CN221007459U - Device for detecting ion concentration - Google Patents
Device for detecting ion concentration Download PDFInfo
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- CN221007459U CN221007459U CN202322984721.8U CN202322984721U CN221007459U CN 221007459 U CN221007459 U CN 221007459U CN 202322984721 U CN202322984721 U CN 202322984721U CN 221007459 U CN221007459 U CN 221007459U
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- 150000001450 anions Chemical class 0.000 claims abstract description 99
- 150000001768 cations Chemical class 0.000 claims abstract description 92
- 238000001514 detection method Methods 0.000 claims abstract description 84
- 150000002500 ions Chemical class 0.000 claims abstract description 27
- 125000002091 cationic group Chemical group 0.000 claims description 19
- 125000000129 anionic group Chemical group 0.000 claims description 12
- 239000003480 eluent Substances 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 10
- 238000002347 injection Methods 0.000 abstract description 6
- 239000007924 injection Substances 0.000 abstract description 6
- 238000012360 testing method Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000004255 ion exchange chromatography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model provides a device for detecting ion concentration, which comprises a sample injector, a first valve, a pump, a quantitative ring unit, a second valve, an anion detection unit and a cation detection unit, wherein the first valve is connected with the sample injector; the first valve includes a first passage, a second passage, a third passage, and a fourth passage; the second valve includes a first passage, a second passage, and a third passage; the sample injector, the first channel of the first valve, the second channel of the first valve, the pump, the dosing ring unit, the third channel of the first valve, the fourth channel of the first valve and the first channel of the second valve are sequentially connected in series; the first passage of the second valve switchably communicates with its own second passage or third passage; the second channel of the second valve is communicated with the anion detection unit; the third passage of the second valve communicates with the cation detection unit. The device can realize three detection modes: only the anion concentration is detected, only the cation concentration is detected, and the cation and anion concentration is detected at the same time. The device adopts a single-channel sample injection mode, and only needs one pump, so that the cost is low.
Description
Technical Field
The utility model relates to the technical field of ion concentration detection, in particular to a device for detecting ion concentration.
Background
Ion concentration detection is mainly related to UPW (Ultra Pure Water) and AMC (Airborne Molecular Contamination, gaseous molecular contaminant) in semiconductor processes. UPW is in direct contact with wafers in production and is mainly used for wet chemical dilution, wafer cleaning and immersion lithography. AMC comprises various substances such as acid (MA) and alkali (MB), wherein the acid is derived from the processes of corrosion, cleaning, diffusion and the like of chips by using various acid liquor in a process flow, and main pollutants are fluoride, chloride, sulfuric acid mist and the like; the alkali is mainly from etching process of ammonia water and ammonia gas, and the main pollutant is NH4+. Along with the improvement of the process, the rapid, efficient and high-sensitivity detection of the concentration of anions and cations is particularly important.
As shown in fig. 1 and 2, at present, the concentration of anions and cations is detected mainly by IC (Ion Chromatography ), and the detection steps are as follows:
1. Sampling by a sample injector: the sample is pushed to reach an anion and cation quantitative ring (10 mL) through a sample injector and an anion and cation ten-way valve;
2. Sample loading: the content of the sample in the quantitative ring is controlled to the set content of the quantitative ring by a pump (pump), and the quantitative ring is pushed to a six-way valve after loading is finished;
3. Sample injection enrichment by a six-way valve: carrying the sample to an enrichment column to enrich the sample by the six-way valve, and finishing the enrichment of the sample; the enrichment column in fig. 2 is schematically drawn inside the six-way valve, and the enrichment column is outside the six-way valve when the objects are connected;
4. And (3) analysis and detection: after the enrichment of the sample is completed, the sample in the enrichment column is washed by using eluent, the eluent carries the sample in the enrichment column into a detection pool, and concentration detection is carried out in the detection pool.
However, the existing device for detecting the ion concentration has only one detection mode, namely, only the concentration of anions and cations can be detected at the same time, and the concentration of anions or cations cannot be detected independently. However, in actual production, only the anion concentration or the cation concentration is needed, and if the anion concentration and the cation concentration are obtained at the same time, resource waste and high test cost are caused.
Disclosure of utility model
The utility model provides a device for detecting ion concentration, which aims to solve the technical problem that the existing device for detecting ion concentration only has one detection mode.
In order to solve the technical problems, the utility model provides a device for detecting ion concentration, which comprises a sample injector, a first valve, a pump, a quantitative ring unit, a second valve, an anion detection unit and a cation detection unit;
The first valve includes a first passage, a second passage, a third passage, and a fourth passage; the second valve includes a first passage, a second passage, and a third passage;
the sample injector, the first channel of the first valve, the second channel of the first valve, the pump, the dosing ring unit, the third channel of the first valve, the fourth channel of the first valve and the first channel of the second valve are sequentially connected in series;
The first passage of the second valve switchably communicates with its own second passage or third passage; the second channel of the second valve is communicated with the anion detection unit; the third passage of the second valve communicates with the cation detection unit.
Optionally, the device further comprises a third valve comprising a first channel, a second channel and a third channel;
The first valve further includes a fifth passage, the third passage of the first valve switchably communicating with its own fourth passage or fifth passage;
the fifth passage of the first valve communicates with the first passage of the third valve;
The first passage of the third valve switchably communicates with its own second passage or third passage; the second channel of the third valve is communicated with the anion detection unit; the third passage of the third valve communicates with the cation detection unit.
Optionally, the anion detection unit comprises an anion valve, an anion enrichment column and an anion detection cell; the anion valve comprises a first channel, a second channel, a third channel, a fourth channel, a fifth channel and a sixth channel;
The second passage of the second valve communicates with the sixth passage of the anionic valve;
The first channel of the anion valve, the anion enrichment column, and the fourth channel of the anion valve are connected in series; the second channel of the anion valve is communicated with the anion detection pool; the third channel of the anion valve is used for inputting the eluent; the fifth passage of the anionic valve communicates with the second passage of the third valve; the first channel of the anion valve is switchably communicated with the second channel or the sixth channel of the anion valve; the fourth channel of the anionic valve is switchably in communication with its own third channel or fifth channel.
Optionally, the cation detection unit comprises a cation valve, a cation enrichment column and a cation detection cell; the cationic valve includes a first passage, a second passage, a third passage, a fourth passage, a fifth passage, and a sixth passage;
The third passage of the second valve communicates with the second passage of the cationic valve;
The first channel of the cation valve, the cation enrichment column, and the fourth channel of the cation valve are connected in series; the third passage of the cationic valve is in communication with the third passage of the third valve; the fifth channel of the cation valve is used for inputting the eluent; the sixth channel of the cation valve is communicated with the cation detection cell; the first passage of the cationic valve is switchably communicated with the second passage or the sixth passage of the cationic valve; the fourth passage of the cationic valve is switchably in communication with its own third passage or fifth passage.
Optionally, the third valve is a three-way valve.
Optionally, the anionic valve is a six-way valve.
The optional cation valve is a six-way valve.
Optionally, the dosing ring unit comprises more than two dosing rings connected in series.
Optionally, the first valve is a ten-way valve.
Optionally, the second valve is a ten-way valve.
The device for detecting the ion concentration provided by the utility model has the unexpected effect that three detection modes can be realized: the first detection mode is to only detect the concentration of anions, and when the second channel of the second valve is opened and the third channel of the second valve is closed, the sample to be detected in the quantitative loop unit enters the anion detection unit through the third channel of the first valve, the fourth channel of the first valve, the first channel of the second valve and the second channel of the second valve, so that the concentration of anions is obtained; the second detection mode is to only detect the cation concentration, and when the second channel of the second valve is closed and the third channel is opened, the sample to be detected in the quantitative loop unit enters the cation detection unit through the third channel of the first valve, the fourth channel of the first valve, the first channel of the second valve and the third channel of the second valve, so that the cation concentration is obtained; the third detection mode is to detect the concentration of anions and cations simultaneously, and the first detection mode and the second detection mode are respectively executed once to obtain the concentration of anions and the concentration of cations. In addition, the device adopts a single-channel sample injection mode, and only one pump is needed, so that compared with the device comprising two pumps in the prior art, the device has lower cost; the device can only detect the concentration of anions or cations, thereby saving the testing resources and the testing cost.
Drawings
Fig. 1 is a schematic structural view of an apparatus for detecting ion concentration in the prior art.
Fig. 2 is a schematic diagram of the embodiment corresponding to fig. 1.
Fig. 3 is a schematic structural diagram of an apparatus for detecting ion concentration according to an embodiment of the present utility model.
Fig. 4 is a schematic diagram of the embodiment corresponding to fig. 3.
Reference numerals are described as follows:
The device comprises a sample injector-11, a first valve-12, a pump-13, a quantitative loop unit-14, a second valve-15, an anion detection unit-16, a cation detection unit-17 and a third valve-18.
Detailed Description
To make the objects, advantages and features of the present utility model more apparent, a device for detecting ion concentration according to the present utility model will be described in further detail with reference to the accompanying drawings. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.
In the description of the present utility model, the terms "first," "second," and the like, are added for convenience of description and reference, and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining a qualifier such as "first," "second," etc. may explicitly or implicitly include one or more such feature.
As shown in fig. 3 and 4, the present embodiment provides an apparatus for detecting ion concentration, comprising a sample injector 11, a first valve 12, a pump 13, a dosing ring unit 14, a second valve 15, an anion detection unit 16, and a cation detection unit 17; the first valve 12 includes a first channel (which may be the 1 channel of the first valve 12 in fig. 4), a second channel (which may be the 2 channel of the first valve 12 in fig. 4), a third channel (which may be the 5 channel of the first valve 12 in fig. 4), and since the first valve 12 is represented by a ten-way valve in fig. 4, 10 channels of the ten-way valve are represented by numerals 1-10, the numerals 1-10 and part of the letter numbers such as the third channel, the fourth channel do not correspond, and the other valves are the same) and a fourth channel (which may be the 6 channel of the first valve 12 in fig. 4); the second valve 15 includes a first passage (which may be the 1 passage of the second valve 15 in fig. 4), a second passage (which may be the 2 passage of the second valve 15 in fig. 4), and a third passage (which may be the 10 passage of the second valve 15 in fig. 4); the sample injector 11, the first channel of the first valve 12, the second channel of the first valve 12, the pump 13, the dosing ring unit 14, the third channel of the first valve 12, the fourth channel of the first valve 12, and the first channel of the second valve 15 are sequentially connected in series; the first passage of the second valve 15 is switchably in communication with its own second passage or third passage; the second channel of the second valve 15 communicates with the anion detection unit 16; the third passage of the second valve 15 communicates with the cation detection unit 17. Wherein the anion detecting unit 16 is used for enriching anions and detecting anion concentrations, and the cation detecting unit 17 is used for enriching cations and detecting cation concentrations.
The device for detecting the ion concentration provided by the embodiment has the unexpected effect that three detection modes can be realized: the first detection mode is to detect only the concentration of anions, and when the second channel of the second valve 15 is opened and the third channel is closed, the sample to be detected in the quantitative loop unit 14 enters the anion detection unit 16 through the third channel of the first valve 12, the fourth channel of the first valve 12, the first channel of the second valve 15 and the second channel of the second valve 15, so that the concentration of anions is obtained; the second detection mode is to detect only the cation concentration, and when the second channel of the second valve 15 is closed and the third channel is opened, the sample to be detected in the quantitative loop unit 14 enters the cation detection unit 17 through the third channel of the first valve 12, the fourth channel of the first valve 12, the first channel of the second valve 15 and the third channel of the second valve 15, so as to obtain the cation concentration; the third detection mode is to detect the concentration of anions and cations simultaneously, and the first detection mode and the second detection mode are respectively executed once to obtain the concentration of anions and the concentration of cations. In addition, the device adopts a single-channel sample injection mode, and only one pump 13 is needed, so that compared with the device comprising two pumps in the prior art, the device has lower cost; the device can only detect the concentration of anions or cations, thereby saving the testing resources and the testing cost.
Optionally, as shown in fig. 3 and 4, the apparatus further includes a third valve 18, where the third valve 18 includes a first channel (which may be the 1 channel of the third valve 18 in fig. 4), a second channel (which may be the 2 channel of the third valve 18 in fig. 4), and a third channel (which may be the 3 channel of the third valve 18 in fig. 4); the first valve 12 further includes a fifth passage (which may be the 4 passage of the first valve 12 in fig. 4), and the third passage of the first valve 12 is switchably communicated with its own fourth passage or fifth passage; the fifth passage of the first valve 12 communicates with the first passage of the third valve 18; the first passage of the third valve 18 is switchably in communication with its own second passage or third passage; the second passage of the third valve 18 communicates with the anion detection unit 16; the third passage of the third valve 18 communicates with the cation detection unit 17.
In the solution provided in this embodiment, the third detection mode of the device may be implemented through the third valve 18, and when the fourth channel of the first valve 12 is closed and the fifth channel is opened, the sample to be measured in the quantitative loop unit 14 may first enter the anion detection unit 16 through the third channel and the fifth channel of the first valve 12 and the first channel and the second channel of the third valve 18, so as to obtain the anion concentration; the sample to be measured in the dosing ring unit 14 then enters the cation detection unit 17 through the third and fifth channels of the first valve 12, and the first and third channels of the third valve 18, thereby obtaining the cation concentration. The detection sequence of the concentration of anions and cations can be exchanged.
Alternatively, as shown in fig. 3 and 4, the anion detecting unit 16 includes an anion valve, an anion enriching column, and an anion detecting cell; the anion valve includes a first channel (which may be the 1 channel of the anion valve in fig. 4), a second channel (which may be the 2 channel of the anion valve in fig. 4), a third channel (which may be the 3 channel of the anion valve in fig. 4), a fourth channel (which may be the 4 channel of the anion valve in fig. 4), a fifth channel (which may be the 5 channel of the anion valve in fig. 4), and a sixth channel (which may be the 6 channel of the anion valve in fig. 4); the second channel of the second valve 15 communicates with the sixth channel of the anionic valve; the first channel of the anion valve, the anion enrichment column, and the fourth channel of the anion valve are connected in series; the second channel of the anion valve is communicated with the anion detection pool; the third channel of the anion valve is used for inputting the eluent; the fifth passage of the anionic valve communicates with the second passage of the third valve 18; the first channel of the anion valve is switchably communicated with the second channel or the sixth channel of the anion valve; the fourth channel of the anionic valve is switchably in communication with its own third channel or fifth channel. After the enrichment of the sample to be detected on the anion enrichment column is completed, washing the sample in the anion enrichment column to an anion detection pool through a eluent, and detecting the concentration of anions in the anion detection pool.
Alternatively, as shown in fig. 3 and 4, the cation detection unit 17 includes a cation valve, a cation enrichment column, and a cation detection cell; the cation valve comprises a first channel (which can be the 1 channel of the cation valve in fig. 4), a second channel (which can be the 2 channel of the cation valve in fig. 4), a third channel (which can be the 3 channel of the cation valve in fig. 4), a fourth channel (which can be the 4 channel of the cation valve in fig. 4), a fifth channel (which can be the 5 channel of the cation valve in fig. 4) and a sixth channel (which can be the 6 channel of the cation valve in fig. 4); the third passage of the second valve 15 communicates with the second passage of the cationic valve; the first channel of the cation valve, the cation enrichment column, and the fourth channel of the cation valve are connected in series; the third passage of the cationic valve communicates with the third passage of the third valve 18; the fifth channel of the cation valve is used for inputting the eluent; the sixth channel of the cation valve is communicated with the cation detection cell; the first passage of the cationic valve is switchably communicated with the second passage or the sixth passage of the cationic valve; the fourth passage of the cationic valve is switchably in communication with its own third passage or fifth passage. After the enrichment of the sample to be detected on the cation enrichment column is completed, washing the sample in the cation enrichment column to a cation detection pool through a eluent, and detecting the cation concentration in the cation detection pool.
Alternatively, as shown in fig. 3 and 4, the third valve 18 is a three-way valve. The three-way valve is a common valve, and can be used for realizing the test of anions and cations respectively. In other embodiments, the third valve 18 may be a four-way valve or more, but the four-way valve or more is more costly than a three-way valve.
Alternatively, as shown in fig. 3 and 4, the anionic valve is a six-way valve. The six-way valve is a common valve, and can be communicated with the second valve 15, the third valve 18, the enrichment column, the eluent and the detection tank through the six-way valve, so that the detection of the concentration of anions is completed. In other embodiments, the anionic valve may be a seven-way or more valve, but a seven-way or more valve is more costly than a six-way valve.
Alternatively, as shown in fig. 3 and 4, the cationic valve is a six-way valve. The six-way valve is a common valve, and can be communicated with the second valve 15, the third valve 18, the enrichment column, the eluent and the detection tank through the six-way valve, so that the detection of the cation concentration is completed. In other embodiments, the cationic valve may be a seven-way or more valve, but a seven-way or more valve is more costly than a six-way valve.
Alternatively, as shown in fig. 3 and 4, the dosing ring unit 14 includes two or more dosing rings connected in series. The volume of the dosing ring may be 10ML. Through more than two quantitative rings connected in series, the sample injection amount can be increased, so that the concentration of ions in the enrichment column is increased, and the detection result of a low-concentration sample to be detected is more accurate.
Alternatively, as shown in fig. 3 and 4, the first valve 12 is a ten-way valve. A ten-way valve is a common valve, which has 10 channels, one part of which can be used in the device, and the other part of which can be used for connecting cleaning liquid or removing waste liquid. In other embodiments, the first valve 12 may be a ten-way or more valve.
Alternatively, as shown in fig. 3 and 4, the second valve 15 is a ten-way valve. A ten-way valve is a common valve, which has 10 channels, one part of which can be used in the device, and the other part of which can be used for connecting cleaning liquid or removing waste liquid. In other embodiments, the second valve 15 may be a ten-way or more valve.
In summary, the device for detecting ion concentration provided by the utility model has the unexpected effect that three detection modes can be realized: the first detection mode is to detect only the concentration of anions, and when the second channel of the second valve 15 is opened and the third channel is closed, the sample to be detected in the quantitative loop unit 14 enters the anion detection unit 16 through the third channel of the first valve 12, the fourth channel of the first valve 12, the first channel of the second valve 15 and the second channel of the second valve 15, so that the concentration of anions is obtained; the second detection mode is to detect only the cation concentration, and when the second channel of the second valve 15 is closed and the third channel is opened, the sample to be detected in the quantitative loop unit 14 enters the cation detection unit 17 through the third channel of the first valve 12, the fourth channel of the first valve 12, the first channel of the second valve 15 and the third channel of the second valve 15, so as to obtain the cation concentration; the third detection mode is to detect the concentration of anions and cations simultaneously, and the first detection mode and the second detection mode are respectively executed once to obtain the concentration of anions and the concentration of cations. In addition, the device adopts a single-channel sample injection mode, and only one pump 13 is needed, so that compared with the device comprising two pumps in the prior art, the device has lower cost; the device can only detect the concentration of anions or cations, thereby saving the testing resources and the testing cost.
The above description is only illustrative of the preferred embodiments of the present utility model and is not intended to limit the scope of the present utility model, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the present utility model.
Claims (10)
1. The device for detecting the ion concentration is characterized by comprising a sample injector, a first valve, a pump, a quantitative ring unit, a second valve, an anion detection unit and a cation detection unit;
The first valve includes a first passage, a second passage, a third passage, and a fourth passage; the second valve includes a first passage, a second passage, and a third passage;
the sample injector, the first channel of the first valve, the second channel of the first valve, the pump, the dosing ring unit, the third channel of the first valve, the fourth channel of the first valve and the first channel of the second valve are sequentially connected in series;
The first passage of the second valve switchably communicates with its own second passage or third passage; the second channel of the second valve is communicated with the anion detection unit; the third passage of the second valve communicates with the cation detection unit.
2. An apparatus for detecting ion concentration according to claim 1, further comprising a third valve, the third valve comprising a first channel, a second channel, and a third channel;
The first valve further includes a fifth passage, the third passage of the first valve switchably communicating with its own fourth passage or fifth passage;
the fifth passage of the first valve communicates with the first passage of the third valve;
The first passage of the third valve switchably communicates with its own second passage or third passage; the second channel of the third valve is communicated with the anion detection unit; the third passage of the third valve communicates with the cation detection unit.
3. An apparatus for detecting ion concentration as defined in claim 2, wherein said anion detecting unit comprises an anion valve, an anion enriching column and an anion detecting cell; the anion valve comprises a first channel, a second channel, a third channel, a fourth channel, a fifth channel and a sixth channel;
The second passage of the second valve communicates with the sixth passage of the anionic valve;
The first channel of the anion valve, the anion enrichment column, and the fourth channel of the anion valve are connected in series; the second channel of the anion valve is communicated with the anion detection pool; the third channel of the anion valve is used for inputting the eluent; the fifth passage of the anionic valve communicates with the second passage of the third valve; the first channel of the anion valve is switchably communicated with the second channel or the sixth channel of the anion valve; the fourth channel of the anionic valve is switchably in communication with its own third channel or fifth channel.
4. An apparatus for detecting ion concentration as defined in claim 2, wherein said cation detecting unit comprises a cation valve, a cation enriching column and a cation detecting cell; the cationic valve includes a first passage, a second passage, a third passage, a fourth passage, a fifth passage, and a sixth passage;
The third passage of the second valve communicates with the second passage of the cationic valve;
The first channel of the cation valve, the cation enrichment column, and the fourth channel of the cation valve are connected in series; the third passage of the cationic valve is in communication with the third passage of the third valve; the fifth channel of the cation valve is used for inputting the eluent; the sixth channel of the cation valve is communicated with the cation detection cell; the first passage of the cationic valve is switchably communicated with the second passage or the sixth passage of the cationic valve; the fourth passage of the cationic valve is switchably in communication with its own third passage or fifth passage.
5. An apparatus for detecting ion concentration as defined in claim 2, wherein said third valve is a three-way valve.
6. A device for detecting the concentration of ions as claimed in claim 3, wherein said anion valve is a six-way valve.
7. The apparatus for detecting ion concentration according to claim 4, wherein the cation valve is a six-way valve.
8. The apparatus for detecting ion concentration according to claim 1, wherein the dosing ring unit comprises two or more dosing rings connected in series.
9. An apparatus for detecting ion concentration as defined in claim 1, wherein said first valve is a ten-way valve.
10. An apparatus for detecting ion concentration as defined in claim 1, wherein said second valve is a ten-way valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322984721.8U CN221007459U (en) | 2023-11-06 | 2023-11-06 | Device for detecting ion concentration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322984721.8U CN221007459U (en) | 2023-11-06 | 2023-11-06 | Device for detecting ion concentration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221007459U true CN221007459U (en) | 2024-05-24 |
Family
ID=91123449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322984721.8U Active CN221007459U (en) | 2023-11-06 | 2023-11-06 | Device for detecting ion concentration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221007459U (en) |
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2023
- 2023-11-06 CN CN202322984721.8U patent/CN221007459U/en active Active
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