CN220233430U - Terahertz waveguide alignment fixing clamp - Google Patents

Abstract

The application discloses terahertz waveguide alignment fixture belongs to terahertz devices, and solves the problem that the terahertz waveguide fixture in the prior art is insufficient in alignment, clamping and fixing schemes of waveguide devices. In the technical scheme of the application, a waveguide limiting groove is formed in the clamp body, and a waveguide device is arranged in the clamp body; the outer shape of the waveguide device is matched with the inner shape of the waveguide limit groove, and the outer surface of the waveguide device is attached to the inner surface of the waveguide limit groove; the clamp body comprises an upper clamp block and a lower clamp block, and the upper clamp block is in butt joint with the lower clamp block from the upper side of the lower clamp block to form the clamp body; butt joint openings are respectively constructed on the end surfaces of the two ends of the clamp body, and are communicated with the inside of the waveguide limiting groove. The technical scheme of the application has great improvement in the aspects of device alignment precision, assembly reliability, transmission loss control and the like.

Description

Terahertz waveguide alignment fixing clamp

Technical Field

The utility model relates to a terahertz waveguide alignment fixing clamp, and relates to a terahertz device.

Background

Terahertz waves refer to electromagnetic waves with frequencies ranging from 0.1 to 10THz and corresponding wavelengths ranging from 3mm to 30 μm, which are located in the middle of the millimeter wave and infrared wave frequency bands in the electromagnetic spectrum. Because of the unique properties of the terahertz wave, such as wide frequency band, high penetrability, sensitivity to biological tissues and the like, the terahertz wave can be applied to the fields of satellite communication, radar detection, biological imaging and the like. One factor that currently limits the application of terahertz technology is that its transmission loss is serious, and effective transmission is required through a terahertz transmission line with high reliability and low loss. The existing terahertz transmission line is mainly in the form of a waveguide, is commonly used for signal transmission between terahertz devices or between a terahertz system and test equipment, and generally needs to be matched with structures such as pins, flanges and the like for reliable assembly and connection.

Due to the size co-transition effect, in order to ensure the stable propagation mode of electromagnetic wave and reduce transmission loss, the critical dimensions of devices such as waveguides and the like are reduced to one tenth of the wavelength, so that the preparation precision of the devices in the terahertz frequency range is up to the micron level. The higher the frequency of the electromagnetic wave signal is, the lower the skin depth is, and the surface roughness of the waveguide device is smaller than the skin depth of the electromagnetic wave under the working frequency, so that the surface roughness of the waveguide device is controlled below hundreds of nanometers in the terahertz frequency band. The conventional machining technology cannot manufacture a fine waveguide structure, and the surface roughness cannot be effectively reduced, so that additional loss is brought to the waveguide device. And the existing processes of Deep Reactive Ion Etching (DRIE), LIGA and the like in the micro-nano processing process can effectively prepare micro-scale and even nano-scale fine structures, and are suitable for developing high-frequency terahertz waveguide devices. The terahertz waveguide device developed based on the micro-nano processing technology at present has the following problems in terms of assembly and use: (1) Because the critical structure of the device is small in size, high requirements are put on error control and alignment accuracy in the assembly process, and assembly deviation is required to be less than a few micrometers; (2) The device prepared by the micro-nano technology has smaller overall appearance, lighter and thinner structure and poor structural strength, and is easy to deform under the conditions of stress or temperature change and the like, so that the working stability of the device is influenced, and the service life of the device is prolonged; (3) The capacity of the micro-nano technology for preparing the device is limited, and the fine micro-nano structure, the flange plate and other large-size outline structures cannot be synchronously manufactured, so that the waveguide device cannot be directly connected with other parts for use, and auxiliary assembly is needed by means of a clamp.

The main technology for processing the waveguide flange structure at present is to utilize a high-precision numerical control machine tool to carry out metal milling forming, and can directly integrally process and form the waveguide and the flange, but the processing precision and the surface roughness of the method are difficult to meet the performance requirements of devices. In recent years, a silicon micromachining mode is adopted to prepare a high-precision terahertz waveguide, and a waveguide assembly scheme for clamping and assembling the terahertz waveguide by utilizing a metal clamp with a flange plate becomes a new technical route. However, the existing metal fixture processing scheme is based on milling forming of a machine tool, and alignment of the micro-nano terahertz waveguide is mostly positioned by adopting pin holes or special marks, so that alignment accuracy of devices is greatly reduced. In addition, the waveguide device is generally integrally held inside the fixture, and the waveguide port needs to be connected to an external component port through a waveguide channel milled on the sidewall of the fixture, which introduces additional transmission loss. Therefore, in terms of alignment and clamping fixation of the micro-nano terahertz waveguide device, a further optimization of the design scheme of the clamp is required.

The existing schemes for realizing the assembly connection of passive devices such as waveguides and the like mainly comprise two schemes, namely, a waveguide structure for transmitting signals, a pin and a flange structure for assembly connection are processed on the same metal base material, and a machine tool is used for milling the metal material for integral forming; the other is that the waveguide structure and the pin flange are respectively processed by adopting two technologies, the waveguide device is processed by adopting a micro-nano processing mode with higher process precision, then the metal fixture with the pin and the flange adopts a precise machine tool milling mode, and the waveguide device is clamped and fixed by the fixture, so that the reliable whole is finally formed to realize assembly connection.

However, in the first scheme, the minimum structural dimension of the waveguide device is required to be in the micron order in the terahertz frequency band, and the dimensions of the standard pins and flanges for device connection assembly are in the centimeter order, so that the dimension difference between the existing assembly structure and the high-frequency terahertz device is too large, the precision of a machine tool machining mode can meet the tolerance requirements of the pin and flange structures, but in the process of preparing the high-frequency terahertz waveguide device, the milling forming of a high-precision metal structure cannot be realized by the machine tool machining mode, and the roughness of the metal surface after machining is finished cannot be effectively reduced.

The second scheme separates out the terahertz waveguide structure, adopts a micro-nano processing method with higher process precision to prepare, and simultaneously adopts a precise machine tool processing mode for the pin and flange structure, and the waveguide device is assembled in a clamping mode by a clamp. The scheme improves the preparation precision of the waveguide structure, and solves the problem that the micro-nano terahertz waveguide device cannot be connected with other components reliably. However, this solution still has several problems: (1) In the alignment scheme, the existing clamp performs alignment of the waveguide device by means of a special positioner, the alignment precision is not high in this way, and the stability and reliability of the device in a complex working environment cannot be guaranteed; (2) In the clamping scheme, the existing scheme clamps the whole waveguide device inside the clamp, and an additional waveguide channel is required to be processed on the clamp for transmitting an external electromagnetic wave signal to the internal waveguide, but the waveguide channel on the clamp still needs to be milled by a machine tool, so that the same problem as the first scheme is brought, and the waveguide channel on the clamp needs to be aligned with a port of the internal waveguide device and also needs to be aligned with a port of an external part for a second time, so that the assembly difficulty is high, and a larger error is easy to occur; (3) On the fixed scheme, current anchor clamps pass through the pin and fix device and anchor clamps together, need synchronous processing out the cotter hole when waveguide device prepares, and this not only brings extra work load for receiving processing mode a little, and in the fixed screwing in-process of pin, waveguide device local atress is inhomogeneous, appears warping easily, influences the working property and the life of device.

In conclusion, the high-precision terahertz waveguide device prepared based on the micro-nano processing technology is clamped by the clamp, and is integrally assembled through the pin and flange structure on the clamp, so that the high-precision terahertz waveguide device is a feasible scheme for realizing high-precision and high-reliability assembly of passive devices such as waveguides in the terahertz frequency band. There are a number of problems with the alignment, clamping and fixing schemes of the waveguide devices and further optimization improvements are needed.

Disclosure of Invention

The terahertz waveguide alignment fixing clamp provided by the utility model has the advantages of great improvement in the aspects of device alignment precision, assembly reliability, transmission loss control and the like.

The technical scheme adopted by the utility model is that the terahertz waveguide alignment fixing clamp comprises a clamp body and a waveguide device (1), wherein a waveguide limit groove (2) is formed in the clamp body, and the waveguide device (1) is arranged in the clamp body;

the external shape of the waveguide device (1) is matched with the internal shape of the waveguide limit groove (2), and the outer surface of the waveguide device (1) is attached to the inner surface of the waveguide limit groove (2);

the clamp body comprises an upper clamp block (3) and a lower clamp block (4), wherein the upper clamp block (3) is in butt joint with the lower clamp block (4) from the upper side of the lower clamp block (4) to form the clamp body; and butt joint openings (5) are respectively formed in the end faces of the two ends of the clamp body, and the butt joint openings (5) are communicated with the inside of the waveguide limiting groove (2).

Preferably, the terahertz waveguide alignment fixing clamp is characterized in that grooves are respectively formed in the surface of the upper clamp block (3) facing the lower clamp block (4) and the surface of the lower clamp block (4) facing the upper clamp block (3), and the grooves of the upper clamp block (3) and the grooves of the lower clamp block (4) are butted to form the waveguide limiting groove (2).

Preferably, the terahertz waveguide is aligned to the fixing clamp, and the waveguide limit groove (2) is constructed on the surface of the upper clamp block (3) facing the lower clamp block (4) or the waveguide limit groove (2) is constructed on the surface of the lower clamp block (4) facing the upper clamp block (3).

Preferably, the terahertz waveguide is aligned to the fixing clamp, standard flange grooves (6) are respectively formed on the end surfaces of the two ends of the clamp body, and the concave depth of each standard flange groove (6) is smaller than the thickness of the end wall of the clamp body; the butt joint openings (5) at two ends of the clamp body are respectively positioned in the standard flange grooves (6) at two ends of the clamp body; a standard flange (8) is arranged in the standard flange groove (6) through bolts, an opening II is formed in the middle of the standard flange (8), and the opening II is matched with the butt joint opening (5).

Preferably, the terahertz waveguide alignment fixture is made of a metal material, wherein the fixture body is made of one of gold, copper and aluminum.

Preferably, the terahertz waveguide is aligned with the fixing clamp, and the waveguide limiting groove (2) is a polygonal groove.

Optimally, the terahertz waveguide is aligned with the fixing clamp, and a plurality of flange connecting pin shaft holes (7) are formed in the inner wall of the standard flange groove (6).

Preferably, the terahertz waveguide is aligned with the fixing clamp, and the upper clamp block (3) and the lower clamp block (4) are fixed through bolts after being butted.

The beneficial effects of this application lie in:

the size gap between the terahertz waveguide device and external test equipment or a high-frequency system can be effectively matched, the terahertz waveguide can be precisely limited and aligned, and signal loss caused by alignment errors between the terahertz waveguide device and an external interface is avoided. Meanwhile, the terahertz waveguide device is protected by means of the clamp, the mechanical strength of the terahertz waveguide device is improved, and the deformation of the device under the action of external force is avoided.

According to the technical scheme, the high-precision numerical control machine tool is used for milling the limiting groove consistent with the outline dimension of the waveguide device on the clamping surface of the clamp, the position offset of the waveguide device is controlled by the outer wall of the groove, and the device is limited and fixed, so that the alignment precision and the assembly reliability are improved, meanwhile, the waveguide port is aligned with the flange surface of the clamp, the waveguide port is directly connected with the port on the outer side, and the machining error and the secondary alignment error caused by the preparation of the waveguide channel on the clamp are avoided. Compared with the existing fixture design scheme, the scheme provided by the utility model is suitable for assembling and debugging passive devices such as terahertz frequency band waveguides, and has great improvement in the aspects of device alignment precision, assembly reliability, transmission loss control and the like.

Drawings

FIG. 1 is a schematic structural diagram of the present application;

FIG. 2 is a front view of the terahertz waveguide alignment fixture of the present application;

FIG. 3 is a side view of the terahertz waveguide alignment fixture of the present application;

FIG. 4 is a top view of the lower clamp block of the present application;

fig. 5 is a schematic structural view of the terahertz waveguide alignment fixture of the present application after the standard flange is mounted.

Detailed Description

The technical features of the present utility model are further described below with reference to the accompanying drawings and the specific embodiments.

In the terahertz frequency band, the structural dimensions of passive devices such as waveguides are basically in the micron level, and as the traditional machining mode cannot process micron-level fine structures, the mode can cause damage on the metal surface, and the machining precision and roughness requirements of the terahertz frequency band waveguide devices cannot be met. And based on the micro-nano processing technology, the micro-nano structure processing can be effectively realized, and the method is very suitable for preparing terahertz frequency band waveguide devices. However, the overall size of the waveguide device manufactured by the micro-nano technology is smaller, the problem of mismatching with the standard connector such as a flange is solved, the micro-size structure such as a waveguide cavity and the large-size structure such as a pin hole and the flange cannot be manufactured synchronously by adopting the same technology, and meanwhile, the manufactured waveguide device is easy to deform, so that an external clamp is required to be used for fixing and protecting, the accurate alignment of the waveguide is ensured by virtue of the limit groove and other structures of the clamp, and meanwhile, the pin and flange structures can be manufactured on the clamp, so that the connection and assembly of the waveguide device are realized.

The existing clamp adopts pin holes to fix the waveguide device or clamps the device inside the clamp completely, and certain defects still exist in the aspect of device alignment precision. The utility model provides a method for fixing the waveguide device by milling a unique groove structure in a precise machine tool machining mode, and limiting the outer wall of the groove structure, thereby improving the reliability and alignment precision of the waveguide device in the clamp.

The core of the application is to clamp the waveguide device (1) in the middle by using the upper part and the lower part of the clamp body. The surface, which is contacted with the waveguide device (1), of the upper clamp block (3) and the lower clamp block (4) is milled with a waveguide limit groove (2) which is completely consistent with the appearance of the waveguide device (1) in a precision lathe machining mode, the waveguide device (1) can be embedded in the groove to be fixed, and meanwhile, the alignment precision of the device is effectively guaranteed through the limit structure of the waveguide limit groove (2).

And standard flanges (8) are manufactured on the outer surfaces of the input and output sides of the two ends of the clamp body, meanwhile, the port surfaces of the micro-nano terahertz waveguide are aligned with the surface of the standard flange (8), the waveguide ports are directly connected with other standard waveguide devices, the waveguide ports are not required to be manufactured on the clamp body for secondary alignment, and the alignment precision of the waveguide is improved.

The terahertz waveguide device can be effectively protected by adopting the fixture body for fixation, so that structural deformation is avoided, and the service life is prolonged. Therefore, the terahertz waveguide alignment fixing clamp provided by the utility model has the advantages of high precision, good reliability and the like, and has important application value in scenes such as high-precision terahertz test equipment, high-power terahertz output sources, high-frequency terahertz transmission systems and the like.

In order to achieve the aim of the utility model, the utility model adopts the following technical scheme:

example 1

This embodiment is a terahertz waveguide alignment fixture including a fixture body and a waveguide device (1). In this embodiment, the whole fixture body is made of oxygen-free copper, and the fixture body can also be made of gold, aluminum or other materials. The fixture body machining method can be replaced by 3D printing, nano-CNC process, if desired.

In this embodiment, standard flange grooves (6), standard flanges (8) and connecting pin holes are milled on a complete oxygen-free copper block by using a precision machining mode, and the standard flanges (8) and the pin holes are used for connecting other waveguides or testing equipment.

The clamp body is split into an upper part and a lower part along a horizontal plane to form an upper clamp block (3) and a lower clamp block (4), the upper clamp block (3) and the lower clamp block (4) of the upper part and the lower part are butted, and alignment and fixation are carried out by using positioning bolts or pins after the butt joint. In the embodiment, a plurality of through holes are formed in the upper end face of the upper clamp block (3), the through holes are located on two sides of the waveguide limiting groove (2), a counter bore is formed in the upper end face of the lower clamp block (4), the through holes are opposite to the counter bore, internal threads are formed in the counter bore, a bolt penetrates through the through hole of the upper clamp block (3) and then is connected in the counter bore of the lower clamp block (4) in a threaded mode, and the upper clamp block (3) and the lower clamp block (4) are fixedly in butt joint.

The waveguide device (1) is clamped between the upper clamp block (3) and the lower clamp block (4).

In this embodiment, grooves are milled in accordance with the profile of the waveguide device (1) on the lower bottom surface of the upper jig block (3) and the upper surface of the lower jig block (4), and the depths of both grooves are half the thickness of the waveguide device (1), respectively. After the upper clamp block (3) and the lower clamp block (4) are in butt joint, the two grooves are in butt joint to form a waveguide limiting groove (2), and the waveguide device (1) is integrally embedded in the waveguide limiting groove (2). The recess is octagonal in shape, and it is understood that four right angles of a square or rectangle are cut off by an isosceles right triangle, respectively, so that each angle of the octagon is 135 °. The external shape of the waveguide device (1) is matched with the internal shape of the waveguide limit groove (2), and after the waveguide device (1) is installed in the waveguide limit groove (2), the external surface of the waveguide device (1) is attached to the internal surface of the waveguide limit groove (2).

In this embodiment, four side walls of the octagonal recess parallel and perpendicular to the waveguide channel direction are used to roughly limit and align the waveguide device (1), and the remaining four side walls are used to finely limit and align the waveguide by forming an angle of 45 ° with the waveguide channel direction. The size of the groove is 1 micron smaller than the corresponding size of the appearance of the waveguide device, and the larger tolerance brought by a precise machine tool machining mode is reduced as much as possible.

The fixture body for fixing and aligning the terahertz frequency band waveguide device (1) can clamp and fix the micro-nano processing terahertz waveguide device (1), the alignment precision of the waveguide device is kept by milling the waveguide limiting groove (2) in the fixture body, and deformation of the waveguide device (1) is effectively avoided through the upper plane and the lower plane in the groove.

And butt joint openings (5) are respectively formed in the end faces of the two ends of the clamp body, and the butt joint openings (5) are communicated with the inside of the waveguide limiting groove (2). In the embodiment, strip-shaped notches are respectively formed in positions, corresponding to the waveguide input port and the waveguide output port, of the upper clamp block (3) and the lower clamp block (4), the notches penetrate through the end wall and are communicated with the insides of grooves of the upper clamp block (3) and the lower clamp block (4), after the upper clamp block (3) and the lower clamp block (4) are in butt joint and fixed, the notches of the upper clamp block (3) and the lower clamp block (4) are in butt joint and form strip-shaped butt joint openings (5), and the butt joint openings (5) at two ends of the clamp body correspond to the waveguide input port and the waveguide output port of the waveguide device (1) respectively.

Standard flange grooves (6) are respectively constructed on the end surfaces of the two ends of the clamp body, and the concave depth of each standard flange groove (6) is smaller than the thickness of the end wall of the clamp body. That is, the standard flange groove (6) does not penetrate the end face of the clamp body.

In the embodiment, semicircular grooves are respectively formed in positions, corresponding to the waveguide input port and the waveguide output port, of the upper clamp block (3) and the lower clamp block (4), the thickness of each semicircular groove is smaller than that of the end walls of the upper clamp block (3) and the lower clamp block (4), and notches are formed in the inner bottom end faces of the semicircular grooves. After the upper clamp block (3) and the lower clamp block (4) are in butt joint and fixed, the two semicircular grooves are in butt joint to form a standard flange groove (6).

A standard flange (8) is arranged in the standard flange groove (6) through bolts, an opening II is formed in the middle of the standard flange (8), and the opening II is matched with the butt joint opening (5). After the standard flange (8) is installed in the standard flange groove (6), the second opening is opposite to the butt joint opening (5) so that the waveguide input port and the waveguide output port of the waveguide device (1) are exposed.

The flange plate on the clamp body is connected with other devices or testing systems to match the size difference between the terahertz waveguide and external equipment, and the clamp can be used for realizing accurate alignment of the terahertz waveguide, improving the mechanical strength of the waveguide device and ensuring nondestructive transmission of terahertz signals.

The inner wall of the standard flange groove (6) is provided with a plurality of flange connecting pin shaft holes (7). When the standard flange (8) is installed, an installed bolt penetrates through the standard flange (8) and is in threaded connection with the flange connection pin shaft hole (7), and then the standard flange (8) is fixed.

The clamp with the standard flange plate and the polygonal limiting groove structure can effectively align and fix the terahertz waveguide device prepared based on the micro-nano technology, ensure the service performance of the waveguide device, solve the problem of device deformation under the action of external force, and is relatively suitable for clamping and assembling the miniaturized waveguide device in the terahertz wave band.

Due to the design of the polygonal groove limiting structure, the waveguide device can be kept stable in the clamp and is not easy to shake, the interface on the standard flange of the waveguide device and the interface on the standard flange of the outer device can be accurately aligned, and signal loss caused by alignment errors is reduced. The terahertz waveguide can be connected with external equipment or high-frequency devices by means of the standard flange on the clamp, so that the size difference between the terahertz waveguide and the external devices is effectively matched, and the difficulty in assembling and aligning the terahertz waveguide devices is reduced.

Example 2

This embodiment differs from embodiment 1 in that: the waveguide limit groove (2) is constructed on the surface of the upper clamp block (3) facing the lower clamp block (4) or the waveguide limit groove (2) is constructed on the surface of the lower clamp block (4) facing the upper clamp block (3).

It should be understood that the above description is not intended to limit the utility model to the particular embodiments disclosed, but to limit the utility model to the particular embodiments disclosed, and that various changes, modifications, additions and substitutions can be made by those skilled in the art without departing from the spirit and scope of the utility model.

Claims (8)

1. The terahertz waveguide alignment fixing clamp comprises a clamp body and a waveguide device (1), wherein a waveguide limit groove (2) is formed in the clamp body, and the waveguide device (1) is arranged in the clamp body; the method is characterized in that:

the external shape of the waveguide device (1) is matched with the internal shape of the waveguide limit groove (2), and the outer surface of the waveguide device (1) is attached to the inner surface of the waveguide limit groove (2);

the clamp body comprises an upper clamp block (3) and a lower clamp block (4), wherein the upper clamp block (3) is in butt joint with the lower clamp block (4) from the upper side of the lower clamp block (4) to form the clamp body; and butt joint openings (5) are respectively formed in the end faces of the two ends of the clamp body, and the butt joint openings (5) are communicated with the inside of the waveguide limiting groove (2).

2. The terahertz waveguide alignment fixture according to claim 1, wherein: grooves are respectively formed in the surface of the upper clamp block (3) facing the lower clamp block (4) and the surface of the lower clamp block (4) facing the upper clamp block (3), and the grooves of the upper clamp block (3) and the grooves of the lower clamp block (4) are in butt joint to form a waveguide limit groove (2).

3. The terahertz waveguide alignment fixture according to claim 1, wherein: the waveguide limit groove (2) is constructed on the surface of the upper clamp block (3) facing the lower clamp block (4) or the waveguide limit groove (2) is constructed on the surface of the lower clamp block (4) facing the upper clamp block (3).

4. The terahertz waveguide alignment fixture according to claim 1, wherein: standard flange grooves (6) are respectively formed in the end faces of the two ends of the clamp body, and the concave depth of each standard flange groove (6) is smaller than the thickness of the end wall of the clamp body; the butt joint openings (5) at two ends of the clamp body are respectively positioned in the standard flange grooves (6) at two ends of the clamp body; a standard flange (8) is arranged in the standard flange groove (6) through bolts, an opening II is formed in the middle of the standard flange (8), and the opening II is matched with the butt joint opening (5).

5. The terahertz waveguide alignment fixture according to claim 1, wherein: the fixture body is made of metal, and the metal is one of gold, copper and aluminum.

6. The terahertz waveguide alignment fixture according to claim 1, wherein: the waveguide limit groove (2) is a polygonal groove.

7. The terahertz waveguide alignment fixture according to claim 4, wherein: the inner wall of the standard flange groove (6) is provided with a plurality of flange connecting pin shaft holes (7).

8. The terahertz waveguide alignment fixture according to claim 1, wherein: the upper clamp block (3) and the lower clamp block (4) are fixed through bolts after being butted.