CN221025850U - Feeding device of equipment for completing exhaust packaging of pressure bags in same furnace chamber - Google Patents
Feeding device of equipment for completing exhaust packaging of pressure bags in same furnace chamber Download PDFInfo
- Publication number
- CN221025850U CN221025850U CN202322654026.5U CN202322654026U CN221025850U CN 221025850 U CN221025850 U CN 221025850U CN 202322654026 U CN202322654026 U CN 202322654026U CN 221025850 U CN221025850 U CN 221025850U
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- Prior art keywords
- driving shaft
- furnace chamber
- sleeve
- sealing
- feeding device
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 60
- 238000009434 installation Methods 0.000 claims abstract description 39
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 21
- 238000001816 cooling Methods 0.000 claims description 16
- 238000005538 encapsulation Methods 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims description 4
- 210000001503 joint Anatomy 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 10
- 238000007872 degassing Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Vacuum Packaging (AREA)
Abstract
The utility model discloses a feeding device of equipment for finishing exhaust packaging of a pressure bag in the same furnace chamber, which comprises a workpiece disc provided with a plurality of workpiece placing positions, a driving shaft for driving the workpiece disc to rotate, a motor for driving the driving shaft to rotate, a control system for controlling the motor to rotate and a sealing installation structure, wherein the driving shaft is vertically installed in a driving shaft installation hole at the bottom of the furnace chamber through the sealing installation structure, the upper end of the driving shaft is horizontally fixed in the furnace chamber, and the lower end of the driving shaft is connected with the motor below a vacuum furnace. The advantages are that: the driving mechanism of the feeding device is arranged outside the furnace chamber, so that the driving mechanism avoids a high-temperature environment of about 300 ℃, and simultaneously more furnace chamber space is vacated, so that the furnace chamber space with limited volume can be placed at one time and more pressure bags can be processed.
Description
Technical Field
The utility model relates to a feeding device of equipment for completing exhaust packaging of a pressure bag in the same furnace chamber, and belongs to the technical field of vacuum packaging.
Background
The film vacuum gauge is an instrument for measuring vacuum degree, and its principle is to measure vacuum degree by utilizing the motion rule of gas molecules in vacuum, and it has a key component-pressure bag, and the exterior of the pressure bag has an exhaust tail pipe for evacuating, an external connection pipe for external connection of detection object and two positive and negative electrode wire connectors for connecting instrument.
According to the measurement principle, the film vacuum gauge can be divided into a plurality of types, and the measurement range of the vacuum degree is 1.33×10 5—1.33x10-2 Pa.
The film vacuum gauge has a very wide application range and can be applied to various fields of aerospace, electronics, chemical industry, medical treatment and the like. For example, in the electronics field, thin film vacuum gauges can be used to test vacuum tubes, semiconductor devices, to ensure their normal use and lifetime.
The film vacuum gauge pressure package is a main component of the whole film vacuum gauge, and how to vacuumize and package the pressure package more standard, simpler, more economical and more efficient is always a problem discussed in the field. There are two conventional solutions:
firstly, placing the sample in a high-temperature high-vacuum environment, and sealing by adopting a high-temperature eutectic welding method, a brazing method or a glass sintering method and the like. However, the vacuum welding void ratio is high, so that the sealing performance of a sealing area is affected, and the maintenance of the vacuum degree in the reference cavity can be affected.
And secondly, adopting oxygen-free copper as a sealing material, and performing clamping by using a clamping device under the condition of continuous vacuumizing. However, the degassing step before sealing is insufficient, and the vacuum degree in the reference cavity is difficult to improve.
In order to solve the above-mentioned problems, various solutions are proposed in the prior art, and the following two patent documents disclose more typical solutions:
The application number is 202211376858.9, the name is a sealing and arranging table for an active electric vacuum device and an integrated twice sealing and arranging method, and the sealing and arranging table disclosed in the document comprises an outer vacuum system, an inner vacuum system, a control system, a heating system, a high-voltage power supply and a mechanical lifting system; the external vacuum system is used for providing a high vacuum environment in an external vacuum cavity in the furnace body and providing a vacuum working environment for the outside of the active electric vacuum device; the inner vacuum system is used for exhausting the active electric vacuum device in the furnace body and providing an ultrahigh vacuum environment for the active electric vacuum device; the heating system is used for electrifying the heating body and heating an active electric vacuum device in the furnace body; and the high-voltage power supply is used for driving the active electric vacuum device to work and generating X rays. The invention realizes the high-quality integrated ultrahigh vacuum sealing and discharging of the metal ceramic X-ray tube on the premise of improving the efficiency, saving energy and reducing emission, and improves the production efficiency and the production yield. The general manner of packaging is disclosed in the specification, and the word "pinch-off" is disclosed in fig. 7.
The application number 202211282013.3 is a reference chamber forming device and a reference chamber forming method for a film vacuum gauge, and the reference chamber forming device for the film vacuum gauge disclosed in the document comprises: the degassing module comprises a baking chamber and a first vacuum pump set for vacuumizing the baking chamber; the clamping module comprises a main cavity, a clamping mechanism arranged in the main cavity and a second vacuum pump set for vacuumizing the main cavity; the main chamber is arranged at the downstream of the baking chamber and is communicated with the baking chamber through a first valve capable of controlling opening and closing; the conveying module is used for enabling the sample to be processed to be conveyed in a sealing mode between the degassing module and the clamping module; the gas backfill module is provided with a plurality of backfill branches capable of controlling on-off, is connected with the degassing module and the clamping module and is used for backfilling gas into the degassing module and the clamping module. The problems of high vacuum welding temperature and large void ratio are avoided, and the sealing performance of a sealing area is ensured; and before sealing, baking and degassing are adopted to accelerate the outgassing of the sample material to be processed, so that the vacuum degree in the reference chamber is improved.
The two technical schemes relate to the vacuum pumping and packaging operation of the vacuum part of the film vacuum gauge in the vacuum environment of the vacuum chamber, the idea of the invention is only focused on how to reach the quality standard of the product, and a specific creative technical scheme is not provided for how to solve the problems of vacuum pumping and packaging of the vacuum part by means of simpler, more economical and more efficient measures. From the innovation of the traditional technology to the prior art, the vacuumizing packaging technology of the pressure bag still has two main defects:
1. The device is complex in construction. At least two cavities capable of being communicated and capable of being vacuumized need to be arranged, one cavity is used for vacuuming under the high-temperature condition, and the other cavity is used for packaging tail cutting. A conveying mechanism for accurately clamping and pushing the workpiece is also required to be arranged between the two vacuum chambers.
2. The process is complex. After one chamber completes high-temperature vacuumizing on the pressure bag, the pressure bag needs to be pushed to the other chamber for tail cutting and packaging.
Disclosure of utility model
In order to solve the problems that the prior art does not solve or does not solve well, the company performs a series of improvements (related schemes and patent application protection on the same date of the utility model), wherein the improvements comprise a vacuum furnace with a vacuum chamber, a tail shearing device, a feeding device and the like, the driving mechanism is arranged outside the vacuum furnace, the actuating mechanism is arranged in the vacuum chamber, and the utility model is one of the series of improvements.
The utility model aims to solve the technical problems that: a feeding device is provided which can place a driving mechanism outside a vacuum furnace and a workpiece tray inside a furnace chamber.
Aiming at the problems, the technical proposal provided by the utility model is as follows:
The utility model provides a feedway of equipment that accomplish pressure package exhaust encapsulation in same furnace chamber, includes work piece dish that has a plurality of work pieces place, drive shaft pivoted motor, control motor pivoted control system and sealed mounting structure that drive shaft rotated, the drive shaft passes through sealed mounting structure vertical installation in the drive shaft mounting hole of furnace chamber bottom, and its upper end is fixed the work piece dish level in the furnace chamber, and the motor is connected to its lower extreme below the vacuum furnace.
