CN219818441U

CN219818441U - Laser processing device

Info

Publication number: CN219818441U
Application number: CN202320808034.8U
Authority: CN
Inventors: 柳济润; 金正洙; 金昭宴; 张镐眞
Original assignee: Samsung Display Co Ltd
Current assignee: Samsung Display Co Ltd
Priority date: 2022-12-28
Filing date: 2023-04-13
Publication date: 2023-10-13
Anticipated expiration: 2033-04-13

Abstract

The laser processing device comprises a laser light source, a rotating unit, a transmitting unit and a control unit. The laser light source may generate a laser beam. The rotation unit may control a rotation angle of the laser beam. The transfer unit may control an irradiation position of the laser beam. The control unit may synchronize the irradiation position of the laser beam with the rotation of the laser beam, and control the rotation unit and the transfer unit, respectively. Thus, the laser processing apparatus can synchronize the processing position with the rotation of the laser beam, and the processing quality can be improved.

Description

Laser processing device

Technical Field

The present utility model relates to a laser processing apparatus. More specifically, the present utility model relates to a laser processing apparatus including an optical system having directivity.

Background

The laser beam may be used in a manufacturing process of the display device. The laser beam can be used as a high-density heat source for marking a workpiece, cutting a pattern, welding a workpiece, heat treatment, or the like. The laser processing is non-contact, and has the advantages of low abrasion and fine processing.

Examples of the display device include a liquid crystal display device (liquid crystal display device, LCD), an organic light emitting display device (organic light emitting display device, OLED), and a plasma display device (plasma display device, PDP).

The scanner can adjust the irradiation position of the laser beam. If the scanner position is subject to errors, the final machining position may deviate from the design position. Thus, the quality of the display device may be degraded.

Disclosure of Invention

The present utility model provides a laser processing device including an optical system having directivity.

However, the object of the present utility model is not limited to the object described above, and various extensions can be made without departing from the spirit and scope of the present utility model.

In order to achieve the foregoing object of the present utility model, a laser processing apparatus according to an embodiment of the present utility model may include a laser light source, a rotation unit, a transmission unit, and a control unit. The laser light source may generate a laser beam. The rotation unit may control a rotation angle of the laser beam. The transfer unit may control an irradiation position of the laser beam. The control unit may synchronize the irradiation position of the laser beam with the rotation of the laser beam, and may control the rotation unit and the transfer unit, respectively.

In an embodiment, the laser processing apparatus may further include: a table which is spaced apart from the transfer unit and can accommodate a processing object.

In an embodiment, the control unit may include: and an encoder outputting an encoder signal including position information of the table.

In an embodiment, the control unit may further include: and a stage control unit configured to output a first control signal based on the encoder signal. The first control signal may include at least one of a position signal of the table and a signal for controlling movement of the table.

In an embodiment, the control unit may further include: and a position control unit configured to output a second control signal for controlling movement of the transmission unit based on the first control signal.

In an embodiment, the transfer unit may horizontally move the laser beam based on the second control signal.

In an embodiment, the control unit may further include: an angle calculating section that outputs a target angle of the laser beam at a processing position where processing is achieved by the laser beam, based on the first control signal and the second control signal; and an angle control section that outputs a third control signal that controls movement of the rotating unit so as to cause the laser beam to have the target angle at the processing position.

In an embodiment, the rotation unit may rotate the laser beam based on the third control signal.

In an embodiment, the rotation unit may include: a direction determining unit configured to determine a rotation direction of the laser beam; and a rotation unit configured to rotate the direction determination unit.

In one embodiment, the direction determining unit may include a dove prism (dove prism).

In an embodiment, the rotating part may include a rotating table (rotation stage).

In order to achieve the above object, a laser processing apparatus according to another embodiment of the present utility model may include a laser light source, a rotation unit, a transfer unit, a table, an angle calculation unit, and an angle control unit. The laser light source may generate a laser beam. The rotation unit may receive the laser beam from the laser light source and rotate the laser beam. The transfer unit may receive the laser beam from the rotation unit to horizontally move the laser beam. The table may be spaced apart from the transfer unit and may be capable of disposing a processing object. The angle calculating section may output a target angle of the laser beam at a processing position of the processing object where processing is achieved by the laser beam. The angle control part may output a first control signal that controls rotation of the laser beam so as to have the laser beam at the processing position with the target angle.

In an embodiment, the laser processing apparatus may further include: and an encoder outputting an encoder signal including position information of the table.

In an embodiment, the laser processing apparatus may further include: and a stage control unit configured to output a second control signal including at least one of a position signal of the stage and a signal for controlling movement of the stage, based on the encoder signal.

In an embodiment, the laser processing apparatus may further include: and a position control unit configured to output a third control signal for controlling movement of the transmission unit based on the second control signal.

(effects of the utility model)

A laser processing apparatus according to an embodiment of the present utility model may include a laser light source, a rotation unit, a transfer unit, and a control unit. The laser light source may generate a laser beam. The rotation unit may control a rotation angle of the laser beam. The transfer unit may control an irradiation position of the laser beam. The control unit may synchronize an irradiation position of the laser beam with rotation of the laser beam, and control the rotation unit and the transfer unit, respectively. Thus, the laser processing apparatus can synchronize the processing position with the rotation of the laser beam, and the processing quality can be improved.

However, the effects of the present utility model are not limited to the aforementioned effects, and various extensions can be made within the scope not departing from the spirit and scope of the present utility model.

Drawings

Fig. 1 is a block diagram showing a laser processing apparatus according to an embodiment of the present utility model.

Fig. 2 is a perspective view illustrating the laser processing apparatus of fig. 1.

Fig. 3 is a perspective view showing a rotating portion included in the laser processing apparatus of fig. 1.

Fig. 4 to 6 are diagrams for explaining a glass processing step using the laser processing apparatus of fig. 1, and fig. 7 is an enlarged view of a portion a of fig. 6.

Symbol description:

1: a laser processing device; 10: a laser light source; 20: a rotating unit; 30: a transfer unit; 40: and a control unit.

Detailed Description

Hereinafter, embodiments of the present utility model will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and overlapping description of the same components is omitted.

Fig. 1 is a block diagram showing a laser processing apparatus according to an embodiment of the present utility model. Fig. 2 is a perspective view illustrating the laser processing apparatus of fig. 1. Fig. 3 is a perspective view showing a rotating portion included in the laser processing apparatus of fig. 1.

Referring to fig. 1, 2 and 3, a laser processing apparatus 1 according to an embodiment of the present utility model may include a table STA, an optical system and a control unit 40. The optical system may include a laser light source 10, a rotation unit 20, and a transfer unit 30. The control unit 40 may include an encoder 100, a table control part 200, a rotation control part 300, and a position control part 400.

The object PO may be disposed on the stage STA. The laser processing apparatus 1 may further include a first driving section capable of moving the table STA in a first direction (for example, the X axis), a second driving section capable of moving the table STA in a second direction (for example, the Y axis), and a third driving section capable of moving the table STA in a third direction (for example, the Z axis). The first direction and the second direction may intersect each other, and the third direction may be perpendicular to a plane defined by the first direction and the second direction. Thus, the table STA can be driven in the X-axis, Y-axis, and Z-axis.

The first driving unit that can move the table STA in the first direction may be further provided in the table STA. The stage STA may further include a second driving unit capable of moving the stage STA in the second direction intersecting the first direction. The stage STA may further include a third driving unit capable of moving the stage STA in the third direction intersecting the first direction and the second direction, respectively. Thus, the table STA can be driven in the X-axis, Y-axis, and Z-axis.

However, the present utility model is not limited thereto, and the first driving unit, the second driving unit, and the third driving unit are not limited as long as they can drive the table STA. For example, the table STA may be driven in one direction by a conveyor belt or the like.

The type of the object PO may be various depending on the type of the laser processing step. For example, the laser processing process may include an etching process, a cutting process, a melting process, a repairing process, and the like. For example, the object PO may include a plurality of cells CE and a substrate SUB. The plurality of cells CE may be arranged in the row and column directions. The plurality of cells CE may include a display area and a non-display area surrounding the display area, respectively. The adjacent plurality of cells CE may also be in a state in which the non-display areas are connected to each other. A scribe line (scribing line) may be defined between the plurality of cells CE. By cutting along the scribe lines, the plurality of cells CE can be separated, respectively.

However, the present utility model is not limited thereto, and the types of the laser processing step and the object to be processed PO may be various.

The laser light source 10 may generate a laser beam LR. In detail, the laser light source 10 may generate a laser beam LR having directivity. The laser beam LR may be irradiated onto the object PO placed on the table STA.

The laser light source 10 can continuously emit the laser beam LR. Alternatively, the laser light source 10 may emit the laser beam LR in a pulse form.

The laser light source 10 may emit the laser beam LR as a single-beam (single-beam). Optionally, the laser light source 10 may also emit the laser beam LR as a multi-beam (multi-beam).

The rotation unit 20 may control a rotation angle of the laser beam LR. Specifically, the rotation unit 20 may receive the laser beam LR emitted from the laser light source 10. Then, the rotation unit 20 may rotate the laser beam LR based on a third control signal described later.

Referring to fig. 3, the rotation unit 20 may include a direction determining part 22 and a rotation part 24. The direction determining unit 22 may correct the direction of the laser beam LR, and the rotating unit 24 may rotate the direction determining unit 22. In one embodiment, the direction determining unit 22 may be a dove prism (dove prism), and the rotating unit 24 may be a rotating stage (rotation stage). The beams incident on the dav prism may be emitted at different angles. The rotary table may rotate about a single rotation axis. Thus, the rotation unit 20 can rotate the laser beam LR received from the laser light source 10, and the laser beam LR emitted from the rotation unit 20 can be emitted at a different angle from the laser beam LR incident on the rotation unit 20. Here, the angle may represent an angle between a normal line of the upper surface of the stage STA and the laser beam LR.

However, the present utility model is not limited to this, and the direction determining unit 22 is not limited as long as it can rotate the laser beam LR. For example, in the case where the direction determining section 22 can be driven alone, the rotating section 24 may be omitted.

Referring again to fig. 1 and 2, the transfer unit 30 may control the irradiation position of the laser beam LR.

In an embodiment, the transfer unit 30 may receive the laser beam LR emitted from the rotation unit 20. Then, the transfer unit 30 may horizontally move the laser beam LR so that the laser beam LR is irradiated to the processing position. Thereby, the traveling path of the laser beam LR can be corrected. The processing position can be preset.

In other embodiments, the laser processing apparatus 1 may further include at least one path conversion unit disposed on the incident path of the laser beam LR. In this case, the transfer unit 30 may receive the laser beam LR emitted from the rotation unit 20 and passing through the path conversion unit.

In one embodiment, the transfer unit 30 may be a scanner. The scanner may comprise at least one mirror. For example, the laser processing apparatus 1 may include a galvanometer scanner (galvano scanner) having two mirrors. The scanner may correct the travel path of the laser beam LR while rotating the mirror.

That is, the laser beam LR emitted from the laser light source 10 can be rotated by the rotation unit 20 and irradiated to the processing position by the transfer unit 30. For this, the transfer unit 30 may be driven in front-rear, up-down, and left-right directions.

The control unit 40 may control the stage STA and the optical system. As described above, the control unit 40 may include the encoder 100, the table control part 200, the rotation control part 300, and the position control part 400.

The encoder 100 may be provided in the workstation STA. The encoder 100 may obtain position information of the table STA and output an encoder signal based on the position information. In the case of the linear driving stage STA, the encoder 100 may include a linear encoder.

The laser processing device 1 may also comprise a scale. The gauge may be disposed in an outer frame of the table STA. In this case, the encoder 100 may be disposed in the table STA so as to face the gauge. Thus, the encoder 100 can confirm the scale of the scale to obtain the position information of the table STA when the table STA is stopped. Thus, the scale may be configured as a plurality in the workstation STA. The plurality of gauges may be respectively arranged along the driving direction of the table STA to correspond to positions at which the table STA stops.

The encoder signal may include the position information of the workstation STA. For example, the encoder signal may include various information such as a position coordinate value of the table STA, a moving speed of the table STA, and the like. In the case where the laser processing apparatus 1 includes the encoder 100 that detects the position in the +x direction, the encoder 100 may output the encoder signal including the position of the table STA in the +x direction. The encoder signal may be the basis for generating a control signal as described below.

The table control section 200 may output the first control signal based on the encoder signal output from the encoder 100. The first control signal may include at least one of a position signal of the station STA and a signal controlling movement of the station STA.

In an embodiment, the stage control part 200 may output the signal for controlling the movement of the stage STA based on the encoder signal. The signal for controlling the movement of the stage STA may be transmitted to a structure capable of driving the stage STA. Thus, the driving direction of the table STA, the driving speed of the table STA, and the like can be controlled.

In an embodiment, the table control part 200 may output the position signal of the table STA based on the encoder signal. The position signal of the station STA may include position coordinates of the station STA, etc.

The rotation control part 300 may output the third control signal for controlling the movement of the rotation unit 20 based on the first control signal and a second control signal described later. Specifically, the rotation control section 300 may output the third control signal for controlling the movement of the rotation unit 20 based on the first control signal output from the table control section 200 and the second control signal output from the position control section 400. The second control signal will be described in detail later in the position control unit 400.

The rotation control part 300 may include an angle calculating part 310 and an angle control part 320.

The angle calculating unit 310 may output the target angle of the laser beam LR at the processing position based on the first control signal and the second control signal. Specifically, the angle calculating section 310 may output the target angle of the laser beam LR at the machining position based on the first control signal output from the table control section 200 and the second control signal output from the position control section 400. The target angle may represent an angle between a normal to an upper surface of the stage STA and the laser beam LR.

The angle control part 320 may output the third control signal controlling the movement of the rotating unit 20 so as to have the laser beam LR at the processing position with the target angle. The third control signal may include information of the target angle of the laser beam LR at the machining position. The third control signal may be transferred to the rotation unit 20. Thereby, the rotating portion 24 included in the rotating unit 20 is rotatable. Alternatively, in the case where the direction determining section 22 can be driven alone, the rotating section 24 may be omitted, and the direction determining section 22 may be rotated based on the third control signal.

The position control part 400 may output the second control signal controlling the movement of the transfer unit 30 based on the first control signal. Specifically, the position control unit 400 may output the second control signal for controlling the movement of the transmission unit 30 based on the first control signal output from the table control unit 200.

In an embodiment, the position control part 400 may output a signal instructing the angle calculating part 310 to calculate the target angle based on the first control signal. The signal commanding the calculation of the target angle may include the position information of the table STA, angle information of the laser beam LR at the processing position stored in advance, and the like.

In an embodiment, the position control part 400 may output the second control signal controlling the movement of the transfer unit 30 based on the first control signal. The second control signal may include irradiation position information of the laser beam LR, the position information of the stage STA, and the like. Thus, the position to be irradiated with the laser beam LR at the processing position can be determined.

Fig. 4 to 6 are diagrams for explaining a glass processing step using the laser processing apparatus of fig. 1, and fig. 7 is an enlarged view of a portion a of fig. 6. The glass processing step may include a thinning (thinning) step and a scribing (scribing) step included in the manufacturing step of the display device.

Referring to fig. 4, a driving circuit layer may be disposed on the substrate SUB, and a glass CW may be disposed on the driving circuit layer. The scribing process may be performed before the thinning process is performed. Unlike the cutting process, the scribing process may represent a process that leaves only a trace of laser light. A trace SK of the laser light having a curved shape may be left by the scribing process.

Referring to fig. 5 and 6, an acid-resistant film ARF may be attached to the light emitting surface of the substrate SUB, and the etching solution AC may be sprayed from the nozzle NZ. For example, the etching solution AC may be hydrofluoric acid.

Referring to fig. 6 and 7, the glass CW of the first thickness DEP1 can be thinned to the glass CW of the second thickness DEP2 by the thinning process. For example, the first thickness DEP1 may be about 500 microns and the second thickness DEP2 may be about 200 microns. The physical properties of the glass CW of the portion irradiated with the laser beam may become different. Thereby, the etching selectivity of the portion irradiated with the laser beam can be increased.

For example, as shown in fig. 4, a laser processing apparatus (e.g., the laser processing apparatus 1 of fig. 1) may be utilized during the scribing process. The laser processing apparatus may irradiate a laser beam having directivity. The laser beam having directivity may be rotated according to a processing position.

