CN220116655U - Simple planetary workpiece disc suitable for magnetron sputtering - Google Patents
Simple planetary workpiece disc suitable for magnetron sputtering Download PDFInfo
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- CN220116655U CN220116655U CN202320714202.7U CN202320714202U CN220116655U CN 220116655 U CN220116655 U CN 220116655U CN 202320714202 U CN202320714202 U CN 202320714202U CN 220116655 U CN220116655 U CN 220116655U
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- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 15
- 239000011248 coating agent Substances 0.000 claims abstract description 22
- 238000000576 coating method Methods 0.000 claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 4
- 230000008569 process Effects 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- -1 argon ions Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
A simple planetary workpiece disk suitable for magnetron sputtering mainly comprises a central driving shaft, a revolution workpiece disk, a bearing seat, a workpiece seat supporting shaft, a driving plate and a shifting plate. The center driving shaft is arranged at the center of the bottom of the cavity, and positioning and transmission are realized between the center driving shaft and the revolution workpiece disc through the positioning block. The revolution workpiece plate is provided with sunk table holes uniformly distributed in the circumferential direction for installing a workpiece seat supporting shaft. The driving plate and the workpiece seat are arranged on the workpiece seat supporting shaft, the poking plate is arranged in the coating chamber, the poking plate is poked to rotate for a certain angle when passing through the position of the poking plate each time in the rotation process of the revolution workpiece disc, and the workpiece seat rotates one circle after the workpiece disc rotates for a plurality of circles, so that coating of the circumferential surface of the workpiece is completed. The workpiece seat is of a quick-dismantling structure, is convenient to replace and is suitable for coating workpieces of different specifications. The simple planetary workpiece disc suitable for magnetron sputtering provided by the utility model can realize batch coating of small-size shaft rotary workpieces with different specifications, and is simple in structure and convenient to maintain.
Description
Technical Field
The utility model relates to the technical field of material surface coating, in particular to a simple planetary workpiece disc suitable for magnetron sputtering.
Background
Magnetron sputtering is one of the physical vapor deposition (PhysicalVaporDeposition, PVD) principles of ionizing argon into argon ions and electrons under high vacuum conditions, the argon ions bombarding the target under the action of an electric field, sputtering target atoms (or molecules) and depositing a thin film on the workpiece. And secondary electrons are restrained on the surface of the target under the action of a magnetic field, so that the ionization rate of argon is increased, and the deposition rate of the film is improved. The magnetron sputtering coating technology is widely applied to various fields, in particular to the fields of microelectronics, optical films and material surface treatment because of the two remarkable characteristics of low temperature and high speed.
When the outer circle surface of the shaft type rotary workpiece is subjected to magnetron sputtering coating, the workpiece is required to realize autorotation. In order to improve the production efficiency, a planetary workpiece disc with rotation and revolution functions is generally adopted.
In order to avoid radial displacement of the workpiece in the rotation process, a common practice is to arrange clamping devices which are provided with sinking tables and can perform rotation on two end surfaces of the workpiece. The size of the vacuum cavity of the magnetron sputtering coating equipment is usually fixed, and the magnetron target is customized according to the size of the vacuum cavity, and is generally longer. The length of the workpiece to be coated is not fixed, and the specifications of the workpieces in different batches are generally different. The planetary workpiece disc described above generally can only hold one layer of workpieces, and cannot adjust the spacing of the clamping devices, and is only suitable for workpieces of the same specification. When the length of the workpiece is shorter, the space of the coating chamber cannot be fully utilized, and resource waste is caused.
Disclosure of Invention
The utility model provides a simple planetary workpiece disc suitable for magnetron sputtering, which can carry out multi-layer loading on a rotary workpiece in a vacuum coating chamber, thereby reducing or avoiding the waste of vacuum chamber space.
In order to realize the above, the utility model adopts the following technical scheme: a simple planetary workpiece disk suitable for magnetron sputtering mainly comprises a central driving shaft, a revolution workpiece disk, a bearing seat, a workpiece seat supporting shaft, a driving plate and a shifting plate. The center driving shaft is arranged at the center of the bottom of the cavity, and positioning and transmission are realized between the center driving shaft and the revolution workpiece disc through the positioning block. The revolution workpiece plate is provided with sunk table holes uniformly distributed in the circumferential direction for installing a workpiece seat supporting shaft. The driving plate and the workpiece seat are arranged on the workpiece seat supporting shaft, the poking plate is arranged in the coating chamber, the poking plate is poked to rotate for a certain angle when passing through the position of the poking plate each time in the rotation process of the revolution workpiece disc, and the workpiece seat rotates one circle after the workpiece disc rotates for a plurality of circles, so that coating of the circumferential surface of the workpiece is completed. The workpiece seat is of a quick-dismantling structure, is convenient to replace and is suitable for coating workpieces of different specifications.
Preferably, the center driving shaft is provided with a plurality of square holes for installing positioning blocks, so that the number of layers and the distance of the workpiece disc are flexibly adjustable; the inner wall of the coating chamber is provided with a corresponding number of threaded holes according to square holes on the central driving shaft, and the threaded holes are used for installing the corresponding poking sheets of each layer of workpiece disc.
Preferably, the transmission of the workpiece seat supporting shaft is realized by a driving plate and a driving plate, and the workpiece seat supporting shaft has a simple structure and is convenient to maintain.
Preferably, the workpiece seat and the workpiece seat support shaft are in quick-dismantling connection, so that the workpiece seats with different specifications can be conveniently replaced to adapt to workpieces with different specifications.
Drawings
The following drawings are only for purposes of illustration and explanation of the present utility model and are not intended to limit the scope of the utility model.
Fig. 1 is a schematic perspective view of a structure of a single-layer workpiece tray according to an embodiment of the present utility model, fig. 2 is a schematic view of a single-layer workpiece tray, fig. 3 is a cross-sectional view of a portion where a workpiece holder support shaft is installed, and fig. 4 is a schematic view of a driving connection manner of the workpiece holder and the workpiece holder support shaft. The device comprises a 1-coating chamber, a 2-central driving shaft, a 3-revolution workpiece disc, a 4-bearing seat, a 5-workpiece seat, a 6-workpiece seat supporting shaft, a 7-driving plate, an 8-shifting plate, a 9-positioning block, a 10-M6 flat pad, a 11-M6 elastic pad, a 12-M6 screw, a 13-M5 flat pad, a 14-M5 elastic pad, a 15-M5 screw, a 16-bearing retainer ring, a 17-bearing, an 18-key, a 19-driving plate pressing ring and a 20-shaft elastic retainer ring.
Detailed Description
For a clearer understanding of the general aspects, technical features, and objects and effects achieved by the present utility model, the present utility model will be further described with reference to the accompanying drawings, to which embodiments of the utility model are not limited.
Referring to the drawings, the utility model comprises a central driving shaft 2 provided with 10 square holes, a plurality of layers of revolution workpiece discs 3 are arranged on the central driving shaft 2 through positioning blocks 9, and the length of each positioning block 9 is slightly shorter than the length and the width of a groove at the bottom of each revolution workpiece disc 3 so as to be convenient for installation. The revolution workpiece disc 3 is provided with 15 sinking table holes, and the sinking table is positioned on the lower end surface of the revolution workpiece disc 3 and is used for installing a bearing and a workpiece seat supporting shaft. The periphery of the sinking table hole is provided with 4 threaded holes uniformly distributed in the circumferential direction, the bearing seat 4 is fastened on the revolution workpiece disc 3 by the M6 screw 12, and the M6 screw 12 is matched with the M6 flat pad 12 and the M6 elastic pad 13 for increasing the compression stress area of the screw and preventing the screw from loosening. The bearing pedestal is internally provided with a bearing retainer 16, a bearing 17 and a workpiece pedestal supporting shaft 6 in sequence from bottom to top, and the bearing retainer 16 and the bearing 17 are also arranged in a sinking table of the lower end face of the revolution workpiece disk 3. The work piece seat supporting shaft 6 and the driving plate 7 are connected and driven through a hole shaft in a matching way, a driving plate pressing ring 19 and an elastic retainer ring 20 for the shaft are arranged above the driving plate 7, and the driving plate 7 is axially fixed on the work piece seat supporting shaft 6. The upper end face of the workpiece seat supporting shaft 6 is provided with a blind hole with a plane on the circumferential surface, the circumferential surface of the workpiece seat 5 matched with the blind hole is also provided with the same plane, and the matched form realizes the simple structure, convenient disassembly and assembly and power transmission on the premise of small required torque.
Before coating, a special workpiece seat 5 is designed according to the overall dimension of the workpiece to be coated, other coating requirements such as a designated coating surface and the like, and the number of layers and the layer spacing of the workpiece disc are configured according to the length of the workpiece to be coated and the production batch. After the preparation work is finished, the special workpiece seat 5 for the workpiece to be coated is arranged on the workpiece disc supporting shaft 6 of each layer of workpiece disc, then the workpiece to be coated is loaded on the workpiece seat 5, and 15 workpieces can be loaded on each layer of workpiece disc. After film coating starts, the center driving shaft 2 drives the revolution workpiece disc 3 to rotate around the axis of the center driving shaft 2 under the action of the driving mechanism, when the workpiece seat 5 rotates to the position of the shifting piece 8 along with the revolution workpiece disc 3, the shifting plate 7 is shifted to rotate by the shifting piece 8, as the shifting plate 7 is provided with 8 teeth and can rotate 45 degrees each time, when the revolution workpiece disc 3 rotates 8 whole circles, the workpiece seat 5 rotates 1 whole circle along with the shifting plate 7, and film coating work of the whole circumferential surface of a workpiece can be completed.
The foregoing is merely illustrative of the present utility model and is not intended to limit the scope of the utility model. Any equivalent alterations, modifications and combinations thereof will be effected by those skilled in the art without departing from the spirit and principles of this utility model, and it is intended to be within the scope of the utility model.
Claims (4)
1. A simple planetary workpiece disc suitable for magnetron sputtering is characterized in that: the rotary type rotary coating machine mainly comprises a central driving shaft, a rotary workpiece disc, a bearing seat, a workpiece seat supporting shaft, a driving plate and a poking plate, wherein the central driving shaft is arranged at the center of the bottom of the cavity, positioning and transmission are realized between the central driving shaft and the rotary workpiece disc through positioning blocks, the rotary workpiece disc is provided with sunk table holes uniformly distributed in the circumferential direction for installing the workpiece seat supporting shaft, the driving plate and the workpiece seat are arranged on the workpiece seat supporting shaft, the poking plate is arranged in a coating chamber, the poking plate is poked to rotate for a certain angle when the driving plate passes through the position of the poking plate every time in the rotary process of the rotary workpiece disc, the workpiece seat rotates for one circle after the workpiece disc rotates for completing coating of the circumferential surface of a workpiece, and the workpiece seat is of a quick-dismantling structure, is convenient to replace and is suitable for coating the workpieces of different specifications.
2. A simple planetary workpiece disc suitable for magnetron sputtering as claimed in claim 1, wherein: the center driving shaft is provided with a plurality of square holes for installing positioning blocks and used for flexibly adjusting the number of layers and the distance between the workpiece discs; the inner wall of the coating chamber is provided with a corresponding number of threaded holes according to square holes on the central driving shaft, and the threaded holes are used for installing the corresponding poking sheets of each layer of workpiece disc.
3. A simple planetary workpiece disc suitable for magnetron sputtering as claimed in claim 1, wherein: the transmission of the workpiece seat supporting shaft is realized by a driving plate and a driving plate.
4. A simple planetary workpiece disc suitable for magnetron sputtering as claimed in claim 1, wherein: the workpiece seat and the workpiece seat support shaft are connected in a quick-dismantling mode, so that workpiece seats with different specifications can be replaced conveniently to adapt to workpieces with different specifications.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320714202.7U CN220116655U (en) | 2023-04-04 | 2023-04-04 | Simple planetary workpiece disc suitable for magnetron sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320714202.7U CN220116655U (en) | 2023-04-04 | 2023-04-04 | Simple planetary workpiece disc suitable for magnetron sputtering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220116655U true CN220116655U (en) | 2023-12-01 |
Family
ID=88893897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320714202.7U Active CN220116655U (en) | 2023-04-04 | 2023-04-04 | Simple planetary workpiece disc suitable for magnetron sputtering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220116655U (en) |
-
2023
- 2023-04-04 CN CN202320714202.7U patent/CN220116655U/en active Active
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