the phase board.Having M to cut apart number in the phase board one-period is M position phase because symmetric existence is as shown in Figure 3 arranged, this M position have at least in mutually corresponding a pair of be equal, therefore, a phase number of steps L is always less than M.Phase number of steps L is many more in the position, just difficult more manufacturing of phase board, and cost will rise.Cut apart number for M in each cycle of phase board in the utility model and be not equal to a phase number of steps L, total trend is got on very well, and it is big more to cut apart several M, and pairing position phase number of steps L is just many more, but is not that linear increasing concerns between them, in other words, and M
1Compare M
2Might not be M greatly,
1Corresponding position phase number of steps L
1Just than M
2L
2Greatly.The part numerical relation of cutting apart between several M and the position phase number of steps L is listed in table 2, and the position of M correspondence can be obtained by formula (1)～(3) mutually arbitrarily, can draw a phase number of steps L mutually by the position.
But computing formula (1-3) is obtained phase number of steps hell to pay after all, and is also inconvenient in the use.Symmetry that the position distributes mutually above utilizing and neighborhood phasic difference divide to be analyzed, and just can provide the position phase number of steps that a simple prime number decomposition rule is obtained phase board.For example, for cutting apart several M=4t in the cycle, t is a prime number here, and then a symmetry that distributes mutually is shown in Fig. 5 (a), and therefore, its phase number of steps is L=3 (t+1)/2.For cutting apart several M=t in the cycle
2, then a symmetry that distributes mutually is shown in Fig. 5 (b), and therefore, its position is distributed as L=t (t-1)/2+1 mutually.For cutting apart in the cycle under the situation of several M for other prime number combination, the distribution of its phase number of steps L is as shown in table 3.The rule of table 3 fully can interpret table 2 concrete numerical solution.Utilize table 3, just can calculate a phase number of steps L easily, thereby can judge manufacture difficulty and cost, reality is made phase board important directive significance.
The phase board 2 of said structure carries out the process of light beam dynamic scan: the complementation because this position that aligns negative-phase-board 201,202 distributes mutually, therefore, and during non-displacement, virgin state, the central axis O of negative-phase-board 202
2O
2Central axis O with positive-phase-board 201
1O
1Coincide, its phasic difference is zero, and light beam can directly pass through, and forms zero order beam shown in Figure 6.When shifter 3 promotes negative-phase-board 202 (or positive-phase-board) the central axis O of positive-phase-board 201 (or negative-phase-board) relatively
1O
1During mobile d/M,
This correspondence be a linear phase factor, therefore, light beam by the time deflection, the angle θ of deflection just taken place
1Be (r=1)
As the mobile again d/M of displacement, the beam deflection angle just increases.If displacement is a Δ, for even number M, then wherein the relative negative-phase-board 202 of the phase function of positive-phase-board 201 is
With the difference of the phase function of negative-phase-board 202 be
Following formula is the linear function of Δ, and promptly corresponding is linear position item mutually.If non-displacement between two positive negative-phase-boards 201,202, Δ=0, (13) formula that goes up also is zero, corresponding is no phase change, so light beam can directly not have deviation and passes through.If between two positive negative-phase-boards displacement is arranged, Δ ≠ 0, the linear position of (13) formula that the goes up slope of item mutually is exactly the function of Δ, and Δ is big more, and beam deflection is just big more.The result that all fours is arranged for odd number M.Here it is, and phase board of the present invention can carry out the principle of beam flying.
As shown in Figure 6, maximum scan angle scope is
The cycle d of phase board 2 is more little, and scanning angle is just big more; It is big more to cut apart several M in cycle, means that attainable scanning step number is many more.Here just relate to the problem of manufacture difficulty.A pair of phase board 2 like this can be made by binary optical technique.D/M is the live width of requirement binary optical technique manufacturing, and they equate within whole phase board, and as shown in Figure 2, its value is more little, difficult more manufacturing.Another difficulty of making phase board depends on its phase number of steps L.Position phase number of steps is many more, just difficult more manufacturing, otherwise just easy more manufacturing.Utilize the simple relation of M and L in the table 3 just to be easy to judge the cost and the difficulty of manufacturing.
Corresponding to relative shift Δ between the positive negative-phase- board 201 and 202, the diffraction efficiency of beam deflection is
Since beam deflection can take place along the chief and vice level of optical axis is inferior, so total number of scan points is:
N=2 Δ+1 ... (16) Δ=0 o'clock, theoretical diffraction efficiency is 100%; Δ=1 o'clock, efficient will descend, and Δ is big more, and decrease in efficiency is many more.When cutting apart several M=8 in the cycle, diffraction efficiency increases the relation that descends as shown in Figure 7 with the displacement Δ.Every step displacement amount Δ is fixedly the time, and diffraction efficiency depends on that M:M is big more, and diffraction efficiency is high more, and M is more little, and diffraction efficiency is low more.Amount of movement Δ=1 o'clock, diffraction efficiency is shown in Fig. 8 with the curve that M increases.Therefore, increase required number of scan points N, just needing increases corresponding M, and the relation between them is shown in Table 4.
Under the situation of required diffraction efficiency, can make Δ according to required number of scan points N, separate number M in the cycle of the required phase board in road as shown in Table 4, table look-up 2 or table 3 again, just can determine required position phase number of steps L.Table 5 has provided at diffraction efficiency=81% o'clock, number of scan points N, and the cycle of phase board 2 is separated the relation between number M and the position phase number of steps L.Thus, can judge difficulty and cost in the manufacturing earlier, and finally make required phase board.
Phase board of the present utility model is with formerly technology is than adopting binary optical technique, and manufacturing is stable and reliable for performance easily.Be mainly used on the micro-optic scanner, and the advantage of micro-optic scanner is simple in structure, volume is little, and is in light weight, and size is little, can to design only be tens microns to the length of phase weekly, the phase board size can only be number mm sq magnitude, and power consumption is little, and displacement also requires very little (about micron order), yet less displacement just can cause bigger beam deflection, for example can obtain the deflection of 5 degree.Has possibility in enormous quantities, that low cost is duplicated.
Adopt the optical beam scanner of phase board of the present utility model that higher beam flying efficient is arranged, signal to noise ratio (S/N ratio) preferably, and may reduce manufacturing cost.Compare with the Fresnel coding lens array in the technology formerly,
1. phase board of the present utility model has overcome the meticulous shortcoming in Fresnel Lenses Array edge, in optical beam scanner, has improved the efficiency of light energy utilization of edge with phase board of the present utility model, has therefore improved the diffraction efficiency in beam flying time.
Formerly in the technology Fresnel Lenses Array need the coding of infinite multidigit phase to approach, this is impossible in the middle of actual manufacturing.Phase board of the present utility model can determine its bits of coded to distribute mutually according to the actual position phase number of steps L that can make conversely, and the theoretical error that this can reduce phase coding is applied in the optical beam scanner, has improved signal to noise ratio (S/N ratio).
3. formerly technology is unfixed move mode, and plus or minus phase board of the present utility model has the shifter 3 of programming Control mobile device 4 controls, so definite accurate moving step length is arranged.Adopt phase board of the present utility model, moving of step-lengths such as the requirement that control is moved in the outside is, referring to Fig. 2 and formula (1-3), this also is (as the piezoelectric ceramics shifter etc.) that present shift technique support section is realized easily, accurately fixing moving step length distance, be proportional to the diffraction deflection angle of light beam, this easy to use and control.
Be described in detail phase board of the present utility model and use three advantages in the photoscanner: (1) is because everybody occupies identical physics realization width d/M mutually on the phase board of the present utility model, so when having avoided formerly making Fresnel Lenses Array in the technology, the shortcoming that the edge number of rings is meticulous.This can prove by table 6.It is compatible and coupling that the manufacturing of phase board of the present utility model and binary optical technique require, and formerly the Fresnel Lenses array of technology and binary optical manufacturing technology to require be incompatible, unmatched.So adopt the manufacturing cost of phase board of the present utility model to reduce, photoscanner's performance can improve.Known by top formula (1-3) that (2) for cutting apart several M in certain cycle, corresponding is limited fixing position phase step, this point can be illustrated by table 1.For example: position phase number of steps is L=4, but cut apart number in performance period and be M=8, corresponding position mutually can option table 1 in listed 8 groups of positions arbitrary group in mutually, this illustrates that phase board of the present utility model has the alternative that the position distributes mutually, this alternative provides convenience for manufacturing technology; And formerly technology has only a kind of position to distribute mutually, can not provide the convenience that can select the position to distribute mutually for manufacturing technology.In addition, phase board of the present utility model can be realized the hot spot point of adjustable dutycycle, and this provides the alternative of different request for utilizations for the user; And formerly the Fresnel Lenses Array of technology can only form the nonadjustable hot spot point of very little dutycycle, can not provide this selectivity for the user.(3) for limited position phase step, can optimize and cut apart several M in the suitable cycle, can illustrate by table 2 by the preferred proper compression ratio of position phase number of steps.For example: for position phase number of steps L=16, in table 2, can find M=31,42,63, the M=63 of attainable maximum is described.Because M is directly relevant with scanning angle, diffraction efficiency, referring to formula 14,15, therefore, the utility model provides the optimum relations between position phase number of steps, scanning angle and the diffraction efficiency, and this not only is suitable for the binary optical technique manufacturing, also helps controlling photoscanner's performance.And the Fresnel Lenses Array of the technology optimum relations between presence bit phase number of steps and the diffraction efficiency not formerly.These advantages of phase board of the present utility model be technology formerly Fresnel Lenses Array can't accomplish.In a word, these advantages of phase board of the present utility model are more suitable for being used for scanner in the binary optical technique manufacturing, make the dependable performance of optical beam scanner, and are easy to manufacture, and cost reduces.
Description of drawings:
Fig. 1 is the structure of phase board of the present utility model and the synoptic diagram that uses in optical beam scanner.Phase board 2 among the figure (comprising 201,202) has only been drawn three cycles, in fact can repeat a plurality of cycles.
Fig. 2 is one dimension phase board 201 and 202 distribution schematic diagrams, and d is the cycle, and one-period d is evenly divided into the M five equilibrium, and the phase function of each five equilibrium (k) is by formula (1-3) decision, so minimum bit phase width is d/M.The sectional view of phase board when Fig. 2 (a) is simulation M=8, { (k) }={ 9 π/8,4 π/8, π/8,0, π/8,4 π/8,9 π/8,0}; Fig. 2 (b) is the vertical view of Fig. 2 (a), and the difference of gray scale is used for the difference of approximate representation position phase.Phase board 2 among the figure (comprising 201,202) has only been drawn two cycles, in fact can repeat a plurality of cycles.
Fig. 3 be 2 phase of phase board (k) (k=1 ..., M)) and the symmetry that distributes, Fig. 3 (a) M is an even number, Fig. 3 (b) M is an odd number.The direction of arrow is represented symmetric direction, and irrelevant with the increase and decrease that the position is worth mutually, it is only non-limiting for explanation that diagram gray scale and cycle are cut apart several M.
Fig. 4 is phase board 2 neighborhood difference position phase Δ (k) distribution plans, and Fig. 4 (a) M is an even number, and Fig. 4 (b) M is an odd number, and the shown difficulty to making this phase board of this Fig. 4 has the value of judgement.
Fig. 5 is 2 of the phase boards special symmetric synoptic diagram that distributes mutually.Fig. 5 (a) M=4t, Fig. 5 (b) M=t
2The time, understand 2 special symmetry that distribute mutually of phase board, can draw a phase number of steps thus.
The dynamic description synoptic diagram that Fig. 6 carries out beam flying for phase board 2 of the present utility model.
Fig. 7 is the diffraction efficiency of phase board 2 and the graph of relation of displacement Δ.Ordinate is a diffraction efficiency, and horizontal ordinate is the displacement Δ of negative-phase-board 202.When diagramatic curve is M=8, the relation curve that diffraction efficiency descends with the increase of displacement Δ.
