CN220153507U - Automatic detection device for size and precision of silicon rod - Google Patents

Automatic detection device for size and precision of silicon rod Download PDF

Info

Publication number
CN220153507U
CN220153507U CN202320700243.0U CN202320700243U CN220153507U CN 220153507 U CN220153507 U CN 220153507U CN 202320700243 U CN202320700243 U CN 202320700243U CN 220153507 U CN220153507 U CN 220153507U
Authority
CN
China
Prior art keywords
sensor
sliding table
servo
servo sliding
silicon rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202320700243.0U
Other languages
Chinese (zh)
Inventor
张天泽
徐亚明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dalian Haolin Intelligent Equipment Co ltd
Original Assignee
Dalian Haolin Intelligent Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalian Haolin Intelligent Equipment Co ltd filed Critical Dalian Haolin Intelligent Equipment Co ltd
Priority to CN202320700243.0U priority Critical patent/CN220153507U/en
Application granted granted Critical
Publication of CN220153507U publication Critical patent/CN220153507U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model discloses an automatic detection device for the size and the precision of a silicon rod, which comprises a gate-shaped frame, wherein the gate-shaped frame is fixed on a detection workbench, a first measurement component is arranged at the front side of the gate-shaped frame, a second measurement component is arranged at the rear side of the gate-shaped frame, a movable workbench capable of placing the silicon rod is arranged at the center of the bottom of the gate-shaped frame, sensors are symmetrically arranged at two sides of the movable workbench, the second measurement component comprises a first servo sliding table, a second servo sliding table and a third servo sliding table, the first measurement component comprises a fourth servo sliding table, a fifth servo sliding table, a sixth servo sliding table and a seventh servo sliding table, and a sensor is arranged on each servo sliding table; the unmanned operation eliminates the artificial factors of manual detection and manual judgment, improves the accuracy, improves the work efficiency, avoids manual input and errors, reduces the labor and improves the detection efficiency.

Description

Automatic detection device for size and precision of silicon rod
Technical Field
The utility model relates to the field of silicon rod processing detection, in particular to an automatic detection device for the size and the precision of a silicon rod.
Background
At present, with the rapid development of the solar photovoltaic industry, the demand of a monocrystalline silicon rod serving as a main raw material is greatly increased, the raw material is pulled into a round crystal rod in the first step of manufacturing the silicon rod, the round rod is cut into square rods in the second step, the monocrystalline silicon rod is cut into square rods according to the size requirement, then four edges of the square rods are ground to be chamfered, and finally the processes of slicing, etching and the like are performed. After the square and the grinding, whether the size of the crystal bar workpiece meets the requirement or not needs to be measured, and the detection items are as follows: the method comprises the steps of blanking, putting the silicon rod on a simple platform, manually moving the silicon rod away, and carrying out size detection by using various measuring tools, wherein when the silicon rod is measured, the existing manual measurement has certain errors, and the existing manual measurement is inaccurate in measurement due to misalignment of the axis of the silicon crystal rod, so that the error occurs in calculating the effective length of a silicon wafer which can be cut, therefore, an automatic detection device for detecting the size and the accuracy of the silicon rod is required to be designed, and the automatic measurement, data comparison and error judgment of the size of the silicon rod are realized by using the current precision sensor measurement technology; the problem of error determination through manual detection and manual work is solved.
Disclosure of Invention
The utility model aims at the problems and provides an automatic detection device for the size and the precision of a silicon rod, which realizes the automatic measurement, the data comparison and the error judgment of the size of the silicon rod by utilizing the precision sensor measurement technology; the problem of error determination through manual detection and manual work is solved.
In order to achieve the above purpose, the utility model provides an automatic detection device for the size and the precision of a silicon rod, which comprises a gate-shaped frame, wherein the gate-shaped frame is fixed on a detection workbench, a first measurement assembly is arranged on the front side of the gate-shaped frame, a second measurement assembly is arranged on the rear side of the gate-shaped frame, a movable workbench capable of placing the silicon rod is arranged at the center of the bottom of the gate-shaped frame, and the movable workbench is connected to the detection workbench through a support piece.
The first measuring assembly comprises a fourth servo sliding table, a fifth servo sliding table, a sixth servo sliding table and a seventh servo sliding table, wherein the fourth servo sliding table and the fifth servo sliding table are arranged on two vertical frames of the door-shaped frame and close to the bottom of the door-shaped frame, and the sixth servo sliding table and the seventh servo sliding table are symmetrically arranged on the top frame of the door-shaped frame through the vertical center line of the door-shaped frame.
The sliding part of the fourth servo sliding table is connected with a ninth sensor through a connecting piece, the sliding part of the fifth servo sliding table is connected with a tenth sensor through a connecting piece, the sliding part of the fourth servo sliding table is connected with a first connecting arm, the tail end of the first connecting arm is provided with a first camera, the sliding part of the fifth servo sliding table is connected with a second connecting arm, and the tail end of the second connecting arm is provided with a second camera.
The sliding part of the sixth servo sliding table is connected with the eleventh sensor through a connecting piece, the sliding part of the seventh servo sliding table is connected with the twelfth sensor through a connecting piece, the sliding part of the sixth servo sliding table is connected with a third connecting arm, the tail end of the third connecting arm is provided with a third camera, the sliding part of the seventh servo sliding table is connected with a fourth connecting arm, and the tail end of the fourth connecting arm is provided with a fourth camera.
The sliding part moving direction of the sixth servo sliding table is 25 degrees to 28 degrees to the vertical center line of the gate type frame, and the sliding part moving direction of the seventh servo sliding table is 25 degrees to 28 degrees to the vertical center line of the gate type frame.
According to the automatic detection device for the size and the precision of the silicon rod, under the preferred mode, the first sensor and the second sensor are symmetrically arranged on two sides of the movable workbench, and are respectively connected to the two vertical frames of the door-shaped frame through the first fixing support and the second fixing support.
According to the automatic detection device for the size and the precision of the silicon rod, under the preferred mode, the second measurement assembly comprises the first servo sliding table, the second servo sliding table and the third servo sliding table, the first servo sliding table is vertically arranged on the central position of the top frame of the gate-type frame, and the third sensor and the fourth sensor are arranged on the sliding part of the first servo sliding table.
According to the automatic detection device for the size and the precision of the silicon rod, under the preferred mode, the second servo sliding table and the third servo sliding table are symmetrically arranged on the two vertical frames of the door-shaped frame, the fifth sensor and the sixth sensor are arranged on the second servo sliding table, and the seventh sensor and the eighth sensor are arranged on the third servo sliding table.
According to the automatic detection device for the size and the precision of the silicon rod, in the preferred mode, the sliding part of the first servo sliding table drives the third sensor and the fourth sensor to move along the vertical direction, and the third sensor and the fourth sensor correspond to the first sensor and the second sensor to jointly measure the height size of the silicon rod.
According to the automatic detection device for the size and the precision of the silicon rod, in the preferred mode, the second servo sliding table and the third servo sliding table are horizontally arranged and drive the fifth sensor, the sixth sensor, the seventh sensor and the eighth sensor to move along the horizontal direction, so that the width size of the silicon rod is measured.
According to the automatic detection device for the size and the precision of the silicon rod, under the preferred mode, the fourth servo sliding table and the fifth servo sliding table are horizontally arranged and drive the ninth sensor and the tenth sensor to move along the horizontal direction.
In the automatic detection device for the size and the precision of the silicon rod, preferably, the angle between the detection directions of the first camera and the ninth sensor and the vertical center line of the gate-type frame is 45 degrees, the angle between the detection directions of the second camera and the tenth sensor and the vertical center line of the gate-type frame is 45 degrees, the angle between the detection directions of the third camera and the eleventh sensor and the vertical center line of the gate-type frame is 45 degrees, and the angle between the detection directions of the fourth camera and the twelfth sensor and the vertical center line of the gate-type frame is 45 degrees.
According to the automatic detection device for the size and the precision of the silicon rod, in a preferred mode, two light sources are arranged at the front ends of the first connecting arm, the second connecting arm, the third connecting arm and the fourth connecting arm.
According to the automatic detection device for the size and the precision of the silicon rod, in a preferred mode, a rough material for preventing the silicon rod from sliding is adopted at the object placing position of the movable workbench.
The utility model has the advantages that the automatic measurement, data comparison and error judgment of the silicon rod size are realized by utilizing the precision sensor measurement technology; the unmanned operation eliminates the manual factors of manual detection and manual judgment, improves the accuracy, improves the work efficiency and avoids manual input and errors. The manual work station is reduced, and the detection efficiency is improved.
Drawings
Fig. 1 is a schematic view of the front side structure of the present utility model.
Fig. 2 is a schematic view of the rear side structure of the present utility model.
FIG. 3 is a schematic view of the front side perspective of the present utility model.
Fig. 4 is a schematic view of the rear side perspective structure of the present utility model.
Fig. 5 is a schematic side view of the overall structure of the present utility model.
FIG. 6 is a schematic diagram of the sensor travel path of the present utility model.
Fig. 7 is a schematic view of the working range structure of the camera according to the present utility model.
FIG. 8 is a schematic view of the silicon rod test of the present utility model.
In the figure: 1. the optical pickup device comprises a door-type frame, 21, a second servo slipway, 22, a third servo slipway, 31, a fourth servo slipway, 32, a fifth servo slipway, 41, a sixth servo slipway, 42, a seventh servo slipway, 5, a first servo slipway, 61, a first fixed bracket, 62, a second fixed bracket, 701, a first sensor, 702, a second sensor, 703, a third sensor, 704, a fourth sensor, 705, a fifth sensor, 706, a sixth sensor, 707, a seventh sensor, 708, an eighth sensor, 709, a ninth sensor, 710, a tenth sensor, 711, an eleventh sensor, 712, a twelfth sensor, 81, a first camera, 82 a second camera, 83, a third camera, 84, a fourth camera, 9, a movable table, 10, a silicon rod, 11 and a light source.
Detailed Description
As shown in fig. 1-5, the automatic detection device for the size and the precision of the silicon rod comprises a door-shaped frame 1, wherein the door-shaped frame 1 is fixed on a detection workbench, a first measurement component is arranged on the front side of the door-shaped frame 1, a second measurement component is arranged on the rear side of the door-shaped frame 1, a movable workbench 9 capable of placing the silicon rod 10 is arranged at the center of the bottom of the door-shaped frame 1, and the movable workbench 9 is connected to the detection workbench through a supporting piece.
As shown in fig. 1 and 3, the first measuring assembly comprises a fourth servo slipway 31, a fifth servo slipway 32, a sixth servo slipway 41 and a seventh servo slipway 42, wherein the fourth servo slipway 31 and the fifth servo slipway 32 are arranged on two vertical frames of the door-shaped frame 1 and are close to the bottom position of the door-shaped frame 1, and the sixth servo slipway 41 and the seventh servo slipway 42 are symmetrically arranged on the top frame of the door-shaped frame 1 along the vertical central line of the door-shaped frame 1;
the sliding part of the fourth servo sliding table 31 is connected with a ninth sensor 709 through a connecting piece, the sliding part of the fifth servo sliding table 32 is connected with a tenth sensor 710 through a connecting piece, the sliding part of the fourth servo sliding table 31 is connected with a first connecting arm, the tail end of the first connecting arm is provided with a first camera 81, the sliding part of the fifth servo sliding table 32 is connected with a second connecting arm, and the tail end of the second connecting arm is provided with a second camera 82;
the sliding part of the sixth servo sliding table 41 is connected with an eleventh sensor 711 through a connecting piece, the sliding part of the seventh servo sliding table 42 is connected with a twelfth sensor 712 through a connecting piece, the sliding part of the sixth servo sliding table 41 is connected with a third connecting arm, the tail end of the third connecting arm is provided with a third camera 83, the sliding part of the seventh servo sliding table 42 is connected with a fourth connecting arm, and the tail end of the fourth connecting arm is provided with a fourth camera 84;
the sliding portion moving direction of the sixth servo slide table 41 is at an angle of 25 ° to 28 ° to the vertical center line of the gate-type frame 1, and the sliding portion moving direction of the seventh servo slide table 42 is at an angle of 25 ° to 28 ° to the vertical center line of the gate-type frame 1.
The two sides of the movable workbench 9 are symmetrically provided with a first sensor 701 and a second sensor 702, and the first sensor 701 and the second sensor 702 are respectively connected to two vertical frames of the door-shaped frame 1 through a first fixing bracket 61 and a second fixing bracket 62.
As shown in fig. 2 and 4, the second measurement assembly includes a first servo slipway 5, a second servo slipway 21 and a third servo slipway 22, the first servo slipway 5 is vertically installed on the central position of the top frame of the door-type frame 1, and the sliding part of the first servo slipway 5 is installed with a third sensor 703 and a fourth sensor 704.
The second servo slipway 21 and the third servo slipway 22 are symmetrically arranged on two vertical frames of the door-shaped frame 1, the fifth sensor 705 and the sixth sensor 706 are arranged on the second servo slipway 21, and the seventh sensor 707 and the eighth sensor 708 are arranged on the third servo slipway 22.
The sliding part of the first servo sliding table 5 drives the third sensor 703 and the fourth sensor 704 to move along the vertical direction, and the height dimension of the silicon rod 10 is measured by the third sensor 703 and the fourth sensor 704 corresponding to the first sensor 701 and the second sensor 702.
The second servo slipway 21 and the third servo slipway 22 are horizontally arranged and drive the fifth sensor 705, the sixth sensor 706, the seventh sensor 707 and the eighth sensor 708 to move along the horizontal direction, so as to measure the width dimension of the silicon rod 10.
The fourth servo slipway 31 and the fifth servo slipway 32 are horizontally arranged and drive the ninth sensor 709 and the tenth sensor 710 to move along the horizontal direction.
The detection direction of the first camera 81 and the ninth sensor 709 forms an angle of 45 ° with the vertical center line of the portal frame 1, the detection direction of the second camera 82 and the tenth sensor 710 forms an angle of 45 ° with the vertical center line of the portal frame 1, the detection direction of the third camera 83 and the eleventh sensor 711 forms an angle of 45 ° with the vertical center line of the portal frame 1, and the detection direction of the fourth camera 84 and the twelfth sensor 712 forms an angle of 45 ° with the vertical center line of the portal frame 1.
The front ends of the first, second, third and fourth connecting arms are provided with two light sources 11.
The placement part of the movable table 9 is made of a rough material for preventing the silicon rod 10 from sliding.
Seven servo slipways (modules) are arranged on the door-type frame 1, wherein the second servo slipway 21, the third servo slipway 22, the fourth servo slipway 31, the fifth servo slipway 32, the sixth servo slipway 41, the seventh servo slipway 42, the first servo slipway 5, the first fixed bracket 61 and the second fixed bracket 62; twelve sensors are respectively arranged on the seven servo slipways (or modules): first sensor 701, second sensor 702, third sensor 703, fourth sensor 704, fifth sensor 705, sixth sensor 706, seventh sensor 707, eighth sensor 708, ninth sensor 709, tenth sensor 710, eleventh sensor 711, twelfth sensor 712, light source 11, and the like, four industrial cameras: the first camera 81, the second camera 82, the third camera 83 and the fourth camera 84, and the two fixed supports, namely the first fixed support 61 and the second fixed support 62, are provided with 2 sensors, namely a first sensor 701 and a second sensor 702, respectively, for detecting the dimensional accuracy of the silicon rod 10 placed on the movable table 9.
Since the silicon rod 10 is placed on the movable table 9 for detection, and a material with a high friction coefficient is selected, the silicon rod 10 does not need to be clamped during detection.
Wherein: the second servo slipway 21, the third servo slipway 22 are arranged horizontally, slipways and sensors thereon, the fifth sensor 705, the sixth sensor 706, the seventh sensor 707 and the eighth sensor 708 move horizontally, and the width dimension of the silicon rod is measured.
The first servo sliding table (or module) 5 is vertically installed, the sliding part vertically moves, and the first fixing bracket 61 and the second fixing bracket 62 are fixed on the door-type frame 1; the third sensor 703 and the fourth sensor 704 on the first servo slipway (or the module) 5 are used for measuring the height dimension of the silicon rod corresponding to the first sensor 701 and the second sensor 702 on the first fixing support 61 and the second fixing support 62.
The fourth servo sliding table 31 and the fifth servo sliding table 32 are horizontally arranged, and the sliding parts of the sliding tables move in the horizontal direction;
as shown in fig. 6, the sliding part moving direction of the sixth and seventh servo slipways 41, 42 for the servo slipway (or die set) for diameter detection is selected to be between 25 ° and 28 ° from the vertical center inclined angle α. The ninth sensor 709, tenth sensor 710, eleventh sensor 711, and twelfth sensor 712 are inclined at an angle β of 45 ° with respect to the vertical center line of the gate frame.
Thus, after the detected silicon rod specification is changed, the sliding parts of the fourth servo sliding table 31, the fifth servo sliding table 32, the sixth servo sliding table (41) and the seventh servo sliding table (42) of the four servo sliding tables for diagonal direction detection are ensured to move, the eleventh sensor 711 and the tenth sensor 710 which are diagonally arranged are ensured, and the moving directions of the twelfth sensor 712 and the ninth sensor 709 which are diagonally arranged are always consistent with the diagonal direction of the square section of the silicon rod 10, so that diameter detection is performed.
Similarly, four cameras, the first camera 81, the second camera 82, the third camera 83 and the fourth camera 84 are mounted at an angle β to each other, and the third camera 83 and the fourth camera 84 move along the angle α to each other along with the slide table. The first camera 81 and the second camera 82 move horizontally for measuring the edge width, the chord length projection length and the chord length of the silicon rod.
The use process of the silicon rod 10 size detection device comprises the following steps:
a fifth sensor 705 installed in the opposite direction of the second servo slide table 21 and a sixth sensor 706 installed in the third servo slide table, detect the width A1 above the silicon rod section of the silicon rod 10 by the movement of the servo slide table sliding portion; the sixth sensor 706 of the second servo slipway 21 and the eighth sensor 708 of the third servo slipway detect the width A2 of the lower section of the silicon rod 10;
the eleventh sensor 711 on the sixth servo slide table 41 mounted obliquely and the ninth sensor 709 on the fourth servo slide table 31 disposed horizontally detect the diameter D1 on the diagonal line of the section of the silicon rod by the movement of the slide table sliding portion, and the twelfth sensor 712 on the seventh servo slide table 42 and the tenth sensor 710 on the fifth servo slide table 32 disposed horizontally detect the diameter D2 on the diagonal line of the section of the silicon rod by the movement of the slide table sliding portion.
The four cameras first camera 81, second camera 82, third camera 83 and fourth camera 84 detect the camera edge widths (or chords) on the four edges, respectively, and the chord length projection length is calculated by software using trigonometric functions.
The third sensor 703 installed on the first servo slide 5 and the first sensor 701 on the first fixing bracket 61 which are vertically disposed detect the height B1 of the left side longitudinal section of the silicon rod 10, and the fourth sensor 704 on the first servo slide 5 and the second sensor 702 on the second fixing bracket 62 detect the height B2 of the left side longitudinal section of the silicon rod 10.
The first sensor 701, the second sensor 702, the third sensor 703, the fourth sensor 704, the fifth sensor 705, the sixth sensor 706, the seventh sensor 707, the eighth sensor 708, the ninth sensor 709, the tenth sensor 710, the eleventh sensor 711, and the twelfth sensor 712 detect the reference-size silicon rod 10, and calibration of sensor data is realized.
Similarly, the four cameras, namely the first camera 81, the second camera 82, the third camera 83 and the fourth camera 84, detect the reference silicon rod, and calibration of camera data is achieved.
After the calibration of each sensor and each camera is finished, detecting the silicon rod part; and after comparing the detected data of the silicon rod with the data detected by the reference silicon rod, uploading the detection result to finish the detection of the silicon rod.
As shown in fig. 8, the moving table 9 carries the silicon rod 10 to move along the length direction of the silicon rod and the detection of multiple positions is carried out, so that the size detection of different sections 2, 3, 4 and n of the silicon rod is carried out; the number of the positions to be detected is set and modified through the control software of the device.
By detecting the width, the height and the diameter of the whole length of the silicon rod 10 and comparing and calculating the detected width, the detected height and the detected diameter by internal software, the detection results of precision items such as variance, taper, verticality and the like of the silicon rod can be obtained.
And comparing and calculating the measurement result with a preset tolerance to obtain the qualification judgment of the silicon rod detection result, and outputting the qualification judgment through software.
The basic type is that the workbench carrying the silicon rod 10 is servo-controlled to move, and the gate-type bracket is fixed.
The variable mode is that the workbench is fixed, and the door-shaped bracket is controlled by servo to move.
The automatic measurement, data comparison and error judgment of the silicon rod size are realized by utilizing the current precision sensor measurement technology; the unmanned operation eliminates the artificial factors of manual detection and manual judgment, and improves the accuracy; and the continuous automatic detection is carried out for 24 hours, the detection result is uploaded to the MAS, the work efficiency is improved, and the manual input and errors are avoided. The manual work station is reduced, and the detection efficiency is improved.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should be covered by the protection scope of the present utility model by making equivalents and modifications to the technical solution and the inventive concept thereof.

Claims (10)

1. The automatic detection device for the size and the precision of the silicon rod is characterized by comprising a gate frame (1), wherein the gate frame (1) is fixed on a detection workbench, a first measurement assembly is arranged on the front side of the gate frame (1), a second measurement assembly is arranged on the rear side of the gate frame (1), a movable workbench (9) capable of placing the silicon rod (10) is arranged at the center of the bottom of the gate frame (1), and the movable workbench (9) is connected to the detection workbench through a supporting piece;
the first measuring assembly comprises a fourth servo sliding table (31), a fifth servo sliding table (32), a sixth servo sliding table (41) and a seventh servo sliding table (42), wherein the fourth servo sliding table (31) and the fifth servo sliding table (32) are arranged on two vertical frames of the gate frame (1) and close to the bottom of the gate frame (1), and the sixth servo sliding table (41) and the seventh servo sliding table (42) are symmetrically arranged on the top frame of the gate frame (1) along the vertical center line of the gate frame (1);
the sliding part of the fourth servo sliding table (31) is connected with a ninth sensor (709) through a connecting piece, the sliding part of the fifth servo sliding table (32) is connected with a tenth sensor (710) through a connecting piece, a first connecting arm is connected to the sliding part of the fourth servo sliding table (31), a first camera (81) is arranged at the tail end of the first connecting arm, a second connecting arm is connected to the sliding part of the fifth servo sliding table (32), and a second camera (82) is arranged at the tail end of the second connecting arm;
the sliding part of the sixth servo sliding table (41) is connected with an eleventh sensor (711) through a connecting piece, the sliding part of the seventh servo sliding table (42) is connected with a twelfth sensor (712) through a connecting piece, a third connecting arm is connected to the sliding part of the sixth servo sliding table (41), a third camera (83) is arranged at the tail end of the third connecting arm, a fourth connecting arm is connected to the sliding part of the seventh servo sliding table (42), and a fourth camera (84) is arranged at the tail end of the fourth connecting arm;
the sliding part moving direction of the sixth servo sliding table (41) and the vertical central line of the gate-shaped frame (1) are at an angle of 25-28 degrees, and the sliding part moving direction of the seventh servo sliding table (42) and the vertical central line of the gate-shaped frame (1) are at an angle of 25-28 degrees.
2. The automatic detection device for the size and the precision of the silicon rod according to claim 1, wherein a first sensor (701) and a second sensor (702) are symmetrically arranged on two sides of the movable workbench (9), and the first sensor (701) and the second sensor (702) are respectively connected to two vertical frames of the door-shaped frame (1) through a first fixing bracket (61) and a second fixing bracket (62).
3. The automatic detection device for the size and the precision of the silicon rod according to claim 2, wherein the second measurement assembly comprises a first servo sliding table (5), a second servo sliding table (21) and a third servo sliding table (22), the first servo sliding table (5) is vertically installed on the central position of the top frame of the gate frame (1), and a sliding part of the first servo sliding table (5) is provided with a third sensor (703) and a fourth sensor (704).
4. The automatic silicon rod size and precision detection device according to claim 3, wherein the second servo sliding table (21) and the third servo sliding table (22) are symmetrically installed on two vertical frames of the gate frame (1), a fifth sensor (705) and a sixth sensor (706) are installed on the second servo sliding table (21), and a seventh sensor (707) and an eighth sensor (708) are installed on the third servo sliding table (22).
5. The automatic silicon rod size and precision detection device according to claim 3, wherein the sliding part of the first servo sliding table (5) drives the third sensor (703) and the fourth sensor (704) to move along the vertical direction, and the third sensor (703) and the fourth sensor (704) are used for measuring the height size of the silicon rod (10) together corresponding to the first sensor (701) and the second sensor (702).
6. The automatic detection device for the size and the precision of the silicon rod according to claim 4, wherein the second servo sliding table (21) and the third servo sliding table (22) are horizontally arranged and drive the fifth sensor (705), the sixth sensor (706), the seventh sensor (707) and the eighth sensor (708) to move along the horizontal direction, so as to measure the width size of the silicon rod (10).
7. The automatic detection device for the size and the precision of the silicon rod according to claim 1, wherein the fourth servo sliding table (31) and the fifth servo sliding table (32) are horizontally arranged and drive the ninth sensor (709) and the tenth sensor (710) to move along the horizontal direction.
8. The automatic detection device of the silicon rod size and the precision according to claim 1, wherein an angle between a detection direction of the first camera (81) and the ninth sensor (709) and a vertical center line of the gate frame (1) is 45 degrees, an angle between a detection direction of the second camera (82) and the tenth sensor (710) and a vertical center line of the gate frame (1) is 45 degrees, an angle between a detection direction of the third camera (83) and the eleventh sensor (711) and a vertical center line of the gate frame (1) is 45 degrees, and an angle between a detection direction of the fourth camera (84) and the twelfth sensor (712) and a vertical center line of the gate frame (1) is 45 degrees.
9. The automatic silicon rod size and precision detection device according to claim 1, wherein the front ends of the first connecting arm, the second connecting arm, the third connecting arm and the fourth connecting arm are provided with two light sources (11).
10. Automatic detection device of the dimensions and the precision of the silicon rod according to claim 1, characterized in that the placement of the mobile table (9) is made of a rough material preventing the sliding of the silicon rod (10).
CN202320700243.0U 2023-03-31 2023-03-31 Automatic detection device for size and precision of silicon rod Active CN220153507U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320700243.0U CN220153507U (en) 2023-03-31 2023-03-31 Automatic detection device for size and precision of silicon rod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320700243.0U CN220153507U (en) 2023-03-31 2023-03-31 Automatic detection device for size and precision of silicon rod

Publications (1)

Publication Number Publication Date
CN220153507U true CN220153507U (en) 2023-12-08

Family

ID=89018183

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320700243.0U Active CN220153507U (en) 2023-03-31 2023-03-31 Automatic detection device for size and precision of silicon rod

Country Status (1)

Country Link
CN (1) CN220153507U (en)

Similar Documents

Publication Publication Date Title
CN111735390B (en) Calibration block for line laser sensor and hand-eye calibration method
CN107764188B (en) Device and method for detecting length and inclination of single crystal silicon rod
CN108413902B (en) Device for detecting size and position of automobile hub mounting hole
CN211085127U (en) Single polycrystalline silicon rod automatic checkout device
CN212227982U (en) Silicon rod appearance detection mechanism
CN210734805U (en) Automatic positioning device and automatic detection line comprising same
CN111121648A (en) Silicon rod appearance detection mechanism
CN117824518A (en) Non-contact thickness measuring device
CN104515487A (en) Two-in-one full-automatic three-Z-axis measuring instrument
CN220153507U (en) Automatic detection device for size and precision of silicon rod
CN114136984A (en) Multifunctional detection platform for cutter and use method
CN111895924B (en) Automatic lens thickness measuring device
CN208606735U (en) Height dimension automatic checkout equipment
CN114964056B (en) Self-calibration method for micro-assembly equipment
CN113834532A (en) Composite measurement system and measurement method for length, jitter tolerance and quality
CN208872203U (en) A kind of workpiece size device for fast detecting
CN210719489U (en) Grid cell clamping force detection device
CN109319477B (en) Lifting type high-speed material taking and discharging platform and working method
CN211977830U (en) Deviation calculation mechanism for high-precision assembly height detection of optical device
CN220741157U (en) Mechanical arm combined gesture adjusting mechanism with large working range
CN217384155U (en) Automatic thickness detection equipment
CN217900756U (en) Automatic part size measuring device based on visual sensing and automatic machining system
CN212482395U (en) Image measuring instrument
CN215148853U (en) High accuracy optics calibration anchor clamps for robot arm
CN219776629U (en) Manipulator precision testing device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant