CN220812614U - Microwave device for producing silicon-carbon material in cold wall type - Google Patents
Microwave device for producing silicon-carbon material in cold wall type Download PDFInfo
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- CN220812614U CN220812614U CN202322676361.5U CN202322676361U CN220812614U CN 220812614 U CN220812614 U CN 220812614U CN 202322676361 U CN202322676361 U CN 202322676361U CN 220812614 U CN220812614 U CN 220812614U
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- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 62
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- 230000005540 biological transmission Effects 0.000 claims description 28
- 238000001816 cooling Methods 0.000 claims description 16
- 239000012774 insulation material Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000010425 asbestos Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
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- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
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- 229910052895 riebeckite Inorganic materials 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 19
- 230000008021 deposition Effects 0.000 abstract description 17
- 229910052799 carbon Inorganic materials 0.000 abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052710 silicon Inorganic materials 0.000 abstract description 12
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- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
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- 229920000742 Cotton Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses a microwave device for producing silicon-carbon materials in a cold wall mode, which relates to the technical field of vapor deposition and comprises a cabinet, a rotary furnace, a microwave generating device and a pitching mechanism, wherein the rotary furnace is hinged to the cabinet, the pitching mechanism is connected to the rotary furnace, at least one microwave generating device is arranged on a furnace body of the rotary furnace, the pitching mechanism can enable the furnace body to incline, the microwave generating device can heat materials in the furnace body, cooling water of a furnace wall can enable the furnace tube to be cooled to enable the temperature of the furnace tube to be low and the deposition decomposition temperature of silicon source gas, and silicon deposition agglomeration of the furnace wall is avoided. According to the utility model, the porous carbon in the rotary furnace body is heated in a microwave manner, so that the porous carbon is heated to a deposition temperature, and the silicon source gas and the carbon source gas enter the furnace through the air inlet system to contact with the porous carbon and deposit, so that the consistency of synthesis of the Si/C composite material can be effectively improved, the deposition is more uniform, and the deposition agglomeration of the furnace wall is prevented.
Description
Technical Field
The utility model relates to the technical field of vapor deposition, in particular to a microwave device for producing silicon-carbon materials in a cold wall mode.
Background
Silicon anode materials become the next generation anode materials most likely to replace traditional graphite anode materials at present due to the advantages of higher theoretical capacity (4200 mAh/g), lower discharge platform, rich reserves and the like.
The lithium ion battery has the advantages of high energy density, good efficiency and the like, is widely applied to portable equipment, and has important significance for electric automobiles. Graphite is used as the active material of the anode, mainly because of its high reversibility of li+ uptake and release, and good cycling stability. For lithium batteries, it is important to increase the energy density, such as to increase the mileage of an electric vehicle. As anodes, many other materials, such as silicon and tin, have been shown to be significantly higher than graphite in weight and volume energy density, but the overall implementation of these materials remains challenging. The main challenge faced by Si as an active material is the large volume change during lithium ion intercalation, up to 300%, leading to particle comminution and continuous growth of the solid electrolyte interface phase (SEI) layer, leading to continuous consumption of electrolyte and active lithium, and its poor electrical properties. Thus, a composite anode comprised of graphite and a small amount of silicon (or silicon oxide) has been considered an advantageous option in that graphite can buffer the volume change of silicon, providing a highly conductive matrix, while silicon can increase capacity.
The properties of the electrode material depend not only on its chemical composition but also on its particulate microstructure. The choice of synthesis method is critical to the manufacturer of the commercial electrode material. The synthesis or molding method of the Si/C composite material is generally a CVD rotary furnace, a fixed bed, a moving bed, a fluidized bed and a ebullated bed CVD rotary furnace, the equipment is heated in an external heating mode, so that the reaction point in the furnace reaches the reaction temperature to deposit, the traditional heating mode is to transfer heat from outside to the material according to the heat conduction, convection and radiation principles, the heat is always transferred from the surface to the inside to heat the material, and a temperature gradient is inevitably present in the material, so that the heated material is uneven, and the material is locally overheated. The external heating method has great defects that Si can be deposited in a furnace in a disordered way, hardening and agglomeration are caused in the inner wall of the furnace by the deposition, so that Si/C composite materials are uneven, and the material of the inner wall of the furnace is difficult to clean, so that various external heating devices cannot be continuously produced in a large quantity currently.
Disclosure of utility model
The utility model aims to provide a microwave device for producing a silicon-carbon material in a cold wall mode, which solves the problems in the prior art, ensures that porous carbon is self-heated by microwaves, improves the consistency of synthesis of Si/C composite materials, and ensures that deposition is more uniform.
In order to achieve the above object, the present utility model provides the following solutions:
The utility model provides a microwave device for producing silicon-carbon materials in a cold wall mode, which comprises a cabinet, a rotary furnace, a microwave generating device and a pitching mechanism, wherein the rotary furnace is hinged to the cabinet, the pitching mechanism is connected to the rotary furnace, at least one microwave generating device is arranged on a furnace body of the rotary furnace, the pitching mechanism can enable the furnace body to incline, and the microwave generating device can heat materials in the furnace body.
Preferably, the rotary furnace comprises a furnace body and a rotary mechanism, the furnace body comprises a furnace tube and a furnace shell, the furnace shell is fixed on a base, the base is hinged on the cabinet, the furnace tube penetrates through the furnace shell, two end parts of the furnace tube are connected through bearings, one end of the furnace tube is connected with the rotary mechanism, an air inlet assembly and an air outlet assembly, and the other end of the furnace tube is connected with the rotary mechanism, the air inlet assembly and the air outlet assembly.
Preferably, the air pipes in the air inlet assembly and the air outlet assembly are both rotationally connected to the end cover of the furnace tube, the air pipes are respectively rotationally connected with the end cover through a bearing, the air pipes are connected to the base through a supporting plate, and the diameter of the air pipes is smaller than 32mm.
Preferably, a thermocouple is inserted in the air inlet assembly along the axial direction of the furnace tube, the thermocouple is used for detecting the temperature in the furnace tube, a micro-pressure transmitter is connected to the air inlet assembly, an air inlet panel is connected to an air pipe of the air inlet assembly, and a pressure sensor, a flowmeter and a valve are arranged in the air inlet panel and can display and adjust the air inlet pressure and flow.
Preferably, the furnace tube comprises an outer furnace tube and an inner furnace tube, a limiting ring is fixed in the outer furnace tube, the inner furnace tube is sleeved in the outer furnace tube, one end of the inner furnace tube is in contact with the limiting ring, the other end of the inner furnace tube is in contact with a movable ring, two ends of the outer furnace tube are provided with a furnace plug, ventilation holes are formed in the furnace plug, one of the furnace plug is in contact with the movable ring, and a flexible material is arranged between the outer furnace tube and the inner furnace tube.
Preferably, a plurality of shoveling plates are uniformly distributed in the inner furnace tube along the circumferential direction, and the inner furnace tube is used for containing materials; the materials of the outer furnace tube and the inner furnace tube comprise glass, ceramic, polytetrafluoroethylene and quartz; the flexible material comprises a cellucotton; the furnace chamber between the furnace shell and the furnace tube is provided with a heat insulation material, the heat insulation material comprises alumina, silicon carbide fibers and asbestos, the furnace shell is made of metal, and the furnace shell is connected with the microwave generating device through a wave guide pipe.
Preferably, the rotation mechanism is a chain wheel transmission mechanism, a motor of the chain wheel transmission mechanism is arranged on the base, and a rotating shaft of the motor and an end cover of the furnace tube are respectively connected with a chain wheel; and a sealing ring is arranged between the furnace tube and the end cover.
Preferably, cooling assemblies are arranged on two end faces of the furnace shell, each cooling assembly comprises a cooling coil, and the cooling coils are attached to the end faces of the furnace shell and are communicated with cooling water.
Preferably, the pitching mechanism comprises a sprocket transmission mechanism and a bevel gear transmission mechanism, wherein a bevel gear of the bevel gear transmission mechanism is connected to a rotating shaft of a driven sprocket of the sprocket transmission mechanism, an engagement included angle of two bevel gears of the bevel gear transmission mechanism is 90 degrees, the other end of the rotating shaft of the other bevel gear of the bevel gear transmission mechanism is connected with a hinge lug of the rotary furnace, and the bevel gears can drive the rotary furnace to swing.
Preferably, a limiting mechanism is connected to another bevel gear of the bevel gear transmission mechanism, the limiting mechanism comprises a swinging rod and three photoelectric sensors, the swinging rod is connected to a rotating shaft of the bevel gear, the photoelectric sensors are located on the stroke of the swinging rod, and the three photoelectric sensors are located at the horizontal, upward and downward swinging positions of the swinging rod respectively.
Compared with the prior art, the utility model has the following technical effects:
According to the utility model, the porous carbon in the rotary furnace body is heated in a microwave manner, so that the porous carbon is heated to a deposition temperature, and the silicon source gas and the carbon source gas enter the furnace through the air inlet system to contact with the porous carbon and deposit, so that the consistency of the synthesis of the Si/C composite material can be effectively improved, and the deposition is more uniform.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view showing the internal structure of a microwave apparatus for cold wall type production of a silicon carbon material according to an embodiment of the present utility model;
FIG. 2 is a front view of a microwave apparatus for cold wall type production of silicon carbon material in accordance with an embodiment of the present utility model;
FIG. 3 is a right side view of a microwave apparatus for cold wall type production of silicon carbon material in accordance with an embodiment of the present utility model;
FIG. 4 is a left side view of a microwave apparatus for cold wall type production of silicon carbon material in accordance with an embodiment of the present utility model;
FIG. 5 is a top view of a cold wall type microwave apparatus for producing silicon carbon material in accordance with an embodiment of the present utility model;
FIG. 6 is a front view of a furnace tube according to an embodiment of the present utility model;
FIG. 7 is a schematic diagram of the internal structure of an inner furnace tube according to an embodiment of the present utility model;
Wherein: the device comprises a machine cabinet, 2-universal wheels, a 3-base, a 4-photoelectric sensor, a 5-swinging rod, a 6-bevel gear, a 7-air inlet panel, an 8-valve, a 9-furnace plug, a 10-outer furnace tube, an 11-inner furnace tube, a 12-microwave generating device, a 13-heat insulation material, a 14-bearing, a 15-end cover, a 16-thermocouple, a 17-wave guide tube, a 18-furnace shell, a 19-control unit, a 20-positioning pin shaft, a 21-air tube, a 22-motor, a 23-sprocket transmission mechanism, a 24-power supply, a 25-cooling coil, a 26-micro-pressure transmitter, a 27-limiting ring and a 28-movable ring.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by a person skilled in the art based on the embodiments of the utility model without any inventive effort, are intended to fall within the scope of the utility model.
The utility model aims to provide a microwave device for producing a silicon-carbon material in a cold wall mode, which solves the problems in the prior art, ensures that porous carbon is self-heated by microwaves, improves the consistency of synthesis of Si/C composite materials, and ensures that the deposition is more uniform.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
As shown in fig. 1 to 7: the embodiment provides a microwave device for producing silicon-carbon materials by a cold wall type, which comprises a cabinet 1, a rotary furnace, a microwave generating device 12 and a pitching mechanism, wherein the rotary furnace is hinged on the cabinet 1, the pitching mechanism is connected on the rotary furnace, at least one microwave generating device 12 is arranged on a furnace body of the rotary furnace, the pitching mechanism can enable the furnace body to incline, and the microwave generating device 12 can heat materials in the furnace body.
As a preferred scheme, the rotary furnace in this embodiment includes a furnace body and a rotary mechanism, the furnace body includes a furnace tube and a furnace shell 18, the furnace shell 18 is fixed on a base 3, the base 3 is hinged on a cabinet 1, the furnace tube penetrates through the furnace shell 18 and both ends are connected through bearings 14, one end of the furnace tube is connected with the rotary mechanism and an air inlet assembly, and the other end is connected with an air outlet assembly. The cabinet 1 in this embodiment is U-shaped, is provided with the furnace body on the medium plate, is provided with structures such as power 24, control unit 19, air inlet panel 7 and every single move mechanism in the side cabinet, and the bottom is provided with four universal wheels 2. The motor 22 of the slewing mechanism is arranged on the base 3 and forms a whole with the furnace body, and can also keep the furnace tube rotating when the inclination angle of the furnace body is adjusted.
As a preferred scheme, in this embodiment, the air pipes 21 in the air inlet assembly and the air outlet assembly are both rotatably connected to the end cover 15 of the furnace tube, the air pipes 21 are respectively rotatably connected to the end cover 15 through a bearing 14, and the air pipes 21 are connected to the base 3 through a supporting plate. The diameter of the air pipe 21 in the air inlet component and the air outlet component is smaller than 32mm, so that the leakage rate of microwaves can be reduced.
As a preferred scheme, in this embodiment, a thermocouple 16 is inserted in the air inlet assembly along the axial direction of the furnace tube, the thermocouple 16 is used for detecting the temperature in the furnace tube, a micro-pressure transmitter 26 is connected to the air inlet assembly and used for detecting the air pressure in the furnace tube, an air inlet panel 7 is connected to an air pipe 21 of the air inlet assembly, a pressure sensor, a flowmeter and a valve 8 are arranged in the air inlet panel 7 and can display and adjust the air inlet pressure and flow, and a valve 8 is also arranged on the air pipe 21 of the air outlet assembly. The silicon source gas and the carbon source gas enter the furnace through an air inlet pipe 21 of the air inlet assembly, are deposited after contacting with high-temperature materials, and realize pressure and flow regulation through a sensor and a valve 8. The temperature in the furnace tube can be detected by using an infrared thermometer, a radiation pyrometer and an optical pyrometer.
As a preferred scheme, the furnace tube in this embodiment includes an outer furnace tube 10 and an inner furnace tube 11, a limiting ring 27 is fixed in the outer furnace tube 10, the inner furnace tube 11 is sleeved in the outer furnace tube 10, one end of the inner furnace tube is in contact with the limiting ring 27, the other end of the inner furnace tube is in contact with a movable ring 28, two ends of the outer furnace tube 10 are provided with a furnace plug 9, ventilation holes are formed in the furnace plug 9, one of the furnace plugs 9 is in contact with the movable ring 28, and a flexible material is arranged between the outer furnace tube 10 and the inner furnace tube 11. In the embodiment, the furnace tube adopts a double-sleeve mode, the inner furnace tube 11 is positioned in the middle of the outer furnace tube 10, the outer furnace tube 10 is a glass furnace tube without a shoveling plate, the inner furnace tube 11 is a furnace tube with a shoveling plate, flexible materials are filled in the gap between the two furnace tubes, and under the requirement of ensuring air tightness, the materials can be effectively stirred when the inner furnace tube 11 rotates; the two furnace plugs 9 can ensure the temperature in the furnace and prevent the materials in the furnace from being blown out of the furnace tube, thereby reducing the loss. The two microwave generating devices 12 are arranged above and below the center of the furnace shell 18 in the embodiment, so that materials can be heated more uniformly, and a plurality of microwave generating devices 12 can be arranged at different positions of the furnace body according to heating requirements, so that a plurality of arrangement modes can be realized. In the furnace tube rotation process, the material is heated uniformly in the turning of the shoveling plate, and in the turning process, the material contacts with the suction type thermocouple 16 inside, so that temperature detection can be performed, and the temperature detection is fed back to the control unit 19, so that the control unit 19 regulates and controls the output power of the microwave generating device 12, and the regulation and control of the temperature are realized.
As a preferred scheme, a plurality of shoveling plates are uniformly distributed in the inner furnace tube 11 along the circumferential direction in the embodiment, and the inner furnace tube 11 is used for containing materials; the materials of the outer furnace tube 10 and the inner furnace tube 11 comprise glass, ceramic, polytetrafluoroethylene and quartz; the flexible material comprises fiber cotton; a heat insulation material 13 is arranged in a furnace chamber between the furnace shell 18 and the furnace tube, the heat insulation material 13 comprises aluminum oxide, silicon carbide fibers and asbestos, the furnace shell 18 is made of metal, and the furnace shell 18 is connected with the microwave generating device 12 through a wave guide tube 17. The heating mode of the furnace body is that microwaves emitted by the microwave generating device 12 enter the furnace through the wave guide pipe 17 and heat materials through the heat insulating material 13 and the furnace tubes 10 of the two glasses, so that the temperature of the materials is raised.
As a preferred scheme, in this embodiment, the rotation mechanism is a sprocket transmission mechanism 23, a motor 22 of the sprocket transmission mechanism 23 is disposed on the base 3, a sprocket is connected to a rotation shaft of the motor 22 and an end cover 15 of the furnace tube respectively, and the furnace tube is driven to rotate by rotation of the sprocket transmission mechanism 23. A sealing ring is arranged between the furnace tube and the end cover 15, so that the air tightness in the furnace shell 18 is ensured, the gas leakage is prevented, and the cracking of the furnace tube caused by thermal expansion can be prevented. The motor 22 is preferably a motor with a decelerator.
Preferably, in this embodiment, cooling assemblies are disposed on both end surfaces of the furnace shell 18, the cooling assemblies include cooling coils 25, and the cooling coils 25 are applied to the end surfaces of the furnace shell 18 and are communicated with cooling water. Preferably, cooling coils 25 are distributed on the microwave generating device 12 and on two end surfaces of the furnace body, and are used for cooling the microwave generating device 12 and two sides of the furnace body respectively, so that the temperature of gas decomposition and deposition cannot be reached due to low temperature of the furnace wall when the gas contacts the furnace wall, and two ends of the furnace mouth can be cooled, so that the furnace wall achieves the effect of cooling the wall. The silicon source gas and the carbon source gas can not reach the decomposition temperature when entering the furnace and are not contacted with the materials, and deposition can not be carried out, but under the condition that the materials are heat sources, the silicon source gas and the carbon source gas can be rapidly deposited in the materials when contacting with the materials in the furnace, the structure can be more compact, and the inner walls around the furnace body can not be deposited, so that the problems of uneven deposition and excessive material deposition are fundamentally solved.
As a preferred scheme, the pitching mechanism in the embodiment comprises a chain wheel transmission mechanism 23 and a bevel gear transmission mechanism, wherein a bevel gear 6 of the bevel gear transmission mechanism is connected to a rotating shaft of a driven chain wheel of the chain wheel transmission mechanism 23, an engagement included angle of the two bevel gears 6 of the bevel gear transmission mechanism is 90 degrees, the other end of the rotating shaft of the other bevel gear 6 of the bevel gear transmission mechanism is connected with a hinge lug of the rotary furnace, and the bevel gear 6 can drive the rotary furnace to swing. Preferably, in this embodiment, a limiting mechanism is connected to the other bevel gear 6 of the bevel gear transmission mechanism, the limiting mechanism includes a swinging rod 5 and three photoelectric sensors 4, the swinging rod 5 is connected to the rotating shaft of the bevel gear 6, the photoelectric sensors 4 are located on the stroke of the swinging rod 5, and the three photoelectric sensors 4 are respectively located at the horizontal, upward and downward swing positions of the swinging rod 5, so that the furnace tube can tilt and swing within plus or minus 60 degrees, and three different angles can be lifted, so that the feeding and discharging are facilitated. In this embodiment, four hinge lugs are disposed on the rotary furnace, each hinge lug is fixedly connected with a positioning pin shaft 20, the rotating shaft of the second bevel gear 6 extends and is connected with the positioning pin shaft 20, synchronous rotation of the hinge lug and the swinging rod 5 is achieved, the positioning pin shaft 20 is perpendicular to the central shaft of the rotary furnace, further, positioning of the axial swinging angle of the rotary furnace is achieved, and further, the furnace body is adjusted to be in a working state, a feeding state and a discharging state.
The microwave heating used in the embodiment is a heating mode which converts microwave energy into heat energy by means of material absorption and uniformly heats the whole body, and is completely different from the traditional heating mode, the microwave heating mode is that dipole molecules in the heated body reciprocate at high frequency to generate internal friction heat so as to raise the temperature of the heated material, the material can be heated simultaneously inside and outside without any heat conduction process, the heating speed is high and uniform, and the heating purpose can be achieved only by a fraction or a tenth of the energy consumption of the traditional heating mode. By the cooling components arranged on the two end faces of the furnace shell 18, the microwave only heats the porous carbon, the container can not generate heat, the effect of cold wall is achieved, the deposition on the four walls of the furnace body is avoided, and the problems of uneven deposition and excessive hardening of material deposition are fundamentally solved.
The principles and embodiments of the present utility model have been described in this specification with reference to specific examples, the description of which is only for the purpose of aiding in understanding the method of the present utility model and its core ideas; also, it is within the scope of the present utility model to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the utility model.
Claims (10)
1. A microwave device for producing silicon carbon materials in a cold wall type, which is characterized in that: the device comprises a cabinet, a rotary furnace, a microwave generating device and a pitching mechanism, wherein the rotary furnace is hinged to the cabinet, the pitching mechanism is connected to the rotary furnace, at least one microwave generating device is arranged on a furnace body of the rotary furnace, the pitching mechanism can enable the furnace body to incline, and the microwave generating device can heat materials in the furnace body.
2. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 1 wherein: the rotary furnace comprises a furnace body and a rotary mechanism, the furnace body comprises a furnace tube and a furnace shell, the furnace shell is fixed on a base, the base is hinged on the cabinet, the furnace tube penetrates through the furnace shell, two end parts of the furnace tube are connected through bearings, one end of the furnace tube is connected with the rotary mechanism, an air inlet assembly and an air outlet assembly, and the other end of the furnace tube is connected with the air outlet assembly.
3. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 2 wherein: the air inlet assembly and the air pipes in the air outlet assembly are both rotationally connected to the end cover of the furnace tube, the air pipes are respectively rotationally connected with the end cover through a bearing, the air pipes are connected to the base through a supporting plate, and the diameter of each air pipe is smaller than 32mm.
4. A cold wall microwave device for producing silicon carbon material as defined in claim 3 wherein: the gas inlet assembly is connected with a micro-pressure transmitter in a connecting mode, a gas inlet panel is connected to a gas pipe of the gas inlet assembly, and a pressure sensor, a flowmeter and a valve are arranged in the gas inlet panel and can display and adjust gas inlet pressure and flow.
5. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 2 wherein: the furnace tube comprises an outer furnace tube and an inner furnace tube, a limiting ring is fixed in the outer furnace tube, the inner furnace tube is sleeved in the outer furnace tube, one end of the inner furnace tube is in contact with the limiting ring, the other end of the inner furnace tube is in contact with the moving ring, two ends of the outer furnace tube are provided with a furnace plug, the furnace plug is provided with air holes, one of the furnace plug is in contact with the moving ring, and a flexible material is arranged between the outer furnace tube and the inner furnace tube.
6. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 5 wherein: a plurality of shoveling plates are uniformly distributed in the inner furnace tube along the circumferential direction, and the inner furnace tube is used for containing materials; the materials of the outer furnace tube and the inner furnace tube comprise glass, ceramic, polytetrafluoroethylene and quartz; the flexible material comprises a cellucotton; the furnace chamber between the furnace shell and the furnace tube is provided with a heat insulation material, the heat insulation material comprises alumina, silicon carbide fibers and asbestos, the furnace shell is made of metal, and the furnace shell is connected with the microwave generating device through a wave guide pipe.
7. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 2 wherein: the rotary mechanism is a chain wheel transmission mechanism, a motor of the chain wheel transmission mechanism is arranged on the base, and a rotating shaft of the motor and an end cover of the furnace tube are respectively connected with a chain wheel; and a sealing ring is arranged between the furnace tube and the end cover.
8. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 2 wherein: the cooling assembly comprises a cooling coil, wherein the cooling coil is attached to the end face of the furnace shell and is communicated with cooling water.
9. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 1 wherein: the pitching mechanism comprises a chain wheel transmission mechanism and a bevel gear transmission mechanism, wherein a rotating shaft of a driven chain wheel of the chain wheel transmission mechanism is connected with one bevel gear of the bevel gear transmission mechanism, an engagement included angle of two bevel gears of the bevel gear transmission mechanism is 90 degrees, the other end of the rotating shaft of the other bevel gear of the bevel gear transmission mechanism is connected with a hinge lug of the rotary furnace, and the bevel gears can drive the rotary furnace to swing.
10. A cold wall microwave apparatus for producing silicon carbon material as defined in claim 9 wherein: the novel bevel gear driving device is characterized in that a limiting mechanism is connected to the other bevel gear of the bevel gear driving mechanism, the limiting mechanism comprises a swinging rod and three photoelectric sensors, the swinging rod is connected to a rotating shaft of the bevel gear, the photoelectric sensors are located on the stroke of the swinging rod, and the three photoelectric sensors are located at the horizontal position, the upward position and the downward position of the swinging rod respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322676361.5U CN220812614U (en) | 2023-10-08 | 2023-10-08 | Microwave device for producing silicon-carbon material in cold wall type |
Applications Claiming Priority (1)
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