CN220366820U - Device for scanning and detecting profile and verticality of complex structure - Google Patents
Device for scanning and detecting profile and verticality of complex structure Download PDFInfo
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- CN220366820U CN220366820U CN202321783794.4U CN202321783794U CN220366820U CN 220366820 U CN220366820 U CN 220366820U CN 202321783794 U CN202321783794 U CN 202321783794U CN 220366820 U CN220366820 U CN 220366820U
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- 238000001514 detection method Methods 0.000 claims abstract description 127
- 239000004065 semiconductor Substances 0.000 claims abstract description 48
- 238000009434 installation Methods 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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Abstract
The utility model provides a complex structure profile and verticality scanning detection device, which comprises: the semiconductor profile scanning detection device comprises a detection device supporting frame, wherein a detection supporting platform is arranged in the middle of the detection device supporting frame, a plurality of movable supporting pad feet are arranged at the lower end of the detection device supporting frame, a semiconductor detection supporting platform is arranged on the detection supporting platform, a semiconductor profile scanning detection device is arranged on the detection supporting platform at the lower side of the semiconductor detection supporting platform, and a verticality scanning detection device is arranged on the detection supporting platform at one side of the semiconductor profile scanning detection device.
Description
Technical Field
The utility model relates to the technical field of semiconductor production equipment, in particular to a device for scanning and detecting profile and verticality of a complex structure.
Background
A semiconductor refers to a material whose conductivity can be controlled, ranging from an insulator to a conductor. The quality detection device for the green ceramic production is disclosed in China (patent number 202120417974.5), and comprises a base, wherein the bottom of the base is fixedly connected with supporting legs, the top of the base is fixedly connected with a detection box, the top of the detection box is fixedly connected with a water tank, one side of the water tank is fixedly connected with a water inlet pipe, the top of the water tank is fixedly connected with a water pump, and a water inlet of the water pump is fixedly connected with a water inlet pipe. However, the detection dimension is limited, and the complex structure profile and verticality scanning detection cannot be realized.
Disclosure of Invention
The technical problem to be solved by the utility model is to provide a device for scanning and detecting the profile and verticality of a complex structure so as to solve the problems in the background art.
The technical problems solved by the utility model are realized by adopting the following technical scheme: a device for complex structure profile and verticality scanning detection, comprising: the detection equipment supporting frame, detection equipment supporting frame middle part is equipped with detection supporting platform, detection equipment supporting frame lower extreme is equipped with a plurality of removal supporting legs, be equipped with semiconductor detection supporting platform on the detection supporting platform, be equipped with semiconductor profile scanning check out test set on the detection supporting platform of semiconductor detection supporting platform downside, be equipped with straightness scanning check out test set on the detection supporting platform of semiconductor profile scanning check out test set one side, semiconductor detection supporting platform includes the product mounting fixture, the product mounting fixture upper end is installed on rotary driving motor's output, rotary driving motor's casing passes through the motor fixed plate and installs on the altitude mixture control support, the altitude mixture control support passes through fixing bolt and installs the upper end at the stand, the lower extreme fixed mounting of stand is on detection supporting platform.
Further, straightness scanning check out test set includes the scanning support base, the scanning support base upside is equipped with the equipment installing support, equipment installing support one side is equipped with straightness detection end mount pad, straightness detection end mount pad is installed on removing the regulating plate, remove the regulating plate lower extreme and install on adjusting the drive plate, adjusting the drive plate and installing on adjusting the output of driving the cylinder, the cylinder body of adjusting the driving cylinder is installed on equipment installing support.
Further, an adjusting guide hole is formed in the movable adjusting plate, an adjusting guide rod is arranged in the adjusting guide hole, and two ends of the adjusting guide rod are mounted on the equipment mounting bracket through guide rod fixing plates.
Further, the semiconductor profile scanning detection equipment comprises a profile scanning end mounting seat, the profile scanning end mounting seat is mounted on the output end of a lifting adjusting cylinder II, the cylinder body of the lifting adjusting cylinder II is mounted on an equipment mounting vertical plate II through a cylinder fixing seat II, and the lower end of the equipment mounting vertical plate II is mounted on a detection support platform through an adjusting support base.
Further, adjust the support base and include backup pad, lower backup pad, go up backup pad one end and install on adjusting drive board II, adjusting drive board II installs on adjusting drive cylinder II's output, adjusting drive cylinder II's cylinder body passes through cylinder fixed plate II and installs on the lower backup pad.
Further, an adjusting guide device is arranged between the upper support plate and the lower support plate, the adjusting guide device comprises an adjusting guide sliding rail, a plurality of adjusting guide sliding blocks are arranged on the adjusting guide sliding rail, the adjusting guide sliding rail is fixedly arranged on the lower support plate, and the adjusting guide sliding blocks are fixedly arranged on the upper support plate.
Further, the movable supporting foot comprises a movable supporting wheel, the movable supporting wheel is installed on a supporting wheel installation seat, the upper end of the supporting wheel installation seat is installed on a supporting fixing plate through a rotary supporting seat, and the supporting fixing plate is installed on a supporting frame of the detection equipment.
Further, a supporting base plate is arranged on one side of the movable supporting wheel, the upper end of the supporting base plate is installed on a base plate fixing plate through a double-head adjusting bolt, and the base plate fixing plate is installed on a supporting wheel installation seat.
Compared with the prior art, the utility model has the beneficial effects that: the utility model not only can realize the profile and verticality scanning detection of semiconductors with complex structures, but also can adjust the scanning position according to different requirements so as to adapt to products with different models, improve the application range of equipment and reduce the production cost.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
FIG. 2 is a schematic view of a movable support foot according to the present utility model.
Fig. 3 is a schematic diagram of a structure of the verticality scanning detection apparatus according to the present utility model.
Fig. 4 is a schematic structural view of a semiconductor profile scanning and detecting device according to the present utility model.
Fig. 5 is a schematic structural diagram of a semiconductor inspection support platform according to the present utility model.
Detailed Description
In order that the manner in which the features and objects and functions of the utility model are attained and can be readily understood, a further description of the utility model will be seen in connection with the accompanying drawings, in which the terms "mounted," "connected," and "connected" are to be understood broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intermediate medium, or communicate between the two elements unless otherwise specifically indicated and defined.
Examples
As shown in fig. 1 to 5, a device for scanning and detecting profile and verticality of a complex structure includes: the detection equipment supporting frame 1, detection equipment supporting frame 1 middle part is equipped with detection supporting platform 2, detection equipment supporting frame 1 lower extreme is equipped with a plurality of removal supporting legs 3, be equipped with semiconductor detection supporting platform 6 on the detection supporting platform 2, be equipped with semiconductor profile scanning detection equipment 5 on the detection supporting platform 2 of semiconductor detection supporting platform 6 downside, be equipped with straightness scanning detection equipment 4 that hangs down on the detection supporting platform 2 of semiconductor profile scanning detection equipment 5 one side, semiconductor detection supporting platform 6 includes product mounting fixture 61, product mounting fixture 61 upper end is installed on the output of rotary driving motor 62, the casing of rotary driving motor 62 passes through motor fixed plate 63 and installs on altitude mixture control support 64, altitude mixture control support 64 passes through fixing bolt and installs the upper end at support post 65, the lower extreme fixed mounting of support post 65 is on detection supporting platform 2.
Examples
As shown in fig. 1 to 5, a device for scanning and detecting profile and verticality of a complex structure includes: the detection equipment supporting frame 1, detection equipment supporting frame 1 middle part is equipped with detection supporting platform 2, detection equipment supporting frame 1 lower extreme is equipped with a plurality of removal supporting legs 3, be equipped with semiconductor detection supporting platform 6 on the detection supporting platform 2, be equipped with semiconductor profile scanning detection equipment 5 on the detection supporting platform 2 of semiconductor detection supporting platform 6 downside, be equipped with straightness that hangs down on the detection supporting platform 2 of semiconductor profile scanning detection equipment 5 one side and scan detection equipment 4, straightness that hangs down scanning detection equipment 4 includes scanning support base 41, scanning support base 41 upside is equipped with equipment installing support 42, equipment installing support 42 one side is equipped with straightness detection end mount pad 48, straightness that hangs down detection end mount pad 48 is installed on removal regulating plate 45, remove regulating plate 45 lower extreme and install on regulating drive plate 44, regulating drive plate 44 is installed on regulating drive cylinder 43's output, regulating drive cylinder 43's cylinder body is installed on equipment installing support 42. The movable adjusting plate 45 is provided with an adjusting guide hole, an adjusting guide rod 46 is arranged in the adjusting guide hole, and two ends of the adjusting guide rod 46 are arranged on the equipment mounting bracket 42 through guide rod fixing plates 47.
Examples
As shown in fig. 1 to 5, a device for scanning and detecting profile and verticality of a complex structure includes: the detection equipment supporting frame 1, detection equipment supporting frame 1 middle part is equipped with detection supporting platform 2, detection equipment supporting frame 1 lower extreme is equipped with a plurality of removal supporting legs 3, be equipped with semiconductor detection supporting platform 6 on the detection supporting platform 2, be equipped with semiconductor profile scanning detection equipment 5 on the detection supporting platform 2 of semiconductor detection supporting platform 6 downside, be equipped with straightness that hangs down on the detection supporting platform 2 of semiconductor profile scanning detection equipment 5 one side and scan detection equipment 4, semiconductor profile scanning detection equipment 5 includes profile scanning end mount pad 57, profile scanning end mount pad 57 is installed on the output of lift adjustment cylinder II58, the cylinder body of lift adjustment cylinder II58 passes through cylinder fixing base II59 and installs on equipment installation riser II56, equipment installation riser II56 lower extreme is installed on detection supporting platform 2 through the regulation support base. The adjusting support base comprises an upper support plate 52 and a lower support plate 51, one end of the upper support plate 52 is installed on an adjusting drive plate II53, the adjusting drive plate II53 is installed on the output end of an adjusting drive cylinder II54, and a cylinder body of the adjusting drive cylinder II54 is installed on the lower support plate 51 through a cylinder fixing plate II 55. An adjusting guide device is arranged between the upper support plate 52 and the lower support plate 51 and comprises an adjusting guide slide rail 511, a plurality of adjusting guide slide blocks 510 are arranged on the adjusting guide slide rail 511, the adjusting guide slide rail 511 is fixedly arranged on the lower support plate 51, and the adjusting guide slide blocks 510 are fixedly arranged on the upper support plate 52.
Examples
As shown in fig. 1 to 5, a device for scanning and detecting profile and verticality of a complex structure includes: the detection equipment supporting frame 1, detection equipment supporting frame 1 middle part is equipped with detection supporting platform 2, detection equipment supporting frame 1 lower extreme is equipped with a plurality of removal supporting legs 3, be equipped with semiconductor detection supporting platform 6 on the detection supporting platform 2, be equipped with semiconductor profile scanning detection equipment 5 on the detection supporting platform 2 of semiconductor detection supporting platform 6 downside, be equipped with straightness scanning detection equipment 4 that hangs down on the detection supporting platform 2 of semiconductor profile scanning detection equipment 5 one side, remove supporting legs 3 including removing supporting wheel 31, remove supporting wheel 31 and install on supporting wheel mount pad 32, the supporting wheel mount pad 32 upper end is installed on supporting fixed plate 33 through rotatory supporting seat, supporting fixed plate 33 installs on detection equipment supporting frame 1. The movable supporting wheel 31 is provided with a supporting base plate 34 on one side, the upper end of the supporting base plate 34 is mounted on a base plate fixing plate 36 through a double-head adjusting bolt 35, and the base plate fixing plate 36 is mounted on the supporting wheel mounting seat 32.
The semiconductor profile scanning detection device is characterized in that the semiconductor detection support platform 6 is arranged on the detection support platform 2 at the lower side of the semiconductor detection support platform 6, the semiconductor profile scanning detection device 5 is arranged on the detection support platform 2 at one side of the semiconductor profile scanning detection device 5, and the perpendicularity scanning detection device 4 is arranged on the detection support platform 2 at one side of the semiconductor profile scanning detection device 5, so that the profile and perpendicularity scanning detection of semiconductors with complex structures can be realized, scanning positions can be adjusted according to different requirements, products with different types can be adapted, the application range of the device is improved, and the production cost is reduced.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (8)
1. A device for complex structure profile and verticality scanning detection, comprising: detection equipment braced frame (1), detection equipment braced frame (1) middle part is equipped with detection supporting platform (2), detection equipment braced frame (1) lower extreme is equipped with a plurality of removal support foot (3), its characterized in that: the semiconductor profile scanning detection device comprises a detection support platform (2), wherein a semiconductor detection support platform (6) is arranged on the detection support platform (2) at the lower side of the semiconductor detection support platform (6), a semiconductor profile scanning detection device (5) is arranged on the detection support platform (2) at one side of the semiconductor profile scanning detection device (5), a perpendicularity scanning detection device (4) is arranged on the detection support platform (2), the semiconductor detection support platform (6) comprises a product fixing clamp (61), the upper end of the product fixing clamp (61) is arranged on the output end of a rotary driving motor (62), a shell of the rotary driving motor (62) is arranged on a height adjusting support (64) through a motor fixing plate (63), the height adjusting support (64) is arranged at the upper end of a support column (65) through a fixing bolt, and the lower end of the support column (65) is fixedly arranged on the detection support platform (2).
2. The apparatus for detecting profile and verticality scanning of a complex structure according to claim 1, wherein: the straightness scanning check out test set (4) including scanning support base (41), scanning support base (41) upside is equipped with equipment installation support (42), equipment installation support (42) one side is equipped with straightness detection end mount pad (48), straightness detection end mount pad (48) are installed on removal regulating plate (45), remove regulating plate (45) lower extreme and install on regulation drive plate (44), regulation drive plate (44) are installed on the output of regulation drive cylinder (43), the cylinder body of regulation drive cylinder (43) is installed on equipment installation support (42).
3. The apparatus for detecting profile and verticality scanning of a complex structure according to claim 2, wherein: the movable adjusting plate (45) is provided with an adjusting guide hole, an adjusting guide rod (46) is arranged in the adjusting guide hole, and two ends of the adjusting guide rod (46) are arranged on the equipment mounting bracket (42) through guide rod fixing plates (47).
4. The apparatus for detecting profile and verticality scanning of a complex structure according to claim 1, wherein: the semiconductor profile scanning detection device (5) comprises a profile scanning end mounting seat (57), the profile scanning end mounting seat (57) is mounted on the output end of a lifting adjusting cylinder II (58), a cylinder body of the lifting adjusting cylinder II (58) is mounted on a device mounting vertical plate II (56) through a cylinder fixing seat II (59), and the lower end of the device mounting vertical plate II (56) is mounted on a detection support platform (2) through an adjusting support base.
5. The apparatus for scanning and detecting profile and verticality of a complex structure according to claim 4, wherein: the adjusting support base comprises an upper support plate (52) and a lower support plate (51), one end of the upper support plate (52) is installed on an adjusting drive plate II (53), the adjusting drive plate II (53) is installed on the output end of an adjusting drive cylinder II (54), and a cylinder body of the adjusting drive cylinder II (54) is installed on the lower support plate (51) through a cylinder fixing plate II (55).
6. The apparatus for scanning and detecting profile and verticality of a complex structure according to claim 5, wherein: the adjustable guide device is characterized in that an adjusting guide device is arranged between the upper support plate (52) and the lower support plate (51), the adjusting guide device comprises an adjusting guide sliding rail (511), a plurality of adjusting guide sliding blocks (510) are arranged on the adjusting guide sliding rail (511), the adjusting guide sliding rail (511) is fixedly arranged on the lower support plate (51), and the adjusting guide sliding blocks (510) are fixedly arranged on the upper support plate (52).
7. The apparatus for detecting profile and verticality scanning of a complex structure according to claim 1, wherein: the movable supporting foot pad (3) comprises a movable supporting wheel (31), the movable supporting wheel (31) is installed on a supporting wheel installation seat (32), the upper end of the supporting wheel installation seat (32) is installed on a supporting fixing plate (33) through a rotary supporting seat, and the supporting fixing plate (33) is installed on a supporting frame (1) of the detection equipment.
8. The apparatus for scanning and detecting profile and verticality of a complex structure according to claim 7, wherein: the movable supporting wheel (31) is characterized in that a supporting base plate (34) is arranged on one side of the movable supporting wheel (31), the upper end of the supporting base plate (34) is mounted on a base plate fixing plate (36) through a double-head adjusting bolt (35), and the base plate fixing plate (36) is mounted on a supporting wheel mounting seat (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321783794.4U CN220366820U (en) | 2023-07-09 | 2023-07-09 | Device for scanning and detecting profile and verticality of complex structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321783794.4U CN220366820U (en) | 2023-07-09 | 2023-07-09 | Device for scanning and detecting profile and verticality of complex structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220366820U true CN220366820U (en) | 2024-01-19 |
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ID=89520423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321783794.4U Active CN220366820U (en) | 2023-07-09 | 2023-07-09 | Device for scanning and detecting profile and verticality of complex structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220366820U (en) |
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2023
- 2023-07-09 CN CN202321783794.4U patent/CN220366820U/en active Active
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