CN2335123Y - Laser collimation measurer - Google Patents

Laser collimation measurer Download PDF

Info

Publication number
CN2335123Y
CN2335123Y CN 97250676 CN97250676U CN2335123Y CN 2335123 Y CN2335123 Y CN 2335123Y CN 97250676 CN97250676 CN 97250676 CN 97250676 U CN97250676 U CN 97250676U CN 2335123 Y CN2335123 Y CN 2335123Y
Authority
CN
China
Prior art keywords
laser
circuit
detector
conversion
position sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 97250676
Other languages
Chinese (zh)
Inventor
萧宁华
武长贵
张玉明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WEIDE ELECTRONIC SYSTEM CO Ltd TIANJIN CITY
Original Assignee
WEIDE ELECTRONIC SYSTEM CO Ltd TIANJIN CITY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WEIDE ELECTRONIC SYSTEM CO Ltd TIANJIN CITY filed Critical WEIDE ELECTRONIC SYSTEM CO Ltd TIANJIN CITY
Priority to CN 97250676 priority Critical patent/CN2335123Y/en
Application granted granted Critical
Publication of CN2335123Y publication Critical patent/CN2335123Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model relates to a laser collimation measurer, which is composed of a laser emission part and a laser position sensitive detection part. The emission part is provided with a ga-al-as long distance laser emission tube, and the detection part is provided with a pin-sc silicon photovoltaic effect four axis type position sensitive detector; the photovoltaic signal is connected with a control microcomputer through amplification and A/D conversion, and the measuring value can also be given out by a laser position sensitive detector arithmetic circuit. The utility model has the advantages of simple regulation and measurement of the form and position tolerance of a workpiece with a big size, visualness and convenience and strong anti-interference ability and is suitable for field use in a workshop. A universal microcomputer is used by matching the modularization, and the utility model has a free training type software and good adaptability of a Chinese operation interface.

