CN220432358U - Production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas - Google Patents

Production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas Download PDF

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Publication number
CN220432358U
CN220432358U CN202322313077.1U CN202322313077U CN220432358U CN 220432358 U CN220432358 U CN 220432358U CN 202322313077 U CN202322313077 U CN 202322313077U CN 220432358 U CN220432358 U CN 220432358U
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sulfuric acid
electronic grade
tower
grade sulfuric
coal chemical
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申长皓
易志龙
余复幸
孙帅
梁艳芬
杜明选
张德宇
许梦雅
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Henan Xinlianxin Chemicals Group Co Ltd
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Henan Xinlianxin Chemicals Group Co Ltd
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Abstract

The utility model belongs to a production system for preparing electronic grade sulfuric acid from coal chemical acid gas; the low-temperature methanol washing acid gas pipeline is connected with a sulfur dioxide generation and purification unit, the sulfur dioxide generation and purification unit is connected with an electronic grade sulfuric acid purification unit through a sulfur trioxide purification unit, and the electronic grade sulfuric acid purification unit is connected with an electronic grade sulfuric acid storage tank; the method can directly prepare high-purity electronic grade sulfuric acid by using the coal chemical acid gas as a raw material, changes the coal chemical acid gas into valuable on the premise that coal chemical enterprises do not need to externally adopt additional raw materials, improves the added value of the coal chemical waste gas, and improves the profitability of the enterprises.

Description

Production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas
Technical Field
The utility model belongs to the technical field of coal gasification systems, and particularly relates to a production system for preparing electronic grade sulfuric acid from coal chemical acid gas.
Background
The acid gas in coal chemical industry is absorbed, regenerated and concentrated by a low-temperature methanol washing device in coal chemical industry, and the acid gas contains a large amount of H 2 S gas (more than or equal to 30 percent), wherein the acid gas is usually used as a raw material for preparing industrial grade sulfur and sulfuric acid, and has low added value; and because the yield of the acid gas is related to the sulfur content of the coal, H in the acid gas is caused 2 The fluctuation of the S content is large, and the acid gas contains hydrocarbons, alcohols, carbonyl sulfide and other impurities, so that the prior art can only utilize the coal chemical acid gas to prepare industrial grade sulfur and sulfuric acid raw materials.
The common method for producing the electronic sulfuric acid in the prior art is a rectification method, wherein the rectification method takes industrial grade sulfuric acid as a raw material, and light components and heavy component impurities in the industrial grade sulfuric acid are removed by heating rectification in a rectification tower to obtain high-purity sulfuric acid; because the boiling point of the industrial grade sulfuric acid is higher, the energy consumption of rectification causes high processing cost, and the purity of the produced high-purity sulfuric acid cannot be ensured; in order to solve the technical problems, the utility model patent with publication number of CN103407972A discloses a production method of electronic grade sulfuric acid, but the raw materials used by the utility model are industrial grade SO 3 The method comprises the steps of carrying out a first treatment on the surface of the However, as described above, the acid gas yield is closely related to the coal quality, resulting in H 2 The concentration and flow fluctuation of S are large; the acid gas contains other impurities such as hydrocarbon, alcohol, carbon dioxide and the like; the system is provided with water after hydrogen sulfide combustion, and impurities are more difficult to separate, so that the utility model can not directly use the coal chemical acid gas as a raw material to prepare the electronic grade sulfuric acid.
Disclosure of Invention
The utility model aims to provide a production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas, which aims to solve the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas comprises a low-temperature methanol washing acid gas pipeline, wherein the low-temperature methanol washing acid gas pipeline is connected with a sulfur dioxide generation and purification unit, the sulfur dioxide generation and purification unit is connected with an electronic grade sulfuric acid purification unit through a sulfur trioxide purification unit, and the electronic grade sulfuric acid purification unit is connected with an electronic grade sulfuric acid storage tank.
The utility model has the beneficial effects that: peroxide combustion is carried out on the coal chemical acid gas through the sulfur dioxide generation and purification unit to generate SO 2 And removing water and part of water-soluble impurities by purification to achieve SO improvement 2 Purity is improved by reacting oxygen with sulfur trioxide by a sulfur trioxide refining unit to obtain SO 2 Fully converted into SO 3 A process gas; purifying on the basis, and preparing into electronic grade sulfuric acid by matching with an electronic grade sulfuric acid refining unit; the process can directly prepare high-purity electronic grade sulfuric acid by using the coal chemical acid gas as the raw material, and changes the coal chemical acid gas into valuable on the premise that coal chemical enterprises do not need to externally adopt additional raw materials, so that the added value of the coal chemical waste gas is improved, and the profitability of the enterprises is improved.
Preferably, the sulfur dioxide generation and purification unit comprises a combustion furnace, wherein the combustion furnace is respectively connected with a low-temperature methanol washing acid gas pipeline and an air pipeline, and a sulfur dioxide outlet of the combustion furnace is connected with the drying tower.
Preferably, the sulfur trioxide refining unit comprises an oxidation tower for oxidizing sulfur dioxide, wherein the outlet of the bottom of the oxidation tower is connected with a separating tank, and the gas phase outlet of the separating tank is connected with the sulfur trioxide refining tower.
Preferably, the electronic grade sulfuric acid refining unit comprises an absorption tower connected with an outlet of the sulfur trioxide refining tower, the outlet of the absorption tower is connected with a degassing tower, and the outlet of the degassing tower is connected with the electronic grade sulfuric acid storage tank through a primary filter, a secondary filter and a tertiary filter in sequence.
Preferably, the sulfur dioxide outlet of the combustion furnace is connected with the drying tower through a first heat exchange channel of the first heat exchanger, and the outlet of the drying tower is connected with the sulfur trioxide refining unit through a second heat exchange channel of the first heat exchanger.
Preferably, the oxidation tower is a three-stage oxidation tower, and a first catalyst bed layer, a second catalyst bed layer and a third catalyst bed layer are respectively arranged from top to bottom; the bottom of the third catalyst bed layer is provided with a first boiler water heat exchange pipeline connected with a steam drum, a second boiler water heat exchange pipeline of the steam drum is connected with the inside of the combustion furnace, and the third boiler water heat exchange pipeline of the steam drum is connected with a superheated steam pipeline through the lower part of the second catalyst bed layer and the lower part of the third catalyst bed layer in sequence.
Preferably, the bottom outlet of the oxidation tower is connected with the separation tank through the shell side of the second heat exchanger, and the gas phase outlet of the separation tank is connected with the sulfur trioxide refining tower through the shell side of the third heat exchanger; the tube side outlet of the second heat exchanger is connected with the tube side inlet of the third heat exchanger, and the tube side outlet of the third heat exchanger is connected with the tube side inlet of the second heat exchanger through a water supplementing tee; the water supplementing tee joint is provided with a circulating water pipeline.
Preferably, the upper part of the absorption tower is connected with a concentrated sulfuric acid storage tank through a concentrated sulfuric acid pipeline.
Preferably, a clean gas pipeline is arranged at the bottom of the degassing tower, and a gas phase outlet at the top of the degassing tower is connected with a tail gas absorption tower; a silk screen layer, a first packing layer and a second packing layer are arranged in the degassing tower; the inlet of the degasser is arranged between the wire mesh layer and the first packing layer.
Preferably, the pore size of the primary filter is 0.1 μm, the pore size of the secondary filter is 0.05 μm, and the pore size of the tertiary filter is 0.02 μm.
According to the production system for preparing electronic grade sulfuric acid from the coal chemical acid gas, which is prepared according to the scheme, the acid gas is ensured to be fully converted into SO through the peroxidation of the coal chemical acid gas 2 Removing water and partial water-soluble impurities in the process system through cooling and drying; SO is put into 2 SO is ensured by three-stage catalytic oxidation 2 Can be fully converted into SO 3 The method comprises the steps of carrying out a first treatment on the surface of the And SO is combined with 3 Condensing, separating liquid, evaporating and removing impurities to obtain high-purity SO 3 In liquefied SO 3 Further purification of CO in a separation system 2 、N 2 And the like; finally, through concentrated sulfuric acid absorption and three-stage filtration, the purity of impurities and insoluble particles of the electronic grade sulfuric acid can reach above the G4 (SEMI-C12) standard; compared with the prior art, the method takes the coal chemical acid gas as the raw material to directly prepare the high-purity electronic grade sulfuric acid, so that coal chemical enterprises can directly prepare the high-purity electronic grade sulfuric acid without externally taking additional raw materials; the additional value of the coal chemical waste gas is improved, and the profitability of enterprises is improved.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
In the figure: 1. washing an acid gas pipeline by using low-temperature methanol; 2. an air duct; 3. a combustion furnace; 4. a drying tower; 5. an oxidation tower; 6. a separation tank; 7. a sulfur trioxide refining tower; 8. an absorption tower; 9. a degasser; 10. a primary filter; 11. a secondary filter; 12. a third stage filter; 13. an electronic grade sulfuric acid storage tank; 14. a first heat exchanger; 15. a water supplementing tee joint; 16. a first catalyst bed; 17. a second catalyst bed; 18. a third catalyst bed; 19. a steam drum; 20. a first boiler water heat exchange conduit; 21. a second boiler water heat exchange conduit; 22. a third boiler water heat exchange conduit; 23. a superheated steam pipeline; 24. a second heat exchanger; 25. a third heat exchanger; 26. a circulating water pipe; 27. a concentrated sulfuric acid storage tank; 28. a clean gas pipe; 29. a tail gas absorption tower; 30. a silk screen layer; 31. a first filler layer; 32. and a second filler layer.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
Referring to fig. 1, the utility model relates to a production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas, which comprises a low-temperature methanol washing acid gas pipeline 1, wherein the low-temperature methanol washing acid gas pipeline 1 is connected with a sulfur dioxide generation and purification unit, the sulfur dioxide generation and purification unit is connected with an electronic grade sulfuric acid refining unit through a sulfur trioxide refining unit, and the electronic grade sulfuric acid refining unit is connected with an electronic grade sulfuric acid storage tank 13. The utility model is suitable for preparing the coal chemical acid gas into electronic grade sulfuric acid so as to achieve the characteristic of improving the added value of products, and particularly, the utility model utilizes the sulfur dioxide generation and purification unit to prepare the coal chemical acid gas into sulfur dioxide and simultaneously achieves the purposes of extraction and impurity removal, thereby improving the concentration on the premise of reducing the concentration interval of the sulfur dioxide, and creating conditions for the follow-up stable production load and the long-period stable operation; further, the sulfur dioxide is further purified by a sulfur trioxide refining unit on the basis of converting sulfur dioxide into sulfur trioxide, and finally the electronic grade sulfuric acid is prepared by an electronic grade sulfuric acid refining unit.
Further, the sulfur dioxide generation and purification unit comprises a combustion furnace 3, the combustion furnace 3 is respectively connected with the low-temperature methanol washing acid gas pipeline 1 and the air pipeline 2, and a sulfur dioxide outlet of the combustion furnace 3 is connected with the drying tower 4. By the arrangement, the acid gas from low-temperature methanol washing and excessive air can be combusted in the combustion furnace 3, SO that the acid gas is charged for reaction, and is dried by the drying agent arranged in the drying tower 4, thereby obtaining dry basis SO 2 The process gas can realize impurity removal on the basis of the process gas, and the impurity removal comprises impurity removal by burning the acid gas, water removal in the drying process, partial water-soluble impurities removal and the like; to achieve the aim of improving the dry basis SO 2 Based on the concentration of the process gas, the concentration interval of sulfur dioxide is reduced.
Further, the sulfur trioxide refining unit comprises an oxidation tower 5 for oxidizing sulfur dioxide, an outlet at the bottom of the oxidation tower 5 is connected with a separation tank 6, and a gas phase outlet of the separation tank 6 is connected with a sulfur trioxide refining tower 7. The utility model utilizes the oxidation tower 5 to make SO 2 The process gas is fully converted into SO 3 And SO 3 Gradually cooling in the oxidation tower 5 and the separation tank 6, separating impurities to realize further purification, and thenThen enters a sulfur trioxide refining tower 7 for filtering and purifying to remove SO 3 Metal ions and impurities in the metal ion-containing composition.
Further, the electronic grade sulfuric acid refining unit comprises an absorption tower 8 connected with the outlet of the sulfur trioxide refining tower 7, the outlet of the absorption tower 8 is connected with a degassing tower 9, and the outlet of the degassing tower 9 is connected with an electronic grade sulfuric acid storage tank 13 through a primary filter 10, a secondary filter 11 and a tertiary filter 12 in sequence. The SO passing through the sulfur trioxide refining tower 7 3 The mixture enters an absorption tower 8 to be absorbed by concentrated sulfuric acid, so that the concentration of the sulfuric acid generated by the absorption tower 8 is between 96 and 97 percent; further, sulfuric acid with a concentration of 96-97% is introduced into the deaerator 9 for deaeration, wherein the deaeration is carried out by atomizing the sulfuric acid flowing from the top of the tower by introducing a clean gas into the deaerator 9 from the bottom to the top, and separating unreacted SO which is oxidized from sulfuric acid droplets 2 And the mixture is sequentially subjected to microporous filtration through a primary filter 10, a secondary filter 11 and a tertiary filter 12 to obtain electronic grade sulfuric acid.
Further, the sulfur dioxide outlet of the combustion furnace 3 is connected with the drying tower 4 through a first heat exchange channel of the first heat exchanger 14, and the outlet of the drying tower 4 is connected with the sulfur trioxide refining unit through a second heat exchange channel of the first heat exchanger 14.
Further, the oxidation tower 5 is a three-stage oxidation tower, and a first catalyst bed 16, a second catalyst bed 17 and a third catalyst bed 18 are respectively arranged from top to bottom; the bottom of the third catalyst bed 18 is provided with a first boiler water heat exchange pipeline 20 connected with a steam drum 19, a second boiler water heat exchange pipeline 21 of the steam drum 18 is connected with the inside of the combustion furnace 3, and a third boiler water heat exchange pipeline 22 of the steam drum 18 is connected with a superheated steam pipeline 23 sequentially through the lower part of the second catalyst bed 16 and the lower part of the third catalyst bed 17. The utility model not only can lead SO to be realized by arranging the three-stage oxidation tower 2 The process gas is fully converted into SO 3 The process gas can also realize by-product superheated steam by utilizing the cooperation of the oxidation tower 5 and the combustion furnace 3, and is beneficial to reducing SO 3 The temperature of the process gas is SO in the subsequent process 3 Lay a foundation for condensation.
Further toThe bottom outlet of the oxidation tower 5 is connected with the separation tank 6 through the shell side of the second heat exchanger 24, and the gas phase outlet of the separation tank 6 is connected with the sulfur trioxide refining tower 7 through the shell side of the third heat exchanger 25; the tube side outlet of the second heat exchanger 24 is connected with the tube side inlet of the third heat exchanger 25, and the tube side outlet of the third heat exchanger 25 is connected with the tube side inlet of the second heat exchanger 24 through the water supplementing tee 15; the water supplementing tee 15 is provided with a circulating water pipeline 26. Through the arrangement, SO can be realized on the premise of saving circulating water 3 Condensing and removing impurities.
Further, the upper part of the absorption tower 8 is connected with a concentrated sulfuric acid storage tank 27 through a concentrated sulfuric acid pipe.
Further, a clean gas pipeline 28 is arranged at the bottom of the degassing tower 9, and a gas phase outlet at the top of the degassing tower 9 is connected with a tail gas absorption tower 29; the inside of the degassing tower 9 is provided with a silk screen layer 30, a first packing layer 31 and a second packing layer 32; the inlet of the degassing column 9 is arranged between the wire mesh layer 30 and the first packing layer 31. By the arrangement, clean gas and sulfuric acid can be in countercurrent contact, SO that the sulfuric acid is atomized, and SO which is not reacted and has oxidation reaction is separated from sulfuric acid liquid drops 2 So as to improve the purity of the sulfuric acid and lay a foundation for the subsequent acquisition of electronic grade sulfuric acid.
Further, the pore size of the primary filter 10 is 0.1 μm, the pore size of the secondary filter 11 is 0.05 μm, and the pore size of the tertiary filter 12 is 0.02 μm.
The working principle of the utility model is as follows: the acid gas from the low-temperature methanol washing in the low-temperature methanol washing acid gas pipeline 1 and the excessive air in the air pipeline 2 are fully combusted in the combustion furnace 3 to enable the acid gas to be combusted and reacted, and after heat is recovered, the acid gas is dried by a drying agent in the drying tower 4 to obtain dry basis SO 2 Process gas. The temperature of the burner depends on H in the acid gas 2 S concentration, typically acid gas H 2 S is more than or equal to 30 percent, combustion-supporting oxygen/H 2 S=1.2 to 2.2, the combustion temperature is about 900 to 1050 ℃; the temperature of the hot air is 170-230 ℃; the drying agent can be calcium chloride, sulfuric acid, molecular sieve, etc.; allowing the dry basis SO to 2 The oxidation is carried out in a process gas oxidation tower 5, and the oxidation tower is three-stage oxygenThe reaction tower can react with oxygen under the action of three-stage catalyst to make SO 2 The process gas is fully converted into SO 3 A process gas; SO (SO) 3 Cooling and liquefying the process gas to obtain crude liquid SO 3 The method comprises the steps of carrying out a first treatment on the surface of the Crude liquid SO 3 Enters a sulfur trioxide refining tower 7 through a separating tank 6, and the sulfur trioxide refining tower 7 is used for refining crude liquid SO 3 Filtering and purifying (removing metal ions and impurities), and purifying to obtain clean SO 3 The gas enters the absorption column 8. The temperature of the process gas entering the three-stage oxidation tower is about 430 ℃, and the catalyst is as follows: vanadium catalysts KSV-13, KSC-13, etc.; the temperature of the first catalyst bed 16 is 530-540 ℃, the temperature of the second catalyst bed 17 is about 430-440 ℃, the temperature of the third catalyst bed 18 is about 380-390 ℃, and the temperature of the materials in the separation tank 6 is 60-70 ℃; the clean SO entering the absorption tower 8 3 The concentration of sulfuric acid in the system is ensured to be 96-97% by fully contacting and absorbing the gas with concentrated sulfuric acid and injecting a proper amount of ultrapure water according to the on-line concentration detection result; the resistivity of the ultrapure water with the temperature of 75-95 ℃ in the absorption tower 8 is more than or equal to 18.2MΩ cm, and the metallic impurity is less than or equal to 1ppt; the sulfuric acid with the concentration of 96-97% enters the degasser 9 for degassing treatment, the clean gas with pressure enters the degasser 9 from bottom to top for countercurrent contact with the sulfuric acid with the concentration of 96-97%, and the SO which is not reacted and is subjected to oxidation reaction is separated from sulfuric acid drops by atomization 2 Removed SO 2 And the high-purity sulfuric acid solution after the degassing treatment is subjected to microporous filtration through a three-stage filter to obtain electronic grade sulfuric acid (SEMI-C12), wherein the clean gas is ultrapure air CDA/nitrogen with the purity of more than or equal to 99.999 percent and the pressure of 0.25-0.45 MPa. The process can directly prepare high-purity electronic grade sulfuric acid by taking the coal chemical acid gas as a raw material, improves the added value of the coal chemical waste gas, and can also achieve the purpose of by-producing superheated steam.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas comprises a low-temperature methanol washing acid gas pipeline (1), and is characterized in that: the low-temperature methanol washing acid gas pipeline (1) is connected with a sulfur dioxide generation and purification unit, the sulfur dioxide generation and purification unit is connected with an electronic grade sulfuric acid purification unit through a sulfur trioxide purification unit, and the electronic grade sulfuric acid purification unit is connected with an electronic grade sulfuric acid storage tank (13).
2. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 1, wherein: the sulfur dioxide generation and purification unit comprises a combustion furnace (3), wherein the combustion furnace (3) is respectively connected with a low-temperature methanol washing acid gas pipeline (1) and an air pipeline (2), and a sulfur dioxide outlet of the combustion furnace (3) is connected with a drying tower (4).
3. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 1, wherein: the sulfur trioxide refining unit comprises an oxidation tower (5) for oxidizing sulfur dioxide, an outlet at the bottom of the oxidation tower (5) is connected with a separation tank (6), and a gas phase outlet of the separation tank (6) is connected with a sulfur trioxide refining tower (7).
4. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 1, wherein: the electronic grade sulfuric acid refining unit comprises an absorption tower (8) connected with an outlet of the sulfur trioxide refining tower (7), an outlet of the absorption tower (8) is connected with a degassing tower (9), and an outlet of the degassing tower (9) is connected with an electronic grade sulfuric acid storage tank (13) through a primary filter (10), a secondary filter (11) and a tertiary filter (12) in sequence.
5. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 2, wherein: the sulfur dioxide outlet of the combustion furnace (3) is connected with the drying tower (4) through a first heat exchange channel of the first heat exchanger (14), and the outlet of the drying tower (4) is connected with the sulfur trioxide refining unit through a second heat exchange channel of the first heat exchanger (14).
6. A production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 3, characterized in that: the oxidation tower (5) is a three-stage oxidation tower, and a first catalyst bed layer (16), a second catalyst bed layer (17) and a third catalyst bed layer (18) are respectively arranged from top to bottom;
the bottom of the third catalyst bed (18) is provided with a first boiler water heat exchange pipeline (20) connected with a steam drum (19), a second boiler water heat exchange pipeline (21) of the steam drum (19) is connected with the inside of the combustion furnace (3), and a third boiler water heat exchange pipeline (22) of the steam drum (19) sequentially passes through the lower part of the second catalyst bed (17) and the lower part of the third catalyst bed (18) and is connected with a superheated steam pipeline (23).
7. A production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 3, characterized in that: the bottom outlet of the oxidation tower (5) is connected with the separation tank (6) through the shell side of the second heat exchanger (24), and the gas phase outlet of the separation tank (6) is connected with the sulfur trioxide refining tower (7) through the shell side of the third heat exchanger (25);
the tube side outlet of the second heat exchanger (24) is connected with the tube side inlet of the third heat exchanger (25), and the tube side outlet of the third heat exchanger (25) is connected with the tube side inlet of the second heat exchanger (24) through a water supplementing tee joint (15);
the water supplementing tee joint (15) is provided with a circulating water pipeline (26).
8. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 4, wherein: the upper part of the absorption tower (8) is connected with a concentrated sulfuric acid storage tank (27) through a concentrated sulfuric acid pipeline.
9. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 4, wherein: the bottom of the degassing tower (9) is provided with a clean gas pipeline (28), and a gas phase outlet at the top of the degassing tower (9) is connected with a tail gas absorption tower (29);
a silk screen layer (30), a first packing layer (31) and a second packing layer (32) are arranged in the degassing tower (9);
the inlet of the degassing tower (9) is arranged between the silk screen layer (30) and the first packing layer (31).
10. The production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas according to claim 4, wherein: the pore diameter of the primary filter (10) is 0.1 mu m, the pore diameter of the secondary filter (11) is 0.05 mu m, and the pore diameter of the tertiary filter (12) is 0.02 mu m.
CN202322313077.1U 2023-08-28 2023-08-28 Production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas Active CN220432358U (en)

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CN202322313077.1U CN220432358U (en) 2023-08-28 2023-08-28 Production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas

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Application Number Priority Date Filing Date Title
CN202322313077.1U CN220432358U (en) 2023-08-28 2023-08-28 Production system for preparing electronic grade sulfuric acid from coal chemical industry acid gas

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