First, the laser beam can process a first side (the back side of fig. 4) of the glass CW in the 12-point direction. The laser beam may have directivity from the 12-point direction toward the 6-point direction.

The laser beam may then process a second side (right side of fig. 4) that intersects the first side. The second side may be located in a 3-point direction. The laser beam may be rotated prior to machining the second side. Thus, the laser beam may have directivity from the 3-point direction toward the 9-point direction.

The laser beam may then process a third side (front of fig. 4) intersecting the second side and facing the first side. The third side may be located in the 6-point direction. The laser beam may be rotated prior to machining the third side. Thus, the laser beam may have directivity from the 6-point direction toward the 12-point direction.

Finally, the laser beam may process a fourth side (left side of fig. 4) intersecting the third side and the first side, respectively, and facing the second side. The fourth side may be located in the 9-point direction. The laser beam may be rotated prior to machining the fourth side. Thus, the laser beam may have directivity from the 9-point direction toward the 3-point direction.

If the laser beam having the directivity is not synchronized with the processing position, it may be difficult to process the shape having the directivity. For example, the laser beam may not be rotated when the first side is previously machined and the second side is machined. In this case, the directivity of the laser beam may be parallel to the second side surface. As a result, the trace SK of the laser light as shown in fig. 4 may not be provided.

In contrast, the laser processing apparatus according to the embodiment of the present utility model may perform processing using a laser beam having directivity. The laser beam having directivity may calculate an angle that the laser beam should have according to a processing position (i.e., the target angle) while tracking (tracking) the position, and rotate the laser beam to have the target angle. Thus, a shape having directivity can be processed.

However, the present utility model is not limited thereto. As described with reference to fig. 1 to 3, the laser processing apparatus may be used in various display device manufacturing processes such as a dicing process and a peeling process.

The laser processing apparatus according to the exemplary embodiment of the present utility model is applicable to a display apparatus and a manufacturing process thereof included in a computer, a notebook, a mobile phone, a smart tablet, a PMP, PDA, MP player, and the like.

While the present utility model has been described with reference to the embodiments thereof, those skilled in the art will appreciate that various modifications and changes can be made to the present utility model without departing from the spirit and scope of the present utility model as set forth in the appended claims.

Claims

1. A laser processing apparatus, comprising:

a laser light source for generating a laser beam;

a rotation unit controlling a rotation angle of the laser beam;

a transmission unit that controls an irradiation position of the laser beam; and

and a control unit that controls the rotation unit and the transfer unit, respectively, in synchronization with rotation of the laser beam.

2. The laser processing apparatus according to claim 1, further comprising:

a table which is spaced apart from the transfer unit and can accommodate a processing object.

3. A laser processing apparatus according to claim 2, wherein,

the control unit includes: and an encoder outputting an encoder signal including position information of the table.

4. A laser processing apparatus according to claim 3, wherein,

the control unit further includes: and a stage control unit configured to output a first control signal including at least one of a position signal of the stage and a signal for controlling movement of the stage, based on the encoder signal.

5. The laser processing apparatus according to claim 4, wherein,

the control unit further includes: and a position control unit configured to output a second control signal for controlling movement of the transmission unit based on the first control signal.

6. The laser processing apparatus according to claim 5, wherein,

the transfer unit horizontally moves the laser beam based on the second control signal.

7. The laser processing apparatus according to claim 6, wherein,

the control unit further includes:

an angle calculating section that outputs a target angle of the laser beam at a processing position where processing is achieved by the laser beam, based on the first control signal and the second control signal; and

and an angle control section that outputs a third control signal that controls movement of the rotating unit so as to cause the laser beam to have the target angle at the processing position.

8. The laser processing apparatus according to claim 7, wherein,

the rotation unit rotates the laser beam based on the third control signal.

9. The laser processing apparatus according to claim 1, wherein,

the rotating unit includes:

a direction determining unit configured to determine a rotation direction of the laser beam; and

and a rotation unit configured to rotate the direction determination unit.

10. The laser processing apparatus according to claim 9, wherein,

the direction determining section includes a doffer prism, and the rotating section includes a rotating table.