CN2392039Y - Electromagnetic cutting-off/inflating valve - Google Patents

Electromagnetic cutting-off/inflating valve Download PDF

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Publication number
CN2392039Y
CN2392039Y CN 99224990 CN99224990U CN2392039Y CN 2392039 Y CN2392039 Y CN 2392039Y CN 99224990 CN99224990 CN 99224990 CN 99224990 U CN99224990 U CN 99224990U CN 2392039 Y CN2392039 Y CN 2392039Y
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China
Prior art keywords
valve
flap
armature
sleeve
valve body
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Expired - Fee Related
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CN 99224990
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Chinese (zh)
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刘立宁
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Individual
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Individual
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Abstract

The utility model discloses an electromagnetic partition / gas charging valve which is formed by combining a rectangular two-way valve and an electromagnet, and a time delay differential mechanism is additionally arranged between armature iron and a valve clack to make the utility model connected in series between a vacuum system and a vacuum pump. When the utility model is used, oil and atmosphere can not be returned and injected to the vacuum system, which can be ensured in the process of the operation and the work stop of the pump, and the operating mode with high quality of the vacuum system is ensured.

Description

A kind of electromagnetism partition/gas charging valve
The utility model discloses a kind of electromagnetism partition/gas charging valve, is particularly suitable for being connected across the middle use of vacuum pump and vacuum system, belongs to the improvement that the valve technology of additional mechanism providing additional operation is arranged between armature and closure member.
Electromagnetism partition/gas charging valve is most widely used a kind of valve in the vacuum technique field; it is the indispensable supporting valve of coarse vacuum components of system as directed mechanical pump; it is the important valve of protection mechanical pump and vacuum system; it is installed on the bleeding point of the mechanical pump between mechanical pump and the vacuum system; its power supply is connected on the power supply of mechanical pump; when mechanical pump quits work or cut off the power supply; this valve is automatically with the vacuum system pipe sealing; return in the vacuum system to prevent mechanical pump oil to inflation (atmosphere) in the mechanical pump simultaneously; when priming pump, valve is opened automatically and air-filled pore is blocked.Yet, existing various electromagnetism partition/gas charging valve does not play due effect, when pump quits work or cut off the power supply, though can prevent that mechanical pump oil from directly returning in the vacuum system to the mechanical pump inflation, but inevitably also atmosphere is charged in the vacuum system, thereby inevitable again oil vapor is taken in the vacuum system, if when a vacuum system remains negative pressure (this is a lot of users' a accepted practice), when resetting mechanical pump, inevitably atmosphere is poured in the vacuum system again, and thereby inevitable also take to oil vapor in the vacuum system, containing the atmosphere (atmosphere all contains water vapor) of water vapor and oil vapor, to enter vacuum system be extremely harmful, particularly just more harmful to high vacuum and ultra-high vacuum system, it not only influences degree of vacuum, more influence the quality of vacuum, vacuum work quality (plated film etc.) is produced serious harmful effect, because termination of pumping, turn on pump and outage are to perplex vacuum system worker's problem with the problem of atmosphere and oil vapor suction vacuum system always.
The purpose of this utility model be exactly provide at the problem of above-mentioned existence a kind of when pump opening or stopped process in or stopping, can both effectively guarantee in the loss of power accident not to vacuum system return oil, a kind of uses of not irritating atmosphere reliably, stable performance, simple in structure, easy to manufacture, widely applicable electromagnetism partition/gas charging valve.
The purpose of this utility model is to realize like this, it is by a kind of electromagnetism partition/gas charging valve with right angle two-way valve and electromagnet be combined into, valve body by the double straight passage of a tool, the flap that in valve body, matches with sealing surface, serial connection also is pressed in the valve gap between the seam behind electromagnet and the valve body, intert the compositions such as armature in the sleeve behind electromagnet and flap, it is characterized in that: the also additional delay inequality actuation mechanism that is provided with between armature and flap, it consists of behind armature front end and flap sleeve and interts the position mutually and have a strip hole, wherein be interspersed with flap after the pin of sleeve Joint, between armature and flap sleeve, also preset the prestretching spring and be set on the armature front end, also preset between the sleeve in valve body and behind the flap and be coated with preloading spring, be pressed between valve gap and the flap, in circular valve gap body, be disposed radially an exhaust valve component, on the valve gap body at place, valve rod position, have between an axial hole and the valve body chamber on it and form passage, with the armature of corresponding position, outlet valve valve rod place on, also have groove vertically, exhaust valve component is by spring on it, valve rod, the sealing of O type is formed, and its top has through hole and communicates with atmosphere.
The proposition of a kind of electromagnetism partition/gas charging valve of the utility model can not only termination of pumping or when outage guarantee mechanical pump not to vacuum system return oil, atmosphere can not enter in the vacuum system in the time of can guaranteeing at termination of pumping, outage and primer pump again, thereby also just stopped atmosphere reliably this unfavorable situation that oil vapor is brought into vacuum system is taken place, just guaranteed fundamentally that also vacuum system can move under high-performance, high-quality state.
Description of drawings:
Fig. 1 is the utility model electromagnetism partition/gas charging valve structural representation.
Fig. 2 is Fig. 1 left view.
Further illustrate the utility model technical characteristics below in conjunction with embodiment.
Electromagnetism partition/gas charging valve the (see figure 1) of using on a kind of vacuum coater of embodiment
Present embodiment is a kind of embodiment that the utility model electromagnetism partition/gas charging valve is used on vacuum coater, the horizontal interface of electromagnetism partition/gas charging valve links to each other with the vacuum coater interface in the present embodiment, its vertical joint links to each other with the vacuum pump bleeding point, the pump valve synchronization control, electromagnetism partition/gas charging valve in the present embodiment is by the valve body (1) of a tool two vertical passages, the flap that in valve body, matches (2) with sealing surface, " O " RunddichtringO (3), be serially connected in the valve gap (15) of usefulness " O " RunddichtringO (10) sealing between the seam of motor magnet (17) and valve body (1) back, through end cap (18) together by screw rod (19) cross-under, and form by interting behind electromagnet (17) and flap the armature (16) in the sleeve etc., it is characterized in that: the also additional delay inequality actuation mechanism that is provided with between armature (16) and flap (2), it consists of at armature front end and the interspersed mutually position of flap sleeve and has a strip hole (5), wherein be interspersed with pin (6) with flap (2) back sleeve Joint, also presetting prestretching spring (4) behind armature (16) and the flap between the sleeve, be set on armature (16) front end, also preset between the sleeve (2) in valve body (1) and behind the flap and be coated with preloading spring (7), be pressed between valve gap (15) and the flap (2), in circular valve gap (15) body, be disposed radially exhaust valve component, have a through hole (9) on the valve gap body at place, its position and form passage with body cavity, with the armature of outlet valve valve rod (11) corresponding position, place on also have groove (8) vertically; Above-mentioned exhaust valve component is made up of spring (13), " O " RunddichtringO (14), valve rod (11), has pore (12) to communicate with atmosphere on the valve.
Present embodiment valve body (1) two vertical passage also can be designed to have " V " type channel shape of arbitrary angle, to adapt to the usage requirement of various distinct devices.
Present embodiment valve body two vertical passage adpting flanges can adopt the Placement of rapid pipe joint, also can adopt the spiral Placement to connect.
Fig. 1 is the locations of structures schematic representation of present embodiment electromagnetism partition/gas charging valve when quitting work state.During work, when the moment that starts vacuum pump because the pump valve synchronization control, the motor magnet of electromagnetism partition/gas charging valve starts synchronously, drive armature to left movement, at this moment the spring in the outlet valve (13) is depressed valve rod (11) and is entered in the armature groove (8), the outlet valve closure is broken off and outer atmosphere path, meanwhile vacuum pump will be evacuated in valve body (1) chamber, join and drive flap (2) up to strip hole (5) other end of armature front end and pin (6), thereby open the vacuum system operation of bleeding, time-delay gap between strip hole one side and the pin just is opening backward delay a period of time of flap like this, move locking system and atmosphere path by outlet valve during this period in advance, simultaneously make vacuum pump again to bleeding in valve body (1) chamber, just can guarantee to enter into vacuum system to can definitely guaranteeing not have atmosphere when opening vacuum system, be in the coater, equally, when stopping Pumpman and do, electromagnet outage armature loses constraint, at this moment rapidly flap (2) is pressed to valve body (1) at the rebound effect of preloading spring (7), sealing surface sealing vacuum system is the coater cavity, this is afterwards owing to there is one section time-delay gap between strip hole on the armature and the pin, the effect that retracts at prestretching spring (4) makes armature continue to move right, the valve rod of drain tap is left in the armature groove and on move pressure spring (13) and open outlet valve, order valve body (1) communicates with ambient atmosphere in the chamber, and ambient atmosphere is inflated in vacuum pump to prevent that the pump steam in oil from entering in the vacuum system passage.Present embodiment electromagnetism partition/gas charging valve is by the coordination of delay inequality actuation mechanism like this, pump is sealed vacuum system earlier when quitting work, and then open outlet valve and in vacuum pump, inflate, when primer pump is worked, then earlier with exhaust valve closure and extract atmosphere in the vacuum pump out, and then open vacuum system and vacuumize operation, just can not only the assurance vacuum pump not returned oil to vacuum system in termination of pumping or outage, again can be in termination of pumping, make atmosphere can not enter vacuum system fully reliably when outage and primer pump, thereby also very reliable assurance makes atmosphere oil vapor can not be brought into vacuum system, the workmanship that this has just fundamentally improved vacuum system is greatly improved the performance of vacuum coater.The stable performance of present embodiment electromagnetism partition/gas charging valve, reliable operation, simple in structure, easy to manufacture, can be applied in the field widely.
Outlet valve also can adopt needle valve structure in the present embodiment.
All and all embodiments same design of the utility model tool all belong within the utility model protection domain.

Claims (4)

1. electromagnetism partition/gas charging valve, valve body by the double straight passage of a tool, the flap that in valve body, matches with sealing surface, serial connection also is pressed in the valve gap between the seam behind electromagnet and the valve body, intert the compositions such as armature in the sleeve behind electromagnet and flap, it is characterized in that: the also additional delay inequality actuation mechanism that is provided with between armature and flap, it consists of behind armature front end and flap sleeve and interts the position mutually and have a strip hole, wherein be interspersed with flap after the pin of sleeve Joint, between armature and flap sleeve, also preset the prestretching spring and be set on the armature front end, also preset between the sleeve in valve body and behind the flap and be coated with preloading spring, be pressed between valve gap and the flap, in circular valve gap body, be disposed radially an exhaust valve component, on the valve gap body at place, valve rod position, have between an axial hole and the valve body chamber on it and form passage, with the armature of corresponding position, outlet valve valve rod place on, also have groove vertically, exhaust valve component is by spring on it, valve rod, the sealing of O type is formed, and its top has through hole and communicates with atmosphere.
2. according to the described electromagnetism partition/gas charging valve of claim 1, valve body (1) by a tool two vertical passages, the flap that in valve body, matches (2) with sealing surface, " O " RunddichtringO (3), be serially connected in the valve gap (15) of usefulness " O " RunddichtringO (10) sealing between the seam of motor magnet (17) and valve body (1) back, through end cap (18) together by screw rod (19) cross-under, and form by interting behind electromagnet (17) and flap the armature (16) in the sleeve etc., it is characterized in that: the also additional delay inequality actuation mechanism that is provided with between armature (16) and flap (2), it consists of at armature front end and the interspersed mutually position of flap sleeve and has a strip hole (5), wherein be interspersed with pin (6) with flap (2) back sleeve Joint, also presetting prestretching spring (4) behind armature (16) and the flap between the sleeve, be set on armature (16) front end, also preset between the sleeve (2) in valve body (1) and behind the flap and be coated with preloading spring (7), be pressed between valve gap (15) and the flap (2), in circular valve gap (15) body, be disposed radially exhaust valve component, have a through hole (9) on the valve gap body at place, its position and form passage with body cavity, with the armature of outlet valve valve rod (11) corresponding position, place on also have groove (8) vertically; Above-mentioned exhaust valve component is made up of spring (13), " O " RunddichtringO (14), valve rod (11), has pore (12) to communicate with atmosphere on the valve.
3. according to claim 1 or 2 described electromagnetism partition/gas charging valves, it is characterized in that: valve body (1) two vertical passage also can be designed to have " V " type channel shape of arbitrary angle.
4. according to claim 1 or 2 described electromagnetism partition/gas charging valves, it is characterized in that: valve body two vertical passage adpting flanges can adopt the Placement of rapid pipe joint, also can adopt the spiral Placement to connect.
CN 99224990 1999-09-03 1999-09-03 Electromagnetic cutting-off/inflating valve Expired - Fee Related CN2392039Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 99224990 CN2392039Y (en) 1999-09-03 1999-09-03 Electromagnetic cutting-off/inflating valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 99224990 CN2392039Y (en) 1999-09-03 1999-09-03 Electromagnetic cutting-off/inflating valve

Publications (1)

Publication Number Publication Date
CN2392039Y true CN2392039Y (en) 2000-08-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 99224990 Expired - Fee Related CN2392039Y (en) 1999-09-03 1999-09-03 Electromagnetic cutting-off/inflating valve

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CN (1) CN2392039Y (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100334375C (en) * 2003-02-11 2007-08-29 张跃 Magnet valve
CN101663523B (en) * 2007-01-22 2011-09-21 Imi韦伯有限公司 Solenoid valve having a two piece moving valve element
CN103413903A (en) * 2013-07-17 2013-11-27 江苏荣联科技发展股份有限公司 Communication storage battery sealing compartment hydrogen discharge apparatus
CN107087934A (en) * 2017-05-17 2017-08-25 王志强 Automatically adjust the Intelligent pillow of temperature
CN107810354A (en) * 2015-06-22 2018-03-16 雀巢产品技术援助有限公司 From charge valve

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100334375C (en) * 2003-02-11 2007-08-29 张跃 Magnet valve
CN101663523B (en) * 2007-01-22 2011-09-21 Imi韦伯有限公司 Solenoid valve having a two piece moving valve element
CN103413903A (en) * 2013-07-17 2013-11-27 江苏荣联科技发展股份有限公司 Communication storage battery sealing compartment hydrogen discharge apparatus
CN103413903B (en) * 2013-07-17 2016-06-22 江苏荣联科技发展股份有限公司 A kind of communication sealed cell cabin row's hydrogen production device
CN107810354A (en) * 2015-06-22 2018-03-16 雀巢产品技术援助有限公司 From charge valve
CN107087934A (en) * 2017-05-17 2017-08-25 王志强 Automatically adjust the Intelligent pillow of temperature
CN107087934B (en) * 2017-05-17 2019-02-15 王志强 Automatically adjust the Intelligent pillow of temperature

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C19 Lapse of patent right due to non-payment of the annual fee
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