CN220914183U - Silicon wafer detects turns over piece device - Google Patents
Silicon wafer detects turns over piece device Download PDFInfo
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- CN220914183U CN220914183U CN202322534228.6U CN202322534228U CN220914183U CN 220914183 U CN220914183 U CN 220914183U CN 202322534228 U CN202322534228 U CN 202322534228U CN 220914183 U CN220914183 U CN 220914183U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 74
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 74
- 239000010703 silicon Substances 0.000 title claims abstract description 74
- 235000012431 wafers Nutrition 0.000 claims abstract description 74
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims abstract description 20
- 230000007306 turnover Effects 0.000 claims abstract description 14
- 241000252254 Catostomidae Species 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 5
- 238000001514 detection method Methods 0.000 abstract description 21
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000009471 action Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a silicon wafer detecting and turning device in the technical field of silicon wafer appearance detection, and aims to solve the problem that a linear scanning camera in the prior art is difficult to comprehensively identify dirt on the back of a battery piece. The device comprises a frame, a first belt conveying line, a second belt conveying line and a sheet turning hand, wherein the first belt conveying line, the second belt conveying line and the sheet turning hand are arranged on the frame; the first belt conveyor line and the second belt conveyor line are used for conveying silicon wafers; the wafer overturning hand is arranged at the tail end of the first belt conveying line and positioned between the first belt conveying line and the second belt conveying line in the vertical direction, and is used for grabbing the silicon wafer conveyed to the tail end of the first belt conveying line and putting down the silicon wafer by rotating above the second belt conveying line; the utility model is used for turning over the silicon wafer in the process of conveying the silicon wafer, and can turn over the back surface of the silicon wafer which cannot be well detected to the front surface so as to facilitate the identification of a line scanning camera, thereby improving the accuracy of silicon wafer sorting and being beneficial to improving the detection accuracy.
Description
Technical Field
The utility model relates to a silicon wafer detecting and turning device, and belongs to the technical field of silicon wafer appearance detection.
Background
Before the silicon wafer is prepared into a battery piece of a photovoltaic module, the silicon wafer which is qualified in detection can enter the next process after being subjected to early detection and sorting, and the early detection of the silicon wafer mainly comprises hidden crack detection, appearance dirt detection, edge breakage detection, resistivity detection and the like.
The appearance dirt detection of silicon chip is mainly to the line and sweeps the camera and carry out comparatively comprehensive detection to the silicon chip at the in-process that the battery piece was flowed at present, to the silicon chip upper surface, very easily through the line sweep camera observe the overall view of silicon chip, and to the lower surface of silicon chip, because need carry hold so the visual field that has shielded, consequently carry out comprehensive detection to the lower surface and have certain difficulty, if directly set up the camera in its below and detect then lead to the detection error rate high easily, be difficult to promote the accuracy of appearance judgement in the automation streamline.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art, and provides a silicon wafer detection turnover device which is used for turning over a silicon wafer in the process of conveying the silicon wafer, and the back surface of the silicon wafer which cannot be well detected can be turned over to the front surface so as to be convenient for the identification of a line scanning camera, thereby improving the accuracy of silicon wafer sorting and being beneficial to improving the detection accuracy.
In order to achieve the above purpose, the utility model is realized by adopting the following technical scheme:
On one hand, the belt conveyor comprises a frame, a first belt conveyor line, a second belt conveyor line and a turnover hand, wherein the first belt conveyor line, the second belt conveyor line and the turnover hand are arranged on the frame;
The first belt conveyor line and the second belt conveyor line are used for conveying silicon wafers, and a height difference is arranged between the first belt conveyor line and the second belt conveyor line;
The wafer overturning hand is arranged at the tail end of the first belt conveying line and located at the position between the first belt conveying line and the second belt conveying line in the vertical direction, and is used for grabbing silicon wafers conveyed to the tail end of the first belt conveying line and putting down the silicon wafers by rotating above the second belt conveying line.
Specifically, the first belt conveyor line and the second belt conveyor line are respectively provided with two narrow belts, and two sides of the silicon wafer are respectively supported by the two narrow belts on two sides;
The wafer turning hand comprises a main vacuum tube, a plurality of vacuum branch tubes and a plurality of suckers, wherein each sucker is communicated with the corresponding vacuum branch tube, the plurality of vacuum branch tubes are circumferentially arranged on the outer side of the main vacuum tube and are communicated with the main vacuum tube, the suckers are rotatably arranged at positions between two narrow belts, and the suckers are used for sucking up a silicon wafer at the tail end of a first belt conveying line and putting down the silicon wafer when rotating to the upper part of a second belt conveying line.
Specifically, the lowest position of the sucker in the rotation process is constantly higher than the conveying position of the top surface of the second belt conveying line.
Specifically, the flap hand further comprises an inner supply air pipe which is arranged and fixed relative to the frame, the main vacuum pipe is driven to rotate, the inner supply air pipe is arranged in the main vacuum pipe in a rotating fit mode and is arranged in a sealing mode relative to the main vacuum pipe at the matching position, an air outlet inclined opening is formed in the inner supply air pipe, and the air outlet inclined opening is used for supplying negative pressure to the corresponding vacuum branch pipe in the process that the vacuum branch pipe rotates along with the main vacuum pipe.
Specifically, the opening position of the air outlet bevel opening is used for providing negative pressure when the sucker rotates to the right upper side and cutting off the negative pressure supply when the sucker rotates to the lower side.
Specifically, the air outlet inclined opening is in mirror symmetry with the horizontal plane.
Specifically, the air outlet bevel is used for cutting off the negative pressure supply when one end of the sucker moves to the bottommost part.
Specifically, the first belt conveying line and the second belt conveying line both comprise a driving roller and two driven rollers, and the driving roller is used for driving the belt to drive the driven rollers to rotate in the conveying process.
Specifically, the topmost end of the track where the sucker is located is higher than the top surface conveying position of the first belt conveying line.
Compared with the prior art, the utility model has the beneficial effects that:
According to the utility model, the turnover hand is arranged between the first belt conveying line and the second belt conveying line, so that the silicon wafer conveyed to the tail end of the first belt conveying line can be taken by the turnover hand and put down on the second belt conveying line through rotation, the turnover can be realized in the process of automatically conveying the silicon wafer, the appearance detection of two sides of the silicon wafer is facilitated, and the detection accuracy is improved.
According to the turnover hand provided by the utility model, the suction cup can automatically provide disconnected negative pressure supply according to the position state of the streamline in the rotating process by utilizing the coordination of negative pressure adsorption and rotation, so that the continuity of turnover can be guaranteed, and the problem of influencing the efficiency due to action time can be reduced as much as possible while the turnover function is realized.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a sheet turning device provided by the utility model;
Fig. 2 is a schematic view of a partial structure of a sheet turning device provided by the utility model;
FIG. 3 is a side view of the flap apparatus provided by the present utility model;
FIG. 4 is a cross-sectional view in the A-A direction of the flap apparatus provided by the embodiment of FIG. 3 of the present utility model;
FIG. 5 is a schematic view of a part of a flip hand according to the present utility model;
FIG. 6 is a schematic view of the overall structure of an inner supply pipe according to the present utility model;
reference numerals: 1. a frame; 2. a first belt conveyor line; 3. a second belt conveyor line; 4. turning the sheet; 401. a main vacuum tube; 402. a vacuum branch pipe; 403. a suction cup; 405. a negative pressure receiving plate; 406. an inner supply air pipe; 407. and (5) an air outlet inclined opening.
Description of the embodiments
The utility model is further described below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present utility model, and are not intended to limit the scope of the present utility model.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.
The silicon wafer detection and turning device provided by the embodiment of the utility model is used for turning over the silicon wafer in the process of conveying the silicon wafer, and can turn over the back surface of the silicon wafer which cannot be well detected to the front surface so as to facilitate the identification of a line scanning camera, thereby improving the accuracy of silicon wafer sorting and facilitating the improvement of the detection accuracy; wherein the first belt conveyor line 2 and the second belt conveyor line 3 are used for conveying silicon wafers, and a height difference is arranged between the first belt conveyor line 2 and the second belt conveyor line 3 as shown in fig. 2; the flip-chip hand 4 is arranged at the tail end of the first belt conveying line 2 and is located at the position between the first belt conveying line 2 and the second belt conveying line 3 in the vertical direction, the design is carried out in a mode of the height difference, the flip-chip hand 4 can be used for directly placing the picked silicon chip in a flip-chip manner through rotation, at the moment, the flip-chip hand 4 is used for grabbing the silicon chip conveyed to the tail end of the first belt conveying line 2 and placing the silicon chip above the second belt conveying line 3 through rotation, and because the implementation mode of the flip-chip hand 4 is not unique, too many descriptions are not carried out here, and specific detail characteristics related to the flip-chip hand 4 can be described according to the following.
The embodiment of the utility model provides a silicon wafer detecting and turning device, in particular to a motion mode of a turning hand 4, wherein a first belt conveying line 2 and a second belt conveying line 3 are respectively provided with two narrow belts, so that two sides of a silicon wafer are supported by the two narrow belts on two sides respectively and are preferably selected, the first belt conveying line 2 and the second belt conveying line 3 respectively comprise a driving roller and two driven rollers, the driving roller is used for driving the belts to drive the driven rollers to rotate in the conveying process, the driving roller drives the two driven rollers, the overall synchronization performance of the conveying line in the conveying process can be improved, at the moment, the silicon wafer can ensure the supporting stability of the two sides of the silicon wafer in the conveying process, and meanwhile, a space gap can be reserved in the middle for the turning hand 4 to perform motion; specifically, the wafer turning hand 4 includes a main vacuum tube 401, a plurality of vacuum branch tubes 402 and a plurality of suction cups 403, as shown in fig. 2 and 5, each suction cup 403 is communicated with the corresponding vacuum branch tube 402, the plurality of vacuum branch tubes 402 are circumferentially arranged on the outer side of the main vacuum tube 401 and are communicated with the main vacuum tube 401, the suction cups 403 at this time are rotatably arranged at positions between two narrow belts, the suction cups 403 at this time are used for sucking up silicon wafers at the tail end of the first belt conveyor line 2 and putting down the silicon wafers when rotating to the upper side of the second belt conveyor line 3, by means of the action, the main vacuum tube 401 can transfer the silicon wafers on the first belt conveyor line 2 to the upper side of the second belt conveyor line 3 only by ensuring continuous rotation.
In order to avoid collision between the suction cup 403 and the top surface of the second belt conveyor line 3 during suction of the silicon wafer, the silicon wafer detection turnover device provided by the embodiment of the utility model affects normal use performance, wherein the lowest position of the suction cup 403 during rotation is constantly higher than the conveying position of the top surface of the second belt conveyor line 3.
In consideration of the fact that the negative pressure is difficult to regulate and adapt according to the rotation process in the rotation process, the silicon wafer detecting and turning device provided by the embodiment of the utility model specifically provides a negative pressure supply mode for effectively combining the action process to provide a negative pressure supply source, specifically, referring to fig. 4, 5 and 6, the turning hand 4 further comprises an inner supply air pipe 406 which is arranged relatively fixedly with the frame 1 and can be fixedly installed through a negative pressure tray 405, wherein the main vacuum tube 401 is driven to rotate, the inner supply air pipe 406 is rotatably matched inside the main vacuum tube 401 and is arranged relatively and hermetically with the main vacuum tube 401 at the matched position, an air outlet bevel 407 is formed on the inner supply air pipe 406, and the air outlet bevel 407 is used for supplying negative pressure to the corresponding vacuum branch tube 402 in the process that the vacuum branch tube 402 rotates along with the main vacuum tube 401. The position of the air outlet bevel 407 is fixed, and the vacuum branch pipe 402 is sequentially matched with the air outlet bevel 407 in the rotating process, so that the supply of negative pressure to the sucker 403 is realized, and after the vacuum branch pipe 402 rotates out of the position corresponding to the air outlet bevel 407, the negative pressure is disconnected, and the battery piece is put down. Specifically, the vent bevel 407 may be provided to provide negative pressure when the suction cup 403 is rotated directly above, and to disconnect the negative pressure supply when the suction cup 403 is rotated below. If the negative pressure is provided directly above and the negative pressure is disconnected directly below, the air outlet bevel 407 is arranged to be mirror-symmetrical with the horizontal plane, and the position of the air outlet bevel 407 is matched with the thickness of the vacuum branch pipe 402.
In the silicon wafer detecting and turning device provided by the embodiment of the utility model, considering that a certain height difference exists between the suction cup 403 and the second belt conveyor line 3 when the suction cup 403 is located right below, if the silicon wafer is put down at the position of the height difference, the height difference easily causes larger position deviation of the silicon wafer when the silicon wafer falls down, so as to be another preferred embodiment, the air outlet bevel 407 is provided for cutting off the negative pressure supply when one end of the suction cup 403 moves to the bottommost position, at this time, one end of the silicon wafer can be firstly contacted with the bottom of the second belt conveyor line 3 and then falls on the second belt conveyor line 3 along the placement position, so that unstable air turbulence can be weakened, and the silicon wafer can be orderly placed on the second belt conveyor line 3.
In order to ensure good contact between the top of the suction cup 403 and the silicon wafer, the top end of the motion track of the suction cup 403 is higher than the top surface conveying position of the first belt conveying line 2, so that the battery piece can accurately follow the suction cup 403 to flow when negative pressure is provided.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present utility model, and such modifications and variations should also be regarded as being within the scope of the utility model.
Claims (9)
1. The silicon wafer detecting and turning device is characterized by comprising a frame (1), a first belt conveying line (2), a second belt conveying line (3) and a turning hand (4), wherein the first belt conveying line (2), the second belt conveying line (3) and the turning hand (4) are arranged on the frame (1);
the first belt conveyor line (2) and the second belt conveyor line (3) are used for conveying silicon wafers, and a height difference is arranged between the first belt conveyor line (2) and the second belt conveyor line (3);
The wafer overturning hand (4) is arranged at the tail end of the first belt conveying line (2) and is positioned at the position between the first belt conveying line (2) and the second belt conveying line (3) in the vertical direction, and the wafer overturning hand (4) is used for grabbing silicon wafers conveyed to the tail end of the first belt conveying line (2) and putting down the silicon wafers by rotating above the second belt conveying line (3).
2. The silicon wafer detecting and turning device according to claim 1, wherein the first belt conveyor line (2) and the second belt conveyor line (3) are respectively provided with two narrow belts, and two sides of a silicon wafer are respectively supported by the two narrow belts on two sides;
The wafer turning hand (4) comprises a main vacuum tube (401), a plurality of vacuum branch tubes (402) and a plurality of suckers (403), wherein each sucker (403) is communicated with the corresponding vacuum branch tube (402), the vacuum branch tubes (402) are circumferentially arranged on the outer side of the main vacuum tube (401) and are communicated with the main vacuum tube (401), the suckers (403) are rotatably arranged at positions between two narrow belts, and the suckers (403) are used for sucking up silicon wafers at the tail end of a first belt conveying line (2) and putting down the silicon wafers when rotating above a second belt conveying line (3).
3. A silicon wafer inspection turn-over device according to claim 2, characterized in that the lowest position of the suction cup (403) in the rotation process is constantly higher than the conveying position of the top surface of the second belt conveyor line (3).
4. The silicon wafer detecting and turning device according to claim 2, wherein the turning hand (4) further comprises an inner supply air pipe (406) which is arranged relative to the frame (1) and is fixed relatively, the main vacuum pipe (401) is driven to rotate, the inner supply air pipe (406) is arranged inside the main vacuum pipe (401) in a rotating fit manner and is arranged relative to the main vacuum pipe (401) in a sealing manner at the matching position, an air outlet bevel (407) is formed in the inner supply air pipe (406), and the air outlet bevel (407) is used for supplying negative pressure to the corresponding vacuum branch pipe (402) in the process that the vacuum branch pipe (402) rotates along with the main vacuum pipe (401).
5. The wafer inspection and flipping device according to claim 4, wherein the vent bevel (407) is provided to provide negative pressure when the suction cup (403) is rotated directly above and to disconnect the negative pressure supply when the suction cup (403) is rotated to below.
6. The wafer inspection flip chip assembly of claim 5, wherein said vent bevel (407) is mirror-symmetrical to the horizontal.
7. A silicon wafer inspection flipping apparatus according to claim 5, wherein the air outlet bevel (407) is configured to disconnect the negative pressure supply when one end of the suction cup (403) moves to the bottommost position.
8. The silicon wafer detecting and turning device according to claim 2, wherein the first belt conveying line (2) and the second belt conveying line (3) comprise a driving roller and two driven rollers, and the driving roller is used for driving the belt to drive the driven rollers to rotate in the conveying process.
9. A silicon wafer inspection turn-over device according to claim 2, characterized in that the top end of the track where the suction cup (403) is located is higher than the top surface conveying position of the first belt conveyor line (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322534228.6U CN220914183U (en) | 2023-09-18 | 2023-09-18 | Silicon wafer detects turns over piece device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322534228.6U CN220914183U (en) | 2023-09-18 | 2023-09-18 | Silicon wafer detects turns over piece device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220914183U true CN220914183U (en) | 2024-05-07 |
Family
ID=90916987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322534228.6U Active CN220914183U (en) | 2023-09-18 | 2023-09-18 | Silicon wafer detects turns over piece device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220914183U (en) |
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2023
- 2023-09-18 CN CN202322534228.6U patent/CN220914183U/en active Active
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