CN220542322U - Diaphragm protection assembly based on oil filling pressure sensor - Google Patents

Abstract

The utility model provides a diaphragm protection assembly based on an oil filling pressure sensor, which relates to the technical field of pressure sensors and comprises a base, wherein an MEMS element is arranged in the base, an electric signal output port is arranged on the side surface of the MEMS element, the electric signal output port is integrated on the surface of a PCB (printed circuit board), the PCB is embedded in the base, a welding ring is welded on the side surface of the base, a diaphragm is arranged between the welding ring and the base, a protection inner ring is arranged in the welding ring, and the end surface of the welding ring is arranged as a protection bottom plate.

Description

Diaphragm protection assembly based on oil filling pressure sensor

Technical Field

The utility model relates to the technical field of pressure sensors, in particular to a diaphragm protection assembly based on an oil filling pressure sensor.

Background

The MEMS pressure sensor is a thin film element, is suitable for sensing pressure, has the advantages of small volume, light weight, high precision, high sensitivity and low cost, and has replaced the traditional sensor in a plurality of fields. Along with the rapid development of microelectronic technology, the application range of the MEMS pressure sensor is wider and wider, and the MEMS pressure sensor is widely applied to automobile systems to measure air bag pressure, fuel pressure, engine oil pressure, air inlet pipeline pressure, tire pressure and the like at present, and can also be applied to pressure measurement in medical markets and other industrial fields.

In the prior art, in order to protect elements inside the MEMS pressure sensor from damage, pressure membrane isolation is usually adopted between the MEMS elements and an external medium, a base, a membrane and a welding ring are welded together by a common oil-filled pressure sensor assembly, and the membrane is very thin in order to ensure that pressure transmission loss is reduced because the membrane is exposed outside in a large area, a membrane with the thickness of 0.025mm is adopted for middle and low pressures, a membrane with the thickness of 0.05mm is adopted for high pressure, and a plastic cover is used for protecting the membrane in the transportation process, so that the membrane is extremely easily damaged by foreign objects in the subsequent operation process; because the membrane is very thin, once there are high-speed flowing particulate impurities in the pressure medium, the membrane is easily broken down by the particulate impurities, especially the ejected particles in the air medium; the design clearance between the diaphragm and the base is very small and is 0.10mm at the minimum, a certain degree of deformation is unavoidable in the processing process, and the diaphragm is possibly damaged by contacting the base at the minimum clearance in the moment of peak pressure in the pressure abrupt change process.

Disclosure of Invention

The utility model aims to solve the defects in the prior art, and provides a diaphragm protection assembly based on an oil filling pressure sensor.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a diaphragm protection subassembly based on fill oil pressure sensor, includes the base, the inside MEMS component that is equipped with of base, MEMS component side is equipped with the electrical signal delivery outlet, the electrical signal delivery outlet is integrated in PCB board surface, the PCB board is embedded inside the base, base side welding has the weld ring, and is equipped with the diaphragm between weld ring and the base, the inside protective inner ring that is equipped with of weld ring, the weld ring terminal surface is established to the protection bottom plate.

Preferably, the surface of the protective bottom plate is provided with damping holes. The damping hole is used for filtering peak pressure and protecting the membrane and the MEMS element inside.

Preferably, the damping holes are arranged in a plurality, and the damping holes are distributed in a cylindrical array. The spike pressure is further filtered, protecting the membrane and the internal MEMS element.

Preferably, one end of the damping hole is a circular hole, and the other end of the damping hole is a semi-conical hole.

Preferably, the surface array of the membrane is provided with bulges, and silicone oil is filled between the bulges and the base. The silicone oil has excellent lubricity and oxidation resistance, and can effectively reduce friction between the diaphragm and the base, thereby reducing heat dissipation and abrasion.

Preferably, the annular clamping groove is formed in the surface of the base, an annular protrusion is arranged on the side face of the PCB, and the annular protrusion is embedded in the annular clamping groove. The annular clamping groove is embedded with the annular bulge, so that the stability of the base and the PCB is improved.

Advantageous effects

In the prior art, in order to protect elements inside the MEMS pressure sensor from damage, pressure membrane isolation is usually adopted between the MEMS elements and an external medium, a base, a membrane and a welding ring are welded together by a common oil-filled pressure sensor assembly, and the membrane is very thin in order to ensure that pressure transmission loss is reduced because the membrane is exposed outside in a large area, a membrane with the thickness of 0.025mm is adopted for middle and low pressures, a membrane with the thickness of 0.05mm is adopted for high pressure, and a plastic cover is used for protecting the membrane in the transportation process, so that the membrane is extremely easily damaged by foreign objects in the subsequent operation process; because the membrane is very thin, once there are high-speed flowing particulate impurities in the pressure medium, the membrane is easily broken down by the particulate impurities, especially the ejected particles in the air medium; the utility model adopts a brand new welding ring, the inside of the welding ring is provided with a protective inner ring, so that sprayed particles cannot directly strike the pressure membrane from any angle, the end face of the welding ring is set as a protective bottom plate, the protective membrane is not unintentionally damaged by an operator, and the surface of the protective bottom plate is provided with damping holes for filtering peak pressure, protecting the membrane and internal MEMS elements, avoiding the membrane from being directly contacted by foreign objects and being sprayed on the front face of a pressure medium, protecting the membrane and the internal MEMS elements.

Drawings

FIG. 1 is a schematic perspective view of the present utility model;

FIG. 2 is a schematic perspective view of a damping hole according to the present utility model;

FIG. 3 is a schematic perspective view of a membrane according to the present utility model;

fig. 4 is a schematic perspective view of a conventional weld ring according to the present utility model.

Legend description:

1. a base; 101. an annular clamping groove; 2. a MEMS element; 3. a weld ring; 4. a membrane; 5. a PCB board; 6. an electrical signal output port; 7. a damping hole; 701. a semi-conical hole; 702. a protective inner ring; 8. a protective bottom plate; 9. silicone oil.

Detailed Description

In order that the manner in which the above recited features, objects and advantages of the present utility model are obtained, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. Based on the examples in the embodiments, those skilled in the art can obtain other examples without making any inventive effort, which fall within the scope of the utility model.

Specific embodiments of the present utility model are described below with reference to the accompanying drawings.

Specific examples:

referring to fig. 1-4, a diaphragm protection assembly based on a hydraulic pressure sensor comprises a base 1, wherein an MEMS element 2 is arranged in the base 1, an electric signal output port 6 is arranged on the side surface of the MEMS element 2, the electric signal output port 6 is integrated on the surface of a PCB 5, the PCB 5 is embedded in the base 1, an annular clamping groove 101 is formed in the surface of the base 1, an annular protrusion is arranged on the side surface of the PCB 5, and the annular protrusion is embedded in the annular clamping groove 101. The annular clamping groove 101 is embedded with the annular bulge, so that the stability of the base 1 and the PCB 5 is improved. The welding ring 3 is welded on the side face of the base 1, the membrane 4 is arranged between the welding ring 3 and the base 1, the surface array of the membrane 4 is provided with bulges, and silicone oil 9 is filled between the bulges and the base 1. The silicone oil 9 has excellent lubricity and oxidation resistance, and can effectively reduce friction between the diaphragm 4 and the base 1, thereby reducing heat dissipation and abrasion thereof. The welding ring 3 is internally provided with a protective inner ring 702, and the end face of the welding ring 3 is provided with a protective bottom plate 8.

Damping holes 7 are formed in the surface of the protective bottom plate 8. The damping hole 7 is used for filtering peak pressure and protecting the membrane 4 and the inner MEMS element 2. The damping holes 7 are provided with a plurality of damping holes 7, and the damping holes 7 are distributed in a cylindrical array. The peak pressure is further filtered, protecting the membrane 4 and the inner MEMS element 2. One end of the damping hole 7 is a circular hole, and the other end of the damping hole 7 is a half conical hole 701.

In the prior art, in order to protect the components inside the MEMS pressure sensor from damage, a pressure diaphragm 4 is usually adopted to isolate the MEMS component 2 from an external medium, a base 1, the diaphragm 4 and a welding ring are welded together by a common oil-filled pressure sensor component, the diaphragm 4 is very thin in order to ensure that the pressure transmission loss is reduced because the diaphragm 4 is exposed outside in a large area, a diaphragm 4 with the thickness of 0.025mm is usually adopted for middle and low pressure, a diaphragm 4 with the thickness of 0.05mm is adopted for high pressure, the diaphragm 4 is protected by a plastic cover in the transportation process, and the diaphragm 4 is extremely easy to be damaged by foreign objects in the subsequent operation process; since the membrane 4 is very thin, once there is a high-speed flow of particulate impurities in the pressure medium, the membrane 4 is easily broken down by the particulate impurities, in particular by the ejected particles in the air medium; the design clearance between the diaphragm 4 and the base 1 is very small and is 0.10mm at the minimum, a certain degree of deformation is inevitably caused in the processing process, the diaphragm 4 is possibly damaged by contacting with the base 1 at the minimum part of the clearance in the moment of peak pressure in the pressure abrupt change process, and aiming at the problems, the novel welding ring 3 is adopted, the inner protective ring 702 is arranged in the welding ring 3, the fact that sprayed particles cannot directly strike the pressure diaphragm 4 from any angle is ensured, the end face of the welding ring 3 is arranged to be a protective bottom plate 8, the diaphragm 4 is protected from being unintentionally damaged by operators, the diaphragm 4 is prevented from being directly contacted by foreign objects and sprayed by the pressure medium in the front, and the diaphragm 4 and the MEMS element 2 in the inner part are protected.

The working principle of the utility model is as follows: the PCB 5 is embedded into the base 1, the annular bulge is embedded into the annular clamping groove 101, the base 1, the membrane 4 and the welding ring are welded together, silicon oil 9 is filled between the membrane 4 and the base 1, friction between the membrane 4 and the base 1 is reduced, the inner protective ring 702 is arranged in the welding ring 3, the fact that sprayed particles cannot directly strike the pressure membrane 4 from any angle is ensured, the end face of the welding ring 3 is set to be a protective bottom plate 8, the protective membrane 4 is not unintentionally damaged by an operator, a damping hole 7 is formed in the surface of the protective bottom plate 8 and used for filtering peak pressure, and the membrane 4 and the MEMS element 2 inside are protected.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the above-described embodiments, and that the above-described embodiments and descriptions are only preferred embodiments of the present utility model, and are not intended to limit the utility model, and that various changes and modifications may be made therein without departing from the spirit and scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (6)

1. The utility model provides a diaphragm protection subassembly based on fill oil pressure sensor, includes base (1), base (1) inside is equipped with MEMS component (2), MEMS component (2) side is equipped with electric signal output port (6), electric signal output port (6) are integrated in PCB board (5) surface, PCB board (5) are embedded inside base (1), base (1) side welding has weld ring (3), and is equipped with diaphragm (4) between weld ring (3) and base (1), its characterized in that: the welding ring (3) is internally provided with a protective inner ring (702), and the end face of the welding ring (3) is arranged as a protective bottom plate (8).

2. The oil filled pressure sensor based diaphragm guard assembly of claim 1, wherein: damping holes (7) are formed in the surface of the protective bottom plate (8).

3. The oil filled pressure sensor based diaphragm guard assembly of claim 2, wherein: the damping holes (7) are arranged in a plurality, and the damping holes (7) are distributed in a cylindrical array.

4. The oil filled pressure sensor based diaphragm guard assembly of claim 3 wherein: one end of the damping hole (7) is a round hole, and the other end of the damping hole (7) is a semi-conical hole (701).

5. The oil filled pressure sensor based diaphragm guard assembly of claim 1, wherein: the surface array of the membrane (4) is provided with bulges, and silicone oil (9) is filled between the bulges and the base (1).

6. The oil filled pressure sensor based diaphragm guard assembly of claim 1, wherein: annular clamping grooves (101) are formed in the surface of the base (1), annular protrusions are arranged on the side face of the PCB (5), and the annular protrusions are embedded in the annular clamping grooves (101).