CN221076136U - Nitrogen supply structure - Google Patents
Nitrogen supply structure Download PDFInfo
- Publication number
- CN221076136U CN221076136U CN202322719798.2U CN202322719798U CN221076136U CN 221076136 U CN221076136 U CN 221076136U CN 202322719798 U CN202322719798 U CN 202322719798U CN 221076136 U CN221076136 U CN 221076136U
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- nitrogen
- liquid nitrogen
- gas
- control valve
- tank
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 425
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 201
- 239000007788 liquid Substances 0.000 claims abstract description 96
- 239000007789 gas Substances 0.000 claims abstract description 70
- 230000005540 biological transmission Effects 0.000 claims abstract description 43
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 23
- 239000006200 vaporizer Substances 0.000 claims abstract description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 37
- 239000001301 oxygen Substances 0.000 claims description 37
- 229910052760 oxygen Inorganic materials 0.000 claims description 37
- 230000001276 controlling effect Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000001514 detection method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The present utility model relates to a nitrogen gas supply structure, comprising: a liquid nitrogen tank; a liquid nitrogen vaporizer connected with the liquid nitrogen tank; a first gas transmission pipeline connected with the liquid nitrogen vaporizer; the first control valve is arranged on the first gas transmission pipeline; a nitrogen making machine; the second gas transmission pipeline is connected with the nitrogen making machine; the second control valve is arranged on the second gas transmission pipeline; a third gas line communicating the second gas line and the first gas line; the third control valve is arranged on the third gas transmission pipeline; and the mixed gas tank is communicated with the first gas transmission pipeline and the third gas transmission pipeline, an air supply pipe is also communicated with the mixed gas tank, and a second supply port is arranged at the end part of the air supply pipe. According to the utility model, the nitrogen is supplied by the liquid nitrogen tank and the nitrogen generator, so that the requirement of nitrogen can be met, the production equipment is prevented from being stopped, and the production efficiency is effectively ensured.
Description
Technical Field
The utility model relates to the technical field of nitrogen supply, in particular to a nitrogen supply structure.
Background
The production equipment of semiconductor package needs to use nitrogen gas is various, usually cost-effective, and the nitrogen gas in semiconductor package workshop adopts the nitrogen making machine to supply more, utilizes the nitrogen making machine to carry out nitrogen gas supply and has following problem, and when the nitrogen gas quantity exceeded the nitrogen making ability, the nitrogen gas supply volume is not enough, can lead to production equipment to shut down, and then influences production efficiency and extravagant manpower.
Disclosure of utility model
The utility model aims to overcome the defects of the prior art, provide a nitrogen supply structure and solve the problems that the production equipment is stopped, the production efficiency is affected, the manpower is wasted and the like due to the fact that the existing nitrogen supply by using a nitrogen generator is low in cost but insufficient in nitrogen supply.
The technical scheme for achieving the purpose is as follows:
the present utility model provides a nitrogen gas supply structure, comprising:
the liquid nitrogen tank stores liquid nitrogen therein;
the liquid nitrogen vaporizer is connected with the liquid nitrogen tank;
A first gas line connected to the liquid nitrogen vaporizer;
the first control valve is arranged on the first gas transmission pipeline;
a nitrogen making machine;
the end part of the second gas pipeline is provided with a first supply port;
the second control valve is arranged on the second gas transmission pipeline;
The first control valve is connected with the first gas pipeline and is used for controlling the liquid nitrogen vaporizer to be in a liquid nitrogen vaporizer state;
the third control valve is arranged on the third gas transmission pipeline;
And the mixed gas tank is communicated with the first gas transmission pipeline and the third gas transmission pipeline, an air supply pipe is also communicated with the mixed gas tank, and a second supply port is arranged at the end part of the air supply pipe.
According to the nitrogen supply structure, the liquid nitrogen tank and the nitrogen generator are arranged, when the nitrogen demand is large, the liquid nitrogen tank and the nitrogen generator are utilized to supply nitrogen together, and when the nitrogen demand is small, the nitrogen generator can be utilized to supply nitrogen independently, so that the nitrogen demand can be met, the production equipment is prevented from being stopped, the production efficiency is effectively ensured, and the cost of nitrogen supply can be comprehensively considered.
The nitrogen supply structure is further improved in that a first oxygen analyzer is connected to the nitrogen generator.
The nitrogen supply structure is further improved in that a pressure sensor is connected to the nitrogen generator.
A further improvement of the nitrogen supply structure of the utility model is that a second oxygen analyzer is connected to the mixing tank.
The nitrogen supply structure is further improved in that two liquid nitrogen evaporators are arranged in parallel, and switching valves are arranged in pipelines of the corresponding liquid nitrogen evaporators.
The nitrogen supply structure is further improved in that a pressure regulating valve is also arranged in the pipeline of the corresponding liquid nitrogen vaporizer.
The nitrogen supply structure is further improved in that a liquid level detector is arranged in the liquid nitrogen tank.
The nitrogen supply structure is further improved in that an overflow port is arranged on the liquid nitrogen tank.
The nitrogen supply structure is further improved in that the bottom of the liquid nitrogen tank is provided with a discharge outlet.
The nitrogen supply structure is further improved in that the liquid nitrogen tank is provided with a pressure regulating valve.
Drawings
FIG. 1 is a schematic diagram of a nitrogen supply structure according to the present utility model.
FIG. 2 is a piping layout of the nitrogen gas supply structure of the present utility model.
Detailed Description
The utility model will be further described with reference to the drawings and the specific examples.
Referring to fig. 1, the present utility model provides a nitrogen supply structure for supplying nitrogen to semiconductor packaging equipment, wherein the nitrogen supply structure adopts a liquid nitrogen tank and a nitrogen generator to supply nitrogen to the equipment, when the nitrogen demand is large, the nitrogen in the liquid nitrogen tank can meet the use demand of nitrogen, and when the nitrogen demand is small, the nitrogen supply structure can only use the nitrogen generator to supply nitrogen, so that the use cost of nitrogen can be saved to a great extent. The phenomenon of insufficient nitrogen supply can be avoided, the condition that production equipment is stopped is avoided, and the production efficiency can be ensured. The nitrogen gas supply structure of the present utility model will be described with reference to the accompanying drawings.
Referring to fig. 1, a schematic diagram of the nitrogen supply structure of the present utility model is shown. The nitrogen gas supply structure of the present utility model will be described with reference to fig. 1.
As shown in fig. 1, the nitrogen supply structure of the present utility model is a liquid nitrogen tank 21, a liquid nitrogen vaporizer 22, a first gas transmission line 23, a first control valve 231, a nitrogen generator 24, a second gas transmission line 25, a second control valve 251, a third gas transmission line 26, a third control valve 261, and a mixing tank 27; wherein liquid nitrogen is stored in the liquid nitrogen tank 21; the liquid nitrogen vaporizer 22 is connected with a liquid nitrogen tank and is used for vaporizing liquid nitrogen in the liquid nitrogen tank 21 to form nitrogen; the first gas transmission pipeline 23 is connected with the liquid nitrogen vaporizer 22 and is used for transmitting liquid nitrogen to be converted into nitrogen; the first control valve 231 is disposed on the first gas transmission pipeline 23 and is used for controlling the on/off of the first gas transmission pipeline 23, when the first control valve 231 controls the first gas transmission pipeline 23 to be opened, nitrogen is provided by the liquid nitrogen tank 21, and when the first control valve 231 controls the first gas transmission pipeline 23 to be closed, the nitrogen supply of the liquid nitrogen tank 21 is closed. The second gas pipeline 25 is connected with the nitrogen generator 24, a first supply port 251 is arranged at the end of the second gas pipeline 25, the second gas pipeline 25 is used for conveying nitrogen generated by the nitrogen generator 24, and equipment needing to use nitrogen can be connected with the first supply port 251 to obtain the nitrogen needed to be used. The second control valve 252 is disposed on the second gas transmission pipeline 25, the second control valve 252 is used for controlling the switch of the second gas transmission pipeline 25, when the second control valve 252 controls the second gas transmission pipeline 25 to be opened, the nitrogen generator 24 supplies nitrogen, and when the second control valve 252 controls the second gas transmission pipeline 25 to be closed, the nitrogen generator 24 is closed to supply nitrogen. The third gas transmission pipeline 26 is communicated with the second gas transmission pipeline 25 and the first gas transmission pipeline 23, one end of the third gas transmission pipeline 26 is connected between the first supply port 251 and the second control valve 252 of the second gas transmission pipeline 25, and the other end of the third gas transmission pipeline 26 is connected to one side, far away from the liquid nitrogen vaporizer 22, of the first control valve 231 on the first gas transmission pipeline 23; the third control valve 261 is disposed on the third gas transmission pipeline 26, the third control valve 261 is used for controlling the switch of the gas transmission pipeline 26, when the third control valve 261 controls the third gas transmission pipeline 26 to be opened, if the first control valve 231 is also in an opened state, and the second control valve 252 is in a closed state, at this time, nitrogen is provided by the liquid nitrogen tank 21; if the first control valve 231 is in a closed state and the second control valve 252 is in an open state, nitrogen gas is supplied from the nitrogen generator 24. When the third control valve 261 controls the third gas transmission pipeline 26 to be closed, the nitrogen can be provided by the liquid nitrogen tank 21 after the first control valve 231 is opened, and the nitrogen can be provided by the nitrogen generator 24 after the second control valve 252 is opened; the gas mixing tank 27 is communicated with the first gas transmission pipeline 23 and the third gas transmission pipeline 26, a gas supply pipe 28 is also communicated with the gas mixing tank 27, and a second supply port is arranged at the end part of the gas supply pipe 28.
The mixing gas tank 27 is provided, and can be used for fully mixing the nitrogen generated by the nitrogen generator 24 with the nitrogen in the liquid nitrogen tank 21 so as to improve the quality of the nitrogen and further ensure the production quality.
In one embodiment of the present utility model, as shown in FIG. 2, a first oxygen analyzer 29 is connected to the nitrogen generator 24. The first oxygen analyzer 29 is used to detect the oxygen content in the nitrogen gas generated by the nitrogen generator 24, and the too high oxygen content in the nitrogen gas affects the quality of the nitrogen gas, and thus affects the packaging process of the semiconductor device.
When the first oxygen analyzer 29 detects that the oxygen content in the nitrogen gas is higher than the set value, the second control valve 252 is controlled to be closed, the nitrogen gas supply of the nitrogen making machine is stopped, at this time, the first control valve 231 and the third control valve 261 at the liquid nitrogen tank 21 can be opened, and the nitrogen gas supply is performed by using the liquid nitrogen tank 21 to meet the production requirements.
Preferably, the set value is 100ppm, and when the oxygen content is 100ppm or more, the second control valve 252 is closed, and when the oxygen content is less than 100ppm, the second control valve 252 is opened.
Further, the first oxygen analyzer 29 is connected to a comparator connected to the second control valve 252, and when the oxygen content is equal to or higher than the set value, the comparator outputs a low level so that the second control valve 252 is closed, and when the oxygen content is lower than the set value, the comparator outputs a high level so that the second control valve 252 is opened. Preferably, the comparator of the first oxygen analyzer 29 is further connected to the first control valve 231 and the third control valve 261 via a NOT gate, and the first control valve 231 and the third control valve 261 are opened when the second control valve 252 is controlled to be closed.
In another preferred embodiment, the first to third control valves may be controlled to be opened and closed by a PLC connected to the first oxygen analyzer 29, so that the first to third control valves may be controlled to be opened and closed according to the detection result of the oxygen content. Specifically, the PLC control method can refer to a PLC control method disclosed in a prior patent (application number 201810545612.7, the invention is entitled as a dual controller control method) in china, which can realize the control of the opening and closing of the corresponding valve according to the detected corresponding signal.
In one embodiment of the present utility model, a pressure sensor is further connected to the nitrogen generator 24, and the pressure sensor is used to detect the pressure of the nitrogen generated by the nitrogen generator 24, so as to determine whether the nitrogen is sufficient. Preferably, the pressure sensor is arranged on the second gas transmission pipeline.
When the pressure detected by the pressure sensor is greater than or equal to the set value, the nitrogen supply of the nitrogen making machine is sufficient, the second control valve 252 can be opened, the first control valve 231 can be closed, the third control valve 261 can be opened or closed (specifically can be determined according to the required nitrogen supply port), and the nitrogen making machine is utilized to independently supply the nitrogen, so that the cost saving can be realized. The set value is preferably 0.5MPa. When the pressure detected by the pressure sensor is smaller than a low limit value, the nitrogen supply of the nitrogen making machine is insufficient, and at the moment, the first control valve to the third control valve can be opened, and the nitrogen making machine and the liquid nitrogen tank are simultaneously utilized for supplying nitrogen. The lower limit is preferably 0.4MPa.
In a preferred embodiment, the pressure sensor can be connected with the corresponding control valve through a comparator, so as to control the switch of the control valve.
In another preferred embodiment, the first to third control valves may be further controlled by a PLC connected to the pressure sensor, the control valves being controlled according to the pressure detected by the pressure sensor.
Preferably, when the pressure value detected by the pressure sensor is smaller than 0.4MPa and the oxygen content detected by the first oxygen analyzer is smaller than a set value, the first control valve to the third control valve can be controlled to be fully opened at the moment, and the nitrogen making machine and the liquid nitrogen tank supply air at the same time.
In one embodiment of the utility model, a second oxygen analyzer is connected to the mixing tank. The second oxygen analyzer is used for detecting the oxygen content of nitrogen at the mixed gas tank, and when the oxygen content at the mixed gas tank is larger than a set value, for example, the set value can be 100ppm, the first control valve is controlled to be opened, the third control valve is controlled to be closed, and the liquid nitrogen tank supplies gas for the mixed gas tank.
And if the detection result of the first oxygen analyzer is higher than the set value, controlling the second control valve to be closed. And if the detection result of the first oxygen analyzer is lower than the set value, controlling the second control valve to be opened.
When the nitrogen making machine is stopped, the first control valve is controlled to be opened, the second control valve is controlled to be closed, the third control valve can be opened or closed at the moment, the determination can be carried out according to a required supply port, and the liquid nitrogen tank is used for supplying air at the moment.
In a specific embodiment of the present utility model, as shown in fig. 1, each of the first control valve to the third control valve is formed by connecting a plurality of switching valves in series and parallel, specifically, the first control valve to the third control valve comprise a first switching valve to a third switching valve, wherein the first switching valve and the second switching valve are connected in series, the third switching valve is connected in parallel with the first switching valve and the second switching valve, so that the corresponding control valve can be opened only when two conditions are simultaneously satisfied by the first switching valve and the second switching valve connected in series, and the corresponding control valve can be opened when one condition is satisfied by the third switching valve.
For example, when the pressure of the nitrogen gas detected by the pressure sensor is smaller than 0.4MPa, the oxygen content of the nitrogen making machine is smaller than 100ppm at the same time, the first control valve to the third control valve are controlled to be opened at the same time, and the nitrogen making machine and the liquid nitrogen tank are used for supplying air together. The pressure sensor and the first oxygen analyzer can be directly connected with the first switch valve and the second switch valve of each control valve through the comparator, and when the two regulation conditions are met, the first switch valve and the second switch valve can be opened. When the nitrogen pressure detected by the pressure sensor is greater than or equal to 0.5MPa, the first control valve is controlled to be closed, the second control valve and the third control valve are controlled to be opened, and the nitrogen making machine supplies air. At this time, a NOT gate may be connected between the comparator and the second and third control valves, and at this time, it is also required to satisfy that the oxygen content detection of the first oxygen analyzer is less than 100ppm.
When the oxygen content detected by the second oxygen analyzer is more than 100ppm, the first control valve is controlled to be opened, the third control valve is closed, the liquid nitrogen tank is used for supplying air to the mixing tank, and when the oxygen content detected by the first oxygen analyzer is less than 100ppm, the second control valve and the third control valve are controlled to be opened, the first control valve is closed, and the nitrogen generator supplies air to the mixing tank.
And simultaneously meeting the requirement that the oxygen content is more than or equal to 100ppm or stopping the nitrogen making machine, controlling the second control valve and the third control valve to be closed, opening the first control valve, and supplying air by the liquid nitrogen tank. When the oxygen content detected by the first oxygen analyzer is less than 100mmp, the first control valve is closed, the second control valve and the third control valve are opened, and nitrogen is supplied by the nitrogen generator. The control valve can be automatically controlled by connecting the comparator with the corresponding switch valve.
In one embodiment of the present utility model, as shown in fig. 2, two liquid nitrogen evaporators 22 are provided, and the two liquid nitrogen evaporators 22 are arranged in parallel, and an on-off valve 221 is provided in a pipeline of the corresponding liquid nitrogen evaporator 22. The corresponding liquid nitrogen vaporizer 22 can be controlled to be connected with the liquid nitrogen tank 21 through the switch valve 221. Two liquid nitrogen vaporizers 22 are provided in order to leave one liquid nitrogen vaporizer ready for use, and the other can be activated in time in the event of a failure of one.
Further, a pressure regulating valve 222 is also provided in the pipeline of the corresponding liquid nitrogen vaporizer. The pressure regulating valve 222 is used to regulate the pressure of the nitrogen in the line.
In one embodiment of the present utility model, a liquid level detector 211 is provided within liquid nitrogen tank 21. The liquid level detector 211 is used for detecting the liquid level of the liquid nitrogen in the liquid nitrogen tank 21, and the liquid level detector 211 comprises a high liquid level detector and a low liquid level detector so as to realize the control of the liquid level of the liquid nitrogen in the liquid nitrogen tank 21.
Further, an overflow port 212 is provided in the liquid nitrogen tank 21. The overflow port 212 is provided at the top of the liquid nitrogen tank 21, and when the injection amount of liquid nitrogen in the liquid nitrogen tank 21 exceeds the overflow port, excess liquid nitrogen overflows from the overflow port 212.
The bottom of the liquid nitrogen tank 21 is provided with a discharge port 213. The discharge port 213 is used to discharge the residual liquid nitrogen in the liquid nitrogen tank 21.
The liquid nitrogen tank 21 is provided with a pressure regulating valve 214. The pressure regulating valve 214 can regulate the pressure in the liquid nitrogen tank 21, and ensures the use safety of the liquid nitrogen tank 21.
The present utility model has been described in detail with reference to the embodiments of the drawings, and those skilled in the art can make various modifications to the utility model based on the above description. Accordingly, certain details of the illustrated embodiments are not to be taken as limiting the utility model, which is defined by the appended claims.
Claims (10)
1. A nitrogen gas supply structure, comprising:
the liquid nitrogen tank stores liquid nitrogen therein;
the liquid nitrogen vaporizer is connected with the liquid nitrogen tank;
A first gas line connected to the liquid nitrogen vaporizer;
the first control valve is arranged on the first gas transmission pipeline;
a nitrogen making machine;
the end part of the second gas pipeline is provided with a first supply port;
the second control valve is arranged on the second gas transmission pipeline;
The first control valve is connected with the first gas pipeline and is used for controlling the liquid nitrogen vaporizer to be in a liquid nitrogen vaporizer state;
the third control valve is arranged on the third gas transmission pipeline;
And the mixed gas tank is communicated with the first gas transmission pipeline and the third gas transmission pipeline, an air supply pipe is also communicated with the mixed gas tank, and a second supply port is arranged at the end part of the air supply pipe.
2. The nitrogen gas supply structure as recited in claim 1, wherein a first oxygen analyzer is connected to said nitrogen generator.
3. The nitrogen gas supply structure according to claim 1, wherein a pressure sensor is connected to the nitrogen generator.
4. The nitrogen supply structure according to claim 1, wherein a second oxygen analyzer is connected to the mixing tank.
5. The nitrogen supply structure according to claim 1, wherein two liquid nitrogen vaporizers are provided, and the two liquid nitrogen vaporizers are arranged in parallel, and an on-off valve is provided in a pipeline of the corresponding liquid nitrogen vaporizer.
6. The nitrogen supply structure as claimed in claim 5, wherein a pressure regulating valve is further provided in the pipeline of the corresponding liquid nitrogen vaporizer.
7. The nitrogen gas supply structure according to claim 1, wherein a liquid level detector is provided in the liquid nitrogen tank.
8. The nitrogen supply structure according to claim 1, wherein an overflow port is provided in the liquid nitrogen tank.
9. The nitrogen gas supply structure according to claim 1, wherein a bottom of said liquid nitrogen tank is provided with a discharge port.
10. The nitrogen supply structure according to claim 1, wherein a pressure regulating valve is provided on the liquid nitrogen tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322719798.2U CN221076136U (en) | 2023-10-10 | 2023-10-10 | Nitrogen supply structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322719798.2U CN221076136U (en) | 2023-10-10 | 2023-10-10 | Nitrogen supply structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221076136U true CN221076136U (en) | 2024-06-04 |
Family
ID=91262085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322719798.2U Active CN221076136U (en) | 2023-10-10 | 2023-10-10 | Nitrogen supply structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221076136U (en) |
-
2023
- 2023-10-10 CN CN202322719798.2U patent/CN221076136U/en active Active
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