CN221186130U

CN221186130U - Cutter for processing edge ring

Info

Publication number: CN221186130U
Application number: CN202323154488.7U
Authority: CN
Inventors: 孔珍源; 陈小龙; 毛健龙
Original assignee: Jisheng Micro Wuhan New Materials Technology Co ltd
Current assignee: Jisheng Micro Wuhan New Materials Technology Co ltd
Priority date: 2023-11-20
Filing date: 2023-11-20
Publication date: 2024-06-21
Anticipated expiration: 2033-11-20

Abstract

The utility model relates to a cutter for processing an edge ring, which comprises a cutter head, wherein an inner circular processing annular surface, a first conical surface and a second conical surface are formed on the outer wall of the cutter head, the first conical surface, the inner circular processing annular surface and the second conical surface are sequentially arranged and connected along a straight line direction, and the first conical surface and the second conical surface are gradually expanded along a direction far away from the inner circular processing annular surface; the inner circle processing annular surface of tool bit is used for processing the internal diameter of edge ring, and the first conical surface and the second conical surface of tool bit are used for carrying out the chamfer to the edge of the both sides of the inner circle of edge ring respectively, need not the tool changing, can once accomplish, improves production efficiency.

Description

Cutter for processing edge ring

Technical Field

The utility model relates to the technical field of etchers, in particular to a cutter for processing an edge ring.

Background

The edge ring is used as a part of an etching machine, and is required to be machined before being used so as to meet the installation condition.

The processing steps are as follows, firstly, the inner wall of the edge ring is processed until the inner diameter of the inner wall reaches the standard, then the edge of one side of the inner ring of the edge ring is chamfered, and finally the edge of the other side of the inner ring of the edge ring is chamfered.

The processing process needs to use three kinds of cutters, is processed for three times, and has low production efficiency.

Disclosure of utility model

In view of the above, it is necessary to provide a tool for processing an edge ring, which is used for solving the problems of three kinds of tools, three times of processing and low production efficiency when processing an edge ring.

The utility model provides a cutter for processing an edge ring, which comprises a cutter head, wherein an inner circular processing annular surface, a first conical surface and a second conical surface are formed on the outer wall of the cutter head, the first conical surface, the inner circular processing annular surface and the second conical surface are sequentially arranged and connected along a straight line direction, and the first conical surface and the second conical surface are gradually expanded along a direction far away from the inner circular processing annular surface.

Further, the tool bit includes cylinder, first cone and second cone, first cone the cylinder with the second cone is arranged in proper order along a straight line direction and is connected, the outer wall of cylinder forms interior circular machining annular face, the outer wall of first cone forms first conical surface.

Further, the cylinder, the first cone and the second cone are fixedly connected.

Further, the cylinder, the first cone and the second cone are detachably connected.

Further, the cylinder is in threaded connection with the first cone and the second cone, the screwing direction of the cylinder relative to the first cone is a first direction, the screwing direction of the second cone relative to the cylinder is a second direction, and the first direction is the same as the second direction and is the same as the rotation direction of the cutter head.

Further, the inclination angle of the first conical surface is 45 degrees, and the second conical surface is 30 degrees.

Further, the tool bit further comprises a polishing head, wherein the roughness of the outer wall of the polishing head is smaller than that of the outer wall of the tool bit.

Further, the outer wall of the polishing head is provided with a polishing annular surface, a third conical surface and a fourth conical surface, the third conical surface, the polishing annular surface and the fourth conical surface are sequentially arranged and connected along a straight line direction, and the third conical surface and the fourth conical surface are gradually expanded along a direction far away from the polishing annular surface.

Further, the polishing head is connected with the tool bit, and the third conical surface, the polishing annular surface, the fourth conical surface, the first conical surface, the inner circle processing annular surface and the second conical surface are sequentially arranged along a straight line direction.

Further, the tool bit comprises a tool handle, and the tool bit is connected with the tool handle.

Compared with the prior art, install the tool bit to the anchor clamps on, anchor clamps drive the tool bit and remove, make the interior circular processing annular face of tool bit paste in the inner wall department of edge ring, first conical surface and second conical surface respectively with the both sides edge butt of edge ring inner circle, anchor clamps drive the tool bit rotation, and control the tool bit for the position of edge ring, wherein, the interior circular processing annular face of tool bit is used for processing the internal diameter of edge ring, the first conical surface and the second conical surface of tool bit are used for carrying out the chamfer to the edge of the both sides of the inner circle of edge ring respectively, need not the tool changing, can once finish, improve production efficiency.

Drawings

Fig. 1 is a schematic diagram of the overall structure of a tool for machining an edge ring according to an embodiment of the present utility model.

Detailed Description

The following detailed description of preferred embodiments of the utility model is made in connection with the accompanying drawings, which form a part hereof, and together with the description of the embodiments of the utility model, are used to explain the principles of the utility model and are not intended to limit the scope of the utility model.

As shown in fig. 1, the tool for machining an edge ring provided by the utility model comprises a tool bit 100, wherein an inner circular machining annular surface 111, a first conical surface 112 and a second conical surface 113 are formed on the outer wall of the tool bit 100, the first conical surface 112, the inner circular machining annular surface 111 and the second conical surface 113 are sequentially arranged and connected along a straight line direction, and the first conical surface 112 and the second conical surface 113 are gradually expanded along a direction away from the inner circular machining annular surface 111.

During implementation, the tool bit 100 is mounted on the fixture, the fixture drives the tool bit 100 to move, the inner circular machining annular surface 111 of the tool bit 100 is attached to the inner wall of the edge ring, the first conical surface 112 and the second conical surface 113 are respectively abutted to the two side edges of the inner ring of the edge ring, the fixture drives the tool bit 100 to rotate, and the position of the tool bit 100 relative to the edge ring is controlled, wherein the inner circular machining annular surface 111 of the tool bit 100 is used for machining the inner diameter of the edge ring, the first conical surface 112 and the second conical surface 113 of the tool bit 100 are respectively used for chamfering the two side edges of the inner ring of the edge ring, tool changing is not needed, one-time finishing can be achieved, and production efficiency is improved.

The tool bit 100 in this embodiment is attached to the edge ring and performs a machining process for the edge ring by rotating it. In order to reduce the number of times of tool changing and the number of times of machining, the outer wall of the tool bit 100 is formed with an inner circular machined annular surface 111, a first tapered surface 112 and a second tapered surface 113, the first tapered surface 112, the inner circular machined annular surface 111 and the second tapered surface 113 being sequentially arranged and connected in a straight line direction, the first tapered surface 112 and the second tapered surface 113 each diverging in a direction away from the inner circular machined annular surface 111.

To form the tool bit 100, in one embodiment, the tool bit 100 includes a cylindrical body 110, a first cone 120, and a second cone 130, where the first cone 120, the cylindrical body 110, and the second cone 130 are sequentially arranged and connected in a straight line direction, an outer wall of the cylindrical body 110 forms an inner circular machined annular surface 111, and an outer wall of the first cone 120 forms a first conical surface 112.

In some embodiments, the tool tip 100 can be formed in a variety of ways, each of which is described below.

In one embodiment, the cylinder 110, the first cone 120 and the second cone 130 are fixedly connected, for example, integrally formed between the cylinder 110, the first cone 120 and the second cone 130.

In another embodiment, the cylinder 110, the first cone 120 and the second cone 130 are detachably connected. For example, the cylindrical body 110 may be screwed with the first cone 120 and the second cone 130, the screwing direction of the cylindrical body 110 with respect to the first cone 120 is a first direction, the screwing direction of the second cone 130 with respect to the cylindrical body 110 is a second direction, and the first direction and the second direction are the same and the same as the rotation direction of the tool bit 100.

The cylinder 110, the first cone 120 and the second cone 130 are detachably connected, and when part of the structures are worn or damaged, only the worn or damaged part of the structures are replaced, so that materials are saved.

In one embodiment, the first conical surface 112 is inclined at 45 degrees and the second conical surface 113 is inclined at 30 degrees. It should be noted that the inclination angles of the first conical surface 112 and the second conical surface 113 should be determined according to the requirements of the edge ring corresponding to different types of etchers.

In order to further improve the production efficiency, the embodiment further comprises a polishing head 200, wherein the roughness of the outer wall of the polishing head 200 is smaller than that of the outer wall of the tool bit 100, and after the rough machining of the tool bit 100 is completed, the edge ring is finished through the polishing head 200.

In one embodiment, the outer wall of the sanding head 200 is formed with a sanding annular surface 210, a third conical surface 220 and a fourth conical surface 230, the third conical surface 220, the sanding annular surface 210 and the fourth conical surface 230 being arranged and connected in sequence in a straight direction, the third conical surface 220 and the fourth conical surface 230 each diverging in a direction away from the sanding annular surface 210.

To reduce the number of tool exchanges, in one embodiment, the sanding head 200 is connected to the tool bit 100, and the third tapered surface 220, the sanding annular surface 210, the fourth tapered surface 230, the first tapered surface 112, the inner circular machining annular surface 111, and the second tapered surface 113 are sequentially arranged in a straight line direction.

In this embodiment, a shank 300 is further included, and the tool bit 100 is connected to the shank 300.

Compared with the prior art: the tool bit 100 is mounted on a clamp, the clamp drives the tool bit 100 to move, the inner circular machining annular surface 111 of the tool bit 100 is attached to the inner wall of the edge ring, the first conical surface 112 and the second conical surface 113 are respectively abutted to the edges of the two sides of the inner ring of the edge ring, the clamp drives the tool bit 100 to rotate, and the position of the tool bit 100 relative to the edge ring is controlled, wherein the inner circular machining annular surface 111 of the tool bit 100 is used for machining the inner diameter of the edge ring, the first conical surface 112 and the second conical surface 113 of the tool bit 100 are respectively used for chamfering the edges of the two sides of the inner ring of the edge ring, tool changing is not needed, one-time finishing can be achieved, and production efficiency is improved.

The present utility model is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present utility model are intended to be included in the scope of the present utility model.

Claims

1. The cutter for processing the edge ring is characterized by comprising a cutter head;

The outer wall of tool bit is formed with interior circular processing annular face, first conical surface and second conical surface, first conical surface interior circular processing annular face with the second conical surface is arranged in proper order along a straight line direction and is connected, first conical surface with the second conical surface is all along keeping away from interior circular processing annular face's direction diverging.

2. The edge ring machining tool according to claim 1, wherein the tool bit includes a cylindrical body, a first cone, and a second cone, the first cone, the cylindrical body, and the second cone being arranged in order and connected in a straight line direction, an outer wall of the cylindrical body forming the inner circular machining annular surface, and an outer wall of the first cone forming the first conical surface.

3. The edge ring machining tool according to claim 2, wherein the cylinder, the first cone and the second cone are fixedly connected.

4. The edge ring machining tool according to claim 2, wherein the cylinder, the first cone and the second cone are detachably connected.

5. The edge ring machining tool according to claim 4, wherein the cylindrical body is threadably connected to the first cone and the second cone, a screwing direction of the cylindrical body with respect to the first cone is a first direction, a screwing direction of the second cone with respect to the cylindrical body is a second direction, and the first direction and the second direction are the same and are the same as a rotation direction of the tool bit.

6. The edge ring processing tool according to claim 1, wherein the inclination angle of the first tapered surface is 45 degrees, and the second tapered surface is 30 degrees.

7. The edge ring machining tool according to claim 1, further comprising a grinding head having an outer wall with a roughness less than that of the outer wall of the tool bit.

8. The edge ring processing tool according to claim 7, wherein the outer wall of the grinding head is formed with a grinding annular surface, a third tapered surface and a fourth tapered surface, the third tapered surface, the grinding annular surface and the fourth tapered surface being sequentially arranged and connected in a straight line direction, the third tapered surface and the fourth tapered surface each diverging in a direction away from the grinding annular surface.

9. The edge ring processing tool according to claim 8, wherein the grinding head is connected to the tool bit, and the third tapered surface, the grinding annular surface, the fourth tapered surface, the first tapered surface, the inner circular processing annular surface, and the second tapered surface are arranged in this order in a straight line direction.

10. The edge ring processing tool of claim 1, further comprising a shank, wherein the tool bit is coupled to the shank.