CN2238435Y

CN2238435Y - Fluorescence microscope

Info

Publication number: CN2238435Y
Application number: CN 94215339
Authority: CN
Inventors: 王仲明
Original assignee: Individual
Current assignee: Individual
Priority date: 1994-07-12
Filing date: 1994-07-12
Publication date: 1996-10-23
Anticipated expiration: 2004-07-12

Abstract

The utility model relates to a fluorescence microscope which belongs to the field of an optical testing instrument and especially belongs to the field of the semiconductor optoelectronics detecting technique. The utility model comprises a refrigerator, a fluorescence microscope and a detecting system. The fluorescence of a sample frozen to 77 K can be observed via the objective lens of a general optical microscope through the utility model. Liquid nitrogen is filled in a housing of the refrigerator, and heat sink is dipped in the liquid nitrogen; the sample to be detected is positioned on the heat sink; a big and a small covers are orderly lapped on the top part of the housing, holes are arranged in the middle parts of the covers, and the covers can move relatively. Cameras with different wave length are used for detecting the fluorescence of materials with the wave length ranging from 650 nm to 1900 nm. The utility model has the advantages of high space resolution for observing the defects in epitaxial layers and lattice imperfection., rapid detecting speed and no breakage. The utility model can be used for observing the epitaxial layers with large area and is particularly suitable for analyzing and controlling daily process courses.

Description

The light fluorescent microscope

The utility model is a kind of smooth fluorescent microscope, relates to optical instrument field, particularly the semi-conductor photoelectronic technology detecting instrument.

At present, adopting the ultra-thin heterogenous junction epitaxy layer of large tracts of land III-V family semiconducting compound of molecular beam epitaxy (MBE) and organometallic vapour phase epitaxy (MOVPE) technology growth and the double-heterostructure of quantum well structure and liquid phase epitaxy (LPE) growth is modern optoelectronic devices, wave device and integrated key thereof.But to the control of this crystalloid growth course and crystal mass assess that detection with microdefect is still waiting to solve in the world at present and perfect.There are such four kinds of methods to determine defective and incomplete character of crystal and distribution in substrate and epitaxial loayer in the prior art, (1) chemical corrosion method, be used for disclosing and judging different defectives, but the method is destructive, and to require the minimum bed thickness of sample be 0.3 micron.(2) optical means can be used for carrying out the research of large tracts of land sample, and can be used as daily material analysis work, so the pattern of common light fluorescence just is used to determine the quality and the homogeneity of substrate and epitaxial loayer, but this smooth fluorescence pattern since its spatial resolution low (greater than 10 microns) so can not be used for the detection microdefect.(3) the light fluorescence pattern of microcell also once was used for obtaining the defective of gallium arsenide/potassium arsenic aluminate quantum well structure and the misfit dislocation in the indium gallium arsenic/gallium arsenic stress quantum well structure, and still visual size restrictions is below 100 microns, and quality is good inadequately.(4) transmission electron microscope and cathode-luminescence also are defective and the incomplete instruments of crystal that is used for determining extremely thin epitaxial loayer, but it is not suitable for the scanning large tracts of land, and this external pelivimetry is that preparing very of sample taken time, and equipment is very expensive.

The utility model is in order to overcome above-mentioned deficiency, and provides a kind of measurement epitaxial loayer and quantum well structure defective and the incomplete spatial resolution of lattice up to 1 μ m; Measure quick and nondestructive; Can carry out the observation of large tracts of land epitaxial loayer, be specially adapted to simple in structure, the efficient and cheap light fluorescent microscope of forming by refrigerator, fluorescent microscope and detection system of the control of daily technological process and analysis.

Concrete technical scheme of the present utility model is: this light fluorescent microscope comprises refrigerator, fluorescent microscope and detection system.The light that sends from light source is selected the short wavelength by exciter filter exciting light is focused refrigeration to the sample of 77K by micro objective, the fluorescence of sample passes through the micro objective imaging on stylus, be blocked optical filter from the next exciting light of sample reflection and stop, thereby on stylus, only obtain the image of fluorescence.Dress liquid nitrogen in the housing of refrigerator, be soaked with heat sink in the liquid nitrogen, sample be placed on heat sink above, case top stacks large and small two lids that the centre is with holes of surface smoothing successively, large and small lid can slide relatively, the aperture of big lid adds the diameter of micro objective greater than sample, and the aperture of tegillum is a bit larger tham the diameter of micro objective.Be equipped with in the fluorescent microscope and excite and barrier filter, exciter filter is the long wave cut-off function optical filter, and barrier filter is peak wavelength spike interference filter identical with the fluorescent wavelength or shortwave cutoff filter.Use the fluorescent wavelength ranges of suitable stylus detecting material to be 650nm-1900nm.

The characteristics of this utility model are: the incomplete spatial resolution height of (1) epitaxial loayer defective and lattice (can reach 1 μ m) (2) is measured quick and non-destruction, (3) can carry out the observation of large tracts of land epitaxial loayer, be specially adapted to the control and the analysis of daily technological process, (4) it is simple all not have like product (5) system architecture both at home and abroad, efficient and cheap.

Fig. 1 is the one-piece construction synoptic diagram of light fluorescent microscope.

Below in conjunction with accompanying drawing the utility model is described in detail.

This smooth fluorescent microscope comprises refrigerator, fluorescent microscope and detection system, in the housing 1 of refrigerator liquid nitrogen 2 is housed, be soaked with heat sink 3 in the liquid nitrogen, sample 4 be placed on heat sink above, case top stacks the big of surface smoothing successively, the lid 5 of little two centres with holes 7,6, greatly, small lid can be slided relatively, the aperture of big lid adds the diameter of micro objective 11 greater than sample size, the aperture 7 of tegillum is a bit larger tham the diameter of micro objective, the material of housing is metal Dewar bottle or glass Dewar flask or other thermal insulation material, heat sink material is red copper or other highly heat-conductive material, greatly, the material of small lid is organic glass or other transparent thermal insulation material, exciter filter 9 and barrier filter 13 are housed in the fluorescent microscope, exciter filter is the long wave cut-off function optical filter, and barrier filter is peak wavelength spike interference filter identical with the fluorescent wavelength or shortwave cutoff filter.During use, the light that sends from light source 8 and condenser system thereof is selected short wavelength's part through exciter filter, focus on the sample by micro objective through half-reflecting mirror 10, the fluorescence that is inspired on the sample is being presented on the monitor 17 through presentation manager 15 on the stylus 14 by the micro objective imaging, and available IMAGE REPRODUCTION device 16 obtains fluorescent image, microscope ocular 12 is used for observation sample surface and adjust the focusing of object lens, remove barrier filter and add suitable attenuator, also can obtain the image of sample surfaces from monitor and IMAGE REPRODUCTION device.Refrigerator is placed on the three-dimensional movable platform 18, during work, liquid nitrogen constantly evaporates nitrogen, dry nitrogen is full of around sample and the micro objective, therefore do not have the steam frosting on microscope and the sample, so that can survey the sample of refrigeration with the simple microscope object lens to 77K, the enlargement factor that changes micro objective can be adjusted the size of visual field, big lid 5 can move can seek the sample measured position and adjust and focus on three-dimensional movable platform, change and to excite with the combination of barrier filter and use the stylus of suitable wavelength response, can measure the fluorescent image of wavelength coverage from the sample of 650nm-1990nm.

The utility model is specially adapted to the control and the analysis of daily technological process.

Claims

1, a kind of smooth fluorescent microscope comprises fluorescent microscope and detection system; Form by light source and condenser system, exciter filter, half-reflecting mirror, microcobjective, objective table, barrier filter and stylus, it is characterized in that refrigerator in addition, this refrigerator places on the objective table, in its housing liquid nitrogen is housed, be soaked with heat sink in the liquid nitrogen, case top stacks large and small two centres lid that can slide relatively with holes of surface smoothing, the aperture of big lid is greater than sample size and microcobjective diameter sum, the aperture of tegillum is greater than the diameter of microcobjective, and big lid links with objective table.

2, according to the described microscope of claim 1, it is characterized in that described exciter filter is the long wave optical filter, barrier filter is peak wavelength spike interference filter identical with the fluorescent wavelength or shortwave cutoff filter.