CN219954314U - Developer valve control structure - Google Patents
Developer valve control structure Download PDFInfo
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- CN219954314U CN219954314U CN202321304181.8U CN202321304181U CN219954314U CN 219954314 U CN219954314 U CN 219954314U CN 202321304181 U CN202321304181 U CN 202321304181U CN 219954314 U CN219954314 U CN 219954314U
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- 230000033001 locomotion Effects 0.000 claims abstract description 59
- 238000007789 sealing Methods 0.000 claims description 26
- 238000005192 partition Methods 0.000 claims description 19
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000013011 mating Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 13
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides a developer valve control structure, which comprises: a control structure shell, in which a piston movement channel is arranged; the developer liquid pipeline is provided with a first opening, and the first opening is opposite to the piston movement channel; a piston assembly axially sliding in the piston movement channel to switch the first opening between open and closed; the adjusting assembly is arranged on one side, far away from the first opening, of the piston assembly and comprises a thimble assembly and a positioning piece, the thimble assembly axially slides in the piston motion channel, the positioning piece is used for axially positioning the thimble assembly, and the thimble assembly is provided with an abutting end which is opposite to one side, far away from the first opening, of the piston assembly; and the air pump is communicated with the piston movement channel. The utility model solves the problem that the existing developer valve can not adjust the control range of the developer flow.
Description
Technical Field
The utility model relates to the technical field of developing equipment, in particular to a developing solution valve control structure.
Background
In integrated circuit or chip fabrication, the development process is a critical aspect. At present, the flow rate of the developing solution in the developing solution pipeline is regulated by changing the opening degree of a valve, however, when the existing developing solution valve arranged in the pipeline has a fixed flow rate regulating range, the flow rate of the developing solution is 0 when the valve is closed, and the valve is opened to a maximum conducting state, the fixed maximum flow rate exists, so that the existing developing solution valve cannot regulate the flow rate regulating range of the developing solution.
Disclosure of Invention
The utility model solves the problem that the existing developing solution valve can not adjust the control range of the flow velocity of the developing solution.
In order to solve the above problems, the present utility model provides a developer valve control structure comprising: the control structure shell is internally provided with a piston movement channel; the developing solution pipeline is provided with a first opening, and the first opening is opposite to the piston movement channel; a piston assembly axially sliding within the piston movement channel, switching the first opening between open and closed; the adjusting assembly is arranged on one side, far away from the first opening, of the piston assembly, the adjusting assembly comprises a thimble assembly and a positioning piece, the thimble assembly axially slides in the piston motion channel, the positioning piece is used for positioning the axial position of the thimble assembly, the thimble assembly is provided with an abutting end, and the abutting end and one side, far away from the first opening, of the piston assembly are oppositely arranged; and the air pump is communicated with the piston movement channel.
The technical effect achieved after the technical scheme is adopted is as follows: the air pump is used for conveying air or exhausting air to the piston movement channel, so that the axial position of the piston assembly is regulated by air pressure; the thimble assembly can also adjust the axial position and is fixed at a certain axial position through the positioning piece, and the side of the thimble assembly, which faces the piston assembly, can limit the movement range of the piston assembly; when the air pump controls the piston assembly to move upwards and abut against the thimble assembly, the gap between the piston assembly and the first opening is the maximum gap which can be achieved currently, the developing solution flowing out of the first opening through the developing solution pipeline can also reach the maximum flow rate which can be achieved currently, and when the axial position of the thimble assembly is changed, the maximum gap between the piston assembly and the first opening and the maximum flow rate of the developing solution are correspondingly adjusted; when the thimble assembly moves to the lowest position and compresses the piston assembly, the piston assembly can be sealed with the first opening, so that the flow rate of the developing solution is 0, and the control range of the flow rate of the developing solution can be adjusted by the control structure of the developing solution valve.
Further, the positioning piece is fixedly connected with the control structure shell, and is provided with a first perforation; the thimble assembly is matched with the first perforation and extends into the piston movement channel.
The technical effect achieved after the technical scheme is adopted is as follows: the thimble assembly can be inserted into or taken out along the first perforation, so that the disassembly and assembly of the thimble assembly are realized.
Further, the first through hole is internally provided with first threads; the outside of thimble assembly is equipped with the second screw thread, first screw thread with the cooperation of second screw thread.
The technical effect achieved after the technical scheme is adopted is as follows: the locating piece and the thimble assembly are matched through threads, so that axial relative movement is realized, and the locating piece can fix the thimble assembly at any axial position.
Further, the thimble assembly comprises a first screw rod and a knob, and the first thread is positioned on the outer side of the first screw rod; the knob is fixedly connected with one end, far away from the piston assembly, of the first screw rod.
The technical effect achieved after the technical scheme is adopted is as follows: the knob is convenient for rotate first screw rod in the control structure casing outside, realizes the regulation to its axial position to the manual open-close of control first opening.
Further, the adjusting assembly further comprises: the guide shell is positioned in the piston movement channel and is fixedly connected with the control structure shell; the first screw is provided with at least one sliding piece on the periphery side, and the sliding piece is connected with the inner wall of the guide shell in a sliding way.
The technical effect achieved after the technical scheme is adopted is as follows: the guide shell is used for limiting the position of the first screw, one end of the first screw is limited through the first perforation of the locating piece, and the other end of the first screw is limited through the cooperation of the sliding piece and the guide shell, so that the first screw can axially move more stably and cannot incline.
Further, the sliding piece comprises a groove formed in the peripheral side of the first screw rod and a first sealing piece located in the groove, and the first sealing piece is attached to the inner wall of the guide shell.
The technical effect achieved after the technical scheme is adopted is as follows: the first sealing piece enables the first screw rod to slide in the guide shell more stably; the first seal is prevented from disengaging from the first screw at a location where the groove is used to define the first seal.
Further, the thimble assembly further comprises a second screw rod, a matching channel is arranged in the first screw rod, the second screw rod is matched with the matching channel, and the second screw rod extends out of one end, close to the piston assembly, of the first screw rod.
The technical effect achieved after the technical scheme is adopted is as follows: the second screw rod can rotate in the cooperation passageway of first screw rod, makes second screw rod and first screw rod keep away from each other or be close to adjust the total length of thimble assembly, realize different compacting effect.
Further, the piston assembly comprises a baffle plate which is in sliding connection with the piston movement channel; the piston movement channel comprises a first cavity and a second cavity, the first cavity and the second cavity are positioned on two opposite sides of the partition board, and the first cavity is positioned on one side of the adjusting assembly; the elastic piece is axially arranged in the piston movement channel, and two ends of the elastic piece are respectively abutted against the partition plate and the inner wall of the first cavity.
The technical effect achieved after the technical scheme is adopted is as follows: after the axial movement range of the piston assembly is limited by the adjusting assembly, the air pump is used for introducing air into the first cavity and/or the second cavity, and the partition plate can be automatically controlled to axially move, so that the distance between the piston assembly and the first opening is adjusted; when the position of the adjusting component is higher, the elastic piece can avoid excessive movement of the partition plate, so that the partition plate blocks a channel of the air pump or the bottom end of the piston component leaks air.
Further, the piston movement channel further comprises a third cavity, the third cavity is communicated between the second cavity and the first opening, and the diameter of the third cavity is smaller than that of the second cavity; the piston assembly further includes: the sealing head is connected with one side, facing the first opening, of the partition plate, is matched with the third cavity and slides in the third cavity, and can seal the first opening.
The technical effect achieved after the technical scheme is adopted is as follows: the third cavity is used for limiting the position of the sealing head, so that the sliding of the piston assembly is more stable; the diameter of the third cavity is smaller than that of the second cavity, so that the second cavity has enough space to be filled with gas to drive the piston assembly to move.
Further, a second seal is provided between the partition and the inner wall of the piston movement channel; and/or a third sealing piece is arranged between the sealing head and the inner wall of the third cavity.
The technical effect achieved after the technical scheme is adopted is as follows: the second sealing piece enables the baffle plate to slide in the piston movement channel more stably, and seals between the first cavity and the second cavity, so that the baffle plate cannot be pushed due to the fact that gas circulates between the first cavity and the second cavity is avoided; the third sealing piece enables the movement of the sealing head in the third cavity to be more stable, and meanwhile developer liquid is prevented from entering the third cavity from the first opening.
In summary, each of the above technical solutions of the present utility model may have one or more of the following advantages or beneficial effects: i) The air pump is used for conveying air or exhausting air to the piston movement channel, so that the axial position of the piston assembly is regulated by air pressure; ii) the thimble assembly can be used for adjusting the axial position and is fixed at a certain axial position through the locating piece, and the movement range of the piston assembly can be limited on one side of the thimble assembly, which faces the piston assembly, so that the maximum gap between the piston assembly and the first opening is controlled, the maximum flow velocity of the developing solution pipeline flowing out from the first opening is controlled, and the adjustment of the control range of the flow velocity of the developing solution is realized.
Drawings
Fig. 1 is a schematic structural diagram of a developer valve control structure according to an embodiment of the present utility model;
FIG. 2 is an enlarged view of a portion of region I of FIG. 1;
FIG. 3 is a schematic view of the control structure housing of FIG. 1;
fig. 4 is a cross-sectional view taken along the direction A-A in fig. 1.
Reference numerals illustrate:
100-a developer valve control structure; 110-a control structure housing; 111-piston motion channels; 112-a first cavity; 113-a second cavity; 114-a third cavity; 115-gas channel; 120-developer line; 121-a first opening; 130-an adjustment assembly; 131-a thimble assembly; 132—an abutment end; 133-a first screw; 134-knob; 135-a second screw; 136-positioning piece; 137-a guide housing; 138-a first seal; 139-a fourth seal; 140-a piston assembly; 141-a separator; 142-sealing heads; 143-a second seal; 144-a third seal; 150-elastic member.
Detailed Description
The utility model aims to provide a developing solution valve control structure which is used for adjusting the effect of a developing solution flow rate control range of a developing solution valve.
In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
Referring to fig. 1 to 4, the present utility model provides a developer valve control structure 100, the developer valve control structure 100 comprising: a control structure housing 110, wherein a piston movement channel 111 is arranged in the control structure housing 110; a developer line 120, the developer line 120 having a first opening 121, the first opening 121 being disposed opposite the piston movement passage 111; a piston assembly 140, the piston assembly 140 axially sliding in the piston movement channel 111, switching the first opening 121 between open and closed; the adjusting assembly 130 is arranged on one side of the piston assembly 140 away from the first opening 121, the adjusting assembly 130 comprises a thimble assembly 131 and a positioning piece 136, the thimble assembly 131 axially slides in the piston motion channel 111, the positioning piece 136 is used for positioning the axial position of the thimble assembly 131, the thimble assembly 131 is provided with an abutting end 132, and the abutting end 132 and one side of the piston assembly 140 away from the first opening 121 are oppositely arranged; an air pump, which communicates with the piston movement passage 111.
In the present embodiment, the air pump is used to supply or discharge air to the piston movement passage 111, thereby adjusting the axial position of the piston assembly 140 by the air pressure; the thimble assembly 131 can also adjust the axial position, and is fixed at a certain axial position by the positioning piece 136, and the side of the thimble assembly 131 facing the piston assembly 140 can limit the movement range of the piston assembly 140; when the air pump controls the piston assembly 140 to move upwards and abut against the thimble assembly 131, the gap between the piston assembly 140 and the first opening 121 takes the maximum gap which can be achieved currently, the developer flowing out of the first opening 121 through the developer pipe 120 can also achieve the maximum flow rate which can be achieved currently, and when the axial position of the thimble assembly 131 is changed, the maximum gap between the piston assembly 140 and the first opening 121 and the maximum flow rate of the developer are correspondingly adjusted; when the ejector pin assembly 131 moves to the lowermost position and presses the piston assembly 140, the piston assembly 140 can be sealed with the first opening 121 to make the flow rate of the developer liquid 0, so that the developer liquid valve control structure 100 can adjust the control range of the flow rate of the developer liquid.
In one particular embodiment, the positioning member 136 is fixedly coupled to the control structure housing 110, the positioning member 136 having a first aperture; the needle assembly 131 mates with the first bore and extends into the piston motion passageway 111. Wherein, the thimble assembly 131 can be inserted into or taken out along the first perforation, so as to realize the disassembly and assembly of the thimble assembly 131.
In a specific embodiment, the first bore has first threads therein; the outside of the thimble assembly 131 is provided with a second thread, and the first thread is matched with the second thread. Wherein, locating piece 136 and thimble assembly 131 have realized axial relative motion through screw-thread fit to locating piece 136 can fix thimble assembly 131 in axial optional position.
In one particular embodiment, spike assembly 131 includes a first screw 133 and a knob 134, the first thread being located outside of first screw 133; the knob 134 is fixedly connected to an end of the first screw 133 remote from the piston assembly 140. The knob 134 facilitates rotating the first screw 133 outside the control structure housing 110 to adjust the axial position thereof, thereby manually controlling the opening and closing of the first opening 121.
Preferably, the knob 134 is pressed against the first screw 133 by a radially arranged set screw, so that the knob 134 and the first screw 133 are fixed.
In a specific embodiment, the adjustment assembly 130 further includes: the guide shell 137, the guide shell 137 is located in the piston movement channel 111, and the guide shell 137 is fixedly connected with the control structure shell 110; wherein, the first screw 133 has at least one sliding member on the circumference side, and the sliding member is slidably connected with the inner wall of the guide housing 137. Wherein, the guiding shell 137 is used for limiting the position of the first screw rod 133, one end of the first screw rod 133 is limited by the first perforation of the positioning piece 136, and the other end of the first screw rod 133 is limited by the cooperation of the sliding piece and the guiding shell 137, so that the first screw rod 133 can perform axial movement more stably without tilting.
In a specific embodiment, the sliding member includes a groove formed on a circumferential side of the first screw 133, and a first sealing member 138 disposed in the groove, and the first sealing member 138 is attached to an inner wall of the guide housing 137. Wherein the first seal 138 makes the first screw 133 slide more smoothly within the guide housing 137; where the groove is used to define the first seal 138, the first seal 138 is prevented from disengaging the first screw 133.
In a specific embodiment, the thimble assembly 131 further includes a second screw rod 135, the first screw rod 133 having a mating channel therein, the second screw rod 135 mating with the mating channel, the second screw rod 135 extending from an end of the first screw rod 133 adjacent to the piston assembly 140. The second screw rod 135 can rotate in the matching channel of the first screw rod 133, so that the second screw rod 135 and the first screw rod 133 are far away from or close to each other, and the total length of the thimble assembly 131 is adjusted, so that different compaction effects are achieved.
Preferably, a groove is formed on the peripheral side of the second screw rod 135, the groove of the second screw rod 135 is used for accommodating the fourth sealing element 139, and the fourth sealing element 139 is attached to the inner wall of the guide shell. The fourth seal 139 smoothes the second screw 135 sliding within the guide housing.
In one particular embodiment, piston assembly 140 includes a diaphragm 141, diaphragm 141 being slidably coupled to piston movement channel 111; the piston movement channel 111 comprises a first cavity 112 and a second cavity 113, the first cavity 112 and the second cavity 113 are positioned on two opposite sides of the partition 141, and the first cavity 112 is positioned on one side of the adjusting assembly 130; after the axial movement range of the piston assembly 140 is defined by the adjusting assembly 130, the air pump may introduce air into the first cavity 112 and/or the second cavity 113, so that the partition 141 may be automatically controlled to perform axial movement, thereby adjusting the distance between the piston assembly 140 and the first opening 121.
Preferably, the control structure housing 110 is provided with a gas channel 115 at the peripheral side of the first cavity 112 and/or the second cavity 113 for connecting with an air pump.
Further, the piston assembly 140 further includes: the elastic member 150, the elastic member 150 is disposed in the piston movement channel 111 along the axial direction, and two ends of the elastic member 150 respectively abut against the partition 141 and the inner wall of the first cavity 112. Wherein, when the adjusting assembly 130 is positioned higher, the elastic member 150 can prevent the diaphragm 141 from moving too much, which may cause the diaphragm 141 to block the gas channel 115 or cause the bottom end of the piston assembly 140 to leak.
Preferably, the partition 141 has a groove to receive the abutment end 132 on a side facing the second screw 135, thereby reducing the axial size of the developer valve control structure 100 and saving space.
In a specific embodiment, the piston movement channel 111 further includes a third cavity 114, the third cavity 114 being communicated between the second cavity 113 and the first opening 121, the third cavity 114 having a smaller diameter than the second cavity 113; the piston assembly 140 further includes: and a sealing head 142, the sealing head 142 being connected to a side of the partition 141 facing the first opening 121, the sealing head 142 being engaged with the third chamber 114 and sliding in the third chamber 114, the sealing head 142 being capable of sealing the first opening 121. Wherein, the third cavity 114 is used for limiting the position of the sealing head 142, so that the piston assembly 140 slides more stably; the third chamber 114 has a smaller diameter than the second chamber 113 so that the second chamber 113 has sufficient space to allow the gas to move the piston assembly 140.
In a specific embodiment, a second seal 143 is provided between the diaphragm 141 and the inner wall of the piston movement passage 111; and/or a third seal 144 is provided between the sealing head 142 and the inner wall of the third cavity 114. The second sealing piece 143 makes the sliding of the partition board 141 in the piston motion channel 111 smoother, and seals between the first cavity 112 and the second cavity 113, so that the partition board 141 cannot be pushed due to the fact that gas flows between the first cavity 112 and the second cavity 113; the third seal 144 smoothes movement of the seal head 142 within the third chamber 114 while preventing developer solution from entering the third chamber 114 from the first opening 121.
Preferably, the second seal 143 and the third seal 144 are skirt seals, and the second seal 143 and the third seal 144 are oppositely oriented, such that an effective seal is achieved when the piston assembly 140 is moved in either axial direction.
Although the present utility model is disclosed above, the present utility model is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the utility model, and the scope of the utility model should be assessed accordingly to that of the appended claims.
Claims (10)
1. A developer valve control structure, characterized in that the developer valve control structure includes:
the control structure shell is internally provided with a piston movement channel;
the developing solution pipeline is provided with a first opening, and the first opening is opposite to the piston movement channel;
a piston assembly axially sliding within the piston movement channel, switching the first opening between open and closed;
the adjusting assembly is arranged on one side, far away from the first opening, of the piston assembly, the adjusting assembly comprises a thimble assembly and a positioning piece, the thimble assembly axially slides in the piston motion channel, the positioning piece is used for positioning the axial position of the thimble assembly, the thimble assembly is provided with an abutting end, and the abutting end and one side, far away from the first opening, of the piston assembly are oppositely arranged;
and the air pump is communicated with the piston movement channel.
2. The developer valve control structure according to claim 1, wherein the positioning member is fixedly connected to the control structure housing, the positioning member having a first through hole; the thimble assembly is matched with the first perforation and extends into the piston movement channel.
3. The developer valve control structure according to claim 2, wherein the first through hole has a first thread therein; the outside of thimble assembly is equipped with the second screw thread, first screw thread with the cooperation of second screw thread.
4. The developer valve control structure according to claim 3, wherein the ejector pin assembly includes a first screw and a knob, the first thread being located outside of the first screw; the knob is fixedly connected with one end, far away from the piston assembly, of the first screw rod.
5. The developer valve control structure according to claim 4, wherein the regulating assembly further comprises: the guide shell is positioned in the piston movement channel and is fixedly connected with the control structure shell;
the first screw is provided with at least one sliding piece on the periphery side, and the sliding piece is connected with the inner wall of the guide shell in a sliding way.
6. The developer valve control structure according to claim 5, wherein the slider includes a groove provided on a peripheral side of the first screw, and a first seal member provided in the groove, the first seal member being fitted to an inner wall of the guide housing.
7. The developer valve control structure according to claim 4, wherein the ejector pin assembly further comprises a second screw, the first screw has a mating channel therein, the second screw mates with the mating channel, and the second screw extends out of an end of the first screw adjacent to the piston assembly.
8. The developer valve control structure according to claim 1, wherein the piston assembly includes a partition plate slidably connected to the piston movement passage; the piston movement channel comprises a first cavity and a second cavity, the first cavity and the second cavity are positioned on two opposite sides of the partition board, and the first cavity is positioned on one side of the adjusting assembly;
the elastic piece is axially arranged in the piston movement channel, and two ends of the elastic piece are respectively abutted against the partition plate and the inner wall of the first cavity.
9. The developer valve control structure according to claim 8, wherein the piston movement passage further includes a third chamber that communicates between the second chamber and the first opening, the third chamber having a smaller diameter than the second chamber;
the piston assembly further includes: the sealing head is connected with one side, facing the first opening, of the partition plate, is matched with the third cavity and slides in the third cavity, and can seal the first opening.
10. The developer valve control structure according to claim 9, wherein a second seal is provided between the partition plate and an inner wall of the piston movement passage; and/or a third sealing piece is arranged between the sealing head and the inner wall of the third cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321304181.8U CN219954314U (en) | 2023-05-26 | 2023-05-26 | Developer valve control structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321304181.8U CN219954314U (en) | 2023-05-26 | 2023-05-26 | Developer valve control structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219954314U true CN219954314U (en) | 2023-11-03 |
Family
ID=88537037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321304181.8U Active CN219954314U (en) | 2023-05-26 | 2023-05-26 | Developer valve control structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219954314U (en) |
-
2023
- 2023-05-26 CN CN202321304181.8U patent/CN219954314U/en active Active
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