Description

The laser alignment measurement instrument
The utility model belongs to the laser alignment measurement instrument, and particularly a kind of multi-purpose combined type laser alignment measurement instrument is applicable to the laser alignment measurement instrument of form and position tolerance of actual measurement large-scale part.
At present the domestic production workshop is in the concentricity of measuring large-scale part, linearity, the depth of parallelism, flatness, verticality still continue to use draw steel wire have a holiday or vacation axle, with big leveling ruler, method such as angle square greatly.The method measuring accuracy is undesirable, and it is numerous and diverse, time-consuming to measure operation.Therefore, machine works, especially Heavy Machinery Plant need have practical, simple and direct, high-precision surveying instrument at the scene, workshop.
The purpose of this utility model provides a kind of laser alignment measurement instrument that is used for surveying the form and position tolerance of large-scale part, promptly manufacture and design measuring distance greater than 20M, resolution is better than 1/1000mm's, automatically finish the large-scale part measurements of form and position deviation, and can be at the laser alignment measurement instrument of production scene practicality.Overcome above-mentionedly originally in the concentricity of measuring large-scale part, linearity uses the shortcoming and defect of original instrument and method when the depth of parallelism, flatness, verticality.
The purpose of this utility model is achieved in that
A kind of laser alignment measurement instrument, it is characterized in that: it is made up of Laser emission part and the quick probe portion in laser position, Laser emission partly is that Ga-Al-As length is contained in the four-degree-of-freedom optics The Cloud Terrace apart from LASER Discharge Tube, this The Cloud Terrace is bearing on the floor stand, and the Ga-Al-As LASER Discharge Tube is powered by power supply; The quick probe portion in laser position is contained in receiver by interior dress PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector and inserts in the target core, and it is outer to be insulation sleeve.PIN-SC series silicon photovoltaic effect four axistyle type position sensitive detector, it is made up of four discrete components that branch is located at four item limits, when laser light is radiated at the detector diverse location, can demonstrate two-dimensional coordinate (X, Y have direction to judge) reading; On its photoamplifier circuit installing wiring board thereon; Light/electric signal after the amplification is sent into A/D conversion amplification case via cable 9, and through collection, maintenance, conversion and the output control of its internal circuit, signal send the control MICROCOMPUTER PROCESSING from the 62 core interface outgoing cables output on the amplification case.
Ga-Al-As is long apart from the angle of divergence of LASER Discharge Tube via non-spherical lens optical element compression laser beam, and then do further to expand that bundle--increasing has a large waist with the circular light beam of an inverted telescope after to unidirectional expansion bundle, the angle of divergence is further compressed, promptly used earlier short focal length lens L 1To have a large waist and be W 10Laser beam is focused into to have a large waist and is W 20, use long-focus lens L again 2With W 20Beam expander is W 40The hot spot that has a large waist, the angle of divergence of hot spot is further compressed, and reaches the collimation of laser beam.
The power control circuit of generating laser is by power transformer, mu balanced circuit, reduction voltage circuit is exported the working power of (2.8-3.0V) direct current as Ga-Al-As semiconductor laser power valve from filtering and holding circuit, is the anti-interference measure of also multicore copper shield cable having been adopted both-end ground connection; Detector circuit is a PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector, after it receives laser signal, by converter amplifier circuit and virtual subtraction circuit, signal is transferred to A/D conversion and control circuit, the plus earth of detector by four road light that are complementary; Photo-translating system is the direct alignment detector of light beam that is sent by generating laser, photosignal is transferred to A/D conversion and control circuit to signal by the photo-translating system circuit by cable, and A/D conversion and control circuit are by adopting double integration circuit, it places in the A/D boxcar, after it obtains the electric signal of detector, input control circuit, holding circuit, the A/D change-over circuit, output control circuit is sent into microcomputer memory through 62 core cable interfaces, through processes and displays or printout result.Detector circuit is a PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector, after it receives laser signal, by four road light converter amplifier circuits and the virtual subtraction circuit that is complementary, signal is transferred to A/D conversion and control circuit, the plus earth of detector.
Measured value also can be provided by laser position sensitive detector computing circuit.
The utility model has the advantages that:
