CN219907007U - Heat energy utilization system of polycrystalline silicon reduction furnace - Google Patents
Heat energy utilization system of polycrystalline silicon reduction furnace Download PDFInfo
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- CN219907007U CN219907007U CN202321495388.8U CN202321495388U CN219907007U CN 219907007 U CN219907007 U CN 219907007U CN 202321495388 U CN202321495388 U CN 202321495388U CN 219907007 U CN219907007 U CN 219907007U
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- reduction furnace
- flash tank
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- energy utilization
- utilization system
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229920005591 polysilicon Polymers 0.000 claims abstract description 23
- AMXOYNBUYSYVKV-UHFFFAOYSA-M lithium bromide Chemical group [Li+].[Br-] AMXOYNBUYSYVKV-UHFFFAOYSA-M 0.000 claims abstract description 10
- 230000001105 regulatory effect Effects 0.000 claims description 14
- 239000000498 cooling water Substances 0.000 abstract description 25
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000002925 low-level radioactive waste Substances 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000006722 reduction reaction Methods 0.000 description 59
- 238000013461 design Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000009191 jumping Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a heat energy utilization system of a polysilicon reduction furnace, which relates to the technical field of polysilicon production, and comprises a first reduction furnace, a second reduction furnace, a first flash tank, a second flash tank, a buffer tank, a cooler, a heater, a rectifying device and a lithium bromide unit; the first reduction furnace is respectively communicated with the first flash tank and the buffer tank through pipelines, and the second reduction furnace is respectively communicated with the first flash tank and the second flash tank through pipelines; the buffer tank is connected with the cooler through a pipeline; the cooler is connected with the heater and the lithium bromide unit through pipelines respectively; the heater is connected with the rectifying device through a pipeline. According to the utility model, the bell jar cooling water and the chassis cooling water of different reduction furnaces are combined, so that the utilization efficiency of low-level waste heat can be improved, the heat waste is reduced, the consumption of the existing circulating water vapor can be reduced, the structure is simple, the investment is low, and the economic benefit of enterprises can be improved.
Description
Technical Field
The utility model relates to the technical field of polysilicon production, in particular to a heat energy utilization system of a polysilicon reduction furnace.
Background
In the process for producing polysilicon by using the improved Siemens method, high-purity TCS from a rectification section and high-purity hydrogen form a gas-liquid mixture with a certain proportion through a static mixer, and then the gas-liquid mixture enters a reduction furnace, and an electric heating carrier enables the reduction furnace to reach the reaction temperature (between 1080 ℃ and 1100 ℃), at the moment, TCS and H 2 And carrying out vapor deposition reaction in a reducing furnace to generate high-purity polysilicon.
In the process of the reduction reaction, the temperature of the furnace barrel and the chassis of the reduction furnace, which are in direct radiation heat transfer with the high-temperature silicon rod, are increased at the same time, and in order to ensure that the temperature of the reduction furnace equipment is not too high to cause accidents, a cooling medium is required to be introduced for continuous cooling.
The reduction furnace commonly used by polysilicon manufacturers at present is a bell jar type reduction furnace, wherein a furnace barrel and a chassis are respectively provided with an interlayer, and circulating water can be introduced to take away heat radiated to the furnace wall. Generally, after cooling water input from a furnace barrel of a reduction furnace absorbs the temperature of the furnace barrel, high-temperature and high-pressure cooling water is formed to return water for output, and then the cooling water exchanges heat with rectified hot water, and surplus heat is taken away by circulating water; and after the heat exchange between the cooling water input from the chassis of the reduction furnace and the chassis of the reduction furnace is finished, the cooling water is directly cooled by the circulating water. The heat exchange mode cannot utilize heat of the bell jar cooling water backwater and the chassis water backwater, so that energy waste is caused, and meanwhile, the consumption of circulating water is increased. Therefore, it is necessary to design a low-level heat energy utilization system of the polysilicon reduction furnace.
Chinese patent publication No. CN203998973U discloses a thermal energy utilization system of a polysilicon reduction furnace, comprising: at least one reduction furnace having a cooling water inlet and a cooling water outlet; the flash tank is connected with the cooling water inlet and the cooling water outlet at the same time, and comprises a waste heat steam pipeline and a condensation water return pipeline which are respectively connected with steam utilization equipment; and the intermediate treatment equipment is connected between the cooling water inlet and the cooling water outlet. Chinese patent publication No. CN212673863U discloses a heat energy utilization system of a polysilicon reduction furnace, comprising a reduction furnace, a high-temperature water circulation pump, a flash tank and a control system; the water outlet of the reduction furnace is communicated with the first main pipe; the flash tanks are arranged in parallel; a communicating pipe is arranged among the flash tanks; the flash tank is communicated with the reduction furnace through a branch pipe I and a main pipe I in sequence; the water outlet of the flash tank is connected with a branch pipe II; the branch pipe II is communicated with an inlet of the high-temperature water circulating pump through the main pipe II; the outlet of the high-temperature water circulating pump is communicated with the water inlet of the reduction furnace; the first branch pipe is provided with a pressure sensing component; the first branch pipe is provided with a regulating valve; the control system is connected with the pressure sensing component to acquire pressure information in the branch pipe I; the control system is connected with the regulating valve to control. Although both of these patent documents have a structure such as a reduction furnace and a flash tank, there is no disclosure of a technique for realizing the effect of reducing the consumption of circulating water by providing a heater, a rectifying device, a buffer tank, and the like to collect heat.
Disclosure of Invention
In order to solve the technical problems, the utility model provides a heat energy utilization system of a polysilicon reduction furnace, which can recycle heat of bell jar cooling water backwater and chassis water backwater of the reduction furnace for a rectification system, and simultaneously reduce the consumption of circulating water in a reduction working section, thereby achieving the purposes of energy conservation and consumption reduction.
In order to achieve the purpose of the utility model, the technical scheme adopted by the utility model is as follows:
a heat energy utilization system of a polysilicon reduction furnace comprises a first reduction furnace, a second reduction furnace, a first flash tank, a second flash tank, a buffer tank, a cooler, a heater, a rectifying device and a lithium bromide unit; the first reduction furnace is respectively communicated with the first flash tank and the buffer tank through pipelines, and the second reduction furnace is respectively communicated with the first flash tank and the second flash tank through pipelines; the buffer tank is connected with the cooler through a pipeline; the cooler is connected with the heater and the lithium bromide unit through pipelines respectively; the heater is connected with the rectifying device through a pipeline.
Based on the technical scheme, the flash tank further comprises a first circulating pump, and the first circulating pump is connected with the first flash tank, the first reducing furnace and the second reducing furnace through pipelines respectively.
Based on the technical scheme, the device further comprises a second circulating pump, and the second circulating pump is respectively connected with the second flash tank and the second reduction furnace through pipelines.
Based on the technical scheme, the flash tank further comprises a steam main pipe, wherein the steam main pipe is connected with the second flash tank through a pipeline, and the outlet steam of the first flash tank is led into the steam main pipe.
Based on the technical scheme, the emergency water tank is further connected with the buffer tank through a pipeline.
Based on the technical scheme, still further, still be equipped with the booster pump, the booster pump passes through the pipeline and links to each other with emergent water pitcher.
Based on the technical scheme, the cooling system further comprises a third circulating pump, and the third circulating pump is respectively connected with the buffer tank and the cooler through pipelines.
Based on the technical scheme, further, the first reduction furnace and the second reduction furnace are provided with the regulating valve and the flowmeter, and the regulating result of the regulating valve is displayed through the flowmeter.
Based on the technical scheme, the first reduction furnace is an 18-pair rod reduction furnace.
Based on the technical scheme, the second reducing furnace is a 36-pair rod reducing furnace or a 40-pair rod reducing furnace.
Based on the technical scheme, further, the withstand voltage test pressure is 0.86MPa, the design temperature is 175 DEG, and the maximum allowable working pressure is 0.3MPa.
Based on the technical scheme, the flash tank is matched with the flash water pump, the test pressure of the jumping shell of the flash water pump is 3.0MPa, the shaft power is 200KW, and the cavitation allowance is NPSHr2.9m.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, the bell jar cooling water and the chassis cooling water of different reduction furnaces are combined, so that the utilization efficiency of low-level waste heat can be improved, the heat waste is reduced, the consumption of the existing circulating water vapor can be reduced, the structure is simple, the investment is low, and the economic benefit of enterprises can be improved.
Drawings
FIG. 1 is a block diagram of a system of the present utility model;
description of the drawings: 1. a first reduction furnace; 2. a second reduction furnace; 3. a first flash tank; 4. a second flash tank; 5. a buffer tank; 6. a cooler; 7. a heater; 8. a rectifying device; 9. a lithium bromide unit; 10. a first circulation pump; 11. a second circulation pump; 12. a steam header pipe; 13. an emergency water tank; 14. a booster pump; 15. and a third circulation pump.
Detailed Description
The utility model is further illustrated and described below with reference to the drawings and detailed description. The technical features of the embodiments of the utility model can be combined correspondingly on the premise of no mutual conflict.
In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below. The technical features of the embodiments of the utility model can be combined correspondingly on the premise of no mutual conflict.
In the description of the present utility model, it should be understood that the terms "first" and "second" are used solely for the purpose of distinguishing between the descriptions and not necessarily for the purpose of indicating or implying a relative importance or implicitly indicating the number of features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature.
Example 1
As shown in fig. 1, a heat energy utilization system of a polysilicon reduction furnace comprises a first reduction furnace 1, a second reduction furnace 2, a first flash tank 3, a second flash tank 4, a buffer tank 5, a cooler 6, a heater 7, a rectifying device 8, a lithium bromide unit 9, a first circulating pump 10, a second circulating pump 11, a steam main pipe 12, an emergency water tank 13, a booster pump 14 and a third circulating pump 15; the first reduction furnace 1 is respectively communicated with the first flash tank 3 and the buffer tank 5 through pipelines, and the second reduction furnace 2 is respectively communicated with the first flash tank 3 and the second flash tank 4 through pipelines; the buffer tank 5 is connected with the cooler 6 through a pipeline; the cooler 6 is respectively connected with the heater 7 and the lithium bromide unit 9 through pipelines; the heater 7 is connected with the rectifying device 8 through a pipeline, wherein the first reducing furnace 1 is 18 pairs of rod reducing furnaces, and the second reducing furnace 2 is 36 pairs of rod reducing furnaces or 40 pairs of rod reducing furnaces.
Specifically, the first circulating pump 10 is respectively connected with the first flash tank 3, the first reduction furnace 1 and the second reduction furnace 2 through pipelines, wherein the first reduction furnace 1 is provided with a first bell jar cooling water return port, return water in the return port is divided into two paths of flow directions, one path is the first flash tank 3 connected with the first circulating pump through an outlet pipeline, the other path is a buffer tank 5 connected with the first flash tank through an outlet pipeline, and the buffer tank 5 is the high-temperature hot water buffer tank 5 of the first reduction furnace 1. The second reduction furnace 2 is provided with a chassis cooling water return outlet, water flowing out of the chassis cooling water return outlet is combined with water of a bell jar cooling water return port of the first reduction furnace 1 and then flows into the first flash tank 3, the first flash tank 3 is also communicated with steam condensate from a deionized water pipe network, outlet steam of the first flash tank 3 is communicated with a steam main pipe 12, the outlet steam is 2bar steam, the steam main pipe 12 is connected with the second flash tank 4 through a pipeline, the first flash tank 3 is also connected with a second circulating pump 11 through a pipeline, the second circulating pump 11 is a high-temperature hot water circulating pump of the second reduction furnace 2, the second circulating pump 11 is also connected with the second flash tank 4 through a pipeline, meanwhile, the second reduction furnace 2 is also provided with a second bell jar cooling water return port, the second bell jar cooling water return port is communicated with the second flash tank 4 through a pipeline, the outlet hot water of the second circulating pump 11 is respectively circulated in multiple ways, the bell jar cooling water for the first reduction furnace 1 and the second reduction furnace 2 is further circulated by the second circulating pump 11 for forming the second cooling water of the second reduction furnace 2.
Further, a third circulating pump 15 is arranged on a pipeline between the buffer tank 5 and the cooler 6, the third circulating pump 15 is a high-temperature hot water circulating pump of the first reduction furnace 1, wherein hot water at an outlet of the third circulating pump 15 respectively enters the lithium bromide unit 9 and the heater 7 for treatment through the cooler 6, the cooler 6 is a reduction hot water cooler 6, the heater 7 is a rectification hot water heater 7, heat after being treated by the heater 7 is directly communicated with the rectification device 8 for utilization, and the third circulating pump 15 is also communicated with the buffer tank 5 through the pipeline; meanwhile, a booster pump 14 is arranged and connected with the emergency water tank 13 through a pipeline, the emergency water tank 13 is connected with the buffer tank 5 through a pipeline, the buffer tank 5 is a high-temperature hot water buffer tank 5 of the first reduction furnace 1, the booster pump 14 is a deionized water booster pump, and water from an external deionized water pipe network is introduced into the emergency water tank 13 through the booster pump 14.
Specifically, the first reduction furnace 1 and the second reduction furnace 2 may be both provided with a regulating valve and a flowmeter, the flowmeter displays the regulating result of the regulating valve, and when the backwater flow deviates from the standard value, the opening of the regulating valve increases or decreases the backwater flow in the pipeline, and the regulating valve is a backwater regulating valve. The design pressure of both the first flash tank 3 and the second flash tank 4 may be set in the range of-0.1 MPa0 to.65 MPa, the withstand test pressure is 0.86MPa, the design temperature is 175 °, and the maximum allowable operating pressure is 0.3MPa. The first flash tank 3 and the second flash tank 4 can be matched with a flash water pump, the test pressure of the jumping shell of the flash water pump is 3.0MPa, the shaft power is 200KW, and the necessary cavitation allowance is 2.9m.
The foregoing is a description of embodiments of the utility model, which are specific and detailed, but are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model.
Claims (10)
1. The heat energy utilization system of the polysilicon reduction furnace is characterized by comprising a first reduction furnace, a second reduction furnace, a first flash tank, a second flash tank, a buffer tank, a cooler, a heater, a rectifying device and a lithium bromide unit;
the first reduction furnace is respectively communicated with the first flash tank and the buffer tank through pipelines,
the second reduction furnace is respectively communicated with the first flash tank and the second flash tank through pipelines;
the buffer tank is connected with the cooler through a pipeline;
the cooler is connected with the heater and the lithium bromide unit through pipelines respectively;
the heater is connected with the rectifying device through a pipeline.
2. The heat energy utilization system of a polysilicon reduction furnace according to claim 1, further comprising a first circulation pump connected to the first flash tank, the first reduction furnace, and the second reduction furnace, respectively, via pipes.
3. The heat energy utilization system of the polysilicon reduction furnace according to claim 1, further comprising a second circulating pump connected to the second flash tank and the second reduction furnace through pipelines, respectively.
4. The thermal energy utilization system of a polysilicon reduction furnace of claim 1, further comprising a steam header connected to the second flash tank by piping, and wherein the outlet steam from the first flash tank is vented to the steam header.
5. The heat energy utilization system of a polysilicon reduction furnace according to claim 1, further comprising an emergency water tank connected to the buffer tank through a pipeline.
6. The heat energy utilization system of a polysilicon reduction furnace according to claim 5, further comprising a booster pump connected to the emergency water tank via a pipeline.
7. The heat energy utilization system of the polysilicon reduction furnace according to claim 1, further comprising a third circulating pump, wherein the third circulating pump is connected with the buffer tank and the cooler respectively through pipelines.
8. The heat energy utilization system of a polysilicon reduction furnace according to claim 1, wherein the first reduction furnace and the second reduction furnace are provided with a regulating valve and a flowmeter, and the regulating result of the regulating valve is displayed by the flowmeter.
9. The thermal energy utilization system of a polysilicon reduction furnace according to claim 1, wherein the first reduction furnace is an 18-pair rod reduction furnace.
10. The thermal energy utilization system of a polysilicon reduction furnace according to claim 1, wherein the second reduction furnace is a 36 pair rod reduction furnace or a 40 pair rod reduction furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321495388.8U CN219907007U (en) | 2023-06-13 | 2023-06-13 | Heat energy utilization system of polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321495388.8U CN219907007U (en) | 2023-06-13 | 2023-06-13 | Heat energy utilization system of polycrystalline silicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219907007U true CN219907007U (en) | 2023-10-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321495388.8U Active CN219907007U (en) | 2023-06-13 | 2023-06-13 | Heat energy utilization system of polycrystalline silicon reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219907007U (en) |
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2023
- 2023-06-13 CN CN202321495388.8U patent/CN219907007U/en active Active
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