CN2397485Y - Photoetching objective lens resolving power testing device - Google Patents
Photoetching objective lens resolving power testing device Download PDFInfo
- Publication number
- CN2397485Y CN2397485Y CN 99241305 CN99241305U CN2397485Y CN 2397485 Y CN2397485 Y CN 2397485Y CN 99241305 CN99241305 CN 99241305 CN 99241305 U CN99241305 U CN 99241305U CN 2397485 Y CN2397485 Y CN 2397485Y
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- China
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- object lens
- resolution test
- objective lens
- resolving power
- cushion block
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Abstract
The utility model discloses a photoetching objective lens resolving power testing device, which overcomes the defect that the existing objective lens testing instrument can only test conventional micro objective lenses with small size and weight, horizontal arrangement when tested and lower precision. The photoetching objective lens resolving power testing device is composed of an image receiver composed of the connection of a shock absorption base plate, a big bracket, a lighting system, a resolving power testing plate, a micro objective lens and a CCD receiver, and a display. The tested photoetching objective lens is vertically arranged on a horizontal stand of the bracket. The conjugate distance, the size and weight and the working wavelength of various photoetching high resolving power objective lenses required to be vertically tested can be conveniently tested through replacing the positions of a cushion block and the lighting system.
Description
The utility model is a kind of lithographic objective resolution test device, belongs to the picture element technical field of measurement and test of lithographic objective high resolution imaging system of projection mask aligner.
IC manufacturing equipment projection mask aligner requires to have very high photolithography resolution, and photolithography resolution is mainly determined by lithographic objective, resolving power high request numerical aperture more is big more, therefore the optics and the physical construction of object lens are very complicated, overall dimensions are very big, and conjugate distance reaches one meter or more, and weight reaches 50～500 kilograms, and because self structure and litho machine machine requirement, object lens can only be placed vertically.Object lens assemblings is finished, will load onto complete machine before, must carry out the test of object lens picture element.Because lithographic objective process and assemble precision is very high, it is also very sensitive influenced by stress deformation, when therefore testing picture element, must guarantee that lithographic objective is in vertical laying state identical when working.And the picture element testing tool that adopts at present biography letter tester generally all requires the horizontal placement of tested object lens.Parallel as comparatively famous its system optical axis of the U.S. MARKIII of OPTIKOS company transfer function measuring instruments with base, transfer function measuring instruments and tested object lens are placed on all seats of light or the platform, the light of transfer function measuring instruments is by the tested object lens of horizontal placement, image on the photomultiplier tube detectors of transfer function measuring instruments, adopt scanning and correlation method, COMPREHENSIVE CALCULATING goes out to pass the letter curve.And the method test that conventional sense object lens image quality usually adopts traditional resolution chart, asterism, Knife-edge Shadow to combine, the comprehensive analysis and judgement picture element.Because the restriction of its structure and method of testing, all there is the range limited shortcoming of lower, the tested object lens of measuring accuracy in above-mentioned proving installation, only suitable dimensional weight is less, the test of the placement of can droping to the ground during test, conventional micro objective that precision is lower, be difficult to carry out to the imaging resolving power very high (＞10001p/mm), very big (diameter＞the 300mm of size and weight, weight＞50～500Kg), conjugate distance are very long, the test of the special large-scale light projection photoetching objective lens that can only vertically place.
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, and provides the tested object lens of a kind of permission vertically to place, and is unrestricted to tested object lens dimensional weight, measuring accuracy height, the lithographic objective resolution test device of observation intuitive and convenient.
The purpose of this utility model can realize by following technical measures: be placed on the surface level of the big support on the vibration damping large substrates fixedly big cushion block, to support illuminator, microcobjective and CCD receiver are formed image receiving system, are connected with display plotter; The object space end face of the tested object lens of vertically placing on the big support level table top is placed the standard cushion block, horizontal support resolution test plate, resolution test figure on the plate by tested object lens projection imaging in image planes W ' W ' plane, microcobjective is fixed on the three-dimensional trim holder by link, and focuses in the image planes W ' W ' plane of tested object lens.
The purpose of this utility model also can realize by following technical measures: the big cushion block of standard cushion block in the resolution test device and support illuminator, and illuminator, can change according to conjugate distance, dimensional weight and the operation wavelength difference of tested object lens.
The purpose of this utility model can also realize by following technical measures: the resolution test plate is made up of at the resolution test figure of different directions and regional location polycomponent cloth, every group of resolution chart comprises the lines group of 16 or a plurality of different in width, the lines group is orthogonal in twos equidistant black and white lines, dutycycle is 1: 1, and the half period that staggers.
The utility model compared with prior art has the following advantages:
When using these resolution test device to test object lens, lithographic objective can vertically be placed, vertically state is identical with object lens self assembling and after loading onto the litho machine complete machine, makes object lens can not bring inner microdeformation, the resolving power when test result can reflect real work fully when test.This proving installation can be changed the big cushion block of the illuminator of different illumination spectral lines, the standard cushion block that supports the resolution test plate and support illuminator, is not subjected to the restriction of operation wavelength, conjugate distance, physical dimension and the weight of tested object lens when therefore using these device to test object lens.
Only need moving three dimension adjustment rack and microcobjective when using this device to carry out the object lens test, and can directly observe test pattern, so this device is easy to use from display.
The utility model is described in further detail below in conjunction with drawings and Examples.
Fig. 1 is the structural drawing of resolution test device embodiment.
Fig. 2 is the resolution test figure distribution plan of resolution test plate.
Fig. 3 is the enlarged drawing of resolution test figure.
As shown in Figure 1: on vibration damping large substrates 1, place big support 2, big support level table top is big cushion block 15 fixedly, to support illuminator 14.The big multiplying power microcobjective 7 of high resolution connects and composes resolution test figure image receiver by the screw thread of lens barrel 6 and the CCD image receiver 4 of power supply 8 power supplies, and is connected to display plotter 9.Tested lithographic objective 10 vertically is placed on the level table of big support 2, the object space end face of tested object lens is placed standard cushion block 11 horizontal support resolution test plates 12, resolution chart morpheme on the plate is in position, the reference material plane of tested object lens 10 (the mask face that is equivalent to litho machine), illuminated system 14 evenly throws light on, and by tested object lens 10 projection imagings to below image planes W ' W ' face (the silicon chip face that is equivalent to litho machine).Focusing is fixed on the three-dimensional trim holder 3 by link 5 in the microcobjective 7 of this face, and near the three-dimensional of microcobjective 7 W ' W ' face moves to be moved by three-dimensional trim holder 3 and reach, and the external veiling glare of object space is gone by preventing stray light plate 13 retainings.
As shown in Figure 2: identical polycomponent distinguishes that power resolution chart 16 is distributed in the different directions and the regional location (totally 9 places) of resolution test plate 12, is covered with the whole true field of object lens.
Be illustrated in figure 3 as the amplification assumption diagram of a resolution test figure 16 in the resolution test plate 12, resolution chart is the lines group that indicates from 1.5～0.15 microns 16 different actual linewidth of correspondence, the lines group is orthogonal equidistant black and white lines in twos, black and white lines dutycycle 1: 1, and the half period that staggers.Move to each test resolving power positions of tested object lens with adjustment rack being fixed on microcobjective 7 on the three-dimensional trim holder 3, by meticulous focusing, simultaneously clearly from the display 9 see two wide resolving power bargraphss of orthogonal extra fine wire clearly, then the extra fine wire that can both clearly see is wide, the optical resolution that reaches for tested object lens.
Claims (3)
1, a kind of lithographic objective resolution test device, by the fixing big cushion block (15) of the level table of the big support (2) that is placed on vibration damping large substrates (1), to support illuminator (14), microcobjective (7) and CCD receiver (4) are formed visual receiving system, be connected with display plotter (9), it is characterized in that: the object space end face of the tested object lens of vertically placing on big support (2) level table (10) is placed standard cushion block (11), horizontal support resolution test plate (12), the resolution test figure on the plate by tested object lens (10) projection imaging in image planes W ' W ' plane.Link (5) is fixed on microcobjective (7) on the three-dimensional trim holder (3), and microcobjective (7) is focused in tested object lens (10) image planes W ' W ' plane.
2, lithographic objective resolution test device as claimed in claim 1, it is characterized in that: the big cushion block (15) and the illuminator (14) of standard cushion block (11) and support illuminator, can be according to different replacing of conjugate distance, dimensional weight, operation wavelength of tested object lens (10).
3, as claim 1 and 2 described lithographic objective resolution test devices, it is characterized in that: resolution test plate (12) is made of the resolution test figure (16) of polycomponent cloth in different directions and position, resolution chart (16) comprises the lines group of 16 or a plurality of different in width, each lines group is orthogonal in twos equidistant black and white lines, the black and white dutycycle is 1: 1, and the half period that staggers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99241305 CN2397485Y (en) | 1999-10-14 | 1999-10-14 | Photoetching objective lens resolving power testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99241305 CN2397485Y (en) | 1999-10-14 | 1999-10-14 | Photoetching objective lens resolving power testing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2397485Y true CN2397485Y (en) | 2000-09-20 |
Family
ID=34028193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99241305 Expired - Fee Related CN2397485Y (en) | 1999-10-14 | 1999-10-14 | Photoetching objective lens resolving power testing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2397485Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494876A (en) * | 2011-12-20 | 2012-06-13 | 公安部上海消防研究所 | Smoke penetration testing device for fire fighting lamp |
-
1999
- 1999-10-14 CN CN 99241305 patent/CN2397485Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494876A (en) * | 2011-12-20 | 2012-06-13 | 公安部上海消防研究所 | Smoke penetration testing device for fire fighting lamp |
| CN102494876B (en) * | 2011-12-20 | 2014-10-01 | 公安部上海消防研究所 | Smoke penetration testing device for fire fighting lamp |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |