CN221186402U

CN221186402U - Work table for slicing operation

Info

Publication number: CN221186402U
Application number: CN202323166052.XU
Authority: CN
Inventors: 刘丽君; 张娟宁; 杨正文
Original assignee: Anhui Qingdian Silicon Industry Co ltd
Current assignee: Anhui Qingdian Silicon Industry Co ltd
Priority date: 2023-11-23
Filing date: 2023-11-23
Publication date: 2024-06-21
Anticipated expiration: 2033-11-23

Abstract

The utility model relates to a working table for slicing operation, which is used for solving the problem that the working table is unsuitable in the existing slicing operation process. The present utility model provides a work table for slicing operation, comprising: a table provided with at least one storage tank configured to be capable of storing at least a silicon wafer to be inspected or/and a silicon wafer for which inspection has been completed; and the bracket is positioned below the table plate and is provided with a height adjusting assembly, and the height adjusting assembly is configured to be capable of adjusting the height of the bracket.

Description

Work table for slicing operation

Technical Field

The utility model relates to the technical field of silicon wafer production, in particular to a working table for slicing operation.

Background

In the silicon wafer manufacturing and inspection process, personnel are required to inspect defective products, namely, the defective products after cutting and cleaning are finished and sorting are rechecked, a working table is required to be used for operation at the moment, particularly, personnel need to put on gloves and stand in front of the working table, hold abnormal silicon wafers in a hand, observe and inspect the surfaces of the silicon wafers, and because the inspection work is long-time repeated precise work, if the adopted working table is unsuitable, the conditions of fatigue and the like of the personnel are easily caused, unstable silicon wafers are caused, the silicon wafers fall off, and the overall yield and the working efficiency of slicing are reduced.

Disclosure of utility model

In view of the above, the present utility model is directed to a table for slicing operation, which is used for solving the problem that the table is unsuitable in the existing slicing operation process.

The aim of the utility model is mainly realized by the following technical scheme:

the utility model provides a work table for slicing operation, comprising:

a table provided with at least one storage tank configured to be capable of storing at least a silicon wafer to be inspected or/and a silicon wafer for which inspection has been completed;

And the bracket is positioned below the table plate and is provided with a height adjusting assembly, and the height adjusting assembly is configured to be capable of adjusting the height of the bracket.

Further, the slicing operation work table further comprises an angle adjusting component, and the angle adjusting component is positioned between the table plate and the bracket;

The angle adjustment assembly is configured to adjust an included angle of the table and the bracket.

Further, one end of the table plate is hinged with the bracket, and the other end of the table plate is adjustable in height with the bracket through the angle adjusting assembly so as to realize that an included angle between the table plate and the bracket is adjustable;

the included angle ranges from 0 to 45 degrees.

Further, the angle adjusting assembly comprises a support rod;

The upper end face of the bracket is provided with a plurality of adjusting holes matched with the supporting rods, and the adjusting holes are distributed on the frame of the bracket from front to back in a row;

One end of the supporting rod is hinged with the table plate, and the other end of the supporting rod is selectively arranged in the adjusting hole so as to adjust the included angle between the table plate and the bracket.

Further, the height adjusting assembly comprises a fixed upright post and table legs, wherein the table legs are arranged at the bottom ends of the fixed upright post, and the fixed upright post at least forms the bottom end part of the upright post of the bracket;

The side wall of the desk leg is provided with an elastic bulge;

The fixed upright post is provided with a sliding groove matched with the table leg, the side wall of the sliding groove is provided with a plurality of clamping holes matched with the elastic bulge so as to realize the adjustment of the height of the bracket by pressing the elastic bulge and sliding the table leg to clamp the elastic bulge into different clamping holes;

The clamping holes are different in height on the fixed upright post and distributed in a row.

Further, the working table for slicing operation further comprises an extension bracket and a lamp bracket, wherein the bottom end of the extension bracket is connected with the bracket, the top end of the extension bracket is connected with the lamp bracket, and the lamp bracket is positioned above the table plate;

The lamp bracket is provided with a first lamp, and the illumination direction of the first lamp faces the desk plate.

Further, at least one group of light supplementing components are detachably arranged on the table plate;

The light supplementing assembly comprises a vertical rod and a lamp panel, one end of the vertical rod is detachably connected with the table panel, and the other end of the vertical rod is rotatably connected with the lamp panel;

the lamp panel is provided with a second lamp capable of illuminating the desk panel.

Further, the first lamp and the second lamp are LED lamps;

the vertical rod is a telescopic rod;

The bottom of pole setting with the table rotates to be connected, the pole setting can rotate around its central line.

Further, the number of the storage tanks is not less than two;

The storage tanks include a first storage tank configured to be capable of storing a silicon wafer to be inspected and a second storage tank configured to be capable of storing a inspected silicon wafer.

Further, a buffer layer is laid on the wall of the storage tank;

The desk plate is provided with an operation area, and the operation area is sequentially laid with a buffer layer and an anti-slip layer.

Compared with the prior art, the utility model has at least one of the following advantages: the height of the support of the work table for slicing operation is adjustable, a user can adjust the height of the table top according to the height of the user, the height of the table top is matched with the height of the user, the fatigue feeling of the user during operation is relieved, and the working efficiency is improved. In addition, be equipped with the holding tank on the table of the work table for slicing operation, when the user gets and puts the silicon chip of convenience, can reduce the silicon chip and take place the possibility that emptys.

In the utility model, the technical schemes can be mutually combined to realize more preferable combination schemes. Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the utility model. The objectives and other advantages of the utility model may be realized and attained by the structure particularly pointed out in the written description and drawings.

Drawings

The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the utility model, like reference numerals being used to refer to like parts throughout the several views.

FIG. 1 is a schematic view (I) of a table for slicing operation according to an embodiment;

FIG. 2 is a schematic view (II) of a table for slicing operation according to the embodiment;

Fig. 3 is a schematic structural view (iii) of a table for slicing operation in the embodiment;

FIG. 4 is a schematic view of a part of a table for slicing operation according to the embodiment (one);

fig. 5 is a partial schematic view (two) of a table for slicing operation in the embodiment.

Reference numerals:

1-a table plate; 11-a storage tank; 111-a first storage tank; 12-supporting rods; 13-a light supplementing component; 131-standing bars; 132-a lamp panel; 112-a second storage tank; 2-a bracket; 21-fixing the upright post; 211-clamping holes; 22-table legs; 23-frame; 231-adjusting holes; 24-reinforcing bars; 3-extending the stent; 4-lamp holders; 41-first luminaire.

Detailed Description

The following detailed description of preferred embodiments of the utility model is made in connection with the accompanying drawings, which form a part hereof, and together with the description of the embodiments of the utility model, are used to explain the principles of the utility model and are not intended to limit the scope of the utility model.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the term "coupled" should be interpreted broadly, for example, as being fixedly coupled, as being detachably coupled, as being integrally coupled, as being mechanically coupled, as being electrically coupled, as being directly coupled, as being indirectly coupled via an intermediate medium. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The terms "top," "bottom," "above … …," "below," and "on … …" are used throughout to describe relative positions with respect to components of the device, such as the relative positions of the top and bottom substrates inside the device. It will be appreciated that the devices are versatile, irrespective of their orientation in space.

The working surface of the utility model can be a plane or a curved surface, and can be inclined or horizontal. For convenience of explanation, the embodiments of the present utility model are placed on a horizontal plane and used on the horizontal plane, and thus "up and down" and "up and down" are defined.

In one embodiment of the present utility model, a work table for slicing operation is disclosed, as shown in fig. 1 to 5, comprising:

A table 1 provided with at least one storage tank 11, said storage tank 11 being configured to be capable of storing at least a silicon wafer to be inspected or/and a silicon wafer for which inspection has been completed;

a stand 2 below the table 1, the stand 2 being provided with a height adjustment assembly configured to enable adjustment of the height of the stand 1.

According to the working table for slicing operation, the height of the support is adjustable, a user can adjust the height of the table top according to the height of the table top, so that the height of the table top is matched with the height of the table top, fatigue feeling of people during operation is relieved, and working efficiency is improved. In addition, the storage groove is arranged on the table plate, so that a user can conveniently take and put the silicon wafer, and meanwhile, the possibility of toppling of the silicon wafer can be reduced.

According to one embodiment of the present utility model, the height adjusting assembly includes a fixed upright 21 and a leg 22, and the leg 22 is disposed at the bottom end of the fixed upright 21. Preferably, the table leg 22 is detachably disposed at the bottom end of the fixed upright 21. The fixed upright post at least forms the bottom end part of the upright post of the bracket 2 (the upright post is a support post in the vertical direction of the bracket 2), and comprises the condition that the fixed upright post is the upright post of the bracket 2.

Specifically, the side walls of the legs 22 are provided with resilient protrusions (not shown) that retract into the legs 22 when a force is applied to the resilient protrusions; when the elastic bulge is not stressed, the elastic bulge protrudes out of the end surface of the side wall of the table leg 22 so as to adjust the length of the table leg 22 extending into the fixed upright post 21, thereby realizing the adjustment of the height of the bracket 2. Preferably, the resilient protrusions are located on top of the side walls of the leg 22.

The fixed upright post 21 is provided with a chute matched with the table leg 22, and the side wall of the chute is provided with a plurality of clamping holes 211 matched with the elastic protrusions, so that the elastic protrusions can be clamped into different clamping holes by pressing the elastic protrusions and sliding the table leg 22, and the height of the support can be adjusted.

The plurality of clamping holes 211 are distributed in a row and have different heights on the fixed upright 21. Preferably, the adjacent card holes 211 are equally spaced. Note that, the distance between the highest card hole 211 and the lowest card hole 211 is smaller than the length of the leg 22.

In order to improve the connection strength between the table leg 22 and the fixed upright post 21, elastic protrusions with the same height are respectively arranged on opposite sides of the table leg 22, and a plurality of clamping holes 211 matched with the elastic protrusions are respectively arranged on opposite side walls of the chute.

In this embodiment, four clamping holes 211 are provided on the fixing upright post 21, and the distance between adjacent clamping holes 211 is 2cm.

In order to ensure the stability of the support 2, at least four ends of the support 2 are provided with upright posts, at least four ends of the support 2 are provided with fixed upright posts 21 and table legs 22, i.e. the bottoms of the upright posts of at least four ends are fixed upright posts. In this embodiment, the stand 2 includes six vertical columns, wherein the bottoms of the six columns are fixed columns 21, and table legs 22 are respectively disposed below the fixed columns 21 at four ends. Of course, the legs 22 may be disposed below the six fixing posts 21, so as to stabilize the bracket 2.

To improve the structural stability of the stand 2, the stand 2 further comprises a frame 23 and a reinforcing bar 24, wherein the frame 23 is located at the top end of the upright post and is used for carrying the table 1. The reinforcing rods 24 are positioned between two adjacent columns and are vertically connected with the columns.

The frame 23 is shaped and dimensioned to fit the table. In this embodiment, the frame is a rectangular frame.

According to a preferred embodiment of the present utility model, the slot 101 of the storage groove 11 is located on the upper surface of the table 1, and the storage groove 11 is extended toward the lower surface of the table 1, that is, the storage groove 11 protrudes from the lower surface of the table 1, so that the space under the table 1 can be reasonably utilized without increasing the thickness of the table 1. Preferably, the side walls of the storage groove 11 are disposed perpendicular to the table.

The number of the storage grooves 11 is not less than two so that at least one is used for storing the silicon wafer to be inspected and at least one is used for storing the inspected silicon wafer. Specifically, the storage tank 11 includes a first storage tank 111 and a second storage tank 112, the first storage tank 111 being configured to be able to store a silicon wafer to be inspected, and the second storage tank 112 being configured to be able to store a silicon wafer after inspection.

In the present embodiment, the number of the storage tanks 11 is six, and the six storage tanks 11 are distributed in a row, and the six storage tanks 11 are located at the front side of the center of the table 1 so as to provide enough working space for personnel. Wherein there are three first storage tanks 111 and three second storage tanks 112, and the interval between adjacent first storage tanks 111 and second storage tanks 112 is significantly larger than the interval between adjacent two first storage tanks (second storage tanks) in order to better distinguish the first storage tanks 111 and the second storage tanks 112.

Preferably, the first storage groove is located at the left side of the second storage groove 112 so that an operator can take the first storage groove and the working efficiency can be improved.

The dimensions of the storage tank 11 are matched with those of the silicon wafer to be stored, and the storage tank 11 is illustratively rectangular in shape, and the dimensions are 210mm×150mm×50mm, specifically, the rectangular notch is 150mm×50, and the groove depth is 210mm.

The utility model positions the front, back, left and right by the station position when the personnel work.

The desk board 1 is provided with an operation area, and a person mainly operates in the operation area when performing inspection operation.

In order to avoid the silicon chip damage caused by carelessly dropping the silicon chip when the personnel operate, a buffer layer is laid on the groove wall of the storage groove 11, and a buffer layer and an anti-skid layer are laid in sequence in the operation area. The material of buffer layer, skid-proof layer is sponge, silica gel etc. the surface of skid-proof layer is equipped with the non-skid raised line.

According to a preferred embodiment of the present utility model, the slicing operation table further comprises an angle adjusting assembly, which is located between the table plate 1 and the stand 2. The angle adjusting component is configured to be capable of adjusting an included angle between the table board 1 and the support 2, namely an included angle between the table board 1 and the top end face of the support 2. So set up for the angle of table 1 is adjustable, makes desktop angle and user's job practice phase-match, avoids because the improper arm muscle ache that leads to of angle, and then improves work efficiency.

Specifically, one end (i.e., the rear end, which is the end close to the operator) of the table board 1 is hinged to the support 2, and the other end (i.e., the front end, which is the end far away from the operator) of the table board is adjustable in height with the support through the angle adjusting assembly, so as to realize that the included angle between the table board 1 and the support 2 is adjustable.

In this embodiment, the angle adjustment assembly includes a support rod 12. The upper end surface of the bracket 2 is provided with a plurality of adjusting holes 201 matched with the supporting rod 12, and a plurality of adjusting holes 231 are distributed on the frame 23 of the bracket 2 from front to back in a row.

One end (i.e., a hinged end) of the supporting rod 12 is hinged to the table 1, and the other end (i.e., a movable end) of the supporting rod 12 is optionally disposed in the adjusting hole 231, i.e., the movable end of the supporting rod 12 is inserted into a different adjusting hole 201 to adjust the included angle between the table 1 and the bracket 2.

Specifically, the hinged end of the support rod 12 is hinged to the center of the left or right side of the lower surface of the table 1. Preferably, the left side and the right side of the lower surface of the table 1 are respectively hinged with a supporting rod 12, and correspondingly, the left side and the right side of the upper surface of the bracket 2 are respectively provided with a row of adjusting holes 231 matched with the supporting rod 12, so as to improve the stability of the table.

Preferably, the included angle between the table plate and the bracket can be adjusted between 0 and 45 degrees, and preferably, the included angle between the table plate and the bracket is 30 degrees.

According to a preferred embodiment of the present utility model, the slicing operation table further comprises an extension bracket 3 and a lamp bracket 4, wherein the bottom end of the extension bracket 3 is connected with the bracket 2, the top end of the extension bracket 3 is connected with the lamp bracket 4, and the lamp bracket 4 is located above the table board 1.

The lamp holder 4 is provided with a first lamp 41, and the illumination direction of the first lamp 41 faces the desk plate. Preferably, the first lamp 41 is a strip-shaped lamp strip, and the extending direction of the strip-shaped lamp strip is consistent with the extending direction of the lamp stand 4, that is, the strip-shaped lamp strip extends from the left side to the right side above the desk board.

In this embodiment, the left front Fang Lizhu and the right front upright of the bracket 2 extend upwards to form the extension bracket 3, the lamp holder 4 is in a triangular prism shape, one end of the triangular prism is connected with the left upright of the extension bracket 3, and the other end is connected with the right upright of the extension bracket 3. The surface of the lamp bracket 4 provided with the first lamp 41 is perpendicular to the extension bracket 3, so that light vertically downward is formed on the desk plate.

Preferably, the upright posts (including the fixed upright posts), the reinforcing rods 24, the frame 23 and the extension bracket 3 are integrally formed, or are made of metal and are connected in a welding mode.

For better providing lighting for the operation of the personnel, at least one group of light supplementing components 13 are detachably arranged on the desk board 1, the light supplementing components 13 comprise a vertical rod 131 and a lamp panel 132, and the lamp panel 132 is provided with a second lamp capable of illuminating the desk board 1; one end of the upright pole 131 is detachably connected with the desk board 1, and the other end of the upright pole 131 is rotatably connected with the lamp panel 132, so that an included angle between the lamp panel 132 and the upright pole 131 can be adjusted, the direction of supplementing lamplight can be adjusted, and personnel operation is facilitated. Preferably, the angle between the lamp panel 132 and the upright 131 can be adjusted between 0 ° and 180 °. Preferably, the upright 131 is perpendicular to the table 1, so as to improve the stability of the lamp panel 132.

Preferably, the first and second light fixtures are LED lamps, and the LED lamps are preferably white.

Preferably, the upright 131 is a telescopic rod, i.e. the length of the upright 131 is adjustable, so that the height of the lamp panel 132 and the desk top can be adjusted, and the light supplement is better provided for the operation of operators. Further, the bottom of the upright 131 is rotatably connected to the table 1, that is, the upright 131 may rotate around its center line, so as to more flexibly adjust the direction of the lamp panel 132.

In this embodiment, two sets of light supplementing assemblies 13 are disposed on the table board 1 and are respectively located above the first storage groove 111 and the second storage groove 112.

According to the working table for slicing operation, when a person works, the height and the angle of the table top are enabled to be in accordance with the height and the working habit of the user, the working fatigue of the person is relieved, muscle stiffness is avoided as much as possible, and the risks of falling and damaging the silicon wafer in the working process are reduced. By arranging the storage groove on the desk plate, the loss caused by the toppling of the silicon wafer is avoided.

The working table for slicing operation solves the problem that staff is difficult to operate for a long time, and improves the convenience, stability and safety of silicon wafer inspection work.

The working table for slicing operation provided by the utility model comprises the combination of the structure with the adjustable angle of the table top, the structure with the adjustable height of the table legs and the illumination of the table top, so that unqualified silicon wafers are easier to find, the arms of staff are more convenient during operation, the working of staff with different heights is more met, the risk of missing detection of unqualified products is reduced, the risk of falling off of the silicon wafers during inspection is reduced, the fatigue is not easy to occur during operation, and the working efficiency is higher.

The present utility model is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present utility model are intended to be included in the scope of the present utility model.

Claims

1. A work table for slicing work, comprising:

A bracket positioned below the table plate, the bracket being provided with a height adjustment assembly configured to enable adjustment of the height of the bracket;

The height adjusting assembly comprises a fixed upright post and table legs, the table legs are arranged at the bottom ends of the fixed upright post, and the fixed upright post at least forms the bottom end part of the upright post of the bracket;

The side wall of the desk leg is provided with an elastic bulge;

2. The slicing work table of claim 1, further comprising an angle adjustment assembly positioned between the table plate and the bracket;

3. The slicing operation work table as claimed in claim 2, wherein one end of the table plate is hinged with the bracket, and the other end of the table plate is adjustable in height with the bracket through the angle adjusting assembly, so as to realize that an included angle between the table plate and the bracket is adjustable;

the included angle ranges from 0 to 45 degrees.

4. A slicing work table as defined in claim 3, wherein said angle adjustment assembly includes a support bar;

5. The slicing operation table of any one of claims 1 to 4, further comprising an extension bracket and a lamp holder, wherein the bottom end of the extension bracket is connected to the bracket, the top end of the extension bracket is connected to the lamp holder, and the lamp holder is located above the table plate;

6. The slicing work table of claim 5, wherein at least one group of light supplementing components is detachably arranged on the table plate;

7. The slicing work table of claim 6, wherein the first and second light fixtures are LED lights;

the vertical rod is a telescopic rod;

8. The slicing operation work table of claim 1, wherein the number of the storage grooves is not less than two;

9. The slicing operation table of claim 8, wherein a buffer layer is laid on the wall of the storage tank;