Fig. 8 is the graph of relation of cutting apart several M five equilibriums in the diffraction efficiency of phase board 2 and the phase d weekly.Ordinate is a diffraction efficiency, and horizontal ordinate is the several M of cutting apart in the d of phase weekly of phase board 2.Diagramatic curve is negative-phase-board 202 displacement Δ=1 fixedly the time, the relation curve that diffraction efficiency increases with the increase of M.
Embodiment:
As shown in Figure 1, the structure of phase board 2 and optical beam scanner comprise light source 1, phase board 2, by the shifter 3 and the detector 5 of programming mobile controller 4 controls.The requirement of light source 1 must be a monochromatic source, and it can be various laser instruments, as semiconductor laser or other monochromatic source.Displacement shifter 3 can be mechanical, electronically controlled, and its requirement is to produce moving of step pitch such as linearity, and its step pitch size can be designed to accurately equal the width that minimum bit is modulated mutually on the phase board.For example, minimum bit phase modulation width is 5 μ m on the phase board 2, and then the moving step length of shifter 3 just is 5 μ m.Detector 5 can all can for charge-coupled device (CCD) camera, photoelectric commutator or other any light activated photoelectric detector to used light source 1 wavelength.Phase board 2 of the present utility model is core components of this scanner, so stress phase board 2.
For cutting apart several M=9 in the cycle, can get the talbot position by above-mentioned distribution function and be distributed as mutually
0，2π/9，2π/3，4π/3，2π/9，4π/3，2π/3，2π/9，0
If the cycle d=90 μ m of phase board 2, positive and negative grid line is counted the s=20 bar.The wavelength X of light source 1=0.6328 μ m, then the homogeneous beam Gr when light source 1 emission incides on the phase board 2, sees through phase board 2, as the central axis O of negative-phase-board 202
2O
2The central axis O of relative positive-phase-board 201
1O
1Between whenever move 10 μ m, light beam Gp is with regard to deflection λ/d=0.4 °, but about deflection (9-1) altogether * 4=3.2 °.D is more little, and the angle of light beam Gp deflection is just big more; M is big more, and the sampling step number of scanning is just many more.The position phase number of steps L that can produce with binary optical technique is many more, and the effect of this scanner is just good more.Count distribution under the situation for M for other, but reference table 1,2,3,4,5, Fig. 2,3,4,5,7,8, and formula (1-3), (15-16), just can analyze the performance of this scanner.Along with the progress of binary optical technique, superiority of the present utility model is just obvious more, and therefore goodish application prospect is arranged.
The position (k) that distributes mutually of table 1 phase board 2 is cut apart the relation between several M and the position phase number of steps L in the cycle
| M | Option p | Position phase (k), k=1 ..., | L | |
| 2 | 1 3 | π/2，0 0，π/2 | 2 2 | |
| 3 | 1 2 4 5 | 0，2π/3，0 0，2π/3，2π/3 2π/3，0， 0 2π/3，0，2π/3 | 2 2 2 2 | |
| 4 | 1 3 5 7 | π/4，4π/4，π/4，0 0，π/4，0，5π/4 π/4，0，π/4，4π/4 0，5π/4，0，π/4 | 3 3 3 3 | |
| 5 | 1 2 3 4 6 7 8 9 | 0，2π/5，6π/5，2π/5，0 2π/5，0，4π/5，4π/5，0 0，4π/5，2π/5，4π/5，0 6π/5，0，2π/5，2π/5，0 6π/5，2π/5，0，0，2π/5 4π/5，0，2π/5，0，4π/5 2π/5，4π/5，0，0，4π/5 2π/5，0，6π/5，0，2π/5 | 3 3 3 3 3 3 3 3 | |
| 6 | 1 5 7 11 | π/6，4π/6，9π/6，4π/6，π/6，0 0，3π/6，4π/6，3π/6，0，7π/6 4π/6，π/6，0，π/6，4π/6，9π/6 3π/6，0，7π/6，0，3π/6，4π/6 | 4 4 4 4 | |
| 7 | 1 2 3 4 5 6 8 9 10 11 12 13 | 2π/7，4π/7，8π/7，0，8π/7，4π/7，2π/7 0，4π/7，2π/7，8π/7，8π/7，2π/7，4π/7 4π/7，0，6π/7，8π/7，6π/7，0，4π/7 0，2π/7，8π/7，4π/7，4π/7，8π/7，2π/7 0，6π/7，4π/7，8π/7，4π/7，6π/7，0 8π/7，0，4π/7，6π/7，6π/7，4π/7，0 0，8π/7，4π/7，2π/7，2π/7，4π/7，8π/7 8π/7，2π/7，4π/7，0，4π/7，2π/7，8π/7 8π/7，6π/7，0，4π/7，4π/7，0，6π/7 4π/7，8π/7，2π/7，0，2π/7，8π/7，4π/7 8π/7，4π/7，6π/7，0，0，6π/7，4π/7 6π/7，4π/7，0，8π/7，0，4π/7，6π/7 | 4 4 4 4 4 4 4 4 4 4 4 4 | |
| 8 | 1 3 5 7 9 11 13 15 | π/8，4π/8，9π/8，0，9π/8，4π/8，π/8，0 0，π/8，8π/8，5π/8，8π/8，π/8，0，5π/8 0，7π/8，8π/8，3π/8，8π/8，7π/8，0，3π/8 11π/8，0，3π/8，4π/8，3π/8，0，11π/8，4π/8 9π/8，4π/8，π/8，0，π/8，4π/8，9π/8，0 8π/8，π/8，0，5π/8，0，π/8，8π/8，5π/8 8π/8，7π/8，0，3π/8，0，7π/8，8π/8，3π/8 3π/8，0，11π/8，4π/8，11π/8，0，3π/8，4π/8 | 4 4 4 4 4 4 4 4 |
The relation between several M and the position phase number of steps L cut apart in 2 cycles of table 2 phase board
| M |
| 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 |
| 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 8 10 9 8 12 12 8 11 14 11 12 15 12 16 12 12 |
| 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 18 12 12 19 20 14 12 21 16 22 18 12 24 24 14 22 |
| 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 22 18 21 27 22 18 16 20 30 30 18 31 32 16 23 |
Separate the simple relation between number M and the position phase number of steps L in table 3 cycle
In the table 3
| M T |
| 2 t t 2 t 1t 2(t 1≠t 2) t 3 t 1t 2t 3(t 1≠t 2，t 1≠t 3，t 2≠t 3) 2 n·M(odd) a M(1)…M(n) c | L (t+1)/2 t+1 t(t-1)/2+1 (t 1+1)(t 2+1)/4 (t 2(t-1)+t+1/2 (t 1+1)(t 2+1)(t 3+1)/8 L(2 n)·L[M(odd)] b L[M(1)]…L[M(n)] d |
Subscript
aIllustrate that M (odd) is an odd number;
Subscript
bL (2 is described
n), and L[M (odd)] be respectively 2
n, with the corresponding position of M (odd) number of steps mutually;
Subscript
cIllustrate that M can be broken down into the product M (1) of the number of no common factor ..., M (n);
Subscript
dL[M (1) is described] ... L[(M (n)) be M (1) ..., the corresponding position of M (n) phase number of steps.
Table 4 phase board is cut apart the relation between several M and diffraction efficiency, number of scan points N=2 Δ+1 in 2 cycles.
| η | M |
| 81 | 4Δ |
| 88 | 5Δ |
| 91 | 6Δ |
| 93 | 7Δ |
| 95 | 8Δ |
Table 5 is at diffraction efficiency=81% o'clock, and number of scan points N separates number M in 2 cycles of phase board, and the relation between the phase number of steps L of position
| Δ | N＝2Δ+1 | | L | |
| 1 | 3 | 4 | 3 | |
| 2 | 5 | 8 | 4 | |
| 3 | 7 | 12 | 6 | |
| 4 | 9 | 16 | 7 | |
| 5 | 11 | 20 | 9 | |
| 6 | 13 | 24 | 8 | |
| 7 | 15 | 28 | 12 | |
| 8 | 17 | 32 | 12 | |
| 9 | 19 | 36 | 12 | |
| 10 | 21 | 40 | 12 | |
| 11 | 23 | 44 | 18 | |
| 12 | 25 | 48 | 14 | |
| 13 | 27 | 52 | 21 | |
| 14 | 29 | 56 | 16 | |
| 15 | 31 | 60 | 18 | |
| 16 | 33 | 64 | 23 |
The micro lens array of phase board that table 6 the utility model adopts and technology employing formerly and the comparison of binary optical technique.
| The micro lens array of technology employing formerly (infinite place phase step, unlimited thin live width) | The phase board (spacing phase step being arranged, finite linewidth) of talbot's phase coding structure that the utility model adopts | |
| The attainable technical requirement of binary optical technique (spacing phase step being arranged, finite linewidth) | Do not match | Coupling |
Claims (2)
1. phase board made from binary optical technique is characterized in that comprising:
＜1〉contains the positive-phase-board (201) and the negative-phase-board (202) of the talbot phase coding structure printing opacity of a pair of complementation;
＜2〉positive-phase-board (201) in the said phase board (2) is parallel storing arranged side by side with negative-phase-board (202), and space D u 〉=0.5 micron is arranged between the two;
＜3〉positive-phase-board (201) of said talbot phase coding structure relatively has the s 〉=1 positive grid line (2011) that positive secondary phase function that the cycle repeats distributes on the surface of negative-phase-board (202), and said negative-phase-board (202) positive-phase-board (201) relatively has and has the s 〉=1 negative grid line (2021) that negative secondary phase function that the cycle repeats distributes on the surface of positive grid line (2011);
＜4〉have the shifter (3) of programming Control mobile device (4) control on said positive-phase-board (201) or the negative-phase-board (202), both their central axis (O relatively of positive negative-phase-board (201,202)
1O
1, O
2O
2) can be parallel to each other mobile.
2. the phase board made from binary optical technique according to claim 1, it is characterized in that the suitable one-period d of grid line (2011,2021) of a said plus or minus, be divided into the M five equilibrium in each cycle d, one-period d contains L position phase number of steps, the width d of each phase step
1, d
2..., d
MAll equate, i.e. d
1=d
2=...=d
M=d/M; The thickness of adjacent two position phase steps is unequal, but is to be symmetrically distributed in one-period d, and therefore adjacent two position phase step thicknesses differences are expressed as:
λ is the wavelength that is incident in light wave on the phase board in the formula, and n is the refractive index of phase board substrate, h
kBe the height of k position phase step, r is the positive integer more than or equal to 1, is the characteristic parameter of secondary phase function.When cutting apart several M and being even number, a position phase distribution function is for above-mentioned:
When cutting apart several M and being odd number, a position phase distribution function is for above-mentioned:
The characteristic parameter r that above-mentioned secondary position distributes mutually is:
p×r＝k
r×M+1，………………………………………(3)
P in the following formula, r and M are the positive integer more than or equal to 1, k
rFor more than or equal to zero positive integer, p＜M, p and r have interchangeability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01246764 CN2492860Y (en) | 2001-07-27 | 2001-07-27 | Phase plate manufactured based on binary optics technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01246764 CN2492860Y (en) | 2001-07-27 | 2001-07-27 | Phase plate manufactured based on binary optics technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2492860Y true CN2492860Y (en) | 2002-05-22 |
Family
ID=33657722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01246764 Expired - Lifetime CN2492860Y (en) | 2001-07-27 | 2001-07-27 | Phase plate manufactured based on binary optics technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2492860Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109676A (en) * | 2011-02-25 | 2011-06-29 | 中国科学院上海光学精密机械研究所 | Design method of multi-partition optical phase plate for photoetching illumination |
-
2001
- 2001-07-27 CN CN 01246764 patent/CN2492860Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109676A (en) * | 2011-02-25 | 2011-06-29 | 中国科学院上海光学精密机械研究所 | Design method of multi-partition optical phase plate for photoetching illumination |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20040414 |
|
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20040414 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |