CN221070992U - Cooling liquid filling equipment of silicon rod slicing machine - Google Patents
Cooling liquid filling equipment of silicon rod slicing machine Download PDFInfo
- Publication number
- CN221070992U CN221070992U CN202322649310.3U CN202322649310U CN221070992U CN 221070992 U CN221070992 U CN 221070992U CN 202322649310 U CN202322649310 U CN 202322649310U CN 221070992 U CN221070992 U CN 221070992U
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- CN
- China
- Prior art keywords
- silicon rod
- workbench
- mixing
- filling
- cooling liquid
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Links
- 238000011049 filling Methods 0.000 title claims abstract description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 29
- 239000010703 silicon Substances 0.000 title claims abstract description 29
- 239000000110 cooling liquid Substances 0.000 title claims abstract description 26
- 238000002156 mixing Methods 0.000 claims abstract description 44
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 238000003756 stirring Methods 0.000 claims abstract description 11
- 239000002826 coolant Substances 0.000 claims abstract description 10
- 230000007774 longterm Effects 0.000 abstract description 2
- 238000005457 optimization Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002173 cutting fluid Substances 0.000 description 3
- 239000012809 cooling fluid Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000002231 Czochralski process Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model belongs to the technical field of silicon rod processing equipment, and particularly relates to cooling liquid filling equipment of a silicon rod slicer. Including the mixing drum body, be equipped with the water pump on the mixing drum body, be equipped with the hose on the water pump, the hose extends into the mixing drum is internal, be equipped with high-efficient mixing assembly on the mixing drum body, water pump one end is equipped with coolant liquid filling subassembly. The utility model has the capability of continuously stirring the proportioned cooling liquid and can ensure the long-term effectiveness of proportioning; the filling function is updated, too much effort of workers is not needed, the filling of the filling barrel can be automatically realized, the labor intensity of the workers is reduced, and the working efficiency is also improved.
Description
Technical Field
The utility model belongs to the technical field of silicon rod processing equipment, and particularly relates to cooling liquid filling equipment of a silicon rod slicer.
Background
The silicon rod is a silicon single crystal rod formed by shaping or pulling in a hearth through a zone melting or Czochralski process. The method is mainly used for producing monocrystalline silicon wafers, and is a key raw material for industries such as photovoltaics, semiconductors and the like. The preparation process requires a high-temperature environment, and is generally carried out by using full-automatic single crystal furnace equipment, so that strict requirements on equipment and technology are met. When processing a silicon rod, the silicon rod needs to be sliced, and the slicing step is generally divided into: bonding, solidification, wiping, slicing, degumming, inserting sheets, cleaning, drying, sorting and final detection, wherein in the processes, slicing links are complicated, in slicing, friction heating is generated due to high-speed movement and rotation, cooling is needed through special solutions, the traditional cooling mode is to split charging and filling through cooling liquid which is proportioned in advance, then spraying and cooling are carried out on a slicing machine, in the process, the filling mode is single, the cooling liquid is proportioned in a big pot firstly, split charging is carried out, the whole process is complicated, the effectiveness of proportioning is not guaranteed for a period of time, the working efficiency is affected, the slicing effect of the final silicon rod is also affected, and the cooling liquid filling equipment for the silicon rod slicing machine is provided for the problems.
Disclosure of utility model
In order to solve the problems in the background art, the utility model provides the cooling liquid filling equipment of the silicon rod slicing machine, which can accurately perform proportioning and can simultaneously perform convenient and rapid split charging and filling.
The utility model provides cooling liquid filling equipment of a silicon rod slicer, which comprises a mixing barrel body, wherein a water pump is arranged on the mixing barrel body, a hose is arranged on the water pump and extends into the mixing barrel body, a high-efficiency mixing assembly is arranged on the mixing barrel body, and a cooling liquid filling assembly is arranged at one end of the water pump; the cooling liquid filling assembly comprises a workbench, a horizontal adjusting mechanism is arranged below the workbench, a sliding plate is arranged on the workbench in a sliding mode, limit grooves are symmetrically formed in the sliding plate, filling barrels are arranged in the limit grooves, supports are arranged on the workbench, connecting pipes are arranged on the supports in an inserting mode, control valves are arranged on the connecting pipes and are communicated with hoses, plugs are arranged at the lower ends of the connecting pipes, liquid level sensors are arranged on the plugs, and the liquid level sensors are electrically connected with the control valves and the water pumps.
Further, the high-efficient mixing assembly is including being located inlet tube one and inlet tube two on the mixing drum body, all be equipped with flow switch on inlet tube one and the inlet tube two, mixing box body below is equipped with the motor, the motor output extends into the internal one end of mixing box and is equipped with the (mixing) shaft, evenly be equipped with a plurality of puddlers on the (mixing) shaft.
Further, the horizontal adjusting component comprises a supporting rod positioned below the workbench, the lower end of the supporting rod is connected with a screw rod in a threaded mode, and a base is arranged on the screw rod.
Further, sliding grooves are symmetrically formed in the workbench, and the sliding plate is connected with the sliding grooves in a sliding mode.
Further, limiting plates are symmetrically arranged on the workbench.
Further, the mixing box body is provided with a protection frame outside, and a support frame is arranged below the protection frame.
Further, one end of the connecting pipe, which is positioned on the bracket, is provided with a spring, and the spring is fixedly connected with the control valve.
Further, the connecting pipe is provided with a limiting ring above the chock.
The utility model has the beneficial effects that:
The utility model has the capability of continuously stirring the proportioned cooling liquid and can ensure the long-term effectiveness of proportioning; the filling function is updated, too much effort of workers is not needed, the filling of the filling barrel can be automatically realized, the labor intensity of the workers is reduced, and the working efficiency is also improved.
Drawings
Fig. 1 is a top perspective view of a silicon rod slicer coolant filling apparatus of the present utility model.
Fig. 2 is a bottom perspective view of the cooling liquid filling device of the silicon rod slicer of the present utility model.
FIG. 3 is a front cross-sectional view of the cooling liquid filling apparatus of the silicon rod slicer of the present utility model.
Fig. 4 is a schematic view of the region a of the cooling liquid filling apparatus of the silicon rod slicer of the present utility model.
Fig. 5 is a schematic view of the region B of the cooling liquid filling apparatus of the silicon rod slicer of the present utility model.
As shown in the figure:
1. Mixing drum body, 2, water pump, 3, hose, 4, workstation, 5, slide, 6, spacing groove, 7, filling drum, 8, support, 9, connecting pipe, 10, chock, 11, level sensor, 12, inlet tube one, 13, inlet tube two, 14, flow switch, 15, motor, 16, stirring shaft, 17, puddler, 18, bracing piece, 19, screw rod, 20, base, 21, spout, 22, limiting plate, 23, protection frame, 24, support frame, 25, spring, 26, spacing ring, 27, control valve.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Please refer to the accompanying drawings:
the cooling liquid filling equipment of the silicon rod slicing machine comprises a mixing barrel body 1, wherein the mixing barrel body 1 is internally used for mixing cooling liquid in a proportion, and specifically, the mixing proportion of cutting liquid and pure water is 1 (cutting liquid): 400 (pure water), both of which constitute the final cooling liquid; the mixing barrel body 1 is provided with a water pump 2, the water pump 2 is provided with a hose 3, the hose 3 extends into the mixing barrel body 1, the mixing barrel body 1 is provided with a high-efficiency mixing assembly, and one end of the water pump 2 is provided with a cooling liquid filling assembly;
the cooling liquid filling assembly comprises a workbench 4, a horizontal adjusting mechanism is arranged below the workbench 4, a sliding plate 5 is arranged on the workbench 4 in a sliding manner, limit grooves 6 are symmetrically formed in the sliding plate 5, filling barrels 7 are arranged in the limit grooves 6, supports 8 are arranged on the workbench 4, connecting pipes 9 are inserted and arranged on the supports 8, control valves 27 are arranged on the connecting pipes 9, the control valves 9 are communicated with the hoses 3, a plug 10 is arranged at the lower end of each connecting pipe 8, and the plug 10 can extend into the filling passages 7 and cannot block openings of the filling passages 7; be equipped with liquid level sensor 11 on the chock 10, liquid level sensor 11 and control valve 27 and water pump 2 electric connection, liquid level sensor 11 can monitor the height of the liquid level in the filling is led to 7, avoids the workman to keep vigilance constantly, prevents that the filling is extravagant too much.
As a technical optimization scheme of the utility model, the efficient mixing assembly comprises a first water inlet pipe 12 and a second water inlet pipe 13 which are positioned on a mixing barrel body 1, flow switches 14 are respectively arranged on the first water inlet pipe 12 and the second water inlet pipe 13, a motor 15 is arranged below the mixing box body 1, a stirring shaft 16 is arranged at one end of the output end of the motor 15 extending into the mixing box body 1, a plurality of stirring rods 17 are uniformly arranged on the stirring shaft 16, and the accuracy of the mixed solution can be ensured through the arrangement of the flow switches 14.
As a technical optimization scheme of the utility model, the horizontal adjusting component comprises a supporting rod 18 positioned below the workbench 4, a screw 19 is arranged at the lower end of the supporting rod 18 in a threaded connection manner, a base 20 is arranged on the screw 19, the base 20 is rotated, the screw 19 is driven to rotate, and the levelness of the workbench can be adjusted so as to prevent the workbench from working on uneven ground and generating filling errors.
As a technical optimization scheme of the utility model, the sliding grooves 21 are symmetrically arranged on the workbench 4, and the sliding plate 5 is in sliding connection with the sliding grooves 21, so that the sliding stability of the sliding plate 5 is improved.
As a technical optimization scheme of the utility model, the limiting plates 22 are symmetrically arranged on the workbench 4, so that the protection of the sliding plate 5 can be improved.
As a technical optimization scheme of the utility model, a protective frame 23 is arranged outside the mixing box body 1, a supporting frame 24 is arranged below the protective frame 23, and the mixing box body 1 is lifted to be separated from the ground.
As a technical optimization scheme of the utility model, one end of the connecting pipe 9, which is positioned on the bracket 8, is provided with a spring 25, the spring 25 is fixedly connected with a control valve 27, and when the connecting pipe 9 is not used, the connecting pipe 9 can be erected through the spring 25, so that the later use is convenient.
As a technical optimization scheme of the utility model, the connecting pipe 9 is provided with a limiting ring above the chock 10, so that the chock 10 can conveniently extend into the filling barrel 7.
Working principle:
The cutting fluid and the pure water are connected through the first water inlet pipe 1 and the second water inlet pipe 13, and the flow is controlled through the flow switch 14, so that the cooling fluid in the mixing drum body 1 is accurately proportioned, and meanwhile, the motor 15 drives the stirring shaft 16 and the stirring rod 17 to rotate, so that the effectiveness of the cooling fluid in the mixing drum body 1 is ensured; then placing a filling barrel 7 on the sliding plate 5, controlling the water pump 2 and the control valve 27 to be opened for filling until the liquid level reaches a designated height, starting by the liquid level sensor 11 until the liquid level stops working, taking down the filling barrel 7 by a worker, and placing the cooling liquid into a slicing machine for cooling; the cutting fluid and pure water were prepared in a ratio of 1 (cutting fluid): 400 The method comprises the steps of (pure water), cooling a wire mesh cut silicon block part by cooling liquid according to a certain flow controlled by equipment, wherein the cutting process is carried out in a multi-wire cutting machine under a closed condition, the cutting temperature of the slicing machine is set to be 20+/-3 ℃ (the multi-wire cutting equipment needs to use chilled water (normal temperature) to control the equipment temperature), and the slicing time is 140-160 min.
The utility model and its embodiments have been described above with no limitation, and the specific embodiments are shown as only one of the embodiments of the utility model, and the actual structure is not limited thereto. In summary, if one of ordinary skill in the art is informed by this disclosure, a structural manner and an embodiment similar to the technical solution should not be creatively devised without departing from the gist of the present utility model.
Claims (8)
1. The utility model provides a silicon rod slicer coolant liquid filling equipment, includes the mixing drum body, be equipped with the water pump on the mixing drum body, be equipped with the hose on the water pump, the hose extends into in the mixing drum body, its characterized in that: the mixing barrel body is provided with a high-efficiency mixing assembly, and one end of the water pump is provided with a cooling liquid filling assembly; the cooling liquid filling assembly comprises a workbench, a horizontal adjusting mechanism is arranged below the workbench, a sliding plate is arranged on the workbench in a sliding mode, limit grooves are symmetrically formed in the sliding plate, filling barrels are arranged in the limit grooves, supports are arranged on the workbench, connecting pipes are arranged on the supports in an inserting mode, control valves are arranged on the connecting pipes and are communicated with hoses, plugs are arranged at the lower ends of the connecting pipes, liquid level sensors are arranged on the plugs, and the liquid level sensors are electrically connected with the control valves and the water pumps.
2. The silicon rod slicer coolant filling apparatus of claim 1, wherein: the efficient mixing assembly comprises a first water inlet pipe and a second water inlet pipe which are positioned on a mixing barrel body, flow switches are arranged on the first water inlet pipe and the second water inlet pipe, a motor is arranged below the mixing box body, a stirring shaft is arranged at one end of an output end of the motor, which extends into the mixing box body, and a plurality of stirring rods are uniformly arranged on the stirring shaft.
3. The silicon rod slicer coolant filling apparatus of claim 1, wherein: the horizontal adjusting assembly comprises a supporting rod positioned below the workbench, the lower end of the supporting rod is connected with a screw rod in a threaded mode, and a base is arranged on the screw rod.
4. The silicon rod slicer coolant filling apparatus of claim 1, wherein: the workbench is symmetrically provided with sliding grooves, and the sliding plate is in sliding connection with the sliding grooves.
5. The silicon rod slicer coolant filling apparatus of claim 1, wherein: limiting plates are symmetrically arranged on the workbench.
6. The silicon rod slicer coolant filling apparatus of claim 1, wherein: the mixing box body is provided with a protection frame outside, and a support frame is arranged below the protection frame.
7. The silicon rod slicer coolant filling apparatus of claim 1, wherein: one end of the connecting pipe, which is positioned on the bracket, is provided with a spring which is fixedly connected with the control valve.
8. The silicon rod slicer coolant filling apparatus of claim 1, wherein: and a limiting ring is arranged above the plug block on the connecting pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322649310.3U CN221070992U (en) | 2023-09-28 | 2023-09-28 | Cooling liquid filling equipment of silicon rod slicing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322649310.3U CN221070992U (en) | 2023-09-28 | 2023-09-28 | Cooling liquid filling equipment of silicon rod slicing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221070992U true CN221070992U (en) | 2024-06-04 |
Family
ID=91267825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322649310.3U Active CN221070992U (en) | 2023-09-28 | 2023-09-28 | Cooling liquid filling equipment of silicon rod slicing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221070992U (en) |
-
2023
- 2023-09-28 CN CN202322649310.3U patent/CN221070992U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |