CN220532437U - Multi-station cleaning device for glow discharge mass spectrometer reaction tank - Google Patents
Multi-station cleaning device for glow discharge mass spectrometer reaction tank Download PDFInfo
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- CN220532437U CN220532437U CN202321175250.XU CN202321175250U CN220532437U CN 220532437 U CN220532437 U CN 220532437U CN 202321175250 U CN202321175250 U CN 202321175250U CN 220532437 U CN220532437 U CN 220532437U
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- cleaning
- basket
- mass spectrometer
- glow discharge
- cleaning basket
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- 238000004140 cleaning Methods 0.000 title claims abstract description 126
- 230000005540 biological transmission Effects 0.000 claims abstract description 24
- 238000005260 corrosion Methods 0.000 claims abstract description 22
- 230000007797 corrosion Effects 0.000 claims abstract description 22
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 238000001914 filtration Methods 0.000 claims abstract description 14
- 238000005406 washing Methods 0.000 claims abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000005507 spraying Methods 0.000 claims abstract description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000005554 pickling Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001036 glow-discharge mass spectrometry Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000003929 acidic solution Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
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- Automatic Analysis And Handling Materials Therefor (AREA)
Abstract
The utility model provides a multi-station cleaning device for glow discharge mass spectrometer reaction tank, is by cleaning part, washing tank, washing liquid filtration bin and board composition, cleaning part comprises washing basket and transmission, and transmission can drive the washing basket and reciprocate, control and rotate, the rotation is realized through washing basket rotation driving motor and drive gear, is equipped with the washing basket on drive gear's the driven gear, and drive gear's rotation can drive the washing basket rotation; the cleaning tank is positioned below the cleaning basket and consists of four mutually independent corrosion-resistant tank positions which are respectively used for pickling, spraying, washing and alcohol cleaning, the lower end of each corrosion-resistant tank position is communicated with a cleaning liquid filtering storage tank through a discharge pipeline, and a discharge valve and a water pump are arranged on the discharge pipeline; the cleaning liquid filtering and storing box is arranged at the inner side of the machine. The device can realize that many accessories multistation washs simultaneously, easy operation, efficient.
Description
Technical Field
The utility model relates to the field of glow discharge mass spectrometry analysis in chemical component analysis, in particular to a multi-station cleaning device for a glow discharge mass spectrometer reaction tank.
Background
The analysis of chemical components of the material is an important test content of physical and chemical inspection, and the glow discharge mass spectrometry is the most effective method for detecting trace elements, has the advantages of direct solid sample injection, full element analysis, high detection speed, wide range, weak matrix effect, stable ion source and the like, is widely applied to various industries of pure metal, semiconductor, alloy, ceramic and coating, and provides important basis for selecting raw materials of application products in various fields.
In practical application, a reaction tank using a glow discharge mass spectrometer based on the glow discharge mass spectrometry principle as a reaction anode belongs to a key component of equipment, and the reaction tank is easy to pollute in the sputtering process and needs to be disassembled and cleaned in time. At present, parts after disassembly of the reaction tank are cleaned with several problems: 1. the detached accessories are different in size and thickness, the traditional method cannot clean the accessories at the same time, the cleaning progress is slow, and the cleaning efficiency is low; 2. the ultrasonic cleaning is carried out independently for a long time and the effect is poor; 3. the cleaning process generally comprises the steps of acid washing, water washing, alcohol washing and the like, and the cleaning solution can only be manually replaced each time, so that the operation is complicated; 4. the traditional cleaning method has poor safety protection performance, and when the reaction tank accessory is taken and placed in an acid solution, the acid liquid is easy to splash; 5. after the cleaning is finished, the acidic solution in the vessel needs to be poured out, and a certain danger exists.
Disclosure of Invention
In order to solve the problems, the utility model provides a multi-station cleaning device for a glow discharge mass spectrometer reaction tank, which can directly clean the detached accessories in the glow discharge mass spectrometer reaction tank, realize multi-accessory multi-station simultaneous operation, and has simple operation and high efficiency.
In order to solve the problems, the utility model adopts the following technical scheme:
a many stations belt cleaning device for glow discharge mass spectrometer reaction tank, its characterized in that: the device comprises a cleaning part, a cleaning tank, a cleaning liquid filtering storage box and a machine table, wherein:
the cleaning part consists of a cleaning basket and a transmission device; in the transmission device, a transverse moving guide rail is arranged on a machine table, a transverse moving frame connected with a transverse moving driving motor is arranged on the transverse moving guide rail, a lifting guide rail is arranged on the transverse moving frame, a lifting frame connected with the lifting driving motor is arranged on the lifting guide rail, a cleaning basket rotating driving motor is arranged at the upper end of the lifting frame, and the cleaning basket rotating driving motor is connected with a transmission gear through a transmission shaft; the driven gear of the transmission gear is provided with a cleaning basket, and the rotation of the transmission gear can drive the cleaning basket to rotate;
the cleaning tank is positioned below the cleaning basket and consists of four mutually independent corrosion-resistant tank positions which are respectively used for pickling, spraying, water washing and alcohol cleaning, the lower end of each corrosion-resistant tank position is communicated with a cleaning liquid filtering storage tank through a discharge pipeline, and a discharge valve and a water pump are arranged on the discharge pipeline; the cleaning liquid filtering and storing box is arranged at the inner side of the machine.
As a preferable technical scheme:
the cleaning basket comprises a cleaning basket unit, supporting rods and a chassis, wherein two supporting rods are symmetrically arranged on the chassis in a perpendicular manner, arc-shaped grooves are formed in the cleaning basket unit, a plurality of cleaning basket units are connected in series and then fixed on the chassis, and the two supporting rods clamp the cleaning basket units which are connected in series.
A spray header is arranged in the corrosion-resistant groove for spraying.
A cover plate is arranged above the cleaning basket.
The uppermost end of the whole device is provided with a protective cover.
The corrosion-resistant groove positions are provided with ultrasonic and heating devices.
The cleaning basket is formed by connecting a plurality of sheet-shaped cleaning baskets in series.
The discharge valves are corrosion-resistant valves.
The beneficial effects of the utility model are as follows:
1. the device can simultaneously clean the accessories with different sizes and thicknesses detached from the glow discharge mass spectrometer reaction tank, and has simple operation and high cleaning efficiency.
2. The device can simultaneously carry out ultrasonic and heating cleaning, and has good cleaning effect.
3. The device does not need to manually replace the cleaning solution after each cleaning, and the cleaning solution can be recycled after being filtered, so that the cost is reduced and the cleaning efficiency is improved.
4. The device can prevent acidic liquid from splashing, and has high safety.
Drawings
FIG. 1 is a side view of a multi-station cleaning apparatus for a glow discharge mass spectrometer reaction cell.
Fig. 2 is a front view of a multi-station cleaning device for a glow discharge mass spectrometer reaction cell.
FIG. 3 is a schematic view of the structure of the cleaning basket unit.
FIG. 4 is a schematic view of the cleaning section.
Reference numerals: 1. the cleaning device comprises a discharge valve, 2, a cleaning basket, 3, a cover plate, 4, a protective cover, 5, a transmission gear, 6, a lifting rack, 7, a lifting guide rail, 8, a transverse moving rack, 9, a transverse moving driving motor, 10, a transverse moving guide rail, 11, a water pump, 12, a machine table, 13, a cleaning tank, 14, a spray header, 15, a lifting driving motor, 16, a cleaning basket rotating driving motor, 17, a cleaning liquid filtering storage box, 21, a cleaning basket unit, 22, a supporting rod, 23 and a chassis.
Detailed Description
The utility model is further illustrated, but not limited, by the following examples and figures of the specification.
Example 1
As shown in fig. 1 to 4, a multi-station cleaning device for a reaction tank of a glow discharge mass spectrometer comprises a cleaning part, a cleaning tank 13, a cleaning liquid filtering and storing tank 17 and a machine table 12, wherein the cleaning part comprises a cleaning basket 2 and a transmission device; wherein:
the cleaning basket 2 consists of a cleaning basket unit 21, supporting rods 22 and a chassis 23, wherein two supporting rods 22 are symmetrically arranged on the chassis 23 in a vertical direction, arc-shaped grooves are formed in the cleaning basket unit 21, a plurality of cleaning basket units 21 are connected in series and then fixed on the chassis 23, and the two supporting rods 22 clamp the cleaning basket units 21 after being connected in series;
in the transmission device, a transverse moving guide rail 10 is arranged on a machine table 12, a transverse moving frame 8 connected with a transverse moving driving motor 9 is arranged on the transverse moving guide rail 10, a lifting guide rail 7 is arranged on the transverse moving frame 8, a lifting frame 6 connected with a lifting driving motor 15 is arranged on the lifting guide rail 7, a cleaning basket rotating driving motor 16 is arranged at the upper end of the lifting frame 6, and the cleaning basket rotating driving motor 16 is connected with a transmission gear 5 through a transmission shaft; the driven gear of the transmission gear 5 is connected with the chassis 23 of the cleaning basket 2, and the rotation of the transmission gear 5 can drive the cleaning basket 2 to rotate; a cover plate 3 is arranged above the cleaning basket 2;
the cleaning tank 13 is positioned below the cleaning basket 2 and consists of four mutually independent corrosion-resistant tanks which are respectively used for pickling, spraying, water washing and alcohol cleaning, and a spray header 14 is arranged in the corrosion-resistant tank for spraying; the lower end of each corrosion-resistant groove is communicated with a cleaning liquid filtering storage tank 17 through a discharge pipeline, and the discharge pipeline is provided with a corrosion-resistant discharge valve 1 and a water pump 11; the cleaning solution filtering and storing tank 17 is arranged on the inner side of the machine table 12; the uppermost end of the whole device is provided with a protective cover 4, and the protective cover 4 is arranged above the machine table 12.
The cleaning basket 2 can move up and down, left and right and rotate under the drive of the transmission device, so that the cleaning basket is convenient to move in different corrosion-resistant slots and the accessories are convenient to clean.
Example 2
The difference from example 1 is that the corrosion-resistant slots are provided with ultrasonic and heating devices.
The device is adopted to clean the disassembled accessories in the reaction tank of the glow discharge mass spectrometer, and the specific steps are as follows: firstly, selecting a cleaning basket 2 with proper size according to the size of accessories, respectively loading different accessories into different cleaning basket units 21 after the cleaning basket 2 is installed, starting a transverse moving driving motor 9 and a lifting driving motor 15 to place the cleaning basket 2 into a corrosion-resistant slot for pickling, starting a cleaning basket rotating driving motor 16, an ultrasonic and heating device to pickling the accessories, sequentially moving the cleaning basket 2 into other corrosion-resistant slots to sequentially spray, wash and clean with alcohol after the cleaning is finished, then moving the cleaning basket 2 out and taking the accessories out to finish cleaning, finally opening a discharge valve 1 to discharge cleaning liquid in the corrosion-resistant slot into a cleaning liquid filtering storage box 17 for storage, and pumping the cleaning liquid into the corrosion-resistant slot again for standby by a water pump 11 before the next cleaning.
Example 3
The difference from embodiment 2 is that the cleaning basket 2 is composed of only one long cylindrical cleaning basket unit 21, and the long cylindrical cleaning basket unit 21 is directly arranged on the driven gear of the transmission gear 5, and is driven to rotate by the transmission gear 5.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather to enable any modification, equivalent replacement, improvement or the like to be made within the spirit and principles of the utility model.
Claims (8)
1. A many stations belt cleaning device for glow discharge mass spectrometer reaction tank, its characterized in that: the device comprises a cleaning part, a cleaning tank (13), a cleaning liquid filtering and storing box (17) and a machine table (12), wherein:
the cleaning part consists of a cleaning basket (2) and a transmission device; in the transmission device, a transverse moving guide rail (10) is arranged on a machine table (12), a transverse moving rack (8) connected with a transverse moving driving motor (9) is arranged on the transverse moving guide rail (10), a lifting guide rail (7) is arranged on the transverse moving rack (8), a lifting rack (6) connected with a lifting driving motor (15) is arranged on the lifting guide rail (7), a cleaning basket rotating driving motor (16) is arranged at the upper end of the lifting rack (6), and the cleaning basket rotating driving motor (16) is connected with a transmission gear (5) through a transmission shaft; the driven gear of the transmission gear (5) is provided with a cleaning basket (2), and the rotation of the transmission gear (5) can drive the cleaning basket (2) to rotate;
the cleaning tank (13) is positioned below the cleaning basket (2) and consists of four mutually independent corrosion-resistant slots which are respectively used for pickling, spraying, washing and alcohol cleaning, the lower end of each corrosion-resistant slot is communicated with a cleaning liquid filtering storage tank (17) through a discharge pipeline, and the discharge pipeline is provided with a discharge valve (1) and a water pump (11); the cleaning liquid filtering and storing box (17) is arranged at the inner side of the machine table (12).
2. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: the cleaning basket (2) consists of a cleaning basket unit (21), supporting rods (22) and a chassis (23), wherein two supporting rods (22) are symmetrically arranged on the chassis (23) in a perpendicular mode, arc-shaped grooves are formed in the cleaning basket unit (21), a plurality of cleaning basket units (21) are connected in series and then fixed on the chassis (23), and the two supporting rods (22) clamp the cleaning basket units (21) after being connected in series.
3. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: a spray header (14) is arranged in the corrosion-resistant groove for spraying.
4. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: a cover plate (3) is arranged above the cleaning basket (2).
5. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: the uppermost end of the whole device is provided with a protective cover (4).
6. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: the corrosion-resistant groove positions are provided with ultrasonic and heating devices.
7. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: the cleaning basket (2) is formed by connecting a plurality of slice-shaped cleaning baskets in series.
8. The multi-station cleaning device for a glow discharge mass spectrometer reaction cell of claim 1, wherein: the discharge valves (1) are corrosion-resistant valves.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202321175250.XU CN220532437U (en) | 2023-05-16 | 2023-05-16 | Multi-station cleaning device for glow discharge mass spectrometer reaction tank |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202321175250.XU CN220532437U (en) | 2023-05-16 | 2023-05-16 | Multi-station cleaning device for glow discharge mass spectrometer reaction tank |
Publications (1)
Publication Number | Publication Date |
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CN220532437U true CN220532437U (en) | 2024-02-27 |
Family
ID=89960689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202321175250.XU Active CN220532437U (en) | 2023-05-16 | 2023-05-16 | Multi-station cleaning device for glow discharge mass spectrometer reaction tank |
Country Status (1)
Country | Link |
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CN (1) | CN220532437U (en) |
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2023
- 2023-05-16 CN CN202321175250.XU patent/CN220532437U/en active Active
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