CN221369269U - Quick multi-degree-of-freedom deviation correcting mechanism - Google Patents
Quick multi-degree-of-freedom deviation correcting mechanism Download PDFInfo
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- CN221369269U CN221369269U CN202322982802.4U CN202322982802U CN221369269U CN 221369269 U CN221369269 U CN 221369269U CN 202322982802 U CN202322982802 U CN 202322982802U CN 221369269 U CN221369269 U CN 221369269U
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Abstract
The utility model relates to a quick multi-degree-of-freedom deviation correcting mechanism which comprises a mechanism bottom plate, a deviation correcting unit, a Y-direction camera unit, an X-direction camera unit and a grabbing unit, wherein the deviation correcting unit is arranged on the mechanism bottom plate, the Y-direction camera unit is arranged on the mechanism bottom plate on one side of the deviation correcting unit along the negative direction of a Y axis, the X-direction camera unit is arranged on the mechanism bottom plate on one side of the deviation correcting unit along the negative direction of the X axis, and the grabbing unit is arranged above the deviation correcting unit. According to the utility model, through the matched use of the material grabbing clamping claw cylinder, the deviation correcting positioning clamping claw cylinder and the deviation correcting positioning table, the material can be well matched to correct deviation in a plurality of angles after being positioned on the deviation correcting positioning table, and feeding and discharging before and after deviation correction are convenient.
Description
Technical Field
The utility model relates to the technical field related to semiconductor processing, in particular to a quick multi-degree-of-freedom deviation correcting mechanism.
Background
In the semiconductor industry, there is a need for performing multiple degrees of freedom precise positioning and correction of a component when carrying and processing a tiny component.
Through mass search, the prior art publication number is CN218039141U, a semiconductor element multi-degree-of-freedom positioning mechanism is disclosed, which comprises a fixed bottom plate, a correction mechanism, an X-direction correction camera module, a Z-direction correction camera module and a Y-direction correction camera module, wherein the correction mechanism, the X-direction correction camera module, the Z-direction correction camera module and the Y-direction correction camera module are all installed on the fixed bottom plate, the X-direction correction camera module is positioned at one side of the correction mechanism along the negative direction of the Y-axis, the Z-direction correction camera module is positioned at the position right above the correction mechanism, and the Y-direction correction camera module is positioned at one side of the correction mechanism along the negative direction of the X-axis. According to the utility model, through the cooperative coordination of the correction mechanism, the X-direction correction camera module, the Z-direction correction camera module and the Y-direction correction camera module, accurate six-degree-of-freedom correction positioning of the micro component in a micro space can be performed under the control of visual positioning in three directions.
In summary, the problems in the prior art are:
in the use process of the positioning mechanism in the prior art, materials are placed and positioned on the correction adsorption base through the external carrying mechanism, so that the materials cannot be well matched to correct the correction on a plurality of angles after being positioned on the correction adsorption base, and feeding and discharging before and after correction are inconvenient.
In view of the above-mentioned drawbacks, the present inventors have actively studied and innovated to create a fast multi-degree-of-freedom deviation correcting mechanism, which has more industrial utility value.
Disclosure of utility model
In order to solve the technical problems, the utility model aims to provide a quick multi-degree-of-freedom deviation correcting mechanism.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
The quick multi-degree-of-freedom deviation correcting mechanism comprises a mechanism bottom plate, a deviation correcting unit, a Y-direction camera unit, an X-direction camera unit and a grabbing unit, wherein the deviation correcting unit is arranged on the mechanism bottom plate;
The correcting unit comprises a correcting bottom plate, a correcting positioning table and a correcting positioning clamping jaw cylinder, a correcting movement module on the correcting bottom plate is connected with the correcting positioning table above, the correcting positioning clamping jaw cylinder is arranged on one side of the correcting positioning table along the positive direction of the Y axis, a correcting positioning fixed clamping jaw is arranged in the correcting positioning table, a correcting positioning movable clamping jaw on the correcting positioning clamping jaw cylinder is mutually matched with the correcting positioning fixed clamping jaw, and the correcting positioning fixed clamping jaw and the correcting positioning movable clamping jaw are sequentially arranged along the positive direction of the X axis;
The material grabbing unit comprises a material grabbing Z-direction module and a material grabbing clamping claw cylinder, the material grabbing Z-direction module is arranged on the top beam, the material grabbing Z-direction module can drive the lower material grabbing clamping claw cylinder to move along the Z-axis direction, and the bottom of the material grabbing clamping claw cylinder is sequentially provided with a material grabbing positioning clamping jaw and a material grabbing flat clamping jaw along the positive direction of the X-axis.
As a further improvement of the utility model, the deviation rectifying motion module sequentially comprises a deviation rectifying Z-axis module, a deviation rectifying rotary table, a deviation rectifying Y-direction module, a deviation rectifying X-direction module, a deviation rectifying first arc swinging table and a deviation rectifying second arc swinging table from bottom to top.
As a further improvement of the utility model, the deviation rectifying rotary table can rotate in an XY-direction plane, the first deviation rectifying arc swinging table can swing in an arc shape in a YZ-direction plane, and the second deviation rectifying arc swinging table can swing in an arc shape in an XZ-direction plane.
As a further improvement of the utility model, a correction backlight source is arranged on one side of the correction positioning table along the positive direction of the X axis.
As a further improvement of the utility model, the Y-direction camera unit comprises a Y-direction camera support, a Y-direction camera X-direction module, a Y-direction camera Y-direction module, a Y-direction camera Z-direction module and a Y-direction camera, wherein the Y-direction camera support is arranged on the mechanism base plate, and the Y-direction camera X-direction module, the Y-direction camera Y-direction module, the Y-direction camera Z-direction module and the Y-direction camera are sequentially arranged on the Y-direction camera support from bottom to top.
As a further improvement of the utility model, an X-direction camera support, an X-direction camera Y-direction module, an X-direction camera X-direction module, an X-direction camera Z-direction module and an X-direction camera are arranged on a mechanism bottom plate, and the X-direction camera X-direction module, the X-direction camera Z-direction module and the X-direction camera are sequentially arranged on the X-direction camera support from bottom to top.
As a further improvement of the utility model, a Z-direction camera is also arranged on the driving end of the grabbing Z-direction module on one side of the grabbing clamping claw cylinder along the X-axis negative direction.
By means of the scheme, the utility model has at least the following advantages:
According to the utility model, through the matched use of the material grabbing clamping claw cylinder, the deviation correcting positioning clamping claw cylinder and the deviation correcting positioning table, the material can be well matched to correct deviation in a plurality of angles after being positioned on the deviation correcting positioning table, and feeding and discharging before and after deviation correction are convenient;
Compared with the same type multi-freedom deviation correcting mechanism, the mechanism only needs to automatically and visually position and correct the deviation in one direction during normal operation, avoids the action that all positioning and deviation correcting shafts participate in positioning and correcting, avoids the system error caused by the hardware positioning accuracy of each deviation correcting shaft, and increases the setting action times and time caused by the system error, thereby greatly optimizing the beat.
The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a mechanism for correcting a deviation with rapid multiple degrees of freedom according to the present utility model;
FIG. 2 is a schematic diagram of the rectifying unit in FIG. 1;
fig. 3 is a schematic view of the structure of the Y-direction camera unit of fig. 1;
Fig. 4 is a schematic structural view of the X-direction camera unit of fig. 1;
FIG. 5 is a schematic view of the structure of the gripping unit of FIG. 1;
FIG. 6 is a schematic view of the structure of the gripping jaw cylinder and the deviation correcting positioning jaw cylinder of FIG. 1;
fig. 7 is a partially enlarged structural schematic diagram at a in fig. 6.
In the drawings, the meaning of each reference numeral is as follows.
The mechanism comprises a mechanism base plate 1, a correction unit 2, a Y-direction camera unit 3, an X-direction camera unit 4, a grabbing unit 5, a correction base plate 6, a correction Z-axis module 7, a correction rotary table 8, a correction Y-direction module 9, a correction X-direction module 10, a correction first arc swing table 11, a correction second arc swing table 12, a correction positioning table 13, a correction backlight source 14, a correction positioning clamping jaw cylinder 15, a correction positioning movable clamping jaw 16, a correction positioning fixed clamping jaw 17, a Y-direction camera bracket 18, a Y-direction camera X-direction module 19, a Y-direction camera Y-direction module 20, a Y-direction camera Z-direction module 21, a Y-direction camera 22, an X-direction camera bracket 23, an X-direction camera Y-direction module 24, an X-direction camera X-direction module 25, an X-direction camera Z-direction module 26, an X-direction camera 27, a grabbing Z-direction module 28, a Z-direction camera 29, a grabbing clamping jaw cylinder 30, a grabbing clamping jaw 31, a grabbing flat clamping jaw 32 and a component 33.
Detailed Description
The following describes in further detail the embodiments of the present utility model with reference to the drawings and examples. The following examples are illustrative of the utility model and are not intended to limit the scope of the utility model.
In order to make the present utility model better understood by those skilled in the art, the following description will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present utility model.
Examples
As shown in figures 1 to 7 of the drawings,
The utility model provides a mechanism is rectified to quick multi freedom, includes mechanism bottom plate 1, rectifies unit 2, Y to camera unit 3, X to camera unit 4 and grabs material unit 5, rectifies unit 2 setting on mechanism bottom plate 1, rectifies and is provided with Y to camera unit 3 on the mechanism bottom plate 1 of unit 2 along Y axle negative direction one side, rectifies and is provided with X to camera unit 4 on the mechanism bottom plate 1 of unit 2 along X axle negative direction one side, rectifies the top of unit 2 and is provided with grabs material unit 5.
The correcting unit 2 comprises a correcting bottom plate 6, a correcting positioning table 13 and a correcting positioning clamping jaw cylinder 15, and a correcting motion module on the correcting bottom plate 6 is connected with the correcting positioning table 13 above. The deviation rectifying motion module sequentially comprises a deviation rectifying Z-axis module 7, a deviation rectifying rotary table 8, a deviation rectifying Y-direction module 9, a deviation rectifying X-direction module 10, a deviation rectifying first arc swinging table 11 and a deviation rectifying second arc swinging table 12 from bottom to top. The deviation rectifying rotary table 8 can rotate in an XY-direction plane, the first deviation rectifying arc swinging table 11 can swing in an arc shape in a YZ-direction plane, and the second deviation rectifying arc swinging table 12 can swing in an arc shape in an XZ-direction plane. A deviation correcting and positioning clamping jaw cylinder 15 is arranged on one side of the deviation correcting and positioning table 13 along the positive direction of the Y axis, a deviation correcting and positioning fixed clamping jaw 17 is arranged in the deviation correcting and positioning table 13, a deviation correcting and positioning movable clamping jaw 16 on the deviation correcting and positioning clamping jaw cylinder 15 is mutually matched with the deviation correcting and positioning fixed clamping jaw 17, and the deviation correcting and positioning fixed clamping jaw 17 and the deviation correcting and positioning movable clamping jaw 16 are sequentially arranged along the positive direction of the X axis. A correction backlight source 14 is also arranged on one side of the correction positioning table 13 along the positive direction of the X axis.
The material grabbing unit 5 comprises a material grabbing Z-direction module 28 and a material grabbing clamping jaw air cylinder 30, the material grabbing Z-direction module 28 is arranged on a top beam, the material grabbing Z-direction module 28 can drive the lower material grabbing clamping jaw air cylinder 30 to move along the Z-axis direction, and a material grabbing positioning clamping jaw 31 and a material grabbing flat clamping jaw 32 are sequentially arranged at the bottom of the material grabbing clamping jaw air cylinder 30 along the positive direction of the X-axis. The driving end of the grabbing Z-direction module 28 on one side of the grabbing claw cylinder 30 along the X-axis negative direction is also provided with a Z-direction camera 29.
The Y-direction camera unit 3 includes a Y-direction camera mount 18, a Y-direction camera X-direction module 19, a Y-direction camera Y-direction module 20, a Y-direction camera Z-direction module 21, and a Y-direction camera 22, the Y-direction camera mount 18 is mounted on the mechanism base plate 1, and the Y-direction camera X-direction module 19, the Y-direction camera Y-direction module 20, the Y-direction camera Z-direction module 21, and the Y-direction camera 22 are mounted on the Y-direction camera mount 18 in this order from bottom to top.
The X-direction camera support 23, the X-direction camera Y-direction module 24, the X-direction camera X-direction module 25, the X-direction camera Z-direction module 26 and the X-direction camera 27 are arranged on the mechanism base plate 1, and the X-direction camera X-direction module 25, the X-direction camera Z-direction module 26 and the X-direction camera 27 are sequentially arranged on the X-direction camera support 23 from bottom to top.
The X-direction, Y-direction and Z-direction may be linear driving structures such as linear sliding tables, which are common in the art.
The relationship among the parts of the quick multi-degree-of-freedom deviation correcting mechanism is as follows: the Y-direction camera 22 is used for carrying out Y-direction positioning on the element 33 to be positioned; the X-direction camera 27 is used for positioning the element 33 to be positioned in the X-direction; the Z-direction camera 29 is used for performing Z-direction positioning on the element 33 to be positioned; to this end, the Y-direction camera 22, the X-direction camera 27, and the Z-direction camera 29 constitute an XYZ three-axis visual positioning system of the entire mechanism.
The deviation correcting Z-axis module 7 is fixed on the deviation correcting bottom plate 6 by bolts, and is sequentially connected with the deviation correcting Z-axis module 7, the deviation correcting rotary table 8, the deviation correcting Y-direction module 9, the deviation correcting X-direction module 10, the deviation correcting first arc swinging table 11 and the deviation correcting second arc swinging table 12 to form three XYZ straight line deviation correcting axes and three angle deviation correcting axes, so that a hardware environment of manual/automatic deviation correction of six degrees of freedom of the element 33 to be positioned is realized.
The deviation correcting positioning fixed clamping jaw 17 is fixed on the deviation correcting positioning table 13 by a screw, the deviation correcting positioning movable clamping jaw 16 matched with the deviation correcting positioning fixed clamping jaw is fixed on the deviation correcting positioning clamping jaw cylinder 15 by the screw, and the deviation correcting positioning clamping jaw cylinder 15 is also fixed on the deviation correcting positioning table 13 by the screw. The gripping and positioning jaw 31 and the gripping and flat jaw 32 are fixed to the gripping and jaw cylinder 30 by screws for carrying and positioning the element 33 to be positioned.
The quick multi-degree-of-freedom deviation correcting mechanism needs to calibrate the position during system assembly/maintenance, clamps the element 33 to be positioned by using the deviation correcting and positioning movable clamping jaw 16 and the deviation correcting and positioning fixed clamping jaw 17, respectively observes the deviation angles of the positioning element 33 in the camera view through the Y-direction camera 22, the X-direction camera 27 and the Z-direction camera 29, adjusts the positions of five deviation correcting axes of the deviation correcting Z-axis module 7, the deviation correcting rotary table 8, the deviation correcting X-direction module 10, the deviation correcting first arc swinging table 11 and the deviation correcting second arc swinging table 12 in a software setting interface, enables the element 33 to be positioned at the position during automatic operation, saves the position parameters of the five deviation correcting axes at the moment, and finishes the position calibration of the quick multi-degree-of-freedom deviation correcting mechanism
During normal operation of the quick multi-degree-of-freedom deviation correcting mechanism, the deviation correcting and positioning clamping jaw cylinder 15 controls the deviation correcting and positioning movable clamping jaw 16 to open a gap with a small amplitude and a thickness slightly larger than that of the element to be positioned 33, ensures that the element to be positioned 33 is not separated from the bottom plane of the deviation correcting and positioning fixed clamping jaw 17 in the overlooking direction, and ensures that the element to be positioned 33 can be stably placed in the gap and cannot slide in the Z direction. Then, the grabbing claw cylinder 30 controls the grabbing positioning claw 31 and the grabbing flat claw 32 to clamp the element 33 to be positioned, and the element 33 to be positioned is placed in the gaps of the deviation correcting positioning movable claw 16 and the deviation correcting positioning fixed claw 17, so that the bottom surface of the element 33 to be positioned is ensured to be slightly higher than the bottom plane of the deviation correcting positioning fixed claw 17.
Then, the deviation correcting positioning clamping jaw cylinder 15 controls the deviation correcting positioning movable clamping jaw 16 to clamp the element 33 to be positioned with small torque, then the grabbing Z-direction module 28 moves downwards to a set working height, so that when the positioning surface of the grabbing positioning clamping jaw 31 presses down the element 33 to be positioned and damages the small torque state, the friction force of the deviation correcting positioning movable clamping jaw 16 and the deviation correcting positioning fixed clamping jaw 17 to the element 33 to be positioned is ensured, the bottom surface of the element 33 to be positioned is tightly and completely contacted with the bottom plane of the deviation correcting positioning fixed clamping jaw 17, the accurate positioning of the element 33 to be positioned in five degrees of freedom except the Y direction is ensured by means of the precision of the five degrees of freedom of the mechanism calibration, and then the deviation correcting positioning clamping jaw cylinder 15 controls the deviation correcting positioning movable clamping jaw 16 to clamp the element 33 to be positioned with large torque positioning.
Then, the X-direction camera 27 performs correction positioning on the element 33 to be positioned, and the correction Y-direction module 9 performs correction on the element 33 to be positioned according to the positioning result, so as to complete correction of the last degree of freedom of the element 33 to be positioned.
So far, the element 33 to be positioned has completed the six-degree-of-freedom positioning and deviation rectifying process, and the equipment can continue to circularly operate the rest elements 33 to be positioned according to the subsequent process requirements.
According to the utility model, through the matched use of the material grabbing clamping claw cylinder, the deviation correcting positioning clamping claw cylinder and the deviation correcting positioning table, the material can be well matched to correct deviation in a plurality of angles after being positioned on the deviation correcting positioning table, and feeding and discharging before and after deviation correction are convenient;
Compared with the multi-freedom deviation correcting mechanism of the same type, the mechanism only needs to automatically and visually position and correct the deviation in one direction during normal operation, avoids the action that all positioning and deviation correcting shafts participate in positioning and correcting, avoids the system error caused by the hardware positioning accuracy of each deviation correcting shaft, and increases the setting action times and time caused by the system error, thereby greatly optimizing the beat.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: can be mechanically or electrically connected: can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, and it should be noted that it is possible for those skilled in the art to make several improvements and modifications without departing from the technical principle of the present utility model, and these improvements and modifications should also be regarded as the protection scope of the present utility model.
Claims (7)
1. The quick multi-degree-of-freedom deviation correcting mechanism comprises a mechanism base plate (1), a deviation correcting unit (2), a Y-direction camera unit (3), an X-direction camera unit (4) and a grabbing unit (5), wherein the deviation correcting unit (2) is arranged on the mechanism base plate (1), the Y-direction camera unit (3) is arranged on the mechanism base plate (1) on one side of the negative direction of the Y axis, the X-direction camera unit (4) is arranged on the mechanism base plate (1) on one side of the negative direction of the X axis of the deviation correcting unit (2), and the grabbing unit (5) is arranged above the deviation correcting unit (2);
The method is characterized in that:
The correcting unit (2) comprises a correcting bottom plate (6), a correcting positioning table (13) and a correcting positioning clamping jaw cylinder (15), a correcting movement module on the correcting bottom plate (6) is connected with the correcting positioning table (13) above, the correcting positioning clamping jaw cylinder (15) is arranged on one side of the correcting positioning table (13) along the positive direction of the Y axis, a correcting positioning fixed clamping jaw (17) is arranged in the correcting positioning table (13), a correcting positioning movable clamping jaw (16) on the correcting positioning clamping jaw cylinder (15) is mutually matched with the correcting positioning fixed clamping jaw (17), and the correcting positioning fixed clamping jaw (17) and the correcting positioning movable clamping jaw (16) are sequentially arranged along the positive direction of the X axis;
the material grabbing unit (5) comprises a material grabbing Z-direction module (28) and a material grabbing claw cylinder (30), the material grabbing Z-direction module (28) is arranged on a top beam, the material grabbing Z-direction module (28) can drive the lower material grabbing claw cylinder (30) to move along the Z-axis direction, and a material grabbing positioning clamping jaw (31) and a material grabbing flat clamping jaw (32) are sequentially arranged at the bottom of the material grabbing claw cylinder (30) along the positive direction of the X-axis.
2. The quick multiple degree of freedom correcting mechanism of claim 1, wherein the correcting motion module comprises a correcting Z-axis module (7), a correcting rotary table (8), a correcting Y-direction module (9), a correcting X-direction module (10), a correcting first arc swinging table (11) and a correcting second arc swinging table (12) from bottom to top.
3. The quick multiple degree of freedom deviation correcting mechanism of claim 2 wherein the deviation correcting rotary table (8) is rotatable in an XY direction plane, the first deviation correcting arcuate table (11) is arcuately swingable in a YZ direction plane, and the second deviation correcting arcuate table (12) is arcuately swingable in an XZ direction plane.
4. The quick multiple degree of freedom correcting mechanism according to claim 1, wherein a correcting backlight source (14) is further installed on the correcting positioning table (13) along one side of the positive direction of the X-axis.
5. The quick multiple degree of freedom correction mechanism of claim 1 wherein the Y-direction camera unit (3) comprises a Y-direction camera support (18), a Y-direction camera X-direction module (19), a Y-direction camera Y-direction module (20), a Y-direction camera Z-direction module (21) and a Y-direction camera (22), wherein the Y-direction camera support (18) is mounted on the mechanism base plate (1), and the Y-direction camera support (18) is sequentially mounted with the Y-direction camera X-direction module (19), the Y-direction camera Y-direction module (20), the Y-direction camera Z-direction module (21) and the Y-direction camera (22) from bottom to top.
6. The quick multiple degree of freedom deviation correcting mechanism according to claim 1, wherein the X-direction camera support (23), the X-direction camera Y-direction module (24), the X-direction camera X-direction module (25), the X-direction camera Z-direction module (26) and the X-direction camera (27), the X-direction camera support (23) is installed on the mechanism base plate (1), and the X-direction camera X-direction module (25), the X-direction camera Z-direction module (26) and the X-direction camera (27) are installed on the X-direction camera support (23) in sequence from bottom to top.
7. The quick multiple degree of freedom deviation correcting mechanism of claim 1 wherein the gripper jaw cylinder (30) is further mounted with a Z camera (29) on the drive end of the gripper Z module (28) on one side along the negative X-axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322982802.4U CN221369269U (en) | 2023-11-06 | 2023-11-06 | Quick multi-degree-of-freedom deviation correcting mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322982802.4U CN221369269U (en) | 2023-11-06 | 2023-11-06 | Quick multi-degree-of-freedom deviation correcting mechanism |
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| CN221369269U true CN221369269U (en) | 2024-07-19 |
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| CN202322982802.4U Active CN221369269U (en) | 2023-11-06 | 2023-11-06 | Quick multi-degree-of-freedom deviation correcting mechanism |
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| CN (1) | CN221369269U (en) |
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- 2023-11-06 CN CN202322982802.4U patent/CN221369269U/en active Active
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