CN221216246U - Sub-packaging device for electronic grade solvent - Google Patents
Sub-packaging device for electronic grade solvent Download PDFInfo
- Publication number
- CN221216246U CN221216246U CN202323395709.XU CN202323395709U CN221216246U CN 221216246 U CN221216246 U CN 221216246U CN 202323395709 U CN202323395709 U CN 202323395709U CN 221216246 U CN221216246 U CN 221216246U
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- Prior art keywords
- clean
- solvent
- valve
- split charging
- pipeline
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- 239000002904 solvent Substances 0.000 title claims abstract description 62
- 238000004806 packaging method and process Methods 0.000 title description 3
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 238000002360 preparation method Methods 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 21
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000011550 stock solution Substances 0.000 claims 1
- 238000012546 transfer Methods 0.000 abstract description 4
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- 239000003292 glue Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Packages (AREA)
Abstract
The utility model relates to a split charging device for an electronic-grade solvent, which is characterized by comprising a Drum barrel and a raw liquid tank, wherein the top of the Drum barrel is in threaded connection with a clean split charging valve, the top of the clean split charging valve is provided with a clean solvent outlet, and one side of the clean split charging valve is provided with a clean air inlet; the clean solvent outlet is connected with the raw liquid tank through a clean solvent pipeline; the clean air inlet is connected with the clean air preparation device through a clean air pipeline. The utility model can realize the transfer of the electronic grade solvent in the closed container, and ensures the cleanliness of the solvent.
Description
Technical Field
The utility model relates to the technical field of clean solvents, in particular to a split charging device for an electronic grade solvent.
Background
Photoresists are a class of chemicals that utilize photochemical reactions for fine pattern transfer. The method is applied to industries of integrated circuits, flat panel displays, OLED, photovoltaic cells and the like. Photoresists, also known as photoresists, electron-grade solvents are the principal constituent of photoresists.
The sub-packaging of the electronic grade solvent from the Drum barrel to the 20L clean barrel and the gallon barrel is an indispensable process link in the photoresist test process. The existing split charging equipment can only meet the requirement of transferring the solvent from the Drum barrel to the 20L clean barrel and the gallon barrel, but cannot avoid the dispersion of impurity particles in the environment to the solvent in the transferring process. Under such a working condition, the reagent in the Drum barrel is exposed once in the environment after each split charging, and the impurity particles in the reagent gradually rise. Therefore, the granularity of the glue solution in the downstream glue preparation link is increased, the difficulty of the glue filtering link is increased due to the increase of the granularity in the glue solution, and the cost of the glue filtering is increased. Meanwhile, the safety of the split charging process cannot be guaranteed, the split charging efficiency is low, and the labor cost is high.
Disclosure of utility model
The utility model aims to solve the problems, and provides a split charging device for an electronic grade solvent, which can realize the transfer of the electronic grade solvent in a closed container and ensure the cleanliness of the solvent.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
The utility model relates to a split charging device for an electronic grade solvent, which comprises a Drum barrel and a raw liquid tank, wherein the top of the Drum barrel is in threaded connection with a clean split charging valve, the top of the clean split charging valve is provided with a clean solvent outlet, and one side of the clean split charging valve is provided with a clean air inlet; the clean solvent outlet is connected with the raw liquid tank through a clean solvent pipeline; the clean air inlet is connected with the clean air preparation device through a clean air pipeline.
The split charging device preferably further comprises a clean shed, wherein the clean shed is covered outside the raw liquid tank; the top of the clean shed is provided with a sealing cover, the clean solvent pipeline extends into the clean shed from the sealing cover, and the pipe wall of the clean solvent pipeline is in sealing connection with the sealing cover.
The split charging device is preferably provided with a first stop valve on the clean air pipeline.
The split charging device is characterized in that preferably, a pressure gauge is arranged on the clean air pipeline and is positioned between the first stop valve and the clean split charging valve.
The split charging device is preferably provided with a second stop valve on the clean solvent pipeline.
The split charging device is characterized in that the sealing cover is provided with a one-way air outlet valve.
The split charging device preferably comprises a frame, wherein the first side face, the second side face and the rear face of the frame are sealed through FTFE plates, FFU is installed at the top of the frame, a transparent vertical curtain is installed in front of the frame, and PTFE plates are used for sealing the bottom of the frame.
The split charging device is characterized in that a baffle is arranged at the bottom of the clean shed, and a leakage-proof pool is formed by enclosing the baffle and the side wall of the clean shed.
The split charging device preferably further comprises a bracket, wherein the bracket is connected with the clean solvent pipeline or the clean air pipeline and is used for supporting the clean solvent pipeline or the clean air pipeline.
Due to the adoption of the technical scheme, the utility model has the following advantages:
(1) The clean split charging valve at the starting end and the sealing cover at the tail end in the device effectively prevent the solvent from contacting with air, reduce the pollution of impurity particles to the solvent, and improve the cleaning degree of the solvent;
(2) The device is arranged in a clean shed to work, so that a clean environment atmosphere is provided for the whole device, and pollution of impurity particles to a solvent or a barrel is reduced in the process of installing and transferring a Drum barrel and a gallon barrel (namely a raw liquid tank);
(3) The starting end split charging valve adopts clean dry air as an air source to press the solvent out of the barrel, so that a manual extrusion mode is replaced, and labor is saved;
(4) The one-way air outlet valve at the upper part of the sealing cover at the tail end of the device ensures the discharge of the pressure in the barrel, so that a plurality of parts between the solvent barrel centering equipment and the equipment are vertically arranged.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model. Like parts are designated with like reference numerals throughout the drawings. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present utility model;
fig. 2 is a schematic structural view of the clean booth according to the present utility model.
The various references in the drawings are as follows:
1-Drum barrel; 2-cleaning a split charging valve; 3-a pressure gauge; 4-a first shut-off valve; 5-a second shut-off valve; 6, sealing the cover; 7-cleaning the shed; 8-cleaning a solvent pipeline; 9-clean air duct; 10-bracket.
Detailed Description
Exemplary embodiments of the present utility model will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present utility model are shown in the drawings, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
The utility model provides a split charging device for electronic-grade solvents, wherein a clean split charging valve is sealed on a Drum barrel at the starting end, so that the solvents in the Drum barrel are not contacted with the environment for a long time, and the particle exchange is reduced; the tail end sealing cover ensures that the solvent in the raw liquid tank is not contacted with the environment for a long time any more, thereby reducing the particle exchange; when the starting end valve and the end cover are connected with the barrel, the solvent can have short contact time with the environment, and the design of the simple clean shed provides clean environment atmosphere and reduces particle exchange in the connection process. Therefore, the utility model can realize the transfer of the electronic grade solvent in the closed container, and ensures the cleanliness of the solvent.
As shown in fig. 1, the split charging device for the electronic-grade solvent provided by the utility model comprises a Drum barrel 1 and a raw liquid tank (not shown in the figure), wherein the top of the Drum barrel 1 is in threaded connection with a clean split charging valve 2, the top of the clean split charging valve 2 is provided with a clean solvent outlet, and one side of the clean split charging valve is provided with a clean air inlet; the clean solvent outlet is connected with the raw liquid tank through a clean solvent pipeline 8; the clean air inlet is connected to a clean air preparation device (not shown in the figures) via a clean air duct 9.
In the above embodiment, preferably, the utility model further comprises a clean shed 7, wherein the clean shed 7 is covered outside the raw liquid tank; the top of the clean shed 7 is provided with a sealing cover 6, the clean solvent pipeline 8 extends into the clean shed 7 from the sealing cover, and the pipe wall of the clean solvent pipeline 8 is in sealing connection with the sealing cover 6.
In the above embodiment, the clean air duct 9 is preferably provided with a first shut-off valve 4. The first stop valve 4 is used for controlling the opening and closing of the clean air pipeline 9 and controlling the flow rate of clean air.
In the above embodiment, preferably, a pressure gauge 3 is disposed on the clean air duct 9, and the pressure gauge 3 is located between the first stop valve 4 and the clean split charging valve 2. The pressure gauge 3 is used for measuring the gas pressure on the clean air duct 9, wherein the measuring range of the pressure gauge 3 is set to be 0-50Kpa.
In the above embodiment, preferably, the clean solvent pipe 8 is provided with a second shut-off valve 5. The second stop valve 5 is used for controlling the opening and closing of the clean solvent pipeline 8 and controlling the flow of the clean solvent.
In the above embodiment, preferably, the sealing cover 6 is provided with a one-way air outlet valve. When solvent enters the raw liquid tank (20L barrel or gallon barrel), the discharged air is discharged into the barrel through a one-way air outlet valve, so that the pressure in the barrel is prevented from rising.
In the above embodiment, preferably, as shown in fig. 2, the clean shed 7 includes a frame, the first side, the second side and the rear of the frame are sealed by FTFE plates, the FFU is installed at the top of the frame for purifying air, the transparent curtain is installed at the front of the frame, and the PTFE plates are used for sealing the bottom of the frame.
In the above embodiment, preferably, a baffle is disposed at the bottom of the clean shed 7, and the baffle and the side wall of the clean shed enclose a leakage-proof pool.
In the above-described embodiment, preferably, the present utility model further includes a bracket 10, the bracket 10 being connected to the clean solvent pipe 8 or the clean air pipe 9 for supporting the clean solvent pipe 8 or the clean air pipe 9.
The working process of the utility model is as follows: clean air is introduced into the Drum barrel 1 through the clean air pipeline 9 for increasing the air pressure in the Drum barrel 1, and clean solvent in the Drum barrel 1 flows into the raw liquid tank through the clean solvent pipeline.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (9)
1. The split charging device for the electronic-grade solvent is characterized by comprising a Drum barrel and a raw liquid tank, wherein the top of the Drum barrel is in threaded connection with a clean split charging valve, the top of the clean split charging valve is provided with a clean solvent outlet, and one side of the clean split charging valve is provided with a clean air inlet;
The clean solvent outlet is connected with the raw liquid tank through a clean solvent pipeline;
The clean air inlet is connected with the clean air preparation device through a clean air pipeline.
2. The racking device of claim 1, further comprising a clean booth, said clean booth being covered outside said stock solution tank;
The top of the clean shed is provided with a sealing cover, the clean solvent pipeline extends into the clean shed from the sealing cover, and the pipe wall of the clean solvent pipeline is in sealing connection with the sealing cover.
3. The dispensing device of claim 1, wherein the clean air conduit is provided with a first shut-off valve.
4. A dispensing device according to claim 3, wherein a pressure gauge is provided on the clean air conduit, the pressure gauge being located between the first shut-off valve and the clean dispensing valve.
5. The dispensing apparatus of claim 1, wherein the clean solvent line is provided with a second shut-off valve.
6. The dispensing device of claim 2, wherein the sealing cover is provided with a one-way air outlet valve.
7. The racking device of claim 2, wherein the clean shed comprises a frame, the first side, the second side, and the back of the frame are sealed with FTFE plates, the FFU is mounted on top of the frame, the transparent curtain is mounted on the front of the frame, and the bottom of the frame is sealed with PTFE plates.
8. The racking device of claim 7, wherein a baffle is provided at the bottom of the clean booth, the baffle and the clean booth side walls enclosing a leak-proof pool.
9. The dispensing device of claim 1, further comprising a bracket coupled to the clean solvent conduit or the clean air conduit for supporting the clean solvent conduit or the clean air conduit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323395709.XU CN221216246U (en) | 2023-12-13 | 2023-12-13 | Sub-packaging device for electronic grade solvent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323395709.XU CN221216246U (en) | 2023-12-13 | 2023-12-13 | Sub-packaging device for electronic grade solvent |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221216246U true CN221216246U (en) | 2024-06-25 |
Family
ID=91579289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323395709.XU Active CN221216246U (en) | 2023-12-13 | 2023-12-13 | Sub-packaging device for electronic grade solvent |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221216246U (en) |
-
2023
- 2023-12-13 CN CN202323395709.XU patent/CN221216246U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |