CN220834785U

CN220834785U - Getter module

Info

Publication number: CN220834785U
Application number: CN202220666479.2U
Authority: CN
Inventors: 周勇强; 熊雄; 吴建乐; 毛剑宏
Original assignee: Zhejiang Core Microelectronics Co ltd
Current assignee: Zhejiang Core Microelectronics Co ltd
Priority date: 2022-03-25
Filing date: 2022-03-25
Publication date: 2024-04-26
Anticipated expiration: 2032-03-25

Abstract

The utility model relates to the technical field of infrared detectors, in particular to a getter module, which comprises: a separation plate, wherein one surface of the separation plate is provided with at least one getter and at least one supporting sheet corresponding to the getter; each getter is provided with a first getter electrode and a second getter electrode, and the first getter electrode is fixedly connected with the supporting sheet. The utility model designs the getter modularized structure, the getter is simple and convenient to install, the damage of the surface coating of the Dewar shell is avoided, the corrosion resistance of the Dewar shell is improved, the number of parts and welding seams is reduced, the air leakage risk is reduced, and the working time is reduced.

Description

Getter module

Technical Field

The utility model relates to the technical field of infrared detectors, in particular to a getter module.

Background

The current common Dewar manufacturing schemes are: firstly, welding all the components, then welding a getter for ensuring the Dewar vacuum on the inner wall of the main cylinder component, and finally welding all the components to form a closed cavity.

In the prior art, getter is installed on the side wall of Du Wazhu cylinder parts, firstly, the side wall of a main cylinder is required to be provided with holes along the radial direction of the side wall of the main cylinder, two insulators are welded in a brazing mode, then, getter fixing parts are arranged on the inner wall of the main cylinder parts for welding the getter, because the getter is required to be fixedly installed on the inner side of the main cylinder parts, the welding accessibility is poor, the operation is inconvenient, meanwhile, the main cylinder parts and cold finger parts cannot be directly connected due to the limitation of welding space in the prior art, a connecting part is required to be added for connection, the insulators are directly exposed on the side wall of the Dewar, the insulators are easy to collide, and the insulators are damaged, so that air leakage is caused.

In the prior art, when the getter is welded on the main cylinder, the getter fixing piece for fixing the getter is required to be welded on the inner wall of the main cylinder by using resistance welding, but when the getter fixing piece is welded inside the main cylinder, the outer surface coating of the main cylinder is damaged by the resistance welding, so that the corrosion resistance and the attractiveness of the Dewar are affected.

And because the getter can produce a large amount of heat when using, the insulating disk thermal insulation effect is general in prior art, and when the getter activates, the chip department temperature can rise more than 80 ℃ in the short time, fragile chip.

Disclosure of utility model

The utility model aims to provide a getter module and an infrared detector Dewar, which are used for solving the technical problem that a getter fixing piece for fixing a getter is required to be welded on a main cylinder part by resistance welding, so that a plating layer of the main cylinder part is damaged due to the welding of the getter fixing piece;

A getter module, said getter module comprising: a separation plate, wherein one surface of the separation plate is provided with at least one getter and at least one supporting sheet corresponding to the getter;

each getter is provided with a first getter electrode and a second getter electrode, and the first getter electrode is fixedly connected with the supporting sheet.

Preferably, the isolation disc comprises: the annular structure extends along the first direction, and the inner side wall structure extends along a second direction intersecting the first direction.

Preferably, a notch is formed on the outer edge of the annular structure, the number of the notch is matched with that of the getters, and the second getter electrode extends to the notch;

Preferably, the notch is in a fan-shaped arrangement, and the notch is provided with a notch surface parallel to the axis of the annular structure.

Preferably, the getter is a solid columnar getter, the axis of the getter is arranged along a direction parallel to the annular structure, the first getter electrode and the second getter electrode are respectively arranged at two ends of the getter, and the first getter electrode and the second getter electrode are both arranged along a direction parallel to the annular structure;

Preferably, the axis of the getter is perpendicular to the axis of the annular structure, the axis of the getter is perpendicular to the notch surface, and the first getter electrode and the second getter electrode are coaxially arranged with the getter.

Preferably, the support sheet is provided with a support portion arranged in the second direction, and the first getter electrode is abutted against the support portion.

Preferably, a first limit groove and a second limit groove are formed in one surface of the isolation disc, and the supporting sheet is arranged in the second limit groove.

Preferably, the method further comprises: and the fixing ring is arranged in the first limit groove, and the getter is arranged on the isolation disc through the fixing ring.

Preferably, the fixing ring includes: the fixing device comprises a ring-shaped fixing part with an opening, and a first leg part and a second leg part which are connected to the opening of the fixing part, wherein the direction of the first leg part is opposite to that of the second leg part, and the projection of the first leg part, the fixing part and the second leg part on the plane of the first direction is Z-shaped.

Preferably, the first limit groove is in a zigzag shape, and/or the second limit groove is in a straight shape.

An infrared detector dewar comprising:

A cold finger component;

a main cylinder member disposed above the cold finger member;

A getter module welded to an upper portion of the main cylinder member, the getter module being as described above;

An insulator provided on the main barrel member, the insulator being connected to a second getter electrode of the getter module;

a wire loop connected to an upper end of the main barrel member;

the window part is arranged above the wire ring and is welded with the wire ring;

the cold finger component, the main cylinder component, the wire ring and the window component are connected to form a vacuum cavity, and the vacuum cavity comprises:

The substrate is connected with one side of the cold finger component, which is close to the wire ring, and a chip and a cold screen are arranged on the substrate.

Preferably, the radial direction of the main cylinder part is a first direction, and the axial direction of the main cylinder part is a second direction.

Preferably, the main cylinder member includes a step portion, an inner wall of the step portion and the isolation disc enclose an annular accommodating space, and the getter is disposed in the accommodating space.

Preferably, the step portion has a step surface arranged in a plane in the first direction, and the insulator is fixed to the step surface;

The insulator comprises a ceramic piece and a rod core penetrating through the ceramic piece, the ceramic piece is fixed at the step surface, the rod core is arranged in the second direction, and the rod core is connected with a second getter electrode of the getter module.

The utility model has the beneficial effects that: due to the adoption of the technical scheme, the getter is designed to have a modularized structure, the getter is installed simply and conveniently, damage to the surface coating of the Dewar shell caused by welding of the getter fixing piece is avoided, the corrosion resistance of the Dewar shell is improved, the number of parts and welding seams is reduced, the air leakage risk is reduced, and the working time is reduced.

Drawings

FIG. 1 is a schematic diagram of a getter module in accordance with an embodiment of the utility model;

FIG. 2 is a schematic diagram of an assembly of a getter module in accordance with an embodiment of the utility model;

FIG. 3 is a schematic view of a spacer disk of a getter module in an embodiment of the utility model;

FIG. 4 is a schematic view of a retaining ring of a getter module in accordance with an embodiment of the utility model;

FIG. 5 is a cross-sectional view of an infrared detector dewar in accordance with an embodiment of the present utility model;

FIG. 6 is a schematic diagram of an infrared detector Dewar according to an embodiment of the present utility model;

Fig. 7 is a schematic structural view of a main cylinder part in an embodiment of the present utility model.

In the accompanying drawings: 3. a getter module; 31. a spacer disc; 311. a first limit groove; 312. a second limit groove; 313. a ring structure; 314. an inner sidewall structure; 32. a getter; 321. a first getter electrode; 322. a second getter electrode; 33. a support sheet; 34. a fixing ring; 341. a first leg portion; 342. a fixing part; 343. a second leg portion; 1. a cold finger component; 2. a main barrel component; 4. an insulator; 41. a rod core; 42. a ceramic member; 5. a wire loop; 6. a window component; 7. a substrate; 8. a cold screen; 9. and a chip.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.

The utility model is further described below with reference to the drawings and specific examples, which are not intended to be limiting.

As shown in fig. 1, the getter module 3 comprises: a spacer disk 31, wherein at least one getter 32 and at least one supporting sheet 33 corresponding to the getter 32 are disposed on one surface of the spacer disk 31; preferably, two getters 32 are provided on both sides of the separation disc 31, and the two getters 32 are arranged in a central symmetry with respect to the axis of the separation disc 31. In other embodiments, multiple getters 32 may also be arranged, as space conditions allow.

Each getter is provided with a first getter electrode 321 and a second getter electrode 322, the first getter electrode 321 being fixedly connected to the support sheet 33.

In a preferred embodiment, referring to FIG. 1, spacer disk 31 comprises: the annular structure 313 includes an annular structure 313 having an inner hole disposed in a plane of a first direction, and an inner wall structure 314 connected to the inner hole of the annular structure 313, the annular structure 313 extending in the first direction, and the inner wall structure 314 extending in a second direction intersecting the first direction. Preferably, the second direction is perpendicular to the plane in which the annular structure 313 lies.

Specifically, the outer edge of the annular structure 313 is provided with notches, the number of the notches is matched with that of the getters 32, and the second getter electrode 322 extends to the notches.

The inner hole of the isolation disc 31 can be used for the cold finger part 1 to pass through, the inner side wall structure 314 of the isolation disc 31 separates the getter 32 from the cold finger part 1, and the annular structure 313 of the isolation disc 31 separates the getter 32 from the chip 9 and the cold screen 8.

Preferably, in the embodiment shown in fig. 1, two getters 32 are disposed on either side of the inner sidewall structure 314.

In a preferred embodiment, the getter 32 is a solid cylindrical getter 32, the axis of the getter 32 is arranged in a direction parallel to the annular structure 313, the first getter electrode 321 and the second getter electrode 322 are respectively arranged at both ends of the getter 32, and the first getter electrode 321 and the second getter electrode 322 are each arranged in a direction parallel to the annular structure 313.

Specifically, the support sheet 33 is provided with support portions arranged in the second direction, and the first getter electrode 321 abuts against and is welded to the support portions.

Further, as shown in fig. 2, the second getter electrode 322 extends from the notch to form a conductive loop with the stem core 41 of the insulator 4.

During assembly, the positions of the first and second getter electrodes 321, 322 relative to the stem core 41 of the insulator 4 can be adjusted by rotating the spacer disk 31, and the provision of the notch provides a space for welding.

In a preferred embodiment, as shown in fig. 3, a first limit groove 311 and a second limit groove 312 are formed on a surface of the isolation disc 31, and the supporting piece 33 is disposed in the second limit groove 312.

Specifically, as shown in fig. 1, the method further includes: the fixing ring 34, the fixing ring 34 is disposed in the first limit groove 311, and the getter 32 is disposed on the isolation disc 31 through the fixing ring 34.

The isolation disc 31, the getter 32, the supporting plate 33 and the fixing ring 34 in the embodiment form a modularized structure, the getter module 3 is assembled, welded and fixed outside, and then welded at the upper end of the main cylinder part 2, the modularized structure is convenient to operate for welding and fixing the getter 32, the welding accessibility is good, and meanwhile, the getter 32 is fixed without additionally welding a getter fixing piece on the surface of the main cylinder part 2, so that the damage to the plating layer on the outer surface of the main cylinder part 2 is reduced, and the corrosion resistance and the attractiveness of the Dewar shell are enhanced.

Specifically, as shown in fig. 4, the fixing ring 34 includes: the fixing portion 342 having an opening, and the first leg portion 341 and the second leg portion 343 connected to the opening of the fixing portion 342 are formed in a ring shape, wherein the direction of the first leg portion 341 is opposite to the direction of the second leg portion 343, and the plane of the first leg portion 341, the fixing portion 342, and the second leg portion 343 in the first direction is projected in a zigzag shape.

Since the first leg portion 341 and the second leg portion 343 are located at both sides of the fixing portion 342, they can form a stable fixing structure after being mounted while occupying less space. The solid columnar getter 32 is placed into the fixing portion 342 from the opening of the fixing portion 342 to form an encircling fixing structure.

Further, the first limit groove 311 has a zigzag shape, and its shape matches the shapes of the first leg portion 341, the second leg portion 343, and the fixing portion 342.

Further, the second limit groove 312 is shaped like a straight line, and its shape matches the shape of the mounting portion of the support piece 33.

The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the embodiments and the protection scope of the present utility model.

The present utility model has the following embodiments based on the above description:

In a further embodiment of the present utility model, there is also provided an infrared detector dewar, as shown in fig. 5 and 6, including:

Cold finger member 1;

A main cylinder part 2, wherein the main cylinder part 2 is arranged above the cold finger part 1;

A getter module 3, the getter module 3 being welded to the upper part of the main cylinder part 2, the getter module 3 being the getter module 3 in any one of the embodiments;

an insulator 4, the insulator 4 is arranged on the main cylinder part 2, and the insulator 4 is connected with the second getter electrode 322 of the getter module 3;

a wire loop 5, the wire loop 5 being connected to the upper end of the main barrel part 2;

The window part 6 is arranged above the wire loop 5 and is welded with the wire loop 5;

The cold finger component 1, the main cylinder component 2, the wire ring 5 and the window component 6 are connected to form a vacuum cavity, and the vacuum cavity comprises:

and a substrate 7, wherein the cold finger part 1 is connected with one side close to the wire ring 5, and a chip 9 and a cold screen 8 are arranged on the substrate 7.

Specifically, in this embodiment, the cold finger component 1 includes a cold finger and a cold stage, the substrate 7 is adhered to the cold stage on a side far away from the cold finger, the chip 9 and the cold screen 8 are adhered to the substrate 7, and a sufficient space distance is provided between the getter 32 and the cold finger to reduce heat radiation to the cold finger.

Specifically, the radial direction of the main tube member 2 is a first direction, and the axial direction of the main tube member 2 is a second direction.

In a preferred embodiment, the main cylinder member 2 has a stepped portion, and the inner wall of the stepped portion and the spacer disk 31 are surrounded to form an annular accommodating space, and the getter 32 is disposed in the accommodating space.

Specifically, the getter module 3 is welded on the upper part of the main cylinder part 2 in an inverted mode, the heat insulation effect of the isolation disc 31 is fully exerted, the heat generated by the activation of the getter 32 can be fully isolated, and when the getter 32 is activated, the temperature rise of the chip 9 is ensured to be slow.

Specifically, as shown in fig. 7, the step portion is provided with a step surface arranged along a plane of the first direction, at which the insulator 4 is fixed;

Wherein the insulator 4 comprises a ceramic member 42 and a rod core 41 penetrating the ceramic member, the ceramic member 42 is fixed at the step surface, the rod core 41 is arranged along the second direction, and the rod core 41 is connected with the second getter electrode 322 of the getter module 3.

Specifically, referring to fig. 5, the horizontal direction in fig. 5 is the first direction, and the vertical direction in fig. 5 is the second direction.

Specifically, receive the welding space restriction in the conventional art, main section of thick bamboo part 2 and cold finger part can't make integral type structure, have increased the welding seam quantity simultaneously, and insulator 4 is on the Dewar lateral wall, and the easy collision that takes place damages insulator 4, leads to gas leakage, and this technical scheme has reduced spare part and welding seam quantity in comparison with prior art, reduces the gas leakage risk, practices thrift man-hour.

The insulator 4 of the present utility model is vertically arranged and hidden by the step portion, which is not directly exposed to the side wall of the main barrel member 2, and in view of the design of the step portion, the main barrel member 2 is made to strike a wider diameter portion at the time of collision without affecting a narrower diameter portion thereof, so that the insulator 4 is not easily damaged when the main barrel member 2 collides.

On the other hand, the ceramic member 42 of the insulator 4 is directly welded to the hole of the stepped surface of the main cylindrical member 2 without other welding members.

The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.

Claims

1. A getter module, wherein the getter module comprises: a separation plate, wherein one surface of the separation plate is provided with at least one getter and at least one supporting sheet corresponding to the getter;

2. The getter module according to claim 1, wherein said spacer disk comprises: the annular structure extends along the first direction, and the inner side wall structure extends along a second direction intersecting the first direction.

3. The getter module according to claim 2, wherein the ring-shaped structure is provided with notches at its outer edge, the number of notches being matched to the number of getters, the second getter electrode extending to the notches;

the notch is in a fan-shaped arrangement, and is provided with a notch surface parallel to the axis of the annular structure.

4. A getter module according to claim 3, wherein the getter is a solid cylindrical getter, the axis of the getter being arranged in a direction parallel to the annular structure, the first and second getter electrodes being provided at both ends of the getter, respectively, the first and second getter electrodes being arranged in a direction parallel to the annular structure;

The axis of the getter is perpendicular to the axis of the annular structure, the axis of the getter is perpendicular to the notch surface, and the first getter electrode and the second getter electrode are coaxially arranged with the getter.

5. The getter module according to claim 4, wherein the support sheet is provided with a support portion arranged along the second direction, against which the first getter electrode abuts.

6. The getter module according to claim 1, wherein a first limit groove and a second limit groove are provided on a surface of the spacer, and the support sheet is provided in the second limit groove.

7. The getter module as recited in claim 6, further comprising: and the fixing ring is arranged in the first limit groove, and the getter is arranged on the isolation disc through the fixing ring.

8. The getter module according to claim 7, wherein the securing ring comprises: the fixing device comprises a ring-shaped fixing part with an opening, and a first leg part and a second leg part which are connected to the opening of the fixing part, wherein the direction of the first leg part is opposite to that of the second leg part, and the projection of the first leg part, the fixing part and the second leg part on the plane of the first direction is Z-shaped.

9. Getter module according to claim 6, wherein the first limit groove is "Z" -shaped and/or the second limit groove is "one" -shaped.