CN221141871U - MPCVD plasma processing device with multimode cylindrical resonant cavity - Google Patents
MPCVD plasma processing device with multimode cylindrical resonant cavity Download PDFInfo
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- CN221141871U CN221141871U CN202323138545.2U CN202323138545U CN221141871U CN 221141871 U CN221141871 U CN 221141871U CN 202323138545 U CN202323138545 U CN 202323138545U CN 221141871 U CN221141871 U CN 221141871U
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- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 38
- 238000012545 processing Methods 0.000 title claims abstract description 34
- 238000012544 monitoring process Methods 0.000 claims abstract description 53
- 238000007789 sealing Methods 0.000 claims abstract description 36
- 230000005540 biological transmission Effects 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 11
- 238000003466 welding Methods 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 description 12
- 239000010432 diamond Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 238000005457 optimization Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The utility model discloses a multimode cylindrical resonant cavity MPCVD plasma processing device, which belongs to the technical field of MPCVD plasma processing devices and adopts the technical scheme that the device comprises a device body and a leakage on-line monitoring system, wherein an observation structure is bolted to the inner wall of the device body, a sealing door is movably connected to the front side of the observation structure, a limit component is bolted to the front side of the sealing door, and an air pressure monitoring meter component is arranged at the top of the observation structure.
Description
Technical Field
The utility model relates to the technical field of MPCVD plasma processing devices, in particular to a multimode cylindrical resonant cavity MPCVD plasma processing device.
Background
The resonant cavity is a device for generating and amplifying microwaves, and is generally composed of a cavity and an electromagnetic field reinforcing element, wherein the name of MPCVD is microwave plasma chemical vapor deposition, the MPCVD equipment is used as excellent diamond cultivation equipment, the working principle of the device is that microwaves are generated through a microwave source, reaction gas is excited into a plasma state under the action of the microwave field, the plasma is an ionized gas-like substance composed of positive and negative ions generated after atoms and atomic groups of which partial electrons are deprived are ionized, the plasma is spherically formed on a diamond substrate, and the substrate can be heated to a certain temperature by utilizing the high temperature of the plasma.
At present, chinese patent with publication number CN216864321U discloses a multimode non-cylindrical resonant cavity MPCVD device with a conical reflection top surface, which solves the technical problems that the prior resonant cavity structure limits low diamond synthesis power and slow growth speed, and comprises a microwave generating device for microwave emission and a growth cavity connected with the microwave generating device for diamond synthesis; the utility model has the advantages that the structure is simple, the design is scientific and reasonable, the use is convenient, the microwave power can be greatly enhanced, the growth speed is improved, and the silicon pollution caused by plasma etching can be greatly reduced.
The multimode cylindrical resonant cavity MPCVD plasma processing device is often used when diamond is cultivated, but the conventional multimode cylindrical resonant cavity MPCVD plasma processing device is not provided with a structure for monitoring air pressure in real time, when the multimode cylindrical resonant cavity MPCVD plasma processing device is in air pressure leakage, impurities are easily doped in synthesized diamond to influence the quality of the diamond, the conventional testing mode on the market is regular spot check, and the regular spot check is inconvenient to carry out rapid detection of air pressure leakage due to complex equipment use environment, affects the subsequent processing quality and is inconvenient for a user to use.
Disclosure of utility model
The utility model provides a multimode cylindrical resonant cavity MPCVD plasma processing device, which aims to solve the problems that the conventional multimode cylindrical resonant cavity MPCVD plasma processing device is not provided with a structure for monitoring air pressure in real time, when the multimode cylindrical resonant cavity MPCVD plasma processing device has air pressure leakage, impurities are easily mixed in synthesized diamond to influence the quality of the diamond, the conventional test mode on the market is regular spot check, and the regular spot check is inconvenient to quickly detect the air pressure leakage due to the complex equipment use environment, so that the subsequent processing quality is influenced, and the using effect is influenced.
The utility model discloses a multimode cylindrical resonant cavity MPCVD plasma processing device, which comprises a device body and a leakage on-line monitoring system, wherein an observation structure is bolted to the inner wall of the device body, a sealing door is movably connected to the front side of the observation structure, a limiting component is bolted to the front side of the sealing door, a gas pressure monitoring meter component is arranged at the top of the observation structure, and an alarm component is arranged at the top of the device body;
The leakage online monitoring system comprises a control terminal, an air pressure monitoring module, an alarm module, a wireless transmission module and a user terminal, wherein the input end of the leakage online monitoring system is electrically connected with a power supply module in a unidirectional mode, the output end of the air pressure monitoring module is electrically connected with the input end of the control terminal in a unidirectional mode, the output end of the control terminal is electrically connected with the input end of the alarm module in a unidirectional mode, the output end of the control terminal is electrically connected with the input end of the wireless transmission module in a unidirectional mode, the output end of the wireless transmission module is electrically connected with the input end of the user terminal in a unidirectional mode, the alarm module is an alarm module, and the air pressure monitoring module is an air pressure monitoring meter module.
In order to achieve the effect of on-site alarm by an alarm component, the multimode cylindrical resonant cavity MPCVD plasma processing device is preferably provided with an LED flashing lamp and an audible alarm, wherein the bottom of the audible alarm is bolted with the top of a device body, and the top of the device body is bolted with the bottom of the LED flashing lamp.
In order to achieve the effect of real-time alarm by the alarm module, the multimode cylindrical resonant cavity MPCVD plasma processing device is preferable, the alarm module comprises a lamplight flashing module and a buzzer alarm module, the output end of the lamplight flashing module is electrically connected with the input end of the buzzer alarm module in a unidirectional manner, the lamplight flashing module is an LED flashing lamp, and the buzzer alarm module is an acoustic alarm.
In order to achieve the effect of fixing the position of the connecting cylinder, as a preferred mode of the MPCVD plasma processing device with the multimode cylindrical resonant cavity, the inner wall of the observation structure is bolted with the connecting cylinder, the top of the connecting cylinder is bolted with the testing rod, and the top of the testing rod is bolted with the bottom of the air pressure monitoring meter component.
In order to achieve the sealing effect, the multimode cylindrical resonant cavity MPCVD plasma processing device of the present utility model is preferably characterized in that a sealing ring is bonded on the rear side of the sealing door, and the surface of the sealing ring is clamped with the inner wall of the observation structure.
In order to achieve the effect that the sealing ring is clamped on the inner wall of the observation structure through the sealing ring, the multi-mode cylindrical resonant cavity MPCVD plasma processing device is preferable in the utility model, the inner wall of the observation structure is provided with a sealing groove matched with the sealing ring, and the rear side of the sealing door is in close contact with the front side of the observation structure.
In order to achieve the effect of fixing the position of the fixing block, as a multimode cylindrical resonant cavity MPCVD plasma processing device of the utility model, preferably, the left side of the sealing door is bolted with the fixing block, and the left side of the fixing block is bolted with the rotating plate.
In order to achieve the effect of fixing the position of the rotating shaft, the multimode cylindrical resonant cavity MPCVD plasma processing device is preferable in the utility model, the rotating shaft is welded on the inner wall of the rotating plate, the connecting block is bolted on the left side of the observation structure, and the surface of the rotating shaft is rotationally connected with the inner wall of the connecting block.
In order to achieve the effect that the rotating plate moves on the inner wall of the connecting block, the multi-mode cylindrical resonant cavity MPCVD plasma processing device is preferable in the utility model, the inner wall of the connecting block is provided with a rotating hole matched with the rotating shaft, and the inner wall of the connecting block is provided with a moving groove matched with the rotating plate.
In order to achieve the effect of fixing the position of the universal wheel, the multimode cylindrical resonant cavity MPCVD plasma processing device is preferable in the utility model, and the universal wheel is bolted to the bottom of the device body.
Compared with the prior art, the utility model has the beneficial effects that:
This multimode cylinder resonant cavity MPCVD plasma processingequipment, through setting up the device body, leak on-line monitoring system, observe the structure, the sealing door, spacing subassembly, atmospheric pressure monitoring table subassembly and alarm component, the position through spacing subassembly with sealing door is restricted during the use, then fix the top at observing the structure through the atmospheric pressure monitoring table subassembly, the atmospheric pressure monitoring table subassembly of being convenient for carries out stable monitoring's work, when atmospheric pressure monitoring module monitors that the inside atmospheric pressure of observing the structure appears revealing, atmospheric pressure monitoring module can transmit abnormal data to control terminal, control terminal can control alarm module carries out alarm work, make alarm component carry out on-the-spot alarm, the on-the-spot staff of being convenient for carries out quick location, control terminal can transmit data to user terminal through wireless transmission module afterwards, be convenient for remind the staff to maintain the work, guarantee the quality of diamond when production.
Drawings
FIG. 1 is a block diagram of an overall multi-mode cylindrical resonator MPCVD plasma processing apparatus according to the present utility model;
FIG. 2 is a block diagram of an on-line leak monitoring system of the present utility model;
FIG. 3 is a block diagram of an alarm assembly of the present utility model;
FIG. 4 is a block diagram of an alarm module according to the present utility model;
FIG. 5 is a block diagram of a device body according to the present utility model;
FIG. 6 is a block diagram of a closure door according to the present utility model;
Fig. 7 is a structural view of a seal ring in the present utility model.
In the figure, 1, a device body; 2. a leakage on-line monitoring system; 201. a control terminal; 202. an air pressure monitoring module; 203. an alarm module; 2031. a light flashing module; 2032. a buzzer alarm module; 204. a wireless transmission module; 205. a user terminal; 206. a power supply module; 3. an alarm assembly; 301. an LED flashing lamp; 302. an acoustic alarm; 4. observing the structure; 5. closing the door; 6.a limit component; 7. an air pressure monitor assembly; 8. a connecting cylinder; 9. a test rod; 10. a seal ring; 11. sealing grooves; 12. a fixed block; 13. a rotating plate; 14. a rotating shaft; 15. a connecting block; 16. a rotation hole; 17. a movable groove; 18. and a universal wheel.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
In the description of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, in the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Referring to fig. 1-7, the present utility model provides the following technical solutions: the utility model provides a multimode cylinder resonant cavity MPCVD plasma processingequipment, includes device body 1 and leaks on-line monitoring system 2, and the inner wall of device body 1 is bolted with observation structure 4, and the front side swing joint of observation structure 4 has closed door 5, and the front side of closed door 5 is bolted with spacing subassembly 6, and the top of observation structure 4 is provided with atmospheric pressure monitoring table subassembly 7, and the top of device body 1 is provided with alarm subassembly 3;
the leakage online monitoring system 2 comprises a control terminal 201, an air pressure monitoring module 202, an alarm module 203, a wireless transmission module 204 and a user terminal 205, wherein the input end of the leakage online monitoring system 2 is electrically connected with a power supply module 206 in a unidirectional manner, the output end of the air pressure monitoring module 202 is electrically connected with the input end of the control terminal 201 in a unidirectional manner, the output end of the control terminal 201 is electrically connected with the input end of the alarm module 203 in a unidirectional manner, the output end of the control terminal 201 is electrically connected with the input end of the wireless transmission module 204 in a unidirectional manner, the output end of the wireless transmission module 204 is electrically connected with the input end of the user terminal 205 in a unidirectional manner, the alarm component 3 is the alarm module 203, and the air pressure monitoring module 202 is an air pressure monitoring meter component 7.
In this embodiment: through setting up device body 1, leak on-line monitoring system 2, observe structure 4, sealing door 5, spacing subassembly 6, atmospheric pressure monitoring table subassembly 7 and alarm component 3, the position that will seal door 5 during the use is restricted through spacing subassembly 6, then fix the top at observing structure 4 through atmospheric pressure monitoring table subassembly 7, the work of being convenient for atmospheric pressure monitoring table subassembly 7 to carry out stable monitoring, when atmospheric pressure monitoring module 202 monitors that the inside atmospheric pressure of observing structure 4 appears revealing, atmospheric pressure monitoring module 202 can transmit unusual data to control terminal 201, control terminal 201 can control alarm module 203 and carry out the alarm work, make alarm component 3 carry out the scene alarm, the on-the-spot staff of being convenient for carries out quick location, control terminal 201 can transmit the data to user terminal 205 through wireless transmission module 204 afterwards, be convenient for remind the staff to carry out maintenance work, guarantee the quality of diamond when producing.
As a technical optimization scheme of the utility model, the alarm component 3 is an LED flashing lamp 301 and an acoustic alarm 302, the bottom of the acoustic alarm 302 is bolted to the top of the device body 1, and the top of the device body 1 is bolted to the bottom of the LED flashing lamp 301.
In this embodiment: through setting up LED flashing light 301 and audible alarm 302, fix through the position of LED flashing light 301 and audible alarm 302 during the use, the audible alarm 302 is fixed with the position of device body 1, and audible alarm 302 and LED flashing light 301 of being convenient for carry out the work of audible and visual alarm, the work of the quick location of on-the-spot staff of being convenient for carries out.
As a technical optimization scheme of the utility model, the alarm module 203 is a lamplight flashing module 2031 and a buzzer alarm module 2032, the output end of the lamplight flashing module 2031 is electrically connected with the input end of the buzzer alarm module 2032 in a unidirectional manner, the lamplight flashing module 2031 is an LED flashing lamp 301, and the buzzer alarm module 2032 is an acoustic alarm 302.
In this embodiment: through setting up light scintillation module 2031 and buzzing alarm module 2032, when control terminal 201 transmits alarm data during the use, light scintillation module 2031 can carry out the work that light blinks, buzzing alarm module 2032 can carry out the work of buzzing alarm, convenient to use person uses.
As a technical optimization scheme of the utility model, a connecting cylinder 8 is bolted to the inner wall of the observation structure 4, a test rod 9 is bolted to the top of the connecting cylinder 8, and the top of the test rod 9 is bolted to the bottom of the air pressure monitoring meter assembly 7.
In this embodiment: through setting up connecting cylinder 8 and test rod 9, fix through the position of connecting cylinder 8 with observing structure 4 during the use, connecting cylinder 8 is fixed with the position of test rod 9, and the work of atmospheric pressure real-time supervision is carried out to atmospheric pressure monitor subassembly 7 of being convenient for.
As a technical optimization scheme of the utility model, a sealing ring 10 is adhered to the rear side of the sealing door 5, and the surface of the sealing ring 10 is clamped with the inner wall of the observation structure 4.
In this embodiment: through setting up sealing washer 10, fix through sealing washer 10 and the position of closing door 5 during the use, be convenient for close door 5 and drive sealing washer 10 joint to the inner wall of observing structure 4, be convenient for strengthen sealed work.
As a technical optimization scheme of the utility model, a sealing groove 11 matched with a sealing ring 10 is formed on the inner wall of the observation structure 4, and the rear side of the sealing door 5 is closely contacted with the front side of the observation structure 4.
In this embodiment: through the seal groove 11 of observing structure 4 inner wall and seting up, the sealing washer 10 of being convenient for passes through the seal groove 11 joint at the inner wall of observing structure 4, is convenient for carry out sealed work.
As a technical optimization scheme of the utility model, the left side of the closing door 5 is bolted with a fixed block 12, and the left side of the fixed block 12 is bolted with a rotating plate 13.
In this embodiment: through setting up fixed block 12 and rotating plate 13, fix through the position of fixed block 12 and closing door 5 during the use, fixed block 12 and rotating plate 13's position is fixed, is convenient for follow-up closing door 5 to carry out stable pivoted work.
As a technical optimization scheme of the utility model, a rotating shaft 14 is welded on the inner wall of a rotating plate 13, a connecting block 15 is bolted on the left side of an observation structure 4, and the surface of the rotating shaft 14 is rotationally connected with the inner wall of the connecting block 15.
In this embodiment: through pivot 14 and connecting block 15, fix through the position of pivot 14 with rotating plate 13 during the use, connecting block 15 is fixed with observing structure 4's position, and the stable pivoted work is carried out at connecting block 15's inner wall through pivot 14 to rotating plate 13 of being convenient for.
As a technical optimization scheme of the utility model, a rotating hole 16 matched with the rotating shaft 14 is formed in the inner wall of the connecting block 15, and a movable groove 17 matched with the rotating plate 13 is formed in the inner wall of the connecting block 15.
In this embodiment: through the rotation hole 16 that the connecting block 15 inner wall was seted up, the pivot of being convenient for 14 rotates at the inner wall of connecting block 15 through rotation hole 16, through the movable groove 17 that the connecting block 15 inner wall was seted up, the pivot of being convenient for 13 rotates at the inner wall of connecting block 15 through movable groove 17.
As a technical optimization of the utility model, the bottom of the device body 1 is bolted with a universal wheel 18.
In this embodiment: through setting up the universal wheel 18, fix through the position of universal wheel 18 with device body 1 during the use, the device body 1 of being convenient for removes through universal wheel 18.
Working principle: firstly, restrict the position of closing door 5 through spacing subassembly 6 during the use, then fix at the top of observing structure 4 through atmospheric pressure monitoring table subassembly 7, the atmospheric pressure monitoring table subassembly 7 of being convenient for carries out stable monitoring's work, when atmospheric pressure monitoring module 202 monitors that the inside atmospheric pressure of observing structure 4 appears revealing, atmospheric pressure monitoring module 202 can transmit unusual data to control terminal 201, control terminal 201 can control alarm module 203 and carry out alarm work, make alarm subassembly 3 carry out the scene alarm, the scene staff of being convenient for carries out quick location, control terminal 201 can transmit the data to user terminal 205 through wireless transmission module 204 afterwards, the staff of being convenient for is reminded and is carried out maintenance work, the quality of diamond when guaranteeing the production.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (10)
1. The utility model provides a multimode cylinder resonant cavity MPCVD plasma processingequipment, includes device body (1) and leaks on-line monitoring system (2), its characterized in that: the device comprises a device body (1), wherein an observation structure (4) is bolted to the inner wall of the device body (1), a sealing door (5) is movably connected to the front side of the observation structure (4), a limiting component (6) is bolted to the front side of the sealing door (5), an air pressure monitoring meter component (7) is arranged at the top of the observation structure (4), and an alarm component (3) is arranged at the top of the device body (1);
The leakage online monitoring system (2) comprises a control terminal (201), an air pressure monitoring module (202), an alarm module (203), a wireless transmission module (204) and a user terminal (205), wherein the input end of the leakage online monitoring system (2) is unidirectionally and electrically connected with a power supply module (206), the output end of the air pressure monitoring module (202) is unidirectionally and electrically connected with the input end of the control terminal (201), the output end of the control terminal (201) is unidirectionally and electrically connected with the input end of the alarm module (203), the output end of the control terminal (201) is unidirectionally and electrically connected with the input end of the wireless transmission module (204), the output end of the wireless transmission module (204) is unidirectionally and electrically connected with the input end of the user terminal (205), the alarm module (3) is the alarm module (203), and the air pressure monitoring module (202) is an air pressure monitoring meter assembly (7).
2. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 1, wherein: the alarm assembly (3) is an LED flashing lamp (301) and an audible alarm (302), the bottom of the audible alarm (302) is bolted with the top of the device body (1), and the top of the device body (1) is bolted with the bottom of the LED flashing lamp (301).
3. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 2, wherein: the alarm module (203) is a lamplight flashing module (2031) and a buzzer alarm module (2032), the output end of the lamplight flashing module (2031) is in unidirectional electrical connection with the input end of the buzzer alarm module (2032), the lamplight flashing module (2031) is an LED flashing lamp (301), and the buzzer alarm module (2032) is an acoustic alarm (302).
4. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 1, wherein: the inner wall bolt of observation structure (4) has connecting cylinder (8), the top bolt of connecting cylinder (8) has test rod (9), the top of test rod (9) is bolted with the bottom of atmospheric pressure monitoring table subassembly (7).
5. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 1, wherein: the rear side of the sealing door (5) is adhered with a sealing ring (10), and the surface of the sealing ring (10) is clamped with the inner wall of the observation structure (4).
6. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 5, wherein: the inner wall of the observation structure (4) is provided with a sealing groove (11) matched with the sealing ring (10), and the rear side of the sealing door (5) is in close contact with the front side of the observation structure (4).
7. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 1, wherein: the left side of the closing door (5) is bolted with a fixed block (12), and the left side of the fixed block (12) is bolted with a rotating plate (13).
8. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 7, wherein: the inner wall welding of swivel plate (13) has pivot (14), the left side bolt of observing structure (4) has connecting block (15), the surface of pivot (14) is connected with the inner wall rotation of connecting block (15).
9. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 8, wherein: the inner wall of the connecting block (15) is provided with a rotating hole (16) matched with the rotating shaft (14), and the inner wall of the connecting block (15) is provided with a movable groove (17) matched with the rotating plate (13).
10. The multi-mode cylindrical resonator MPCVD plasma processing apparatus of claim 1, wherein: the bottom of the device body (1) is bolted with a universal wheel (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323138545.2U CN221141871U (en) | 2023-11-21 | 2023-11-21 | MPCVD plasma processing device with multimode cylindrical resonant cavity |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323138545.2U CN221141871U (en) | 2023-11-21 | 2023-11-21 | MPCVD plasma processing device with multimode cylindrical resonant cavity |
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| CN221141871U true CN221141871U (en) | 2024-06-14 |
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| CN202323138545.2U Active CN221141871U (en) | 2023-11-21 | 2023-11-21 | MPCVD plasma processing device with multimode cylindrical resonant cavity |
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| CN (1) | CN221141871U (en) |
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