Further, the seal mounting structure comprises a shaft magnetic liquid seal sleeve, the shaft magnetic liquid seal sleeve is sleeved on the driving shaft below the vacuum furnace, and the upper end of the shaft magnetic liquid seal sleeve is sealed with the bottom surface of the vacuum furnace around the mounting hole of the driving shaft.
Further, the sealing installation structure further comprises a lower sealing installation sleeve, the lower sealing installation sleeve is sleeved outside the driving shaft between the shaft magnetic liquid sealing sleeve and the vacuum furnace bottom surface around the driving shaft installation hole, the upper end of the shaft magnetic liquid sealing sleeve is sealed with the vacuum furnace bottom surface around the driving shaft installation hole, the lower end of the lower sealing installation sleeve is in sealing butt joint with the shaft magnetic liquid sealing sleeve through a flange plate, and the upper end of the lower sealing installation sleeve is welded and sealed with the vacuum furnace bottom surface around the driving shaft installation hole.
Further, the sealing installation structure further comprises a flange sleeve sleeved outside the driving shaft in the furnace chamber, and a workpiece disc installation flange for installing the workpiece disc is arranged at the top end of the flange sleeve.
Further, a bearing for installing the driving shaft is arranged below the flange sleeve.
Further, the motor is in sealing connection with the lower end of the driving shaft through a synchronous belt.
Further, the motor is a servo motor.
Further, a water cooling blind hole is arranged at the bottom end of the driving shaft along the axial line upwards, a water pipe for spraying water to the top of the water cooling blind hole is arranged in the water cooling blind hole, and a running water gap is arranged between the water pipe and the wall of the water cooling blind hole.
Advantageous effects
1. The driving mechanism of the feeding device is arranged outside the furnace chamber, so that the driving mechanism avoids a high-temperature environment of about 300 ℃, and simultaneously more furnace chamber space is vacated, so that the furnace chamber space with limited volume can be placed at one time and more pressure bags can be processed;
2. the driving mechanism of the feeding device is arranged outside the furnace chamber, so that the arrangement is simpler because the arrangement is not limited by space, and the operation and the maintenance are more convenient.
Drawings
FIG. 1 is a schematic perspective view of a part of a feeding device for a device for exhausting and packaging a pressure bag in a same furnace chamber, wherein the lower seal assembly is arranged around the periphery of a driving shaft above a shaft magnetic liquid seal sleeve;
fig. 2 is a schematic perspective view of the top end of the driving shaft in the furnace chamber according to an embodiment;
FIG. 3 is a schematic perspective view of the workpiece tray installed in a furnace chamber according to an embodiment;
FIG. 4 is a schematic perspective view of a portion of the drive member of the feeding device mounted on the bottom of a vacuum furnace;
Fig. 5 is a schematic sectional view of the mounting and fixing of the feeding device according to the second embodiment.
In the figure: 1. a workpiece disc, 2, a driving shaft; 201. shaft magnetic liquid sealing sleeve; 202. a lower seal mounting sleeve; 203. a flange sleeve; 204. a bearing; 205. a workpiece disc mounting flange; 206. water-cooling blind holes; 207. a water pipe; 3. a motor; 4. a synchronous belt; 5. a vacuum furnace; 501. a cavity; 502. and a drive shaft mounting hole.
Detailed Description
As shown in fig. 2, the purpose of developing the tail-cutting packaging equipment of the film vacuum gauge pressure package is to meet the requirements of vacuumizing and packaging the film vacuum gauge pressure package in the furnace chamber 101, and meanwhile, the equipment is simpler in structure and higher in operation efficiency. The basic scheme is as follows: 1. the pressure bag is vacuumized in the closed furnace chamber 101 synchronously with the furnace chamber 101 (at the furnace temperature of about 300 ℃ C.) as in the prior art; 2. the improvement is that the tail cutting encapsulation is completed in the furnace chamber 101 under the vacuum and the state of about 300 ℃ (the tail pipe is strongly clamped off and sealed by a clamp, so that the external gas cannot enter the pressure bag).
The utility model provides a feeding device which can place a driving mechanism outside a vacuum furnace and a workpiece disc inside a furnace chamber.
The utility model is further described below with reference to the accompanying drawings:
Example 1
As shown in fig. 1-4, a feeding device for a device for performing exhaust packaging of pressure bags in the same furnace chamber is improved in that: the vacuum furnace comprises a workpiece disc with a plurality of workpiece placement positions, a driving shaft 2 for driving the workpiece disc to rotate, a motor 3 for driving the driving shaft 2 to rotate, a control system for controlling the motor 3 to rotate and a sealing installation structure, wherein the driving shaft is vertically installed in a driving shaft installation hole 502 at the bottom of the furnace chamber 501 through the sealing installation structure, the upper end of the driving shaft is horizontally fixed in the furnace chamber 501, and the lower end of the driving shaft is connected with the motor 3 below the vacuum furnace 5. In this way, it is possible to install only the workpiece tray in the cavity 501 of the vacuum furnace 5, and to dispose the motor 3 for driving the driving shaft 2 to rotate outside the cavity 501 so as to avoid the high temperature of about 300 degrees celsius in the cavity, while also freeing up a part of the space of the cavity 501.
The sealing installation structure comprises a shaft magnetic liquid sealing sleeve 201, the shaft magnetic liquid sealing sleeve 201 is sleeved on the driving shaft 2 below the vacuum furnace 5, sealing is achieved between the driving shaft 2 and the shaft magnetic liquid sealing sleeve 201, rotation of the driving shaft 2 is not affected, and the upper end of the shaft magnetic liquid sealing sleeve 201 is sealed with the bottom surface of the vacuum furnace 5 around the driving shaft installation hole 502. This achieves sealing between the drive shaft 2 and the drive shaft mounting hole 502.
The sealing installation structure further comprises a lower sealing installation sleeve 202, the lower sealing installation sleeve 202 is sleeved outside the driving shaft 2 between the shaft magnetic liquid sealing sleeve 201 and the bottom surface of the vacuum furnace 5 around the driving shaft installation hole 502, the upper end of the shaft magnetic liquid sealing sleeve 201 is sealed with the bottom surface of the vacuum furnace 5 around the driving shaft installation hole 502, the lower end of the lower sealing installation sleeve 202 is in sealing butt joint with the shaft magnetic liquid sealing sleeve 201 through a flange, and the upper end of the lower sealing installation sleeve 202 is welded and sealed with the bottom surface of the vacuum furnace 5 around the driving shaft installation hole 502.
The seal mounting structure further comprises a flange sleeve 203 sleeved outside the driving shaft 2 in the furnace chamber 501, and a workpiece disc mounting flange 205 for mounting the workpiece disc 1 is arranged at the top end of the flange sleeve 203.
A bearing 204 for mounting the drive shaft 2 is provided below the flange cover 203, and the drive shaft 2 is mounted on the bottom of the vacuum furnace through the bearing 204.
The motor 3 is connected with the lower end of the transmission shaft through a synchronous belt 4.
The motor is a servo motor.
Example two
As shown in fig. 5, the difference from embodiment 1 is that a water cooling blind hole 206 is provided at the bottom end of the driving shaft 2 along the axis upward, a water pipe 207 for spraying water to the top of the water cooling blind hole 206 is provided in the water cooling blind hole 206, and a running water gap is provided between the water pipe 207 and the wall of the water cooling blind hole 206. When the cooling device is applied, cooling water is sprayed out from the top end of the water pipe 207, flows downwards along a running water gap between the water pipe 207 and the wall of the water-cooling blind hole 206, and realizes cooling of the driving shaft 2.
The above embodiments are only for the purpose of more clearly describing the present utility model and should not be construed as limiting the scope of the present utility model, and any equivalent modifications should be construed as falling within the scope of the present utility model.
Claims (8)
1. A feeding device for equipment for completing exhaust packaging of pressure bags in the same furnace chamber, which is characterized in that: including work piece dish (1) that has a plurality of work pieces place, drive work piece dish (1) pivoted drive shaft (2), drive shaft (2) pivoted motor (3), control motor (3) pivoted control system and seal mounting structure, drive shaft (2) are installed in drive shaft mounting hole (502) of furnace chamber (501) bottom through seal mounting structure is vertical, and its upper end is fixed work piece dish (1) level in furnace chamber (501), and motor (3) are connected to its lower extreme below vacuum furnace (5).
2. The feeding device of the apparatus for accomplishing the encapsulation of the exhaust gas of the pressure package in the same furnace chamber as defined in claim 1, wherein: the sealing installation structure comprises a shaft magnetic liquid sealing sleeve (201), the shaft magnetic liquid sealing sleeve (201) is sleeved on a driving shaft (2) below the vacuum furnace (5), and the upper end of the shaft magnetic liquid sealing sleeve (201) is sealed with the bottom surface of the vacuum furnace (5) around a driving shaft installation hole (502).
3. The feeding device of the apparatus for accomplishing the encapsulation of the exhaust gas of the pressure package in the same furnace chamber as claimed in claim 2, wherein: the sealing installation structure further comprises a lower sealing installation sleeve (202), the lower sealing installation sleeve (202) is sleeved outside the driving shaft (2) between the shaft magnetic liquid sealing sleeve (201) and the bottom surface of the vacuum furnace (5) around the driving shaft installation hole (502), the upper end of the shaft magnetic liquid sealing sleeve (201) is sealed with the bottom surface of the vacuum furnace (5) around the driving shaft installation hole (502), the lower end of the lower sealing installation sleeve (202) is in sealing butt joint with the shaft magnetic liquid sealing sleeve (201) through a flange plate, and the upper end of the lower sealing installation sleeve (202) is in welding sealing with the bottom surface of the vacuum furnace (5) around the driving shaft installation hole (502).
4. A feeding device for an apparatus for accomplishing exhaust packaging of pressure packets in a single oven cavity as claimed in claim 3, wherein: the sealing installation structure further comprises a flange sleeve (203) sleeved outside the driving shaft (2) in the furnace chamber (501), and a workpiece disc installation flange (205) for installing the workpiece disc (1) is arranged at the top end of the flange sleeve (203).
5. The apparatus for feeding a package in a single oven cavity according to claim 4, wherein: a bearing (204) for installing the driving shaft (2) is arranged below the flange sleeve (203).
6. The feeding device of an apparatus for accomplishing exhaust encapsulation of pressure packets in a furnace chamber according to any one of claims 1 to 5, wherein: the motor (3) is connected with the lower end of the driving shaft (2) in a sealing way through a synchronous belt (4).
7. The feeding device of an apparatus for accomplishing exhaust encapsulation of pressure packets in a furnace chamber according to any one of claims 1 to 5, wherein: the motor is a servo motor.
8. A feeding device for an apparatus for accomplishing exhaust packaging of pressure packets in a single oven cavity as claimed in claim 3, wherein: a water cooling blind hole (206) is arranged at the bottom end of the driving shaft (2) along the axial line upwards, a water pipe (207) for spraying water to the top of the water cooling blind hole (206) is arranged in the water cooling blind hole (206), and a water flowing gap is reserved between the water pipe (207) and the wall of the water cooling blind hole (206).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322654026.5U CN221025850U (en) | 2023-09-28 | 2023-09-28 | Feeding device of equipment for completing exhaust packaging of pressure bags in same furnace chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322654026.5U CN221025850U (en) | 2023-09-28 | 2023-09-28 | Feeding device of equipment for completing exhaust packaging of pressure bags in same furnace chamber |
Publications (1)
Publication Number | Publication Date |
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CN221025850U true CN221025850U (en) | 2024-05-28 |
Family
ID=91130935
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202322654026.5U Active CN221025850U (en) | 2023-09-28 | 2023-09-28 | Feeding device of equipment for completing exhaust packaging of pressure bags in same furnace chamber |
Country Status (1)
Country | Link |
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CN (1) | CN221025850U (en) |
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2023
- 2023-09-28 CN CN202322654026.5U patent/CN221025850U/en active Active
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