CN220233123U - Wafer cleaning brush auxiliary device - Google Patents
Wafer cleaning brush auxiliary device Download PDFInfo
- Publication number
- CN220233123U CN220233123U CN202321940259.5U CN202321940259U CN220233123U CN 220233123 U CN220233123 U CN 220233123U CN 202321940259 U CN202321940259 U CN 202321940259U CN 220233123 U CN220233123 U CN 220233123U
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- CN
- China
- Prior art keywords
- cleaning brush
- shaft sleeve
- sliding shaft
- baffle
- auxiliary device
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- 238000004140 cleaning Methods 0.000 title claims abstract description 80
- 238000000034 method Methods 0.000 abstract description 13
- 244000185238 Lophostemon confertus Species 0.000 description 4
- 238000000926 separation method Methods 0.000 description 3
- 230000001680 brushing effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The application provides an auxiliary device for a wafer cleaning brush, which is applied to the technical field of wafer cleaning and comprises a cleaning brush, a driving end and a driven end, wherein two ends of the cleaning brush are detachably connected with the driving end and the driven end respectively, and the driving end is used for driving the cleaning brush to rotate; the driven end comprises a sliding shaft sleeve and a telescopic part, one end of the cleaning brush is detachably connected with the sliding shaft sleeve, the sliding shaft sleeve can slide along the length direction of the cleaning brush, the telescopic part is used for driving the sliding shaft sleeve to slide, when the cleaning brush needs to be replaced, the telescopic part drives the sliding shaft sleeve to move towards one side deviating from the cleaning brush until the sliding shaft sleeve is separated from the cleaning brush, when the cleaning brush is separated from the sliding shaft sleeve, an operator only needs to dial the cleaning brush out of the driving end, the complexity of the operator in the process of disassembling the cleaning brush is reduced in the whole disassembling process, the influence of space on the disassembling process of the cleaning brush is reduced, and the disassembling efficiency and safety performance are improved.
Description
Technical Field
The application relates to the technical field of wafer cleaning, in particular to an auxiliary device for a wafer cleaning brush.
Background
The brush is the core element of the brush module and is responsible for removing residual particles and residual chemicals from the wafer surface. At present, the brush in the brushing module is replaced manually.
The specific operation flow is as follows:
(1) Before the brush is disassembled, the operator cleans the worn glove;
(2) When the brush is disassembled, one hand slides the sliding shaft sleeve backwards, the other hand holds the front end of the brush, and the whole body is forced backwards.
(3) When the front end of the brush is moved out, the back end of the brush is moved out by reverse force.
Through the above, it is known that the replacement of the brush in the brush box requires the simultaneous operation of both hands of an operator, and the space in the brush box is small, so that the brush is not conveniently pushed backwards together with the sliding sleeve shaft, and the nozzle module is damaged easily due to improper operation.
Based on this, a new solution is needed.
Disclosure of Invention
In view of this, this description embodiment provides a wafer cleaning brush auxiliary device, has reduced operating personnel's complexity in dismantling the cleaning brush in-process, has reduced the influence of space to the cleaning brush dismantlement process, has improved dismantlement efficiency and security performance.
The embodiment of the specification provides the following technical scheme: the wafer cleaning brush auxiliary device comprises a cleaning brush, a driving end and a driven end, wherein two ends of the cleaning brush are detachably connected with the driving end and the driven end respectively, and the driving end is used for driving the cleaning brush to rotate;
the driven end comprises a sliding shaft sleeve and a telescopic part, one end of the cleaning brush is detachably connected with the sliding shaft sleeve, the sliding shaft sleeve can slide along the length direction of the cleaning brush, and the telescopic part is used for driving the sliding shaft sleeve to slide.
Optionally, both ends of the cleaning brush are connected with rotating shafts, and the two rotating shafts can be detachably connected with the driving end and the sliding shaft sleeve respectively.
Optionally, the rotating shaft is respectively connected with the driving end and the sliding shaft sleeve in a clamping connection or a plug connection mode.
Optionally, the telescopic part includes baffle and electric telescopic handle, baffle and slip axle sleeve fixed connection, the slip axle sleeve passes the baffle, electric telescopic handle drives through the baffle and drives slip axle sleeve slip.
Optionally, the number of the electric telescopic rods is two.
Optionally, the baffle is set to be oval, and two electric telescopic rods are respectively arranged at two ends of the length direction of the baffle.
Optionally, the through hole formed in the baffle is elliptical.
Optionally, the cleaning brush, the driving end and the driven end are positioned on the same straight line.
Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least:
when needs change the cleaning brush, the telescopic part drives the slip axle sleeve and moves towards one side that deviates from the cleaning brush until slip axle sleeve and cleaning brush separation, when cleaning brush and slip axle sleeve separation, operating personnel only need dial the cleaning brush from the driving end can, whole dismantlement process has reduced operating personnel in the complexity of dismantlement cleaning brush in-process, has reduced the influence of space to the cleaning brush dismantlement process, has improved dismantlement efficiency and security performance.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art structure;
FIG. 2 is a schematic view of a wafer brush auxiliary device according to the present application during rotation;
FIG. 3 is a schematic view of a wafer brush auxiliary device according to the present application in a separation process;
fig. 4 is a schematic view of a separated structure of an auxiliary device for cleaning a wafer.
In the figure: 1. a cleaning brush; 2. a driving end; 3. a driven end; 4. a case; 5. a sliding sleeve; 6. a telescopic part; 7. a rotating shaft; 8. a baffle; 9. an electric telescopic rod.
Detailed Description
Embodiments of the present application are described in detail below with reference to the accompanying drawings.
Other advantages and effects of the present application will become apparent to those skilled in the art from the present disclosure, when the following description of the embodiments is taken in conjunction with the accompanying drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. The present application may be embodied or carried out in other specific embodiments, and the details of the present application may be modified or changed from various points of view and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, apparatus may be implemented and/or methods practiced using any number and aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concepts of the application by way of illustration, and only the components related to the application are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the present utility model may be practiced without these specific details.
The brush is the core element of the brush module and is responsible for removing residual particles and residual chemicals from the wafer surface. At present, the brush in the brushing module is replaced manually.
The specific operation flow is as follows:
(1) Before the brush is disassembled, the operator cleans the worn glove;
(2) When the brush is disassembled, one hand slides the sliding shaft sleeve 5 out backwards, the other hand holds the front end of the brush, and the whole body is forced backwards.
(3) When the front end of the brush is moved out, the back end of the brush is moved out by reverse force.
Through the above, as shown in fig. 1, it is known that the replacement of the brush in the brush box 4 requires the simultaneous operation of both hands of the operator, that is, the operator needs to hold the brush by holding the sliding sleeve 5 with one hand and holds the brush with the other hand, and the space in the brush box 4 is small, so that the brush is not conveniently pushed backwards along with the sliding sleeve, and the nozzle module is damaged easily due to improper operation.
Based on this, the embodiment of the present specification proposes a wafer cleaning brush auxiliary device: as shown in fig. 2, the driven end 3 is controlled to automatically retract, so that an operator can detach the cleaning brush 1 by merely holding the cleaning brush 1.
The following describes the technical solutions provided by the embodiments of the present application with reference to the accompanying drawings.
As shown in fig. 2, the embodiment of the present disclosure provides an auxiliary device for a wafer cleaning brush, which includes a cleaning brush 1, a driving end 2, and a driven end 3, wherein the cleaning brush 1, the driving end 2, and the driven end 3 are located on the same straight line. Drive end 2 and driven end 3 all rotate with box 4 and are connected, and the both ends of cleaning brush 1 can dismantle with drive end 2 and driven end 3 respectively and be connected, and drive end 2 is used for driving cleaning brush 1 and rotates, and driven end 3 supports cleaning brush 1, drives cleaning brush 1 jointly and rotates.
The driven end 3 comprises a sliding shaft sleeve 5 and a telescopic part 6, the telescopic part 6 is connected with the inner wall of the box body 4, and the sliding shaft sleeve 5 can stretch or slide along the length direction of the cleaning brush 1. One end of the cleaning brush 1 is detachably connected with the sliding shaft sleeve 5, the sliding shaft sleeve 5 can slide along the length direction of the cleaning brush 1, and the telescopic part 6 is used for driving the sliding shaft sleeve 5 to slide.
In an alternative embodiment, both ends of the cleaning brush 1 are connected with rotating shafts 7, and both rotating shafts 7 can be detachably connected with the driving end 2 and the sliding shaft sleeve 5, respectively. The rotating shaft 7 is respectively connected with the driving end 2 and the sliding shaft sleeve 5 in a clamping or inserting way.
As shown in fig. 2 and 3, when the cleaning brush 1 needs to be replaced, the telescopic part 6 drives the sliding shaft sleeve 5 to move towards one side away from the cleaning brush 1 until the sliding shaft sleeve 5 is separated from the cleaning brush 1, and when the cleaning brush 1 is separated from the sliding shaft sleeve 5, an operator only needs to pull the cleaning brush 1 out of the driving end 2.
In an alternative embodiment, the telescopic part 6 comprises a baffle 8 and an electric telescopic rod 9, the electric telescopic rod 9 is connected with the inner wall of the case 4, and one end of the electric telescopic rod 9 away from the case 4 is connected with the baffle 8. Baffle 8 and slip axle sleeve 5 fixed connection, slip axle sleeve 5 pass baffle 8, and electric telescopic handle 9 drives through baffle 8 and drives slip axle sleeve 5 and slide.
In an alternative embodiment, the electric telescopic rods 9 are provided in two. Baffle 8 sets up to oval, and two electric telescopic handle 9 set up respectively at baffle 8 length direction's both ends. The through hole formed in the baffle plate 8 is oval, and the sliding shaft sleeve 5 penetrates through the oval through hole.
As shown in fig. 2 and 3, when the cleaning brush 1 needs to be replaced, the electric telescopic rod 9 drives the sliding shaft sleeve 5 to move towards one side deviating from the cleaning brush 1 through the baffle plate 8 until the sliding shaft sleeve 5 is separated from the cleaning brush 1, when the cleaning brush 1 is separated from the sliding shaft sleeve 5, an operator only needs to pull the cleaning brush 1 out of the driving end 2, the complexity of the operator in the cleaning brush disassembling process is reduced in the whole disassembling process, the influence of space on the cleaning brush disassembling process is reduced, and the disassembling efficiency and safety performance are improved.
In this specification, identical and similar parts of the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, the description is relatively simple for the embodiments described later, and reference is made to the description of the foregoing embodiments for relevant points.
The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions easily conceivable by those skilled in the art within the technical scope of the present application should be covered in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (8)
1. The utility model provides a wafer cleaning brush auxiliary device which characterized in that: the cleaning brush comprises a cleaning brush, a driving end and a driven end, wherein two ends of the cleaning brush are detachably connected with the driving end and the driven end respectively, and the driving end is used for driving the cleaning brush to rotate;
the driven end comprises a sliding shaft sleeve and a telescopic part, one end of the cleaning brush is detachably connected with the sliding shaft sleeve, the sliding shaft sleeve can slide along the length direction of the cleaning brush, and the telescopic part is used for driving the sliding shaft sleeve to slide.
2. The wafer cleaning brush auxiliary device according to claim 1, wherein: the two ends of the cleaning brush are connected with rotating shafts, and the two rotating shafts can be detachably connected with the driving end and the sliding shaft sleeve respectively.
3. The wafer cleaning brush auxiliary device according to claim 2, wherein: the rotating shaft is respectively connected with the driving end and the sliding shaft sleeve in a clamping or inserting way.
4. A wafer cleaning brush aid according to claim 3, wherein: the telescopic part comprises a baffle and an electric telescopic rod, the baffle is fixedly connected with the sliding shaft sleeve, the sliding shaft sleeve penetrates through the baffle, and the electric telescopic rod drives the sliding shaft sleeve to slide through the baffle.
5. The wafer cleaning brush auxiliary device according to claim 4, wherein: the number of the electric telescopic rods is two.
6. The wafer cleaning brush auxiliary device according to claim 5, wherein: the baffle is set to be oval, two electric telescopic rods are respectively arranged at two ends of the length direction of the baffle.
7. The wafer cleaning brush auxiliary device according to claim 6, wherein: the through holes formed in the baffle are elliptical.
8. The wafer cleaning brush assist apparatus of claim 7, wherein: the cleaning brush, the driving end and the driven end are positioned on the same straight line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321940259.5U CN220233123U (en) | 2023-07-21 | 2023-07-21 | Wafer cleaning brush auxiliary device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321940259.5U CN220233123U (en) | 2023-07-21 | 2023-07-21 | Wafer cleaning brush auxiliary device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220233123U true CN220233123U (en) | 2023-12-22 |
Family
ID=89193861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321940259.5U Active CN220233123U (en) | 2023-07-21 | 2023-07-21 | Wafer cleaning brush auxiliary device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220233123U (en) |
-
2023
- 2023-07-21 CN CN202321940259.5U patent/CN220233123U/en active Active
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