CN2257823Y - Chemical gaseous phase deposition furnace with eccentric inlet - Google Patents
Chemical gaseous phase deposition furnace with eccentric inlet Download PDFInfo
- Publication number
- CN2257823Y CN2257823Y CN 96225269 CN96225269U CN2257823Y CN 2257823 Y CN2257823 Y CN 2257823Y CN 96225269 CN96225269 CN 96225269 CN 96225269 U CN96225269 U CN 96225269U CN 2257823 Y CN2257823 Y CN 2257823Y
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- CN
- China
- Prior art keywords
- eccentric
- inlet
- pbn
- gaseous phase
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a chemical gaseous phase deposition furnace with an eccentric inlet, which is composed of a furnace body, a gas inlet, a core mould, a heating body, a gas outlet, etc. The gas outlet is arranged at the central position of the top of the furnace body or the central position of the bottom of the furnace body. The utility model is characterized in that the gas inlet is arranged at the opposite eccentric position of the gas outlet. The utility model can deposit out large size PBN copple, and the wall thickness of the PBN copple is more uniform.
Description
The utility model relates to chemical vapour deposition technique, and a kind of chemical vapor deposition stove of eccentric air inlet is provided especially.
No matter the chemical vapor deposition stove that uses is that medium-frequency induction furnace or carbon tube furnace all are two center, garden air inlets with one heart at present, the blending dispersion method, (or standing on the universal stage) hung in matrix (mould) centre in stove, manual or rotation automatically.This method makes the thickness evenness of crucible on garden week or horizontal direction that good improvement be arranged, but differs still very big in the short transverse wall thickness.Simultaneously, thus since the carbon tube furnace type of heating to be that 220 volts of single phase poaer supplies use in many instances very inconvenient.Because play destruction by pulling out the balance of single-phase Bi Ran to electrical network in the three phase network, this makes the electrical equipment facility increase again otherwise will add transformer in addition, and facility investment strengthens.
The purpose of this utility model provides a kind of eccentric air inlet chemical vapor deposition stove, with PBN crucible wall thickness that it deposited more evenly and use convenient.
The utility model provides a kind of eccentric air inlet chemical vapor deposition stove, by body of heater 1, inlet mouth 2, core 3, heating element 4, air outlet 5 grades are partly formed, and air outlet 5 is arranged at body of heater top center position or bottom centre position, it is characterized in that: inlet mouth 2 is arranged at the eccentric position relative with air outlet 5.Heating element 4 connects for three-phase electricity.Inlet mouth is a concentric(al) circles, also can be the radial slit shape, also can be hyperchannel.The utility model such as hot mode adopt three-phase electricity, non-central air inlet, and matrix rotates in stove continuously.Adopting the benefit of three-phase supply is easy-to-connect, helps the balance of electrical network, and temperature is also more stable in the stove.To adopt the air inlet of non-central place to improve centre, big crucible bottom settled layer thick partially apparent in viewly, the shortcoming that crucible upper wall periphery is thin excessively.It is bigger to produce diameter with this design and technology, and height is than the thick crucible uniformly of longwell.It is too thick to improve former crucible bottom greatly, and the thin excessively defective of crucible opening end end wall has improved the crucible quality, and crucible work-ing life.By embodiment in detail the utility model is described in detail below in conjunction with accompanying drawing.
Accompanying drawing 1 bottom eccentric air inlet chemical vapor carbon deposition pipe furnace.
Accompanying drawing 2 tops eccentric air inlet chemical vapor carbon deposition pipe furnace.
The eccentric air inlet chemical vapour deposition in accompanying drawing 3 tops induction furnace.
Embodiment 1
Structure as described in Figure 1, the eccentric air inlet in bottom at first is placed on mould in the scope of high temperature soaking zone when preparation diameter phi 186mm major diameter crucible, 1800 ℃ of temperature, furnace pressure remains on 1mmHg, feeds BCl
3And NH
3Gas mixture, insulation for some time, special after forming the thick PBN thin layer of 0.8～1.2mm on the graphite jig surface, can have a power failure is cooled to room temperature, and the PBN thin layer is promptly obtained the big crucible of PBN by taking off on the mould.
As shown in Figure 2, adopt the carbon tube furnace of the eccentric air inlet in top, the mould that will be made by three high graphite is hung or is stood in the carbon tube furnace heating zone, 1900 ℃ of temperature, and furnace pressure 2mmHg feeds following gas, N
26 liters/minute, NH
30.8 liter/minute, BCl
30.55 liter/minute, on the graphite core, forming the thick PBN thin layer of 0.8～1mm through 16 hours, the back of coming out of the stove promptly obtains the big crucible of PBN of φ 186mm by on the core PBN being taken off.
As shown in Figure 3, pyrotoxin is a ruhmkorff coil, will be placed stove, temperature to be heated to 1850 ℃ by the mould (core) that graphite is made, and feeds N
27 liters/minute, NH
31.2 liter/minute, BCl
30.8 liter/minute furnace pressure remains on 2mmHg, is incubated 20 hours, forms the thick PBN thin layer of 0.8～1.2mm on core, cools to room temperature with the furnace, can come out of the stove, and through the demoulding, obtains the big crucible of PBN of φ 186mm.
Claims (3)
1. eccentric air inlet chemical vapor deposition stove, by body of heater (1), inlet mouth (2), core (3), heating element (4), part such as air outlet (5) is formed, and air outlet (5) are arranged at body of heater (1) top center position or bottom centre position, it is characterized in that: inlet mouth (2) is arranged at and the relative eccentric position in air outlet (5).
2. by the described chemical vapor deposition stove of claim 1, it is characterized in that: heating element (4) connects for three-phase electricity.
3. by claim 1 or 2 described chemical vapor deposition stoves, it is characterized in that inlet mouth (2) is slit-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96225269 CN2257823Y (en) | 1996-01-29 | 1996-01-29 | Chemical gaseous phase deposition furnace with eccentric inlet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96225269 CN2257823Y (en) | 1996-01-29 | 1996-01-29 | Chemical gaseous phase deposition furnace with eccentric inlet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2257823Y true CN2257823Y (en) | 1997-07-16 |
Family
ID=33903993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96225269 Expired - Fee Related CN2257823Y (en) | 1996-01-29 | 1996-01-29 | Chemical gaseous phase deposition furnace with eccentric inlet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2257823Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1955338B (en) * | 2005-10-06 | 2010-12-01 | 东京毅力科创株式会社 | Vaporizer and semiconductor processing system |
| WO2011060621A1 (en) * | 2009-11-20 | 2011-05-26 | 中南大学 | Process and device for improving properties of carbon paper with chemical vapor infiltration coating quickly applied by pressure-gradient method |
-
1996
- 1996-01-29 CN CN 96225269 patent/CN2257823Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1955338B (en) * | 2005-10-06 | 2010-12-01 | 东京毅力科创株式会社 | Vaporizer and semiconductor processing system |
| WO2011060621A1 (en) * | 2009-11-20 | 2011-05-26 | 中南大学 | Process and device for improving properties of carbon paper with chemical vapor infiltration coating quickly applied by pressure-gradient method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |