CN220169988U - Cooling mechanism for silicon wafer graphite boat - Google Patents
Cooling mechanism for silicon wafer graphite boat Download PDFInfo
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- CN220169988U CN220169988U CN202321686802.3U CN202321686802U CN220169988U CN 220169988 U CN220169988 U CN 220169988U CN 202321686802 U CN202321686802 U CN 202321686802U CN 220169988 U CN220169988 U CN 220169988U
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- graphite boat
- cooling mechanism
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- 230000007246 mechanism Effects 0.000 title claims abstract description 82
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 76
- 239000010439 graphite Substances 0.000 title claims abstract description 76
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 73
- 239000010703 silicon Substances 0.000 title claims abstract description 73
- 238000001816 cooling Methods 0.000 title claims abstract description 58
- 239000011148 porous material Substances 0.000 claims description 4
- 230000002146 bilateral effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a cooling mechanism for a silicon wafer graphite boat, and relates to the technical field of silicon wafer graphite boat cooling.
Description
Technical Field
The utility model relates to the related field of cooling of silicon wafer graphite boats, in particular to a cooling mechanism for a silicon wafer graphite boat.
Background
Silicon with the content of 25.8% in the crust provides an inexhaustible source for the production of monocrystalline silicon, and as the silicon is one of the most abundant elements in the crust, the silicon is one of the main photovoltaic materials for the solar cell products which are supposed to enter the large-scale market, the silicon is required to be used as a graphite boat in the process of processing, the graphite boat is required to be cooled when coming out of a graphite boat welding furnace, a graphite boat cooling room is matched with a PECVD carrier vehicle for the solar industry, and filtered clean air is scattered and blown to the graphite boat by a blower, so that the graphite boat is ensured to be rapidly cooled.
When the existing cooling mechanism for the silicon wafer graphite boat is optimized, the aspects of improved stability and novelty are mostly presented, for example, chinese practical patent with the patent number of CN201721500362.2 just discloses a cooling mechanism for the silicon wafer graphite boat, which comprises a machine room and a workbench, wherein the workbench is fixedly installed at the bottom of the machine room, a blowing fan is arranged on the upper surface of the workbench, an air suction cover is arranged above the workbench, an air delivery pipe is fixedly installed at the middle part of the upper surface of the air suction cover in a welding manner, a heat dissipation plate is fixedly installed inside the air delivery pipe, the end parts of the air delivery pipe are symmetrically communicated with a first air guide pipe, a supporting plate is fixedly installed inside the machine room, and one end of the supporting plate is welded and installed on the surface of the air delivery pipe.
Although the cooling mechanism for the silicon wafer graphite boat has certain advantages in terms of improved stability and novelty, the cooling mechanism has certain disadvantages:
as shown in fig. 6, an air suction cover is arranged in the machine room to suck hot air and cool the hot air through a heat dissipation plate and a water tank, so that the excessive high temperature of the hot air is avoided, and the cooling quality is greatly improved; the inside at the computer lab is equipped with the commentaries on classics board groove, thereby the inside in commentaries on classics board groove is equipped with the commentaries on classics board, thereby this commentaries on classics board passes through the motor and drives the gas from in the water tank and discharges through the outlet duct, but foretell cooling mechanism for silicon chip graphite boat, the bottom fixed mounting of computer lab has square workstation, the upper surface of workstation is equipped with blows the fan, it blows out the air of silicon chip graphite boat bottom through the fan, hardly carries out comprehensive cooling to silicon chip graphite boat, it is normal atmospheric temperature to blow the air to silicon chip graphite boat, the temperature can reach more than 500 ℃ when graphite boat comes out from the welding furnace, can lead to the air temperature around rising, lead to the cooling to the silicon chip graphite boat needs overlength time, lead to the work efficiency of cooling mechanism for the silicon chip graphite boat hardly to be improved.
Disclosure of Invention
Accordingly, in order to solve the above-described drawbacks, the present utility model provides a cooling mechanism for a silicon wafer graphite boat.