Use the utility model laser collimator, to the large-size workpiece form and position tolerance measure, adjust accomplish simple, intuitive and convenient, antijamming capability is strong, is fit to that the workshop is on-the-spot uses.And select universal microcomputer for use, and be equipped with modularization, exempt from training type software, the Chinesizing operation interface, adaptability is good.
Below in conjunction with description of drawings embodiment:
Fig. 1 is a laser alignment measurement instrument synoptic diagram
Fig. 2 is the beam of laser synoptic diagram
Fig. 3 is the long a branch of smooth synoptic diagram that sends apart from LASER Discharge Tube of Ga-Al-As
Fig. 4 is the optical beam path figure that the laser that LASER Discharge Tube is sent is collimated and handles
Fig. 5 is a laser alignment measurement instrument laser position sensitive detector phantom view
Fig. 6 is a LASER Discharge Tube power supply block diagram
Fig. 7 is a laser position sensitive detector photoamplifier circuit block diagram
Fig. 8 is the photo-translating system block diagram
Fig. 9 is A/D conversion, control circuit block diagram
Figure 10 is laser position sensitive detector computing circuit figure
With solid semiconductor generating laser and laser detector sensor as this surveying instrument; Drive the computer programming software systems with photoelectron A/D converter amplifier circuit, realize that finishing surveying work automatically is core of the present utility model.Because laser has concentration of energy, the rectangular tropism of operating distance is good, has opened up new way for the alignment measurement of large-scale part with it as linear datum, and this is a novelty of the present utility model.
The LASER Discharge Tube of using in the utility model is the Ga-Al-As semiconductor diode, red visible light, and two kinds of specifications of operating distance 20M, 40M are crucial optoelectronic devices of directed exploitation.The laser detector that uses in the utility model is PIN-SC series silicon photovoltaic effect diode, and it is made up of four discrete components, when laser light is radiated at the detector diverse location, can demonstrate two-dimensional coordinate (X, Y have direction to judge) reading; When laser spot was radiated at the center, displayed value was O (0,0).The zeroing in Here it is the utility model and the hardware supported of centering technology.The laser detector of this two-dimensional coordinate reading only senses the center of energy of laser facula and the size and the shape of hot spot has nothing to do.The 3rd characteristics of PIN-SC silicon photovoltaic effect position sensitive detector of using in the utility model are on 90% useful area, keep 99.9% absolute precision, it only is subjected to the restriction of light spot position and A/D conversion driving amplifying circuit enlargement ratio as the position sensing precision of analog quantity device.In the utility model, A/D conversion driving amplifying circuit enlargement ratio has been designed to the corresponding output voltage>10mV of 0.01mm, and then the precision of this instrument can reach 0.001mm (1 μ m).
Figure 2 shows that the beam of laser that LASER Discharge Tube is sent, the amplitude of light is a special surface in the air, and its amplitude is by Gauss's index variation, so be Gaussian beam.The minimum cross section W of light beam makes have a large waist (or waist bundle), 2 θ make the angle of divergence, θ be divergence half-angle.
For further specifying the structure of LASER Discharge Tube, the semiconductor laser light-emitting component is done especially big amplification be illustrated in Fig. 3, because luminous optical aperture is a minimum narrow slit, see diagram, stitch high d ≈ 2 μ m and stitch wide b ≈ 500 μ m, light-emitting area A=db=0.0001mm, the kernel size of this semiconductor devices P-N is very little because of cavity mirror when luminous, and influenced the directivity of Fang Shu, θ that provides among Fig. 2 and 2 θ should provide one-vertical direction angle of divergence on the θ, θ ∥ in Fig. 3--the horizontal direction angle of divergence, θ is last to differ far away with θ ∥, so the angle of divergence of semiconductor laser beam is bigger, apart from collimated light source usefulness, must compress the angle of divergence of laser beam as long.
The collimation of laser beam in the design, because of the laser alignment measurement distance is a 20-40 rice, need further improve its directivity, promptly needs to compress the angle of divergence of laser beam.The concrete practice
1, with 2 θ ⊥=50 °~80 °
The laser beam of 2 θ ∥=16 °~24 ° is made unidirectional expansion bundle, makes 2 θ ⊥=2 θ ∥ become circular light spot, and optical element is a non-spherical lens.The special topic exploitation.
2 and then do further to expand that bundle--the increasing that has a large waist is further compressed the angle of divergence with the circular light beam of an inverted telescope after to unidirectional expansion bundle.Use earlier short focal length lens L 1To have a large waist and be W 10Laser beam is focused into to have a large waist and is W 20Shown in Figure 4.Use long-focus lens L again 2With W 20Beam expander is W 40The hot spot that the has a large waist angle of divergence of hot spot is at this moment further compressed.
The theoretical foundation of collimation principle: among Fig. 4 be in laser-beam divergence angle, W place expression formula:
2 θ 0 = 2 λ π W 10 Band reduces θ 0Then at λ, π, 2 when being constant, has only the expansion of laser light thick W that girdles the waist 10Area, above design is just meeting this principle.
Fig. 5 represents the laser pickoff structure
51 is laser pickoff, be contained in the receiver plug-in type target core 52,53 is insulation sleeve, photoamplifier circuit (Fig. 7) is installed on the wiring board 54, the photovoltaic signal induces one amplifying circuit after amplifying, cause in the aviation plug 55 with electric wire, cause Control System of Microcomputer with electric wire (seeing part Fig. 1-9, center line calibration synoptic diagram).
The technical solution of the utility model is to become basic configuration (for the general part of laser alignment measurement instrument) by the multi-usage composite design, also has multiple option in addition.The two-part reasonable combination of basic configuration and option can constitute complete, a multiduty laser alignment measurement instrument.
The also available accompanying drawing of the technical solution of the utility model is done concrete more detailed elaboration.Its main building block of the utility model as shown in Figure 1,1 is generating laser among the figure, makes plug-in type target core, at the target in-core Ga-Al-As LASER Discharge Tube 2 is housed, by power supply 3 power supply.4 is four-degree-of-freedom optics The Cloud Terraces among the figure, this The Cloud Terrace is bearing in again on the floor stand 5,1,2,3,4,5 complete units are set, draw reference line 13 with regard to recoverable,, just can make actual measurement the form and position tolerance that is adjusted object 14 in case reference line is set up, only need this moment laser detector target core 6 is supported on by on the accent object 14 corresponding reference points, just can read the deviation of X, Y both direction at once, the limit is adjusted, and review till qualified on the limit.The laser detector target core 6 that Fig. 1 shows, interior dress PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector 7 and light amplification circuit 8, light/electric signal after the amplification is sent into A/D conversion amplification case 10 via cable 9, collection, maintenance, conversion and output control through its internal circuit, signal links with control microcomputer 12 from 62 core interface outgoing cables 11 on the amplification case 10, also finishes measurement automatically by the work of software control microcomputer.Control and the multiple functional software systems support operation that is complementary with technological requirement of operational design one cover in order to use microcomputer, microcomputer can detect deviation and adjustment amount automatically, on computer screen with Chinese character, graphic presentation, real-time numeric literal explanation is convenient to Chinese and is used.The correction of reference line 13 among Fig. 1 is to pass through O 1-O 2-O 3Three point on a straight line draws, and its method of operating illustrates with Fig. 4.
Fig. 6 is the power control circuit figure of generating laser.Power transformer 31 among Fig. 6; mu balanced circuit 32; reduction voltage circuit 33 is exported the working power of 2.8-3.0V direct currents as Ga-Al-As semiconductor laser power valve from filtering and holding circuit 34, is the anti-interference measure of also multicore copper shield cable having been adopted both-end ground connection.
Fig. 7 is the detector circuit block diagram, part 7 among Fig. 7 is PIN-SC silicon photovoltaic effect four axistyle type position sensitive detectors, after it receives laser signal, by four road light converter amplifier circuits 35 and the virtual subtraction circuit 36 that is complementary, signal is transferred to A/D conversion and control circuit, the plus earth of detector.
Fig. 8 is the photo-translating system block diagram, the direct alignment detector 7 of the light beam that generating laser 2 sends among Fig. 8, photosignal is transferred to A/D conversion and control circuit 38 to signal by photo-translating system circuit 37 by cable 43, keep, change, control signal input microcomputer 40 through over-sampling by 62 cable interfaces 39, through the computer programming software processes, consequence shown on display 41 or by printer 42 printouts.
Fig. 9 is A/D conversion and control circuit block diagram, A/D adopts double integration circuit, it places in the A/D boxcar, after it obtains the electric signal of detector, input control circuit 43, holding circuit 44, A/D change-over circuit 45, output control circuit 46 is sent into microcomputer memory through 62 core cable interfaces 39, through processes and displays or printout result.
Figure 10 is laser position sensitive detector computing circuit figure
Owing to implemented above every technical scheme, selected for use Ga-Al-As long apart from generating laser, PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector and performance are highly stable.It is anti-interference that to hold together strong major measure be to have adopted biproduct somatotype circuit, and transmitter two ends circuit ground measure, the special exploitation of LASER Discharge Tube, spot diameter is that Φ 3mm-Φ 4mm is shaped as circle, operating distance reaches 20-40M, resolution reaches the multiple precision optics annex of the special exploitation of 1/1000mm, adopt the utility model laser collimator, to the large-size workpiece form and position tolerance measure adjust accomplish simple, intuitive and convenient, be fit to the on-the-spot fine measuring instrument that uses in workshop, and select universal microcomputer for use, and be equipped with modularization, exempt from training type software, the Chinesizing operation interface has reached the purpose of utility model fully.

Claims (4)

1, a kind of laser alignment measurement instrument, it is characterized in that: it is made up of Laser emission part and the quick probe portion in laser position, Laser emission partly is that Ga-Al-As is long apart from LASER Discharge Tube, be contained in the four-degree-of-freedom optics The Cloud Terrace, this The Cloud Terrace is bearing in again on the floor stand, and the Ga-Al-As LASER Discharge Tube is powered by power supply; The quick probe portion in laser position is contained in receiver by interior dress PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector and inserts in the target core, and it is outer to be insulation sleeve; PIN-SC series silicon photovoltaic effect four axistyle type position sensitive detector, it is made up of four discrete components that branch is located at four item limits, when laser light is radiated at the detector diverse location, can demonstrate two-dimensional coordinate (X, Y have direction to judge) reading; On its photoamplifier circuit installing wiring board thereon; Light/electric signal after the amplification is sent into A/D conversion amplification case via cable 9, and through collection, maintenance, conversion and the output control of its internal circuit, signal links with the control microcomputer from 62 core interface outgoing cables 1 on the amplification case.
2, laser alignment measurement instrument according to claim 1, it is characterized in that: the long non-spherical lens optical element of Ga-Al-As apart from the angle of divergence of establishing the compression laser beam before the LASER Discharge Tube, and then by an inverted telescope, circular light beam behind the unidirectional expansion bundle is done further to expand to restraint--increasing has a large waist, the angle of divergence is further compressed, promptly used earlier short focal length lens L 1To have a large waist and be W 10Laser beam is focused into to have a large waist and is W 20, use long-focus lens L again 2With W 20Beam expander is W 40The hot spot that has a large waist, the angle of divergence of hot spot is further compressed, and reaches the collimation of laser beam.
3, laser alignment measurement instrument according to claim 1, it is characterized in that: the power control circuit of generating laser is by power transformer, mu balanced circuit, reduction voltage circuit, export the working power of 2.8-3.0V direct current from filtering and holding circuit, be the anti-interference measure of also multicore copper shield cable having been adopted both-end ground connection as Ga-Al-As semiconductor laser power valve; Detector circuit is a PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector, after it receives laser signal, by four road light converter amplifier circuits and the virtual subtraction circuit that is complementary, signal is transferred to A/D conversion and control circuit, the plus earth of detector; Photo-translating system is the direct alignment detector of light beam that is sent by generating laser, photosignal is transferred to A/D conversion and control circuit to signal by the photo-translating system circuit by cable, and A/D conversion and control circuit are by adopting double integration circuit, it places in the A/D boxcar, after it obtains the electric signal of detector, input control circuit, holding circuit, the A/D change-over circuit, output control circuit is sent into microcomputer memory through 62 core cable interfaces, through processes and displays or printout result; Detector circuit is a PIN-SC silicon photovoltaic effect four axistyle type position sensitive detector, after it receives laser signal, by four road light converter amplifier circuits and the virtual subtraction circuit that is complementary, signal is transferred to A/D conversion and control circuit, the plus earth of detector.
4, laser alignment measurement instrument according to claim 1 is characterized in that: measured value also can be provided by laser position sensitive detector computing circuit.
CN 97250676 1997-08-18 1997-08-18 Laser collimation measurer Expired - Fee Related CN2335123Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 97250676 CN2335123Y (en) 1997-08-18 1997-08-18 Laser collimation measurer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 97250676 CN2335123Y (en) 1997-08-18 1997-08-18 Laser collimation measurer

Publications (1)

Publication Number Publication Date
CN2335123Y true CN2335123Y (en) 1999-08-25

Family

ID=33957179

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 97250676 Expired - Fee Related CN2335123Y (en) 1997-08-18 1997-08-18 Laser collimation measurer

Country Status (1)

Country Link
CN (1) CN2335123Y (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102692187A (en) * 2011-03-21 2012-09-26 上海微电子装备有限公司 Laser beam deviation measuring device and method
CN104634283A (en) * 2015-02-06 2015-05-20 浙江理工大学 Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection
CN108592828A (en) * 2018-06-29 2018-09-28 南京理工大学 Photoelectric sensor deep hole axiality detection device and its detection method
CN109290758A (en) * 2018-09-30 2019-02-01 成都南方电子仪表有限公司 A kind of position centering method based on laser collimator detection
CN114839730A (en) * 2022-04-26 2022-08-02 珠海光库科技股份有限公司 Emergent mode field measuring device and method of optical chip

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102692187A (en) * 2011-03-21 2012-09-26 上海微电子装备有限公司 Laser beam deviation measuring device and method
CN102692187B (en) * 2011-03-21 2016-02-03 上海微电子装备有限公司 A kind of laser displacement measuring method
CN104634283A (en) * 2015-02-06 2015-05-20 浙江理工大学 Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection
CN104634283B (en) * 2015-02-06 2017-05-03 浙江理工大学 Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection
CN108592828A (en) * 2018-06-29 2018-09-28 南京理工大学 Photoelectric sensor deep hole axiality detection device and its detection method
CN109290758A (en) * 2018-09-30 2019-02-01 成都南方电子仪表有限公司 A kind of position centering method based on laser collimator detection
CN114839730A (en) * 2022-04-26 2022-08-02 珠海光库科技股份有限公司 Emergent mode field measuring device and method of optical chip

Similar Documents

Publication Publication Date Title
CN2884141Y (en) Laser, six freedom simultaneous measuring apparatus
CN211740141U (en) Laser profile detection system with optical navigation function
CN207180619U (en) Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation
CN202372164U (en) Photoelectric load multi-optical-axis space angle precision calibrating device
CN105737735B (en) Portable self calibration end effector repetitive positioning accuracy measuring device and method
CN106323199A (en) Combination zeroing laser large working distance auto-collimation device and method
CN103868476A (en) Photoelectric nondestructive testing-based tube inner hole straightness automatic test system and test method
CN101063607A (en) Device for detecting deformation of accurate measuring systems for synthesis ship gesture
CN2335123Y (en) Laser collimation measurer
Zhang et al. Summary on calibration method of line-structured light sensor
CN108592829A (en) A kind of measuring device and method of non-cpntact measurement deep hole inside surface roughness
CN108286997B (en) Laser tracking measurement system and method
CN110501576A (en) A kind of rectangular co-ordinate scanning support system and stitching measure method
CN106225730B (en) The big working distance autocollimation of portable combined zeroing high-precision laser and method
CN211072866U (en) Take receiving and dispatching split type five degree of freedom measuring device of light path drift compensation
CN110500966A (en) A kind of six degree of freedom precision measurement system for the measurement of force structure miniature deformation
CN106247992A (en) A kind of high accuracy, wide scope and big working distance autocollimation and method
CN105806217A (en) Single pull thread type measuring system and method for object space position measurement
CN106323198A (en) High precision, wide range and large working distance laser auto-collimation device and method
CN116105638A (en) U-shaped turntable coaxiality detection system and detection method
CN106323197A (en) Portable array zeroing high precision laser large working distance auto-collimation device and method
CN106017441A (en) Portable high-precision laser long-working distance auto-collimation apparatus and method thereof
CN108534699B (en) Laser light curtain target distance accurate measurement device and measurement method
CN2148311Y (en) Surface microscopic appearance superprecision laser probe
Bosnyakov et al. Blade deformation and PSP measurements on the large scale rotor by videometric system

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee