CN220932234U - High temperature resistant force transducer - Google Patents
High temperature resistant force transducer Download PDFInfo
- Publication number
- CN220932234U CN220932234U CN202322716589.2U CN202322716589U CN220932234U CN 220932234 U CN220932234 U CN 220932234U CN 202322716589 U CN202322716589 U CN 202322716589U CN 220932234 U CN220932234 U CN 220932234U
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- metal
- seat
- annular
- ring
- force sensor
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- 239000002184 metal Substances 0.000 claims abstract description 143
- 229910052751 metal Inorganic materials 0.000 claims abstract description 143
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 238000002347 injection Methods 0.000 claims description 10
- 239000007924 injection Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims 3
- 230000006835 compression Effects 0.000 abstract description 16
- 238000007906 compression Methods 0.000 abstract description 16
- 238000001514 detection method Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241000218202 Coptis Species 0.000 description 1
- 235000002991 Coptis groenlandica Nutrition 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model relates to the technical field of force sensors, and discloses a high-temperature-resistant force sensor, which comprises: the metal seat is provided with a liquid groove and a mounting hole; the metal corrugated sheet is positioned between the metal seat and the metal pressing ring, and the liquid groove is sealed into a liquid cavity; the metal cover plate is fixed on the metal corrugated sheet, and the bottom end of the metal cover plate is provided with a corrugated bulge and a corrugated groove which are attached to the metal corrugated sheet; the connector is arranged in the mounting hole and comprises an insulating seat and a conductive piece, and one end of the conductive piece extends out of the insulating seat; the pressure chip is fixed on the connector, and the metal PAD of the pressure chip is electrically connected with the other end of the conductive piece. The high-temperature-resistant force sensor disclosed by the utility model has a small volume, is beneficial to the miniaturization arrangement of the structure, and because the metal seat, the metal corrugated sheet, the metal compression ring and the metal cover plate are all made of metal, the creep resistance is enhanced, and the additionally arranged pressure chip can bear higher working temperature, so that the pressure detection is facilitated.
Description
Technical Field
The utility model relates to the technical field of force sensors, in particular to a high-temperature-resistant force sensor.
Background
The force sensor can convert a pressure signal to be detected into an electric signal, and a strain gauge force sensor or a packaged force sensor is generally adopted for measuring the pressure. Strain gauge force sensors are susceptible to creep by bonding to the substrate of the device to be measured, and can suffer from a portion of the pressure causing measurement inaccuracies and unsuitable for long-term measurement. The existing packaged force sensor is limited by the structure of the force sensor, the large-range force sensor is large in size and cannot be installed on a small device, the small-range force sensor is small in size, but cannot be suitable for devices with large-range requirements, and in addition, the highest temperature which can be born by the force sensor with the structure is low, so that the force sensor cannot be suitable for a high-temperature environment.
Disclosure of utility model
Based on the above, the utility model aims to provide a high temperature resistant force sensor which can normally work at a higher ambient temperature, does not generate creep, has a small volume and is beneficial to the miniaturization arrangement of a structure.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
A high temperature resistant force sensor comprising:
the metal seat is provided with a liquid groove and a mounting hole communicated with the liquid groove;
The metal corrugated sheet is positioned between the metal seat and the metal pressing ring, and seals the liquid tank into a liquid cavity;
The metal cover plate is fixed on the metal corrugated sheet, and the bottom end of the metal cover plate is provided with a corrugated bulge and a corrugated groove which are attached to the metal corrugated sheet;
the connector is arranged in the mounting hole and comprises an insulating seat and a conductive piece arranged on the insulating seat, and one end of the conductive piece extends out of the insulating seat;
And the pressure chip is fixed on the connector, the metal PAD of the pressure chip is electrically connected with the other end of the conductive piece, and the pressure chip can measure the liquid pressure in the liquid cavity.
As a preferable scheme of the high temperature resistant sensor, the metal seat is provided with a liquid injection hole communicated with the liquid cavity, and a sealing plug is arranged in the liquid injection hole.
As a preferable scheme of the high-temperature-resistant force sensor, the ripple protrusion is an annular sine function protrusion, the ripple groove is an annular sine function groove, the annular sine function protrusion and the annular sine function groove form an annular sine function curve structure, the number of the annular sine function curve structures is multiple, and the annular sine function curve structures are concentrically distributed.
As a preferable scheme of the high temperature resistant force sensor, the metal seat is an annular seat, the metal compression ring comprises a metal inner compression ring and a metal outer compression ring, the metal outer compression ring is positioned on the outer ring of the annular seat, the metal inner compression ring is positioned on the inner ring of the annular seat, and the metal inner compression ring is welded on the metal corrugated sheet.
As a preferable scheme of the high temperature resistant force sensor, a positioning groove is formed in the inner wall of the annular seat, and a positioning boss corresponding to the positioning groove is arranged on the inner ring of the metal inner pressure ring.
As a preferable scheme of the high temperature resistant force sensor, the metal external pressure ring is welded on the metal corrugated sheet.
As a preferred embodiment of the high temperature resistant force sensor, the metal cover plate is bonded or welded to the metal corrugated sheet.
As a preferable scheme of the high temperature resistant force sensor, a communication hole penetrating through the metal cover plate is arranged in the center of the metal cover plate, the communication hole comprises a first communication sub-hole and a second communication sub-hole, the diameter of the first communication sub-hole is equal to the inner diameter of the annular seat, and the metal inner pressure ring stretches into the second communication sub-hole.
As a preferable scheme of the high temperature resistant force sensor, the metal corrugated sheet is an annular film, the outer ring of the annular film is positioned between the outer ring of the annular seat and the metal outer pressure ring, and the inner ring of the annular film is positioned between the inner ring of the annular seat and the metal inner pressure ring.
As a preferable scheme of the high temperature resistant force sensor, the insulating seat is provided with a mounting groove, the other end of the conductive piece extends into the mounting groove, and the pressure chip is fixed in the mounting groove.
The beneficial effects of the utility model are as follows: the high-temperature-resistant force sensor disclosed by the utility model is small in size and favorable for miniaturization of a structure, as the metal seat, the metal corrugated sheet, the metal pressing ring and the metal cover plate are all made of metal, the high-temperature-resistant force sensor has high creep resistance, the metal corrugated sheet between the metal seat and the metal pressing ring can seal a liquid tank into a liquid cavity, when pressure is detected, acting force acting on the metal cover plate is transmitted to liquid in the liquid cavity through the metal corrugated sheet, and as the liquid is incompressible, the liquid can act on the pressure chip to realize pressure detection, and the additionally arranged pressure chip can bear high working temperature and is favorable for pressure detection.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a cross-sectional view of a high temperature resistant force sensor provided in an embodiment of the present utility model;
FIG. 2 is an isometric view of a high temperature resistant force sensor provided in an embodiment of the present utility model;
FIG. 3 is a side view of a high temperature resistant force sensor provided in an embodiment of the present utility model.
In the figure:
1. A metal seat; 10. a liquid chamber;
2. A metal corrugated sheet;
31. A metal inner pressure ring; 311. positioning the boss; 32. a metal outer pressure ring;
4. A metal cover plate; 40. a communication hole; 401. a first communicating sub-hole; 402. a second communicating sub-hole; 41. a corrugated protrusion;
5. a connector; 51. an insulating base; 52. a conductive member;
6. And (5) a pressure chip.
Detailed Description
In order to make the technical problems solved by the present utility model, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present utility model will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to fall within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The embodiment provides a high temperature resistant force sensor, as shown in fig. 1 to 3, including metal seat 1, metal ripple piece 2, metal clamping ring, metal apron 4, connector 5 and pressure chip 6, be equipped with the liquid groove on the metal seat 1 and with the mounting hole of liquid groove intercommunication, metal ripple piece 2 is located between metal seat 1 and the metal clamping ring, metal ripple piece 2 seals the liquid groove into liquid chamber 10, metal apron 4 is fixed on metal ripple piece 2, the bottom of metal apron 4 is equipped with ripple protruding 41 and the ripple recess of laminating with metal ripple piece 2, connector 5 sets up in the mounting hole, connector 5 includes insulating seat 51 and the conducting piece 52 of setting on insulating seat 51, insulating seat 51 is stretched out to the one end of conducting piece 52, pressure chip 6 is fixed on connector 5, the metal PAD of pressure chip 6 is connected with the other end electricity of conducting piece 52, pressure chip 6 can measure the liquid pressure in liquid chamber 10.
It should be noted that, the pressure chip 6 in this embodiment belongs to the prior art, and the pressure chip 6 includes a silicon substrate and a borosilicate glass cover plate covered on the silicon substrate, and because the thermal expansion coefficients of the silicon substrate and the borosilicate glass cover plate are similar, the pressure chip 6 reduces the variation of the thermal expansion coefficient caused by the temperature rise as much as possible, improves the use temperature of the force sensor, and can realize accurate measurement of the pressure at high temperature.
The high temperature resistant force sensor that this embodiment provided, small, do benefit to the miniaturized setting of structure, because metal seat 1, metal corrugated sheet 2, metal clamping ring and metal apron 4 are made by the metal, have stronger creep resistance, metal corrugated sheet 2 between metal seat 1 and the metal clamping ring can seal the liquid groove into liquid chamber 10, when detecting pressure, the effort that acts on metal apron 4 passes through metal corrugated sheet 2 and transmits the liquid in liquid chamber 10, because liquid incompressible, liquid can be with pressure effect on pressure chip 6, realize the detection to the pressure, the higher operating temperature of pressure chip 6 ability that adds does benefit to the detection of pressure.
The metal seat 1 of the present embodiment is provided with a liquid injection hole (not shown) communicating with the liquid chamber 10, and a sealing plug (not shown) is provided in the liquid injection hole. Specifically, the liquid may be injected into the liquid chamber 10 through the liquid injection hole, and the liquid may be silicone oil or the like, and the liquid chamber 10 is filled with the liquid and then the liquid injection hole is sealed by using a sealing plug. In other embodiments, the liquid injection hole can be thoroughly sealed by adopting a welding mode through the welding column, and the liquid injection hole is specifically arranged according to actual needs.
The ripple protrusion 41 in this embodiment is an annular sine function protrusion, the ripple groove is an annular sine function groove, the annular sine function protrusion and the annular sine function groove form an annular sine function curve structure, the number of the annular sine function curve structures in this embodiment is 4, and the 4 annular sine function curve structures are concentrically distributed. In other embodiments, the corrugated protrusions 41 may be other shapes, and the number of the corrugated protrusions may be other numbers, which are specifically set according to actual needs.
As shown in fig. 1, the metal seat 1 of the present embodiment is an annular seat, the metal compression ring includes a metal inner compression ring 31 and a metal outer compression ring 32, the metal outer compression ring 32 is located on an outer ring of the annular seat, the metal inner compression ring 31 is located on an inner ring of the annular seat, and the metal inner compression ring 31 is welded on the metal corrugated sheet 2. Specifically, the metal corrugated sheet 2 is an annular film, the outer ring of the annular film is located between the outer ring of the annular seat and the metal outer pressure ring 32, and the inner ring of the annular film is located between the inner ring of the annular seat and the metal inner pressure ring 31.
The inner wall of the annular seat is provided with a positioning groove, as shown in fig. 1, the inner ring of the metal inner compression ring 31 is provided with a positioning boss 311 corresponding to the positioning groove, the outer wall of the positioning boss 311 can be attached to the side wall of the positioning groove, the bottom end face of the metal inner compression ring 31 can be attached to the upper surface of the annular seat, and the structure can ensure that the metal inner compression ring 31 is primarily installed on the annular seat during assembly.
The metal outer pressure ring 32 of this embodiment is welded on the metal corrugated sheet 2, specifically, when processing, firstly the metal corrugated sheet 2 is welded on the outer ring of the metal seat 1, then the liquid is injected into the liquid cavity 10, the metal outer pressure ring 32 is welded on the metal corrugated sheet 2, the metal inner pressure ring 31 is welded on the metal corrugated sheet 2, and finally the metal cover plate 4 is welded on the metal corrugated sheet 2, so that the connection is firm. In other embodiments, the metal outer pressure ring 32 may be welded on the metal corrugated sheet 2, and the metal cover plate 4 is adhered on the metal corrugated sheet 2, and the connection mode is specifically selected according to actual needs.
The center of the metal cover plate 4 of this embodiment is provided with a through hole 40, as shown in fig. 1, where the through hole 40 includes a first communicating sub-hole 401 and a second communicating sub-hole 402, and the diameter of the first communicating sub-hole 401 is equal to the inner diameter of the annular seat, so that the processed high temperature resistant force sensor is fixed on the mounting shaft to be assembled, and the metal inner pressure ring 31 stretches into the second communicating sub-hole 402, i.e. the second communicating sub-hole 402 is used to accommodate the metal inner pressure ring 31, so as to ensure that the metal cover plate 4 can be assembled on the metal corrugated sheet 2 smoothly.
The insulating base 51 of this embodiment is provided with a mounting groove (not shown in the figure), and the other end of the conductive member 52 extends into the mounting groove, and the pressure chip 6 is fixed in the mounting groove. Specifically, the pressure chip 6 is fixed in the mounting groove by conductive paste or conductive silver paste, so that the metal PAD of the pressure chip 6 is electrically connected with the conductive member 52. The conducting piece 52 of this embodiment is the spring needle, and insulating seat 51 is the higher plastics seat of intensity and hardness, and insulating seat 51 moulds plastics in the conducting piece 52 outside, and this kind of structure makes this high temperature resistant force transducer realize leadless and draws forth, compares with current structure that draws forth through the gold thread, and vibration resistance and shock resistance all obtain promoting by a wide margin, have increased high temperature resistant force transducer's environmental adaptation ability.
Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.
Claims (10)
1. A high temperature resistant force sensor comprising:
the metal seat is provided with a liquid groove and a mounting hole communicated with the liquid groove;
The metal corrugated sheet is positioned between the metal seat and the metal pressing ring, and seals the liquid tank into a liquid cavity;
The metal cover plate is fixed on the metal corrugated sheet, and the bottom end of the metal cover plate is provided with a corrugated bulge and a corrugated groove which are attached to the metal corrugated sheet;
the connector is arranged in the mounting hole and comprises an insulating seat and a conductive piece arranged on the insulating seat, and one end of the conductive piece extends out of the insulating seat;
And the pressure chip is fixed on the connector, the metal PAD of the pressure chip is electrically connected with the other end of the conductive piece, and the pressure chip can measure the liquid pressure in the liquid cavity.
2. The high temperature resistant force sensor of claim 1, wherein the metal seat is provided with a liquid injection hole communicated with the liquid cavity, and a sealing plug is arranged in the liquid injection hole.
3. The high temperature resistant force sensor of claim 1, wherein the corrugation lobes are annular sine function lobes, the corrugation grooves are annular sine function grooves, the annular sine function lobes and the annular sine function grooves form an annular sine function curve structure, the number of the annular sine function curve structures is a plurality, and the annular sine function curve structures are concentrically distributed.
4. The high temperature resistant force sensor of claim 1, wherein the metal seat is an annular seat, the metal pressure ring comprises a metal inner pressure ring and a metal outer pressure ring, the metal outer pressure ring is located on an outer ring of the annular seat, the metal inner pressure ring is located on an inner ring of the annular seat, and the metal inner pressure ring is welded on the metal corrugated sheet.
5. The high temperature resistant force sensor of claim 4, wherein a positioning groove is formed in the inner wall of the annular seat, and a positioning boss corresponding to the positioning groove is formed in the inner ring of the metal inner pressure ring.
6. The high temperature resistant force sensor of claim 4, wherein the metallic outer pressure ring is welded to the metallic corrugated sheet.
7. The high temperature resistant force sensor of claim 4, wherein the metal cover plate is bonded or welded to the metal corrugated sheet.
8. The high temperature resistant force sensor of claim 4, wherein a through hole is arranged at the center of the metal cover plate, the through hole comprises a first through sub-hole and a second through sub-hole, the diameter of the first through sub-hole is equal to the inner diameter of the annular seat, and the metal inner pressure ring extends into the second through sub-hole.
9. The high temperature resistant force sensor of claim 4, wherein the metal corrugated sheet is an annular membrane, an outer ring of the annular membrane is positioned between an outer ring of the annular seat and the metal outer pressure ring, and an inner ring of the annular membrane is positioned between an inner ring of the annular seat and the metal inner pressure ring.
10. The high temperature resistant force sensor of claim 1, wherein the insulating base is provided with a mounting groove, the other end of the conductive member extends into the mounting groove, and the pressure chip is fixed in the mounting groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322716589.2U CN220932234U (en) | 2023-10-10 | 2023-10-10 | High temperature resistant force transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322716589.2U CN220932234U (en) | 2023-10-10 | 2023-10-10 | High temperature resistant force transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220932234U true CN220932234U (en) | 2024-05-10 |
Family
ID=90934360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322716589.2U Active CN220932234U (en) | 2023-10-10 | 2023-10-10 | High temperature resistant force transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220932234U (en) |
-
2023
- 2023-10-10 CN CN202322716589.2U patent/CN220932234U/en active Active
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