The utility model is realized in such a way, and constructs a cooling mechanism for a silicon wafer graphite boat, which comprises a supporting frame, wherein the upper ends of the front side and the rear side of the inner side of the supporting frame are fixedly connected with the left end and the right end of a baffle plate, and the middle lower side of the right end of the front side of the supporting frame is fixedly connected with the rear side of a controller;
the method is characterized in that: further comprises:
the lower ends of the left side and the right side of the overhead mechanism are fixedly connected with the lower ends of the inner sides of the supporting frames;
and the left side surface of the left lower end of the cooling mechanism is fixedly connected with the right side lower end surface of the supporting frame.
Preferably, the overhead mechanism comprises:
the vertical groove plates are arranged on the left side and the right side of the overhead mechanism;
the lower end of the outer surface of the sliding plate is in sliding connection with the inner side surface of the groove at the top of the vertical groove plate;
the outer side end of the sliding cylinder is fixedly connected with the front side and the rear side of the upper end of the inner side end of the sliding plate.
Preferably, the overhead mechanism further comprises:
the outer end of the spring is fixedly connected with the inner outer end of the sliding cylinder;
the outer end of the outer surface of the sliding rod is in sliding connection with the inner surface of the sliding cylinder;
and the front end and the rear end of the middle end of the outer side end of the clamping plate are fixedly connected with the inner side end of the sliding rod.
Preferably, the overhead mechanism further comprises:
the outer side end of the sliding groove plate is fixedly connected with the inner side end of the vertical groove plate;
the left end and the right end of the outer surface of the sliding support plate are in sliding connection with the inner surface of the groove at the middle end of the inner side of the chute plate;
the top of the electric push rod is fixedly connected with the middle left end of the bottom of the sliding support plate and the middle right end of the top.
Preferably, the overhead mechanism further comprises:
the bottom of the support vertical rod is fixedly connected with the top of the sliding support plate;
the left end and the right end of the outer surface of the sliding pore plate are in sliding connection with the inner surface of the groove at the upper end of the inner side of the chute plate;
the outer side end of the vertical groove plate is fixedly connected with the lower end of the inner side of the supporting frame.
Preferably, the cooling mechanism includes:
the right end of the supporting inclined block is fixedly connected with the middle upper end of the left side of the supporting frame;
the left side of the bottom of the cold air box is fixedly connected with the top of the supporting inclined block, and the front and rear ends of the inner side of the cold air box are fixedly connected with the front and rear sides of the top of the supporting frame and the front and rear sides of the upper ends of the left side and the right side;
the middle upper end of the outer surface of the exhaust pipe is fixedly connected with the inner side surface of the hole at the middle end of the top of the cold air box.
Preferably, the cooling mechanism further includes:
the outer side end of the connecting rod is fixedly connected with the middle ends of the middle lower ends of the left side and the right side of the inside of the cold air box;
the middle end of the top of the fan is fixedly connected with the inner side end of the bottom of the connecting rod, and the bottom of the fan is fixedly connected with the middle ends of the left side and the right side of the bottom inside the cold air box;
and the inclined holes are formed in the upper ends of the left side and the right side of the supporting frame.
Preferably, the cooling mechanism further includes:
the upper end of the left side of the outer surface of the air inlet pipe is fixedly connected with the inner side surface of a hole at the lower end of the right side of the cold air box;
the top of the refrigerator is fixedly connected with the right side of the bottom of the cold air box, the left end of the refrigerator is fixedly connected with the lower end of the right side of the supporting frame, and the middle part of the upper end of the right side of the refrigerator is fixedly connected with the lower end of the left side of the air inlet pipe;
the lower end of the outer surface of the exhaust pipe is fixedly connected with the inner side surface of the hole at the middle end of the top of the supporting frame.
Preferably, the overhead mechanism is arranged in bilateral symmetry by taking the central axis of the supporting frame as a symmetry axis, four sliding drums in the overhead mechanism are arranged in total, and the four sliding drums are arranged in parallel.
The utility model has the following advantages: the utility model provides a cooling mechanism for a silicon wafer graphite boat by improving the cooling mechanism, which has the following improvements compared with the same type of equipment:
according to the cooling mechanism for the silicon wafer graphite boat, the overhead mechanism and the cooling mechanism are arranged, the sliding pore plate in the overhead mechanism is pulled out to place the silicon wafer graphite boat on the sliding pore plate, the clamping plate in the overhead mechanism can clamp the silicon wafer graphite boat, so that the silicon wafer graphite boat is stabilized, the electric push rod in the overhead mechanism works to drive the silicon wafer graphite boat to move upwards to enable the silicon wafer graphite boat to be overhead, the fan and the refrigerator in the cooling mechanism work to blow cold air to the silicon wafer graphite boat from bottom to top along the inclined hole, so that the silicon wafer graphite boat can be overhead by the overhead mechanism, the silicon wafer graphite boat can be conveniently and comprehensively cooled, the cooling time of the silicon wafer graphite boat is shortened, and the working efficiency of the cooling mechanism for the silicon wafer graphite boat is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a cross-sectional view of the present utility model;
FIG. 3 is a schematic view of the structure of the overhead mechanism of the present utility model;
FIG. 4 is an enlarged view of the utility model at A in FIG. 2;
FIG. 5 is an enlarged view of the utility model at B in FIG. 3;
fig. 6 is a schematic diagram of the prior art.
Wherein: the air conditioner comprises a supporting frame-1, a baffle-2, a controller-3, an overhead mechanism-4, a vertical groove plate-41, a sliding plate-42, a sliding cylinder-43, a spring-44, a sliding rod-45, a clamping plate-46, a sliding groove plate-47, a sliding supporting plate-48, an electric push rod-49, a supporting vertical rod-410, a sliding orifice plate-411, a cooling mechanism-5, a supporting inclined block-51, a cold air box-52, an exhaust pipe-53, a connecting rod-54, a fan-55, an inclined hole-56, an air inlet pipe-57 and a refrigerator-58.
Detailed Description
The principles and features of the present utility model are described below with reference to fig. 1-5, the examples being provided for illustration only and not for limitation of the scope of the utility model. The utility model is more particularly described by way of example in the following paragraphs with reference to the drawings. Advantages and features of the utility model will become more apparent from the following description and from the claims. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Embodiment one:
referring to fig. 1 to 5, the cooling mechanism for a silicon wafer graphite boat of the present utility model includes a supporting frame 1, upper ends of front and rear sides of an inner side of the supporting frame 1 are fixedly connected with left and right ends of a baffle 2, and middle and lower sides of right ends of front side of the supporting frame 1 are fixedly connected with a rear side of a controller 3;
the lower ends of the left side and the right side of the overhead mechanism 4 are fixedly connected with the lower end of the inner side of the supporting frame 1, so that the overhead mechanism 4 is fixed;
the left side surface of the left lower end of the cooling mechanism 5 is fixedly connected with the right lower end surface of the supporting frame 1, so that the cooling mechanism 5 is fixed;
the vertical groove plates 41 are arranged on the left side and the right side of the overhead mechanism 4, and the lower ends of the outer surfaces of the sliding plates 42 are in sliding connection with the inner side surfaces of the grooves at the tops of the vertical groove plates 41, so that the sliding plates 42 can slide;
the outer side end of the sliding cylinder 43 is fixedly connected with the front and rear sides of the upper end of the inner side end of the sliding plate 42, so that the sliding cylinder 43 is fixed;
the outer side end of the spring 44 is fixedly connected with the inner outer side end of the sliding cylinder 43, so that the spring 44 is fixed;
the outer end of the slide bar 45 is fixedly connected with the inner end of the spring 44, and the outer end of the outer surface of the slide bar 45 is slidably connected with the inner surface of the slide cylinder 43, so that the slide bar 45 can slide;
the front and rear ends of the middle end of the outer side end of the clamping plate 46 are fixedly connected with the inner side end of the slide rod 45, so that the clamping plate 46 can clamp the silicon wafer graphite boat;
the outer side end of the sliding groove plate 47 is fixedly connected with the inner side end of the vertical groove plate 41, so that the sliding groove plate 47 is fixed;
the left and right ends of the outer surface of the sliding support plate 48 are in sliding connection with the inner surface of the upper end groove in the inner end of the chute plate 47, so that the sliding support plate 48 can slide up and down;
the top of the electric push rod 49 is fixedly connected with the middle left end at the bottom and the middle right end at the top of the sliding support plate 48, so that the electric push rod 49 can drive the sliding support plate 48 to slide;
the bottom of the support vertical rod 410 is fixedly connected with the top of the sliding support plate 48, so that the sliding support plate 48 can drive the support vertical rod 410 to move;
the left end and the right end of the outer surface of the sliding orifice plate 411 are in sliding connection with the inner surface of the groove at the upper end of the inner side of the sliding groove plate 47, and the outer side end of the vertical groove plate 41 is fixedly connected with the lower end of the inner side of the supporting frame 1, so that the sliding orifice plate 411 can slide back and forth;
the overhead mechanism 4 is arranged in bilateral symmetry by taking the central axis of the supporting frame 1 as a symmetry axis, four sliding drums 43 in the overhead mechanism 4 are arranged in total, and the four sliding drums 43 are arranged in parallel, so that the bottom of the silicon wafer graphite boat can be uniformly stressed when the overhead mechanism 4 is used for overhead the silicon wafer graphite boat.
The working principle of the cooling mechanism for the silicon wafer graphite boat based on the embodiment 1 is as follows: the sliding orifice plate 411 is pulled to the front side, the sliding orifice plate 411 is pulled to slide to the front side under the limit of the slide groove plate 47, then a silicon wafer graphite boat to be cooled is placed on the sliding orifice plate 411, then the clamping plate 46 is pulled to the outside, the sliding rod 45 is driven to slide at the upper end of the left side and the right side of the silicon wafer graphite boat on the sliding orifice plate 411 by the pulling to the outside, the sliding rod 45 slides to squeeze the spring 44, then the sliding orifice plate 411 is pushed to the rear side to slide, the sliding orifice plate 411 slides to drive the silicon wafer graphite boat placed on the sliding orifice plate 411 to move, then the clamping plate 46 is released, the extrusion force received by the spring 44 disappears, the spring 44 can push the sliding rod 45 to slide at the inner end due to elastic potential energy, the sliding of the clamping plate 46 is driven to move by the sliding rod 45, the clamping plate 46 can be contacted with the upper end of the silicon wafer graphite boat on the sliding orifice plate 411, the sliding of the sliding orifice plate 46 is stabilized, then the electric push rod 49 is controlled by the controller 3 to work, the sliding rod 48 is driven to slide upwards at the limit of the slide groove plate 47, the sliding support plate 48 is driven to slide upwards, the silicon wafer graphite boat is driven to move up the sliding plate 410, and the silicon wafer graphite boat is driven to move up the sliding rod 45 is driven to move up by the sliding orifice plate 46 due to the extrusion force generated by the elastic potential energy, the silicon wafer graphite boat is moved up to move up and moves up the sliding rod 46, the silicon wafer graphite boat, the silicon wafer on the upper 46 is moved up and the upper end, and the sliding plate 46 is moved by the sliding plate 46, and the sliding plate is moved by the sliding rod is moved by the sliding graphite boat, and is moved to move by the slide plate 4, and is to move. The cooling mechanism has the advantages that the overall heat dissipation of the silicon wafer graphite boat is facilitated, the cooling time of the silicon wafer graphite boat is shortened, and the working efficiency of the cooling mechanism for the silicon wafer graphite boat is improved.
Embodiment two:
referring to fig. 2, in comparison with the first embodiment, the cooling mechanism for a silicon wafer graphite boat of the present utility model further includes a cooling mechanism 5: the cooling mechanism 5 includes a support ramp 51:
the right end of the supporting inclined block 51 is fixedly connected with the middle upper end of the left side of the supporting frame 1, so that the supporting inclined block 51 is fixed;
the left side of the bottom of the cold air box 52 is fixedly connected with the top of the supporting inclined block 51, and the front and rear ends of the inner side of the cold air box 52 are fixedly connected with the front and rear sides of the top of the supporting frame 1 and the front and rear sides of the upper ends of the left and right sides, so that the cold air box 52 is fixed;
the middle upper end of the outer surface of the exhaust pipe 53 is fixedly connected with the inner side surface of the hole at the middle end of the top of the cold air box 52, so that the exhaust pipe 53 is fixed;
the outer ends of the connecting rods 54 are fixedly connected with the middle ends of the middle lower ends of the left side and the right side in the cold air box 52, so that the connecting rods 54 are fixed;
the middle end of the top of the fan 55 is fixedly connected with the inner side end of the bottom of the connecting rod 54, and the bottom of the fan 55 is fixedly connected with the middle ends of the left side and the right side of the bottom inside the cold air box 52, so that the fan 55 is fixed;
the inclined holes 56 are formed in the upper ends of the left side and the right side of the supporting frame 1, and the upper end of the left side of the outer surface of the air inlet pipe 57 is fixedly connected with the inner side surface of the hole of the right lower end of the cold air box 52, so that the air inlet pipe 57 is fixed;
the top of the refrigerator 58 is fixedly connected with the right side of the bottom of the cold air box 52, the left end of the refrigerator 58 is fixedly connected with the lower end of the right side of the supporting frame 1, the middle part of the upper end of the right side of the refrigerator 58 is fixedly connected with the lower end of the left side of the air inlet pipe 57, the lower end of the outer surface of the air outlet pipe 53 is fixedly connected with the inner side surface of the hole of the middle end of the top of the supporting frame 1, and cold air manufactured by the refrigerator 58 can enter the cold air box 52 through the air inlet pipe 57.
The working principle in this embodiment is: when the silicon wafer graphite boat is overhead to the inner side ends of the two baffles 2 by the overhead mechanism 4, the controller 3 controls the refrigerator 58 and the fan 55 to work, the refrigerator 58 can generate cold air, the generated cold air can enter the cold air box 52 through the air inlet pipe 57, the fan 55 can blow the cold air in the cold air box 52 to the inclined holes 56, the inclined holes 56 are arranged at the inner side ends higher and the outer side ends lower, so that the silicon wafer graphite boat blown to the inclined holes 56 can blow to the inner side ends of the two baffles 2 from bottom to top along the inclined holes 56, and air at the inner side ends of the two baffles 2 can be discharged along the air outlet pipe 53.
According to the utility model, by improving the cooling mechanism for the silicon wafer graphite boat, the overhead mechanism 4 and the cooling mechanism 5 are arranged, the silicon wafer graphite boat can be placed on the sliding orifice plate 411 by pulling out the sliding orifice plate 411 in the overhead mechanism 4, the silicon wafer graphite boat can be clamped by the clamping plate 46 in the overhead mechanism 4, so that the silicon wafer graphite boat is stabilized, the electric push rod 49 in the overhead mechanism 4 works to drive the silicon wafer graphite boat to move upwards so that the silicon wafer graphite boat is overhead, the fan 55 and the refrigerator 58 in the cooling mechanism 5 work to blow cool air to the silicon wafer graphite boat from bottom to top along the inclined hole 56, so that the silicon wafer graphite boat can be overhead by the overhead mechanism 4, the overall heat dissipation of the silicon wafer graphite boat is facilitated, the cooling time of the silicon wafer graphite boat is shortened, and the working efficiency of the cooling mechanism for the silicon wafer graphite boat is improved.
The basic principle and main characteristics of the utility model and the advantages of the utility model are shown and described above, standard parts used by the utility model can be purchased from market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of the parts adopt conventional means such as mature bolt rivets and welding in the prior art, the machinery, the parts and the equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection modes in the prior art, so that the description is omitted.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. The cooling mechanism for the silicon wafer graphite boat comprises a supporting frame (1), wherein the upper ends of the front side and the rear side of the inner side of the supporting frame (1) are fixedly connected with the left end and the right end of a baffle plate (2), and the middle lower side of the right end of the front side of the supporting frame (1) is fixedly connected with the rear side of a controller (3);
the method is characterized in that: further comprises:
the lower ends of the left side and the right side of the overhead mechanism (4) are fixedly connected with the lower ends of the inner side of the supporting frame (1);
the left side surface of the left lower end of the cooling mechanism (5) is fixedly connected with the right side lower end surface of the supporting frame (1).
2. The cooling mechanism for a silicon wafer graphite boat according to claim 1, wherein: the overhead mechanism (4) comprises:
the vertical groove plates (41) are arranged on the left side and the right side of the overhead mechanism (4);
the lower end of the outer surface of the sliding plate (42) is in sliding connection with the inner side surface of the top groove of the vertical groove plate (41);
the sliding cylinder (43), the outside end of the sliding cylinder (43) is fixedly connected with the front side and the rear side of the upper end of the inside end of the sliding plate (42).
3. The cooling mechanism for a silicon wafer graphite boat according to claim 2, wherein: the overhead mechanism (4) further comprises:
the outer side end of the spring (44) is fixedly connected with the inner outer side end of the sliding cylinder (43);
the outer side end of the sliding rod (45) is fixedly connected with the inner side end of the spring (44), and the outer side end of the outer surface of the sliding rod (45) is in sliding connection with the inner surface of the sliding cylinder (43);
and the front end and the rear end of the middle end of the outer side end of the clamping plate (46) are fixedly connected with the inner side end of the sliding rod (45).
4. A cooling mechanism for a silicon wafer graphite boat as set forth in claim 3, wherein: the overhead mechanism (4) further comprises:
the outer side end of the sliding groove plate (47) is fixedly connected with the inner side end of the vertical groove plate (41);
the left end and the right end of the outer surface of the sliding support plate (48) are in sliding connection with the inner surface of the upper end groove at the inner side end of the sliding groove plate (47);
and the top of the electric push rod (49) is fixedly connected with the middle left end of the bottom and the middle right end of the top of the sliding support plate (48).
5. The cooling mechanism for a silicon wafer graphite boat as set forth in claim 4, wherein: the overhead mechanism (4) further comprises:
the bottom of the supporting vertical rod (410) is fixedly connected with the top of the sliding supporting plate (48);
the left end and the right end of the outer surface of the sliding pore plate (411) are in sliding connection with the inner side surface of the groove at the upper end of the inner side of the chute plate (47);
the outer side end of the vertical groove plate (41) is fixedly connected with the lower end of the inner side of the supporting frame (1).
6. The cooling mechanism for a silicon wafer graphite boat according to claim 1, wherein: the cooling mechanism (5) comprises:
the right end of the supporting inclined block (51) is fixedly connected with the middle upper end of the left side of the supporting frame (1);
the left side of the bottom of the cold air box (52) is fixedly connected with the top of the supporting inclined block (51), and the front and rear ends of the inner side of the cold air box (52) are fixedly connected with the front and rear sides of the top of the supporting frame (1) and the front and rear sides of the upper ends of the left and right sides;
and the middle upper end of the outer surface of the exhaust pipe (53) is fixedly connected with the inner side surface of the hole at the middle end of the top of the cold air box (52).
7. The cooling mechanism for a silicon wafer graphite boat as set forth in claim 6, wherein: the cooling mechanism (5) further comprises:
the outer side end of the connecting rod (54) is fixedly connected with the middle ends of the middle lower ends of the left side and the right side in the cold air box (52);
the middle end of the top of the fan (55) is fixedly connected with the inner side end of the bottom of the connecting rod (54), and the bottom of the fan (55) is fixedly connected with the middle ends of the left side and the right side of the bottom inside the cold air box (52);
and the inclined holes (56) are formed in the upper ends of the left side and the right side of the supporting frame (1).
8. The cooling mechanism for a silicon wafer graphite boat as set forth in claim 7, wherein: the cooling mechanism (5) further comprises:
the upper end of the left side of the outer surface of the air inlet pipe (57) is fixedly connected with the inner side surface of a hole at the lower end of the right side of the cold air box (52);
the top of the refrigerator (58) is fixedly connected with the right side of the bottom of the cold air box (52), the left end of the refrigerator (58) is fixedly connected with the lower end of the right side of the supporting frame (1), and the middle part of the upper end of the right side of the refrigerator (58) is fixedly connected with the lower end of the left side of the air inlet pipe (57);
the lower end of the outer surface of the exhaust pipe (53) is fixedly connected with the inner side surface of a hole at the middle end of the top of the supporting frame (1).
9. The cooling mechanism for a silicon wafer graphite boat according to claim 1, wherein: the overhead mechanism (4) is arranged in a bilateral symmetry mode by taking the central axis of the supporting frame (1) as a symmetry axis, four sliding drums (43) in the overhead mechanism (4) are arranged in total, and the four sliding drums (43) are arranged in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321686802.3U CN220169988U (en) | 2023-06-30 | 2023-06-30 | Cooling mechanism for silicon wafer graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321686802.3U CN220169988U (en) | 2023-06-30 | 2023-06-30 | Cooling mechanism for silicon wafer graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220169988U true CN220169988U (en) | 2023-12-12 |
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ID=89065871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321686802.3U Active CN220169988U (en) | 2023-06-30 | 2023-06-30 | Cooling mechanism for silicon wafer graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220169988U (en) |
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2023
- 2023-06-30 CN CN202321686802.3U patent/CN220169988U/en active Active
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