CN2203009Y - Graphite heater - Google Patents
Graphite heater Download PDFInfo
- Publication number
- CN2203009Y CN2203009Y CN 94246584 CN94246584U CN2203009Y CN 2203009 Y CN2203009 Y CN 2203009Y CN 94246584 CN94246584 CN 94246584 CN 94246584 U CN94246584 U CN 94246584U CN 2203009 Y CN2203009 Y CN 2203009Y
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- Prior art keywords
- graphite
- heater
- utility
- calandria
- temperature
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Abstract
The utility model belongs to the technical field of the heater manufacturing. The utility model provides a graphite heater with a heating element made up of graphite materials. The electrode connects the graphite heating element with the power as a graphite heater. The graphite heater not only is a graphite heater of high-temperature form but also can be made into a novel heater with flat-temperature zone of various shapes, such as plain face and circular tube or with gradient distribution according to a definite temperature. According to different requirements the graphite of the novel heater is made into different shapes, such as plate, circular tube, conical column, etc. The utility model integrates the heating element and the uniform temperature element as a whole. The utility model has the advantages of high efficiency and good temperature homogeneity. The utility model is also suitable for making up the materials of carbide and thin film.
Description
The utility model belongs to heater manufacturing technology field.
Multifarious of a great variety at various heaters in field such as life, production and scientific researches, but a kind of important means--the filming technology that is used for preparing new material and carries out research work, because of the general substrate of making film all is to be placed in the vacuum chamber, and require its surface temperature to reach 700-800 ℃, even it is higher, so up to the present, also do not have a kind of putative comparatively desirable universal heater of film system that is used to make.The general heater that all adopts heater strip to manufacture, as shown in Figure 1, Fig. 1 is that the common heating silk is made the heater structure schematic diagram.It is by body of heater (1), and heater strip (2) and equal thermostat (3) three parts are formed.During the system film, substrate (4) is placed on the equal thermostat (3).Experimental result shows, under hundreds of millitorr base vacuum condition, the surface temperature of substrate (4) is lower more than 400 ℃ than the temperature of heater strip (2), that is to say, when underlayer temperature is 700-800 ℃, the thousands of degree of the temperature of heater strip, so heater strip (2) also is blown often owing to the reasons such as stress in knee.There is the human platinum wire to do heater strip now, as document (1) Shenyang section instrument development center " magnetron sputtering coater " specification; Also there is the human halogen lamp to do heater strip, as document (2) M.F.Davis et al, J.A.Phys.69(10), also useful LASER HEATING is as document (3) C.Romeo et al, Physica C 180,77(1991), although these equipment cost costlinesses, equipment complexity, effect are also desirable not enough.
The purpose of this utility model is to overcome the shortcoming and defect of above-mentioned prior art, in order to improve heating-up temperature and calandria life-span, does calandria thereby provide a kind of with graphite, the graphite heater that electrode combines as a whole calandria and power supply.
The purpose of the new shape of this practicality is achieved in that
The utility model utilizes the fusing point height of graphite material, heat-conductivity conducting and chemical property are good, and easy characteristics such as processing, be cut to certain thickness rectangle, square, garden shape, tubular etc., and a heater can be by one or string, and connecting a polylith graphite composition calandria (5), electrode (6) connects calandria (5) to be made with power supply (7).
Figure (2) is plate graphite body heater
Figure (3) is a garden cast graphite body heater
Figure (4) is a garden pipe gradient type graphite body heater
Below in conjunction with drawings and Examples the present invention is described in detail:
Graphite material has certain intensity, during its thinner thickness, and has certain elasticity, processes also easily, no matter is that the graphite fusing point of cubic structure or hexagonal structure all is about 3700 ℃, and when temperature was 1492 ℃, the vapour pressure of carbon correspondence only was 10
-10Holder illustrates that graphite is very good exotic material.Do calandria with graphite, its good electrical conductivity makes the itself pressure drop little, and the electric field that is produced can not exert an influence to growth for Thin Film, and its good electrical conductivity makes it have good temperature homogeneity.When doing film, substrate (4) can be placed directly on the heater (5), the centre does not need equal permanent body (3) to have the very high heat efficiency.Especially it is used to prepare carbide material, calandria (5) itself is exactly a material with carbon element, can not have more its unique advantage owing to the heating material volatilization produces any pollution.
In addition, graphite material and processing charges are all very cheap, and have certain intensity and elasticity, and not fragile, the life-span is long, thereby the heater that provides of the utility model is a kind of very desirable heater of film such as preparation carbide.
If graphite heating body (5) is sealed, it will become and be applicable to the universal heater that comprises the various occasions of oxygen atmosphere.
Machining graphite is become the calandria (5) of wide 30mm * long 60mm * thick 1mm, make clamping plate electrode (6) with stainless steel materials, be clipped in the two ends of calandria (5), select output 20V for use, the self-control transformer of 600W and the voltage regulator of 1000W are power supply (7), it and clamping plate electrode (6) link, and all connections all are screwed, and make the plane heater that the flat-temperature zone is 30mm * 30mm.
Do by embodiment 1, calandria (5) and electrode (6) are burnt be enclosed in the quartz glass, make the universal heater that various occasions such as being used to comprise oxygen atmosphere are used.
