CN219975522U - High-pressure trace gas pressure-stabilizing flow control valve - Google Patents

Abstract

The utility model provides a high-pressure trace gas pressure-stabilizing flow control valve, and relates to the field of high-pressure gas trace adjustment. The pressure-stabilizing flow control valve comprises a valve body, a valve core, a valve rod and an elastic assembly, wherein the valve body is provided with an air inlet flow passage, an air outlet flow passage and a valve cavity; the valve core is arranged in the valve cavity and comprises a valve needle and a sensing diaphragm, the valve needle is inserted in the sensing diaphragm, the sensing diaphragm divides the valve cavity into a first cavity and a second cavity which are mutually independent, and the air inlet flow channel, the first cavity and the air outlet flow channel are sequentially communicated; the valve rod is adjustably arranged in the valve body, the elastic component is arranged in the second cavity, the top end of the elastic component is abutted with the valve rod, and the bottom end of the elastic component is abutted with the valve needle; the valve body is also provided with a micropore runner, two ends of the micropore runner are respectively communicated with the first chamber and the air outlet runner, the diameter of the micropore runner is smaller than that of the air outlet runner, and the valve needle can open or close the micropore runner. The microporous flow channel can limit the gas outflow rate, so that the fluctuation of the gas pressure in the first chamber can be reduced, and the controlled gas pressure and flow are stable.

Description

High-pressure trace gas pressure-stabilizing flow control valve

Technical Field

The utility model relates to the technical field of high-pressure gas micro-regulation, in particular to a high-pressure micro-gas pressure-stabilizing flow control valve.

Background

When the boiler is fed with water for oxygenation, the medium is usually compressed air or pure oxygen, the pressure of the gas is high, the flow is small, the oxygenation precision is difficult to control, the oxygenation precision is low, the anti-corrosion effect of the oxygenation treatment is reduced, and the concentrated peeling risk of oxide scales of a steam system can be possibly caused.

The pressure stabilizing valve can improve the stability of the gas pressure, thereby improving the accuracy of gas flow regulation. However, the pressure stabilizing valve in the prior art is mainly used in low-pressure occasions such as water systems and spraying, and the like, and a piston structure is mostly adopted in high-pressure occasions, so that the control precision is low, and the pressure stabilizing valve is not suitable for micro-adjustment of high-pressure gas.

Disclosure of Invention

The utility model aims to provide a high-pressure trace gas pressure-stabilizing flow control valve, which aims to solve the technical problems that the control precision of the pressure-stabilizing valve is low and the pressure-stabilizing valve is not suitable for trace adjustment of high-pressure gas in the prior art.

The utility model provides a high-pressure trace gas pressure-stabilizing flow control valve which comprises a valve body, a valve core, a valve rod and an elastic assembly, wherein the valve body is provided with an air inlet flow passage, an air outlet flow passage and a valve cavity; the valve core is arranged in the valve cavity and comprises a valve needle and a sensing diaphragm, the valve needle is inserted in the sensing diaphragm, the sensing diaphragm divides the valve cavity into a first cavity and a second cavity which are mutually independent, and the air inlet flow channel, the first cavity and the air outlet flow channel are sequentially communicated; the valve rod is arranged in the valve body in an adjustable mode, the elastic component is arranged in the second cavity, the top end of the elastic component is in butt joint with the valve rod, and the bottom end of the elastic component is in butt joint with the top end of the valve needle;

the valve body is further provided with a micropore runner, two ends of the micropore runner are respectively communicated with the first cavity and the air outlet runner, the diameter of the micropore runner is smaller than that of the air outlet runner, and the valve needle can open or close the micropore runner.

Further, the diameter range of the microporous flow channel is 0.1-0.6 mm.

Further, the sensing diaphragm comprises a central fixing part, a peripheral fixing part and a deformation part connected between the central fixing part and the valve needle, the peripheral fixing part is fixedly connected with the valve body, and the ratio of the projection of the deformation part to the area of the cross section of the first chamber is 1/3-1/2.

Further, the deformation part is planar or wavy along the radial direction.

Further, in the pressure range of 8-15 MPa, the deformation of the sensing diaphragm is linearly and positively correlated with the gas pressure to which the sensing diaphragm is subjected.

Further, the sensing diaphragm is made of high-performance spring steel, the thickness is 0.2-0.4 mm, and the Brinell hardness is 350-650N/mm ² 。

Further, the elastic component comprises a coil spring, the diameter of the coil spring is not more than 30mm, the maximum compression amount is 6mm, and the maximum elastic pressure is 1500N.

Further, the elastic assembly further comprises a lower cover, the bottom of the lower cover is connected with the valve core, a first limiting table is arranged at the top of the lower cover, and the bottom end of the spiral spring is sleeved outside the first limiting table;

and/or, the elastic component further comprises an upper cover, the top of the upper cover is in butt joint with the valve rod, a second limiting table is arranged at the bottom of the upper cover, and the top end of the spiral spring is sleeved outside the second limiting table.

Further, a spherical surface is arranged at the bottom of the valve rod, a first groove is formed in the top of the upper cover, and the first groove is matched with the spherical surface.

Further, the valve core further comprises a fixed cover, the top of the valve needle penetrates through the central through hole of the sensing diaphragm and then is fixedly connected with the fixed cover, and the sensing diaphragm is fixed through the central fixed part; the fixed cover is abutted with the elastic component.

Further, the bottom of the lower cover is provided with an accommodating groove, the fixed cover is inserted into the accommodating groove, and a steel ball is arranged between the top of the fixed cover and the bottom of the accommodating groove.

Further, a limiting cavity is formed in the bottom of the first cavity, a limiting piece is arranged in the limiting cavity, and a sealing piece is arranged between the limiting piece and the bottom of the limiting cavity; the limiting piece is provided with a first channel, the sealing piece is provided with a second channel, and the first cavity, the first channel, the second channel and the micropore runner are communicated in sequence;

the valve needle comprises a needle point and a limiting part connected with the needle point, the needle point is in clearance fit with the second channel, and the limiting part is in clearance fit with the first channel;

the needle tip is provided with a first conical matching surface between the limiting part, a second conical matching surface is arranged between the first channel and the second channel, the second conical matching surface is matched with the first conical matching surface, and the distance between the first conical matching surface and the second conical matching surface is positively related to the gas flow.

Further, a positioning cavity is further arranged at the bottom of the limiting cavity, the positioning cavity is communicated with the micropore runner, and the diameter of the positioning cavity is larger than that of the needle point and is used for limiting the position of the needle point.

Further, the valve body comprises a lower valve body and an upper valve body, wherein the upper valve body is fixedly arranged on the lower valve body and fixes the induction diaphragm.

Further, the upper valve body is provided with a vent hole, and the vent hole is used for communicating the atmosphere with the second chamber.

Further, a first sealing ring is arranged between the contact surfaces of the central fixing part of the sensing diaphragm and the valve needle; and a second sealing ring is arranged between the contact surfaces of the peripheral fixing part of the induction diaphragm and the lower valve body.

Further, a fixing nut is arranged outside the valve body and used for installing the high-pressure trace gas pressure-stabilizing flow control valve on the panel.

The high-pressure trace gas pressure-stabilizing flow control valve provided by the utility model has the following beneficial effects:

according to the high-pressure trace gas pressure-stabilizing flow control valve provided by the utility model, the compression degree of the elastic component can be adjusted by adjusting the position of the valve rod, so that the opening pressure of the valve core and the size of the through flow section can be adjusted, and the gas flow can be controlled. When the air inlet valve is used, air enters the first chamber from the air inlet flow channel, the valve core is opened after the pressure of the air inlet flow channel overcomes the elastic pressure of the elastic component, and the air enters the air outlet flow channel through the micropore flow channel and flows out. The micro-pore flow channel has small diameter, so that the outflow rate of gas can be well limited, the pressure fluctuation of the gas in the first chamber can be reduced, and the phenomenon that the valve core closes the outlet and the gas flow fluctuates due to the fact that the gas pressure in the first chamber is reduced to be smaller than the elastic pressure of the elastic component, namely the phenomenon that the gas outlet is intermittently opened, can be effectively avoided. The high-pressure trace gas pressure stabilizing flow control valve provided by the utility model has the advantages that the micropore flow passage can limit the gas outflow rate, so that the gas pressure fluctuation in the first chamber can be reduced, the controlled gas pressure is stable, the flow is stable, the gas control precision can be improved, and the high-pressure trace gas pressure stabilizing flow control valve can be applied to high-pressure gas trace adjustment.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present utility model, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.

FIG. 1 is a cross-sectional view of a high pressure trace gas pressure stabilizing flow control valve provided by an embodiment of the present utility model;

FIG. 2 is a partial cross-sectional view of a high pressure trace gas pressure stabilizing flow control valve provided in an embodiment of the present utility model;

fig. 3 is an enlarged schematic view at a in fig. 2.

Reference numerals illustrate:

100-valve body; 110-a lower valve body; 111-an intake runner; 112-an outlet flow channel; 113-microporous flow channels; 120-upper valve body; 121-vent holes; 130-a valve cavity; 131-a first chamber; 132-a second chamber; 134-positioning cavity;

200-valve core; 210-a valve needle; 211-needle tip; 212-a limiting part; 213-a first conical mating surface; 220-sensing a diaphragm; 221-a central fixing portion; 222-deformation part; 223-peripheral fixation; 230-a fixed cover; 231-a second groove;

300-valve stem; 310-sphere;

410-a coil spring; 420-lower cover; 421-a first limiting table; 422-a receiving slot; 430-upper cover; 431-a second limiting table;

500-limiting parts; 510-a first channel;

600-seals; 610-a second channel; 620-a second conical mating surface;

700-steel ball; 810-a first sealing ring; 820-a second seal ring; 900-fixing the nut.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

The embodiment provides a high-pressure trace gas pressure-stabilizing flow control valve, as shown in fig. 1 and 2, which comprises a valve body 100, a valve core 200, a valve rod 300 and an elastic assembly 400, wherein the valve body 100 is provided with an air inlet flow channel 111, an air outlet flow channel 112 and a valve cavity 130; the valve core 200 is arranged in the valve cavity 130, the valve core 200 comprises a valve needle 210 and a sensing diaphragm 220, the valve needle 210 is inserted in the sensing diaphragm 220, the sensing diaphragm 220 divides the valve cavity 130 into a first chamber 131 and a second chamber 132 which are mutually independent, and the air inlet flow channel 111, the first chamber 131 and the air outlet flow channel 112 are sequentially communicated; the valve rod 300 is adjustably arranged on the valve body 100, the elastic component 400 is arranged in the second chamber 132, the top end of the elastic component is in contact with the valve rod 300, and the bottom end of the elastic component is in contact with the top end of the valve needle 210; the valve body 100 is further provided with a micro-porous flow channel 113, two ends of the micro-porous flow channel 113 are respectively communicated with the first chamber 131 and the air outlet flow channel 112, the diameter of the micro-porous flow channel 113 is smaller than that of the air outlet flow channel 112, and the valve needle 210 can open or close the micro-porous flow channel 113.

The high-pressure trace gas pressure-stabilizing flow control valve provided by the embodiment can adjust the compression degree of the elastic component 400 by adjusting the position of the valve rod 300, so that the opening pressure of the valve core 200 and the size of the through flow section can be adjusted, and the gas flow can be controlled. In use, the gas enters the first chamber 131 from the inlet channel 111, and the pressure overcomes the elastic pressure of the elastic component 400 to open the valve core 200, and then enters the outlet channel 112 through the micro-porous channel 113 and flows out. The micro-porous flow channel 113 has a small diameter, so that the outflow rate of the gas can be well limited, so that the pressure fluctuation of the gas in the first chamber 131 can be reduced, and further the phenomenon that the valve core 200 closes the outlet and the gas flow fluctuates due to the fact that the gas pressure in the first chamber 131 is reduced to be smaller than the elastic pressure of the elastic component 400, namely the phenomenon that the gas outlet is intermittently opened, can be effectively avoided. That is, the high-pressure trace gas pressure stabilizing flow control valve provided in this embodiment can limit the gas outflow rate by the micro-porous flow channel 113, so that the fluctuation of the gas pressure in the first chamber 131 can be reduced, and the controlled gas pressure and flow are stable, so that the gas control precision can be improved, and the high-pressure trace gas pressure stabilizing flow control valve can be applied to high-pressure trace gas regulation.

Specifically, in the present embodiment, the diameter of the microporous flow channels 113 is in the range of 0.1 to 0.6mm.

Specifically, in the present embodiment, as shown in fig. 2, the sensing diaphragm 220 includes a central fixing portion 221, a peripheral fixing portion 223, and a deformation portion 222 connected therebetween, the central fixing portion 221 is fixedly connected with the valve needle 210, the peripheral fixing portion 223 is fixedly connected with the valve body 100, and the ratio of the projection of the deformation portion 222 to the area of the cross section of the first chamber 131 is 1/3-1/2. More specifically, the ratio of the projection of the deformation portion 222 to the area of the cross section of the first chamber 131 may be 1/3, 1/2, or any ratio between two take-off points. When the gas flow is changed, the gas pressure in the first chamber 131 changes, the pressure applied to the deformation portion 222 by the gas changes, and the deformation portion 222 deforms accordingly to increase the volume, so as to buffer or reduce the pressure change in the first chamber 131, i.e. the high-pressure micro-flow gas pressure-stabilizing flow control valve provided in this embodiment, the volume of the first chamber 131 can dynamically change, so that the gas pressure can be stabilized, and the gas flow can be stabilized.

Specifically, in the present embodiment, as shown in fig. 2, the deformation portion 222 is wavy in the radial direction. With this arrangement, the sensing diaphragm 220 has a larger elastic deformation, a larger range of adjustable gas pressure, and a higher sensitivity. Of course, in other embodiments of the present utility model, the deformation portion 222 may be planar along the radial direction, and the manufacturing process thereof is simpler, so long as the requirement of use can be met.

Specifically, in the present embodiment, in the pressure range of 8 to 15MPa, the deformation amount of the sensing diaphragm 220 is linearly and positively correlated with the gas pressure to which it is subjected. More specifically, in the present embodiment, since the oxygenation pressure is usually around 10MPa, the deformation amount of the sensing diaphragm 220 may be linearly and positively correlated with the gas pressure to which it is subjected, as long as it is in the pressure range of 8 to 12 MPa. Alternatively, further, the deformation amount of the sensing diaphragm 220 may be linearly and positively correlated with the gas pressure to which it is subjected, in the pressure range of 9 to 11 MPa.

Specifically, in the present embodiment, the sensing diaphragm 220 is made of high performance spring steel with a thickness of 0.2-0.4 mm, for example 0.3mm and Brinell hardness of 350-650N/mm ² For example 500N/mm ² 。

More specifically, in this embodiment, the diameter of the elastic membrane 220 may be 35 to 80mm, for example 40mm.

Specifically, in the present embodiment, as shown in fig. 1, the elastic member 400 includes a coil spring 410, and the coil spring 410 has a diameter of not more than 30mm, for example, 25mm, a maximum compression amount of 6mm, and a maximum elastic pressure of 1500N.

Specifically, in this embodiment, as further shown in fig. 1, the elastic assembly 400 further includes a lower cover 420, the bottom of the lower cover 420 is connected to the valve core 200, a first limiting table 421 is disposed on the top of the lower cover 420, and the bottom end of the coil spring 410 is sleeved outside the first limiting table 421. In this arrangement, the lower cover 420 serves as a mounting carrier for the coil spring 410, and the first limiting block 421 thereof also serves as a limiting function for the coil spring 410. Of course, in other embodiments of the present utility model, the lower cap 420 may not be provided, and the coil spring 410 may be directly mounted to the valve core 200.

Specifically, in this embodiment, as further shown in fig. 1, the elastic assembly 400 further includes an upper cover 430, the top of the upper cover 430 abuts against the valve rod 300, a second limiting table 431 is disposed at the bottom of the upper cover 430, and the top end of the coil spring 410 is sleeved outside the second limiting table 431. In this arrangement, the upper cover 430 plays a limiting role in both the axial direction and the radial direction of the coil spring 410, so that the expansion and contraction of the coil spring 410 are more stable, and the movement of the valve needle 210 is more stable.

Specifically, in this embodiment, as further shown in fig. 1, the bottom of the valve rod 300 is provided with a spherical surface 310, and the top of the upper cover 430 is provided with a first groove, which matches the spherical surface 310. In this arrangement, the spherical surface 310 plays a limiting role on the elastic component through the first groove; further, the shape of the first groove is matched with the spherical surface 310, so that the valve rod 300 can automatically adjust the position of the elastic component, and the valve rod and the elastic component are flexibly connected, so that clamping stagnation can be effectively avoided. Of course, in other embodiments of the present utility model, the upper cover 430 may not be provided, and the coil spring 410 may be directly mounted to the bottom end of the valve stem 300.

Specifically, in this embodiment, as shown in fig. 2, the valve core 200 further includes a fixed cover 230, and the top of the valve needle 210 passes through the central through hole of the sensing diaphragm 220 and is fixedly connected with the fixed cover 230, and the sensing diaphragm 220 is fixed by the central fixing portion 221; the fixed cover 230 abuts against the elastic member 400. In this arrangement, the stationary cover 230 presses the sensing diaphragm 220 against the valve needle 210.

Specifically, in the present embodiment, as shown in fig. 1, a receiving groove 422 is provided at the bottom of the lower cover 420, the fixed cover 230 is inserted into the receiving groove 422, and a steel ball 700 is provided between the top of the fixed cover 230 and the bottom of the receiving groove 422.

Specifically, in this embodiment, as shown in fig. 2, a second groove 231 is provided at the top of the fixed cover 230, the steel ball 700 is disposed in the second groove 231, and the second groove 231 plays a limiting role on the steel ball 700.

Specifically, in this embodiment, as shown in fig. 2 and 3, a limiting cavity is provided at the bottom of the first chamber 131, a limiting member 500 is provided in the limiting cavity, and a sealing member 600 is provided between the limiting member 500 and the bottom of the limiting cavity; the limiting member 500 is provided with a first channel 510, the sealing member 600 is provided with a second channel 610, and the first chamber 131, the first channel 510, the second channel 610 and the micro-porous flow channel 113 are sequentially communicated; the valve needle 210 comprises a needle tip 211 and a limiting part 212 connected with the needle tip 211, the needle tip 211 is in clearance fit with the second channel 610, and the limiting part 212 is in clearance fit with the first channel 510; a first conical matching surface 213 is arranged between the needle tip 211 and the limiting part 212, a second conical matching surface 620 is arranged between the first channel 510 and the second channel 610, the second conical matching surface 620 is matched with the first conical matching surface 213, and the distance between the two surfaces is positively related to the gas flow. In this arrangement, the stopper 500 plays a role in stopping the needle 210 and also in fixing the seal 600; the sealing member 600 can effectively prevent the gas from flowing into the micro-porous flow channel 113 from the limiting cavity, thereby ensuring the control precision of the gas flow; further, the arrangement of the first tapered fitting surface 213 and the second tapered fitting surface 620 with respect to the planar fitting surface allows the flow direction of the gas to be gradually changed, so that the gas flow can be smoother.

Specifically, in this embodiment, as shown in fig. 2, a positioning cavity 134 is further disposed at the bottom of the limiting cavity, and the positioning cavity 134 is communicated with the micro-pore flow channel 113, and has a diameter larger than that of the needle tip 211, so as to define the position of the needle tip 211. With this arrangement, the positioning cavity 134 positions and guides the needle tip 211, so that the movement of the valve core 210 is more precise. In addition, the positioning cavity 134 also plays a role in guiding the gas, and the gas flowing from the gap between the valve needle 210 and the sealing member 600 firstly merges into the positioning cavity 134 and then into the micro-porous flow channel 113, so that the gas flow entering the micro-porous flow channel 113 is more uniform and stable.

Specifically, in the present embodiment, as shown in fig. 1, the valve body 100 includes a lower valve body 110 and an upper valve body 120, and the upper valve body 120 is fixedly mounted to the lower valve body 110 and fixes the sensing diaphragm 220. In this arrangement, the upper and lower valve bodies 120 and 110 are assembled while the sensing diaphragm 220 is also fixed, simplifying the assembly process.

Specifically, in the present embodiment, as shown in fig. 1, the upper valve body 120 is provided with a vent hole 121, and the vent hole 121 is used to communicate the atmosphere with the second chamber 132.

Specifically, in the present embodiment, as shown in fig. 1 and 2, a first sealing ring 810 is disposed between the contact surfaces of the central fixing portion 221 of the sensing diaphragm 220 and the valve needle 210; a second seal ring 820 is provided between the contact surfaces of the peripheral fixing portion 223 of the sensing diaphragm 220 and the lower valve body 110. The first sealing ring 810 can effectively prevent the gas in the first chamber 131 from flowing out between the bottom surface of the peripheral fixing portion 223 and the lower valve body 110, and the second sealing ring 820 can effectively prevent the gas in the first chamber 131 from entering the second chamber 132 between the central fixing portion 221 and the valve needle 210, so that the tightness of the first chamber 131 is effectively ensured by the first sealing ring 810, the second sealing ring 820 and the sealing member 600.

Specifically, in this embodiment, as shown in fig. 1, a fixing nut 900 is further disposed outside the valve body 100, and is used to mount the high-pressure trace gas pressure-stabilizing flow control valve on a panel.

In summary, the high-pressure trace gas pressure-stabilizing flow control valve provided by the embodiment can stabilize the pressure and flow of the controlled gas, so that the trace control precision of the high-pressure gas can be improved, and the requirements of boiler water supply and oxygenation treatment adjustment can be well met.

Finally, it is further noted that relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. The high-pressure trace gas pressure-stabilizing flow control valve is characterized by comprising a valve body (100), a valve core (200), a valve rod (300) and an elastic assembly (400), wherein the valve body (100) is provided with an air inlet flow passage (111), an air outlet flow passage (112) and a valve cavity (130); the valve core (200) is arranged in the valve cavity (130), the valve core (200) comprises a valve needle (210) and an induction membrane (220), the valve needle (210) is inserted in the induction membrane (220), the induction membrane (220) divides the valve cavity (130) into a first cavity (131) and a second cavity (132) which are mutually independent, and the air inlet flow channel (111), the first cavity (131) and the air outlet flow channel (112) are sequentially communicated; the valve rod (300) is arranged in the valve body (100) in an adjustable mode, the elastic component (400) is arranged in the second cavity (132), the top end of the elastic component is in abutting joint with the valve rod (300), and the bottom end of the elastic component is in abutting joint with the top end of the valve needle (210);

the valve body (100) is further provided with a micro-pore flow channel (113), two ends of the micro-pore flow channel (113) are respectively communicated with the first cavity (131) and the air outlet flow channel (112), the diameter of the micro-pore flow channel (113) is smaller than that of the air outlet flow channel (112), and the valve needle (210) can open or close the micro-pore flow channel (113);

the diameter of the microporous flow channel (113) ranges from 0.1 mm to 0.6mm.

2. The high-pressure trace gas pressure stabilizing flow control valve according to claim 1, wherein the sensing diaphragm (220) comprises a central fixed portion (221), a peripheral fixed portion (223) and a deformation portion (222) connected therebetween, the central fixed portion (221) is fixedly connected with the valve needle (210), the peripheral fixed portion (223) is fixedly connected with the valve body (100), and the ratio of the projection of the deformation portion (222) to the area of the cross section of the first chamber (131) is 1/3-1/2;

the deformation part (222) is planar or wavy along the radial direction.

3. The high pressure trace gas pressure stabilizing flow control valve according to claim 2, wherein the deformation amount of the sensing diaphragm (220) is linearly positively correlated with the gas pressure to which it is subjected in a pressure range of 8 to 15 MPa.

4. The high-pressure trace gas pressure-stabilizing flow control valve according to claim 3, wherein the sensing diaphragm (220) is made of high-performance spring steel, has a thickness of 0.2-0.4 mm and a Brinell hardness of 350-650N/mm ² 。

5. The high pressure trace gas pressure stabilizing flow control valve according to claim 2, wherein said elastic assembly (400) comprises a coil spring (410), said coil spring (410) having a diameter of no more than 30mm, a maximum compression of 6mm and a maximum elastic pressure of 1500N.

6. The high-pressure trace gas pressure stabilizing flow control valve according to claim 5, wherein the elastic assembly (400) further comprises a lower cover (420), the bottom of the lower cover (420) is connected with the valve core (200), a first limiting table (421) is arranged at the top of the lower cover (420), and the bottom end of the coil spring (410) is sleeved outside the first limiting table (421);

and/or, the elastic component (400) further comprises an upper cover (430), the top of the upper cover (430) is in butt joint with the valve rod (300), a second limiting table (431) is arranged at the bottom of the upper cover (430), and the top end of the spiral spring (410) is sleeved outside the second limiting table (431).

7. The high-pressure trace gas pressure stabilizing flow control valve according to claim 6, wherein said valve cartridge (200) further comprises a fixed cover (230), the top of said valve needle (210) passing through the central through hole of said sensing diaphragm (220) and fixedly connected to said fixed cover (230), and said sensing diaphragm (220) is fixed by said central fixing portion (221); the fixed cover (230) is abutted with the elastic component (400).

8. The high-pressure trace gas pressure stabilizing flow control valve according to claim 1, wherein a limiting cavity is arranged at the bottom of the first chamber (131), a limiting piece (500) is arranged in the limiting cavity, and a sealing piece (600) is arranged between the limiting piece (500) and the bottom of the limiting cavity; the limiting piece (500) is provided with a first channel (510), the sealing piece (600) is provided with a second channel (610), and the first chamber (131), the first channel (510), the second channel (610) and the micropore runner (113) are communicated in sequence;

the valve needle (210) comprises a needle tip (211) and a limiting part (212) connected with the needle tip (211), the needle tip (211) is in clearance fit with the second channel (610), and the limiting part (212) is in clearance fit with the first channel (510);

a first conical matching surface (213) is arranged between the needle tip (211) and the limiting part (212), a second conical matching surface (620) is arranged between the first channel (510) and the second channel (610), the second conical matching surface (620) is matched with the first conical matching surface (213), and the distance between the first conical matching surface and the second conical matching surface is positively related to the gas flow.

9. The high-pressure trace gas pressure stabilizing flow control valve according to claim 8, wherein a positioning cavity (134) is further arranged at the bottom of the limiting cavity, the positioning cavity (134) is communicated with the micro-pore flow passage (113), and the diameter of the positioning cavity is larger than that of the needle point (211) and is used for limiting the position of the needle point (211).

10. The high-pressure trace gas pressure stabilizing flow control valve according to claim 1, wherein the valve body (100) comprises a lower valve body (110) and an upper valve body (120), the upper valve body (120) is fixedly mounted to the lower valve body (110) and fixes the sensing diaphragm (220).