CN219745382U - Gluing system - Google Patents

Abstract

The utility model discloses a gluing system. The gluing system comprises: the device comprises gluing equipment, a liquid supply system and an accessory connection part; the gluing equipment is connected with a main circuit, and the tail end of the main circuit is provided with a first connector; the liquid supply system comprises a positive photoresist liquid supply system and a negative photoresist liquid supply system, and the positive photoresist liquid supply system and the negative photoresist liquid supply system are respectively provided with a second connector and a third connector; the auxiliary connection part comprises an auxiliary circuit, a fourth connector and a fifth connector which are connected to two ends of the auxiliary circuit; the fourth connector is connected with the first connector in a matching way; the fifth connector is connected with the second connector or the third connector of the liquid supply system in a plugging manner, so that the gluing equipment is connected with the positive photoresist liquid supply system or the negative photoresist liquid supply system. The technical scheme of the embodiment of the utility model effectively reduces the damage rate of the main circuit of the gluing equipment, improves the utilization rate and the production efficiency of the gluing equipment, and ensures the production progress.

Description

Gluing system

Technical Field

The embodiment of the utility model relates to the technical field of gluing equipment connection, in particular to a gluing system.

Background

Photoresists, which are one of the core materials of semiconductor processes, may include positive photoresists and negative photoresists. In different semiconductor manufacturing processes, either positive photoresist or negative photoresist may be selected according to actual requirements.

Because the requirements of different manufacturing processes are different, the photoresist gluing equipment needs to use positive photoresist or negative photoresist at different stages of the process, and therefore, the photoresist liquid supply system connected with the photoresist gluing equipment needs to be switched back and forth for a plurality of times in a day. Fig. 1 is a schematic structural diagram of a glue coating system in the prior art, and as shown in fig. 1, a glue coating device 01 is connected with a photoresist liquid supply system 02 through a cable 03 and a connector 04. When the photoresist liquid supply system 02 connected with the photoresist coating equipment 01 is switched, the connector 04 connected with the cable 03 needs to be pulled out and plugged to realize switching. However, as the number of plugging and unplugging times of the connector 04 increases, damage is liable to occur to different degrees, resulting in poor line contact of the cable 03. And the maintenance and replacement of the connector 04 takes a long time, thereby severely affecting the production progress.

Disclosure of Invention

The utility model provides a gluing system which is used for improving the utilization rate of gluing equipment and ensuring the production progress.

According to an aspect of the present utility model, there is provided a glue application system comprising: the device comprises gluing equipment, a liquid supply system and an accessory connection part;

the gluing equipment is connected with a main circuit, and a first connector is arranged at the tail end of the main circuit;

the liquid supply system comprises a positive photoresist liquid supply system and a negative photoresist liquid supply system, and the positive photoresist liquid supply system and the negative photoresist liquid supply system are respectively provided with a second connector and a third connector;

the auxiliary connection part comprises an auxiliary circuit, a fourth connector and a fifth connector, wherein the fourth connector and the fifth connector are connected to two ends of the auxiliary circuit; the fourth connector is connected with the first connector in a matching way; the fifth connector is connected with the second connector or the third connector of the liquid supply system in a plugging manner, so that the gluing equipment is connected with the positive photoresist liquid supply system or the negative photoresist liquid supply system.

Optionally, the first connector is directly connected to the second connector or the third connector by bypassing the auxiliary line.

Optionally, the first connector and the fifth connector are plugs, and the second connector, the third connector and the fourth connector are sockets.

Optionally, the first connector and the fifth connector are sockets, and the second connector, the third connector and the fourth connector are plugs.

Optionally, the first connector, the second connector, the third connector, the fourth connector, and the fifth connector are aviation plugs.

Optionally, the fixing structures of the first connector, the second connector, the third connector, the fourth connector and the fifth connector are pin type thread structures.

Optionally, the shell material of the aviation plug is magnesium aluminum alloy or stainless steel, and the inner material of the aviation plug is thermoplastic resin or thermosetting plastic.

Optionally, the gluing device comprises 5 main lines, and the auxiliary connection part comprises 5 auxiliary lines;

the fourth connectors arranged at the first ends of the auxiliary circuits are in one-to-one matching connection with the first connectors of the main circuit.

Optionally, the positive photoresist liquid supply system is provided with 5 second connectors so as to be connected with the fifth connectors arranged at the second ends of the auxiliary circuits in a one-to-one correspondence manner;

the negative photoresist liquid supply system is provided with 5 third connectors which are connected with the fifth connectors arranged at the second ends of the auxiliary circuits in a one-to-one correspondence.

According to the technical scheme provided by the embodiment of the utility model, the auxiliary connecting part is added between the main circuit of the gluing equipment and the liquid supply system, wherein the fourth connector arranged at one end of the auxiliary circuit in the auxiliary connecting part is in matched connection with the first connector arranged at the tail end of the main circuit, and the fifth connector arranged at the other end of the auxiliary circuit can be in matched plug connection with the second connector arranged in the positive photoresist liquid supply system or the third connector arranged in the negative photoresist liquid supply system. When the liquid supply system connected with the gluing equipment is switched, the fourth connector and the first connector are always kept in a connection state, and the fifth connector is switched between the second connector and the third connector 43 in a plugging manner, so that the liquid supply system 20 connected with the gluing equipment is switched between the positive photoresist liquid supply system and the negative photoresist liquid supply system to be provided with an auxiliary connection part in this way, the damage rate of the first connector can be effectively reduced, the utilization rate and the production efficiency of the gluing equipment are improved, the production progress is ensured, and the adverse effect caused by the damage of the main line connector is reduced.

It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the utility model or to delineate the scope of the utility model. Other features of the present utility model will become apparent from the description that follows.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of a gluing system according to the prior art;

fig. 2 is a schematic structural view of a glue application system according to an embodiment of the present utility model;

fig. 3 is a schematic structural diagram of an aviation plug according to an embodiment of the present utility model.

Detailed Description

In order that those skilled in the art will better understand the present utility model, a technical solution in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.

It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the utility model described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

The embodiment of the utility model provides a gluing system. Fig. 2 is a schematic structural diagram of a glue spreading system according to an embodiment of the present utility model. As shown in fig. 2, the gluing system comprises: the gluing device 10, the liquid supply system 20 and the accessory connection 30.

The gluing device 10 is connected to a main circuit 11, the end of the main circuit 11 being provided with a first connector 41; the liquid supply system 20 includes a positive photoresist liquid supply system 21 and a negative photoresist liquid supply system 22, the positive photoresist liquid supply system 21 and the negative photoresist liquid supply system 22 being provided with a second connector 42 and a third connector 43, respectively; the auxiliary connection part 30 includes an auxiliary line 31, and fourth and fifth connectors 44 and 45 connected to both ends of the auxiliary line 31; the fourth connector 44 is connected with the first connector 41 in a matching manner; the fifth connector 45 is connected with the second connector 42 or the third connector 43 of the liquid supply system 20 in a plugging manner, so that the gluing device 10 is connected with the positive photoresist liquid supply system 21 or the negative photoresist liquid supply system 22.

Specifically, the photoresist coating apparatus 10 is connected to the liquid supply system 20 through the main line 11, so that the corresponding liquid supply system 20 can provide the photoresist to the photoresist coating apparatus 10, so that the photoresist coating operation of the photoresist coating apparatus 10 is completed. Illustratively, when a positive photoresist is to be applied at the current process stage, then the gumming device 10 is connected to the positive photoresist delivery system 21 such that the positive photoresist delivery system 21 provides positive photoresist to the gumming device 10; when a negative photoresist is to be coated at the current process stage, the photoresist coating apparatus 10 is connected to the negative photoresist supply system 22, so that the negative photoresist supply system 22 provides the negative photoresist to the photoresist coating apparatus 10.

The auxiliary connection 30 is connected between the gluing device 10 and the liquid supply system 20. One end of the auxiliary circuit 31 is connected with the glue applying device 10 in a matching manner, and the other end of the auxiliary circuit 31 can be connected with a second connector 42 arranged on the positive photoresist liquid supply system 21 in a matching manner or a third connector 43 arranged on the negative photoresist liquid supply system 22 in a matching manner.

Illustratively, when the photoresist dispenser system is applied in the process, taking the case that positive photoresist is required in the current process stage, the fourth connector 44 at one end of the auxiliary circuit 31 is kept in a connected state with the first connector 41 disposed on the main circuit 11, and the fifth connector 45 at the other end of the auxiliary circuit 31 is connected with the second connector 42 disposed on the positive photoresist supply system 21, so that the positive photoresist supply system 21 provides positive photoresist to the photoresist dispenser 10. If negative photoresist is required in the next process stage, the fifth connector 45 is pulled out from the second connector 42 and plugged into the third connector 43 provided in the negative photoresist supply system 22, and at this time, the fourth connector 44 is still connected to the first connector 41, so as to realize that the negative photoresist supply system 22 provides negative photoresist for the photoresist coating apparatus 10. That is, when the photoresist liquid supply system connected to the photoresist coating apparatus 10 is switched, the connection with the corresponding photoresist liquid supply system is realized only by pulling and inserting the fifth connector 45 at one end of the auxiliary circuit 31, without pulling and inserting one end of the first connector 41, thereby effectively reducing the damage rate of the first connector 41, improving the utilization rate and the production efficiency of the photoresist coating apparatus 10, ensuring the production progress, and reducing the adverse effect caused by the damage of the first connector 41 arranged on the main circuit 11.

The technical solution provided in this embodiment is to add the auxiliary connection portion 30 between the main line 11 of the glue coating apparatus 10 and the liquid supply system 20, where a fourth connector 44 disposed at one end of the auxiliary line 31 in the auxiliary connection portion 30 is connected with a first connector 41 disposed at the end of the main line 11 in a matching manner, and a fifth connector 45 disposed at the other end of the auxiliary line 31 is connected with a second connector 42 disposed in the positive photoresist liquid supply system 21 or a third connector 43 disposed in the negative photoresist liquid supply system 22 in a matching manner in a plugging manner. When the liquid supply system 20 connected to the gumming device 10 is switched, the fourth connector 44 and the first connector 41 are always kept in a connected state, and the fifth connector 45 is switched between the second connector 42 and the third connector 43 in a plugging manner, so that the liquid supply system 20 connected to the gumming device 10 is switched between the positive photoresist liquid supply system 21 and the negative photoresist liquid supply system 22. By arranging the auxiliary connecting part 30 in this way, the damage rate of the first connector 41 can be effectively reduced, the use rate and the production efficiency of the gluing equipment 10 can be improved, and the production progress can be ensured, so that the adverse effect caused by the connector damage of the main circuit 11 can be reduced.

Alternatively, with continued reference to fig. 2, based on the above-described embodiment, the first connector 41 is directly connected with the second connector 42 or the third connector 43 by bypassing the subsidiary line 31.

Specifically, when the fifth connector 45 connected to the side of the auxiliary line 31 and the liquid supply system 20 is damaged by switching the liquid supply system 20 through multiple plugging operations, the auxiliary line 31 connected to the damaged fifth connector 45 may be removed, i.e. the fourth connector 44 at one end of the auxiliary line 31 is unplugged from the connected first connector 41, so as to facilitate maintenance or replacement of the damaged fifth connector 45. In order to ensure that the normal use of the gluing device 10 is not affected during the maintenance process, the first connector 41 at the tail end of the main line 11 corresponding to the removed auxiliary line 31 can be directly connected with the second connector 42 or the third connector 43, so that the gluing device 10 can still be normally used when the auxiliary line 31 is damaged, the use rate and the production efficiency of the gluing device 10 are improved, and the production progress is ensured.

Alternatively, with continued reference to fig. 2, based on the above embodiments, the first connector 41 and the fifth connector 45 are plugs, and the second connector 42, the third connector 43, and the fourth connector 44 are sockets. Alternatively, the first connector 41 and the fifth connector 45 are sockets, and the second connector 42, the third connector 43, and the fourth connector 44 are plugs.

Specifically, the first connector 41 disposed at the end of the main line 11 is a male connector and a female connector which are connected in a matching manner with the second connector 42 disposed in the positive photoresist liquid supply system 21 and the third connector 43 disposed in the negative photoresist liquid supply system 22, and the fourth connector 44 disposed at one end of the first connector 41 and the auxiliary line 31 is a male connector and a female connector which are connected in a matching manner. In addition, the fifth connector 45 provided at the other end of the auxiliary line 31 is a male connector and a female connector which are connected in a matching manner with the second connector 42 provided in the positive photoresist liquid supply system 21 and the third connector 43 provided in the negative photoresist liquid supply system 22.

Illustratively, the male and female connectors may take a variety of mating forms, and in this embodiment, the male and female connectors take the form of plugs and sockets. Therefore, the connector forms of the first connector 41 and the fifth connector 45 are matched with the connector forms of the second connector 42, the third connector 43, and the fourth connector 44, and the specific connector forms thereof are not limited in the present embodiment.

Optionally, fig. 3 is a schematic structural diagram of an aviation plug according to an embodiment of the present utility model. On the basis of the above embodiments, as shown in fig. 3, the first connector 41, the second connector 42, the third connector 43, the fourth connector 44, and the fifth connector 45 are all aviation plugs.

Wherein the aerial plug is an electromechanical element for connecting electrical lines. The fixed knot that aviation plug adopted in this embodiment constructs for contact pin formula screw thread structure to can firmly fix between the messenger circuit, be difficult for becoming flexible. And in case of damage to the auxiliary line, the corresponding main line 11 can be quickly removed and plugged into the corresponding liquid supply system 20.

Furthermore, the material of the aerial plug may affect the quality of the aerial plug, thereby affecting the frequency of repair or replacement of the aerial plug. Illustratively, the housing material of the aviation plug is magnesium aluminum alloy or stainless steel, and the internal material of the aviation plug is thermoplastic resin or thermosetting plastic. The magnesium aluminum alloy or stainless steel is used as a shell material, so that the strength and corrosion resistance of the aviation plug can be improved, and the aviation plug has a longer mechanical life. Thermoplastic resin or thermosetting plastic is used as an internal material, so that the insulation or flame retardance effect can be achieved, and the safety of the aviation plug in the use process is improved.

Optionally, with continued reference to fig. 2, on the basis of the above embodiments, the gluing device 10 comprises 5 main lines 11, the auxiliary connection 30 comprising 5 auxiliary lines 31; the fourth connector 44 provided at the first end of each subsidiary line 31 is connected in one-to-one correspondence with the first connector 41 of the main line 11.

The positive photoresist liquid supply system 21 is provided with 5 second connectors 42 to be connected in one-to-one correspondence with fifth connectors 45 provided at the second ends of the respective subsidiary lines 31; the negative photoresist liquid supply system 22 is provided with 5 third connectors 43 to be connected in one-to-one correspondence with fifth connectors 45 provided at the second ends of the respective subsidiary lines 31.

Illustratively, the existing gluing device 10 is provided with 5 main lines 11 in many cases, and therefore, the auxiliary connection part 30 is provided with 5 auxiliary lines 31, which are connected to the main lines 11 in a one-to-one correspondence. And the liquid supply system 20 is also respectively provided with 5 connectors, and when the positive photoresist liquid supply system 21 supplies positive photoresist to the photoresist coating equipment 10, the fifth connectors 45 at one end of the 5 auxiliary lines 31 are respectively connected with the 5 second connectors 42 arranged on the positive photoresist liquid supply system 21 in a one-to-one correspondence manner; when the liquid supply system 20 is to be switched from the positive photoresist liquid supply system 21 to the negative photoresist liquid supply system 22, all the 5 auxiliary circuits 31 need to be pulled out, and the fifth connectors 45 at one end of the auxiliary circuits 31 are respectively connected to the third connectors 43 arranged in the negative photoresist liquid supply system 22, so that the negative photoresist liquid supply system 22 provides negative photoresist for the photoresist coating apparatus 10. By this arrangement, the auxiliary line 31 can be plugged in and out in the switching of the liquid supply system 20 instead of the main line 11, and the damage rate of the first connector 41 of the main line 11 can be effectively reduced. And when the fifth connector 45 is damaged, the corresponding auxiliary circuit 31 can be detached, and the first connector 41 of the corresponding main circuit 11 is directly plugged into the second connector 42 or the third connector 43 of the liquid supply system 20, so that the normal operation of the gluing equipment 10 is not influenced, the utilization rate of the gluing equipment 10 is improved, and the production progress is ensured.

The above embodiments do not limit the scope of the present utility model. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included in the scope of the present utility model.

Claims (9)

1. A glue application system, comprising: the device comprises gluing equipment, a liquid supply system and an accessory connection part;

the gluing equipment is connected with a main circuit, and a first connector is arranged at the tail end of the main circuit;

the liquid supply system comprises a positive photoresist liquid supply system and a negative photoresist liquid supply system, and the positive photoresist liquid supply system and the negative photoresist liquid supply system are respectively provided with a second connector and a third connector;

the auxiliary connection part comprises an auxiliary circuit, a fourth connector and a fifth connector, wherein the fourth connector and the fifth connector are connected to two ends of the auxiliary circuit; the fourth connector is connected with the first connector in a matching way; the fifth connector is connected with the second connector or the third connector of the liquid supply system in a plugging manner, so that the gluing equipment is connected with the positive photoresist liquid supply system or the negative photoresist liquid supply system.

2. The glue application system of claim 1, wherein the first connector is directly connected to the second connector or the third connector bypassing the accessory line.

3. The glue system of claim 1, wherein the first connector and the fifth connector are plugs and the second connector, the third connector, and the fourth connector are sockets.

4. The glue system of claim 1, wherein the first connector and the fifth connector are receptacles and the second connector, the third connector, and the fourth connector are plugs.

5. The glue system of claim 3 or 4, wherein the first connector, the second connector, the third connector, the fourth connector, and the fifth connector are all aviation plugs.

6. The glue application system of claim 5, wherein the securing structures of the first connector, the second connector, the third connector, the fourth connector, and the fifth connector are pin thread structures.

7. The gluing system of claim 5, wherein the housing material of the aerial plug is magnesium aluminum alloy or stainless steel and the interior material of the aerial plug is a thermoplastic resin or a thermosetting plastic.

8. Gluing system according to claim 1, characterized in that the gluing device comprises 5 main lines and the auxiliary connection comprises 5 auxiliary lines;

the fourth connectors arranged at the first ends of the auxiliary circuits are in one-to-one matching connection with the first connectors of the main circuit.

9. The glue application system of claim 8, wherein the positive photoresist liquid supply system is provided with 5 of the second connectors to connect with the fifth connectors provided at the second end of each of the subsidiary lines in a one-to-one correspondence;

the negative photoresist liquid supply system is provided with 5 third connectors which are connected with the fifth connectors arranged at the second ends of the auxiliary circuits in a one-to-one correspondence.