Machining graphite is become the calandria (5) of wide 50mm * long 90mm * thick 15mm, the two ends of calandria (5) directly are fitted on the water cooled electrode (6) in the filming equipment vacuum chamber with steel plate, do power supply (7) with temperature controller in the coating system and power supply, make and be used to prepare C
3N
4The plane heater that coating system is used.
Graphite is made as shown in Figure 3 length overall 100mm, long each 10mm of electrode, internal diameter 10mm, heat pipe external diameter 12mm, the calandria (5) of electrode external diameter 16mm is made round folder formula electrode (6) with the thick copper coin of 1mm, be clipped in calandria (5) two ends, select 20V for use, the D.C. regulated power supply of 600W is done power supply (7), and links to each other with electrode (6), all connections all are screwed, and make the tubular type heater.
Do by embodiment 4, in calandria (5), put the thick 05mm of an endwall, long 140mm, the quartz ampoule of external diameter 10mm, be 50mm with the external diameter that adds water-cooled then, the stainless steel tube of long 120mm is done outer wall, is enclosed within calandria (5) outside, with boron nitride powder calandria (5) and electrode (6) are sealed in the middle of outer wall steel pipe and the inwall quartz ampoule, make the general microheaters in laboratory such as being used to measure the magnetic characteristic.
Machining graphite is become as shown in Figure 4, length overall 120mm, long each 10mm of electrode, internal diameter 8mm, the calandria (5) that external diameter is tapered, frustum two ends external diameter is respectively 12mm and 10mm, the two end electrodes external diameter is 14mm, makes round folder formula electrode (6) with the corrosion resistant plate of 05mm, is clipped in calandria (5) two ends, select for use big controlled current silicon voltage regulation of voltage regulation power supply to do power supply (7), make the laboratory heater that is the uniform temperature Gradient distribution.
Do 8 of the graphite cakes of long 200mm * wide 20mm * thick 2mm, calandria (5) is done in the parallel placement of 8 graphite cakes interval 1mm, make clamping plate electrode (6) with the thick corrosion resistant plate of 3mm, with electrode (6) 8 graphite cakes are connected successively, with output 20V, power 2000W does power supply (7) around the voltage regulator of transformer and 2000W certainly, makes the large-area flat-plate heater.
Claims (3)
1, a kind of novel graphite body heater that comprises that calandria (5), electrode (6) and power supply (7) constitute is characterized in that: calandria (5) adopts graphite material to make plate, cast, tapered, electrode (6) joining power (7) and calandria (5).
2, by the described graphite body heater of claim 1, it is characterized in that: can make calandria (5) to 2 above graphite parallel connections or series connection.
3, the graphite body heater of stating by claim 1 or 2 is characterized in that: said power supply (7) can be interchange, DC power supply and storage battery, dry cell etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94246584 CN2203009Y (en) | 1994-12-08 | 1994-12-08 | Graphite heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94246584 CN2203009Y (en) | 1994-12-08 | 1994-12-08 | Graphite heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2203009Y true CN2203009Y (en) | 1995-07-05 |
Family
ID=33852032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94246584 Expired - Fee Related CN2203009Y (en) | 1994-12-08 | 1994-12-08 | Graphite heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2203009Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100348951C (en) * | 2006-03-10 | 2007-11-14 | 哈尔滨工业大学 | High performance photoelectric position controller capable of using in adverse circumstances |
| CN101265607B (en) * | 2007-11-12 | 2010-06-09 | 中国电子科技集团公司第四十八研究所 | Graphite heater for polycrystalline silicon casting ingot process |
| CN101404834B (en) * | 2008-11-10 | 2012-02-08 | 西安电子科技大学 | Electromagnetic heater |
| CN103673610A (en) * | 2013-12-23 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Ultra-temperature and mean temperature graphite pipe type heating furnace |
| CN108356270A (en) * | 2018-03-26 | 2018-08-03 | 厦门大学 | A kind of metal 3D printing method based on contact resistance heating |
| CN108934091A (en) * | 2017-05-26 | 2018-12-04 | 中国科学院地质与地球物理研究所 | A kind of graphite heater and preparation method thereof |
-
1994
- 1994-12-08 CN CN 94246584 patent/CN2203009Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100348951C (en) * | 2006-03-10 | 2007-11-14 | 哈尔滨工业大学 | High performance photoelectric position controller capable of using in adverse circumstances |
| CN101265607B (en) * | 2007-11-12 | 2010-06-09 | 中国电子科技集团公司第四十八研究所 | Graphite heater for polycrystalline silicon casting ingot process |
| CN101404834B (en) * | 2008-11-10 | 2012-02-08 | 西安电子科技大学 | Electromagnetic heater |
| CN103673610A (en) * | 2013-12-23 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Ultra-temperature and mean temperature graphite pipe type heating furnace |
| CN103673610B (en) * | 2013-12-23 | 2019-03-19 | 中国科学院上海硅酸盐研究所 | Superhigh temperature samming graphite tubular heater |
| CN108934091A (en) * | 2017-05-26 | 2018-12-04 | 中国科学院地质与地球物理研究所 | A kind of graphite heater and preparation method thereof |
| CN108356270A (en) * | 2018-03-26 | 2018-08-03 | 厦门大学 | A kind of metal 3D printing method based on contact resistance heating |
| CN108356270B (en) * | 2018-03-26 | 2020-06-09 | 厦门大学 | Metal 3D printing method based on contact resistance heating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |