CN219716834U - Lifting leveling mechanism for wafer detection equipment - Google Patents
Lifting leveling mechanism for wafer detection equipment Download PDFInfo
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- CN219716834U CN219716834U CN202321317387.4U CN202321317387U CN219716834U CN 219716834 U CN219716834 U CN 219716834U CN 202321317387 U CN202321317387 U CN 202321317387U CN 219716834 U CN219716834 U CN 219716834U
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- 230000007246 mechanism Effects 0.000 title claims abstract description 26
- 238000001514 detection method Methods 0.000 title claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims abstract description 53
- 238000001179 sorption measurement Methods 0.000 claims abstract description 28
- 238000007689 inspection Methods 0.000 claims description 15
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 abstract 3
- 238000000034 method Methods 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a lifting leveling mechanism for wafer detection equipment, which comprises a bearing switching component, a lifting guide component, an adsorption positioning component, a lifting driving component and a position feedback component, wherein a bearing seat plate of the lifting leveling mechanism adopts a triangle structure, a driving motor and a guide sliding rail are respectively positioned at a waist line part and a bottom edge part, so that the lifting guide component operates more stably, deviation after long-time operation is avoided, adsorption end pipes which are sequentially arranged along the circumferential direction of the bearing seat plate are also arranged on the bearing seat plate, each adsorption end pipe is respectively communicated with vacuum equipment through pipelines arranged in the bearing seat plate and the switching end, the adsorption end pipes are used for adsorbing and positioning wafers, and the driving motor drives the bearing seat plate to ascend or descend along the guide sliding rail through a transmission rotating shaft and a transmission sliding groove matched with the transmission rotating shaft, so that the whole lifting leveling structure operates stably, the falling and damage of the wafers are avoided, and the processing efficiency of semiconductor devices and integrated circuits is facilitated to be improved.
Description
Technical Field
The utility model relates to semiconductor production equipment, in particular to a lifting leveling mechanism for wafer detection equipment.
Background
Patent document CN218039147U discloses a wafer carrying platform with a leveling mechanism, which comprises a mounting platform, a leveling seat and a rotating mechanism, wherein the leveling seat is provided with a cavity for avoiding a grabbing tool and at least one inlet and outlet, the inlet and outlet are communicated with the cavity, a placing groove matched with the shape of a wafer is arranged at the upper end opening position of the cavity, and the rotating mechanism is used for driving the leveling seat to rotate. This wafer carrier is through setting up the cavity and the exit of dodging gripping tool, and the wafer is placed in the standing groove of cavity top, and gripping tool can realize through lifting or adsorbing the lower surface of wafer that the wafer is placed the standing groove, through the restriction of standing groove, gripping tool can not drive the wafer and remove when unloading the wafer, can guarantee the roughness that the wafer was placed, the loading of wafer of also being convenient for simultaneously, through the rotation mechanism rotation of drive leveling seat, can adjust the gesture of the last wafer of leveling seat to follow-up processing of adaptation. However, the leveling mechanism adopts a single guide structure, is easy to deviate after long-term operation, is far away from a set position, and affects subsequent further leveling. Therefore, there is a need for structural optimization of such leveling mechanisms to overcome the above-described drawbacks.
Disclosure of Invention
The utility model aims to provide a lifting leveling mechanism for wafer detection equipment, so as to improve the operation efficiency of a leveling process.
The utility model adopts the technical proposal for solving the technical problems that:
a lift leveling mechanism for a wafer inspection apparatus, comprising:
the bearing switching component is arranged in the detection equipment through a movable structure and can ascend or descend in the detection equipment;
the lifting guide member is arranged in the detection equipment and matched with the bearing switching member, and the lifting guide member guides the lifting or descending process of the bearing switching member;
the adsorption positioning component is arranged on the bearing switching component and can ascend or descend along with the bearing switching component, and is communicated with the vacuum equipment through a pipeline, and the adsorption positioning component is used for carrying out adsorption positioning on the wafer;
and the lifting driving component is arranged in the detection equipment, is matched with the bearing switching component through the transmission structure, and drives the bearing switching component to ascend or descend.
Further comprises:
the position feedback component is arranged between the detection equipment and the bearing switching component, is communicated with the industrial personal computer through a circuit, senses the position data of the bearing switching component through the position feedback component and sends the position data to the industrial personal computer, the lifting driving component is also communicated with the industrial personal computer through the circuit, and the industrial personal computer controls the running state of the lifting driving component according to the position data of the bearing switching component.
Specifically, the load carrying transition member includes:
the bearing seat plate is isosceles triangle, the lifting guide member corresponds to the waist line position, the lifting driving member corresponds to the bottom edge position, and the lifting driving member drives the bearing seat plate to ascend or descend along the lifting guide member;
the transfer end is fixed on the surface of the bearing seat plate and can rise or fall along with the bearing seat plate, and the adsorption positioning component is communicated with the vacuum equipment through the bearing seat plate and the transfer end;
the transmission seat block is fixed at the bottom edge of the bearing seat plate and corresponds to the position of the lifting driving member, a strip-shaped transmission chute is formed in the transmission seat block, the extending direction of the transmission chute is parallel to the plane of the bearing seat plate, and the transmission chute is matched with the shape of the lifting driving member.
The lift guide member includes:
the guide seat frames are provided with a pair of guide seat frames, and each guide seat frame corresponds to the waist line position of the bearing seat plate and is fixed in the detection equipment through the connecting piece;
the guide sliding rails are provided with a pair of guide sliding rails, each guide sliding rail is respectively arranged on the guide seat frame, and the extending direction of each guide sliding rail is perpendicular to the plane where the bearing seat plate is positioned;
the guide sliding blocks are provided with a pair, and each guide sliding block is respectively arranged on the guide sliding rail and can move along with the guide sliding rail;
the lifting wing plates are provided with a pair of lifting wing plates, and each lifting wing plate is respectively arranged at the waist line part of the bearing seat plate and fixedly connected with the guide sliding block, so that the bearing seat plate can ascend or descend along the guide sliding rail.
The adsorption positioning member includes:
the adsorption end pipes are respectively arranged on the bearing seat plate, extend along the normal direction of the bearing seat plate and are sequentially distributed along the circumferential direction of the bearing seat plate, and are respectively communicated with the vacuum equipment through pipelines arranged in the bearing seat plate and the switching end head, and are used for adsorbing and positioning the wafer.
The lift driving member includes:
the driving motor is fixed in the detection equipment through the mounting seat and corresponds to the bottom edge position of the bearing seat plate;
the transmission rotating block is arranged on a power output shaft of the driving motor and can rotate along with the power output shaft;
the transmission rotating shaft is arranged on the transmission rotating block, the axis of the transmission rotating shaft is parallel to the axis of the power output shaft, the tail end of the transmission rotating shaft stretches into the transmission sliding groove and is matched with the transmission sliding groove through a transmission bearing, and when the driving motor operates, the transmission rotating shaft can be driven to apply pressure to the transmission seat block and the bearing seat plate, so that the transmission rotating shaft can ascend or descend along the guide sliding rail.
The position feedback member includes:
the feedback sensor is arranged in the detection equipment and is communicated with the industrial personal computer through a circuit;
and the feedback baffle plate is arranged in the bearing switching component and corresponds to the position of the feedback sensor, and the feedback sensor senses the positions of the feedback baffle plate and the bearing switching component.
The utility model has the advantages that:
the bearing seat plate of the lifting leveling mechanism adopts a triangular structure, the driving motor and the guide sliding rail are respectively positioned at the waist line part and the bottom edge part, so that the lifting guide member consisting of a pair of guide sliding rails and guide sliding blocks operates more stably, deviation is avoided after long-time operation, the bearing seat plate is also provided with adsorption end pipes which are sequentially arranged along the circumferential direction of the bearing seat plate, each adsorption end pipe is respectively communicated with vacuum equipment through a pipeline arranged in the bearing seat plate and the switching end, the adsorption end pipes adsorb and position a wafer, damage to the surface of the wafer can be reduced, the driving motor drives the bearing seat plate to ascend or descend along the guide sliding rail through the transmission rotating shaft and the transmission sliding groove matched with the transmission rotating shaft, the whole lifting leveling structure operates stably, the wafer is prevented from dropping and damage, and the processing efficiency of semiconductor devices and integrated circuits is facilitated to be improved.
Drawings
FIG. 1 is a schematic view of a lift leveling mechanism for a wafer inspection apparatus according to the present utility model;
FIG. 2 is one of the exploded views of the leveling mechanism;
figure 3 is a second exploded view of the leveling mechanism.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. It will be apparent that the described embodiments are some, but not all, embodiments of the utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1 to 3, the lifting leveling mechanism for a wafer inspection apparatus according to the present utility model includes a carrying switching member, a lifting guiding member, an adsorbing and positioning member, a lifting driving member and a position feedback member, wherein the carrying switching member is mounted in the inspection apparatus through a movable structure, and can rise or fall in the inspection apparatus, the lifting guiding member is mounted in the inspection apparatus and cooperates with the carrying switching member, the lifting guiding member guides the rising or falling process of the carrying switching member, the adsorbing and positioning member is mounted on the carrying switching member, and can rise or fall together with the carrying switching member, and is communicated with a vacuum apparatus through a pipeline, the adsorbing and positioning member adsorbs and positions a wafer, the lifting driving member is mounted in the inspection apparatus, and cooperates with the carrying switching member through a transmission structure, the lifting driving member drives the carrying switching member to rise or fall, the position feedback member is mounted between the inspection apparatus and the carrying switching member, and is connected with an industrial computer through a line, the position feedback member senses position data of the carrying switching member and sends the position data of the carrying switching member to the industrial computer, and the lifting driving member also controls the status of the carrying switching member according to the line connection with the position data of the industrial computer.
In embodiment 1, the carrying adapting member includes a carrying seat board 110, an adapting end 120 and a transmission seat block 130, the carrying seat board is isosceles triangle, the lifting guiding member corresponds to the waist line position, the lifting driving member corresponds to the bottom edge position, the lifting driving member drives the carrying seat board to lift or descend along the lifting guiding member, the adapting end is fixed on the surface of the carrying seat board, and can lift or descend along with the carrying seat board, the absorption positioning member is communicated with the vacuum device through the carrying seat board and the adapting end, the transmission seat block is fixed at the bottom edge of the carrying seat board and corresponds to the lifting driving member, a strip-shaped transmission chute 131 is formed in the transmission chute, the extending direction of the transmission chute is parallel to the plane of the carrying seat board, and the transmission chute is adapted to the shape of the lifting driving member.
The lifting guide member comprises a guide seat frame 210, a guide sliding rail 220, a guide sliding block 230 and a lifting wing plate 240, wherein the guide seat frame is provided with a pair, each guide seat frame corresponds to the waist line position of the bearing seat plate respectively and is fixed in the detection equipment through a connecting piece, the guide sliding rail is provided with a pair, each guide sliding rail is respectively installed on the guide seat frame, the extending direction of the guide sliding rail is perpendicular to the plane where the bearing seat plate is located, the guide sliding block is provided with a pair, each guide sliding block is respectively installed on the guide sliding rail and can move along with the guide sliding rail, the lifting wing plate is provided with a pair, and each lifting wing plate is respectively installed on the waist line position of the bearing seat plate and is fixedly connected with the guide sliding block, so that the bearing seat plate can ascend or descend along the guide sliding rail.
The adsorption positioning member comprises a group of adsorption end pipes 500, each adsorption end pipe is arranged on the bearing seat plate, extends along the normal direction of the bearing seat plate and is sequentially arranged along the circumferential direction of the bearing seat plate, and is communicated with the vacuum equipment through pipelines arranged in the bearing seat plate and the switching end head, and the adsorption end pipes are used for adsorbing and positioning the wafer.
The lifting driving member comprises a driving motor 610, a driving rotating block 620 and a driving rotating shaft 630, wherein the driving motor is fixed in the detecting equipment through a mounting seat 611 and corresponds to the bottom edge position of the bearing seat plate, the driving rotating block is arranged on a power output shaft of the driving motor and can rotate along with the power output shaft, the driving rotating shaft is arranged on the driving rotating block, the axis of the driving rotating shaft is parallel to that of the power output shaft, the tail end of the driving rotating shaft stretches into the driving sliding groove and is matched with the driving sliding groove through a driving bearing 631, and the driving motor can drive the driving rotating shaft to drive the driving seat block and the bearing seat plate to apply pressure when running so as to enable the driving rotating shaft to ascend or descend along the guiding sliding rail.
In embodiment 2, the carrying adapting member includes a carrying seat board 110, an adapting end 120 and a transmission seat block 130, the carrying seat board is isosceles triangle, the lifting guiding member corresponds to the waist line position, the lifting driving member corresponds to the bottom edge position, the lifting driving member drives the carrying seat board to lift or descend along the lifting guiding member, the adapting end is fixed on the surface of the carrying seat board, and can lift or descend along with the carrying seat board, the absorption positioning member is communicated with the vacuum device through the carrying seat board and the adapting end, the transmission seat block is fixed at the bottom edge of the carrying seat board and corresponds to the lifting driving member, a strip-shaped transmission chute 131 is formed in the transmission chute, the extending direction of the transmission chute is parallel to the plane of the carrying seat board, and the transmission chute is adapted to the shape of the lifting driving member.
The lifting guide member comprises a guide seat frame 210, a guide sliding rail 220, a guide sliding block 230 and a lifting wing plate 240, wherein the guide seat frame is provided with a pair, each guide seat frame corresponds to the waist line position of the bearing seat plate respectively and is fixed in the detection equipment through a connecting piece, the guide sliding rail is provided with a pair, each guide sliding rail is respectively installed on the guide seat frame, the extending direction of the guide sliding rail is perpendicular to the plane where the bearing seat plate is located, the guide sliding block is provided with a pair, each guide sliding block is respectively installed on the guide sliding rail and can move along with the guide sliding rail, the lifting wing plate is provided with a pair, and each lifting wing plate is respectively installed on the waist line position of the bearing seat plate and is fixedly connected with the guide sliding block, so that the bearing seat plate can ascend or descend along the guide sliding rail.
The adsorption positioning member comprises a group of adsorption end pipes 500, each adsorption end pipe is arranged on the bearing seat plate, extends along the normal direction of the bearing seat plate and is sequentially arranged along the circumferential direction of the bearing seat plate, and is communicated with the vacuum equipment through pipelines arranged in the bearing seat plate and the switching end head, and the adsorption end pipes are used for adsorbing and positioning the wafer.
The lifting driving member comprises a driving motor 610, a driving rotating block 620 and a driving rotating shaft 630, wherein the driving motor is fixed in the detecting equipment through a mounting seat 611 and corresponds to the bottom edge position of the bearing seat plate, the driving rotating block is arranged on a power output shaft of the driving motor and can rotate along with the power output shaft, the driving rotating shaft is arranged on the driving rotating block, the axis of the driving rotating shaft is parallel to that of the power output shaft, the tail end of the driving rotating shaft stretches into the driving sliding groove and is matched with the driving sliding groove through a driving bearing 631, and the driving motor can drive the driving rotating shaft to drive the driving seat block and the bearing seat plate to apply pressure when running so as to enable the driving rotating shaft to ascend or descend along the guiding sliding rail.
In this embodiment, the position feedback member includes a feedback sensor 710 and a feedback baffle 720, where the feedback sensor is installed in the detection device and is connected to the industrial personal computer through a line, the feedback baffle is installed on the bearing seat plate and corresponds to the position of the feedback sensor, the feedback baffle can rise or fall along with the bearing seat plate, and the feedback sensor is fixed on the detection device.
The bearing seat plate of the lifting leveling mechanism adopts a triangular structure, the driving motor and the guide sliding rail are respectively positioned at the waist line part and the bottom edge part, so that the lifting guide member consisting of a pair of guide sliding rails and guide sliding blocks operates more stably, deviation is avoided after long-time operation, the bearing seat plate is also provided with adsorption end pipes which are sequentially arranged along the circumferential direction of the bearing seat plate, each adsorption end pipe is respectively communicated with vacuum equipment through a pipeline arranged in the bearing seat plate and the switching end, the adsorption end pipes adsorb and position a wafer, damage to the surface of the wafer can be reduced, the driving motor drives the bearing seat plate to ascend or descend along the guide sliding rail through the transmission rotating shaft and the transmission sliding groove matched with the transmission rotating shaft, the whole lifting leveling structure operates stably, the wafer is prevented from dropping and damage, and the processing efficiency of semiconductor devices and integrated circuits is facilitated to be improved.
In the description of the present utility model, it should be noted that, when terms such as "upper", "lower", "inner", "outer", "left", "right", and the like indicate orientations or positional relationships, are to be understood as being based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships conventionally put in use of the inventive product, or the orientations or positional relationships conventionally understood by those skilled in the art, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements to be referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, when used herein, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance. In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, terms such as "mounted," "configured," and "connected" are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Claims (7)
1. A lift leveling mechanism for a wafer inspection apparatus, comprising:
the bearing switching component is arranged in the detection equipment through a movable structure and can ascend or descend in the detection equipment;
a lifting guide member installed in the detection device and cooperating with the carrying adapter member;
the absorption positioning component is arranged on the bearing switching component and can rise or fall along with the bearing switching component, and the absorption positioning component is communicated with the vacuum equipment through a pipeline;
and the lifting driving component is arranged in the detection equipment and is matched with the bearing switching component through the transmission structure.
2. The lift leveling mechanism for a wafer inspection apparatus of claim 1, further comprising:
and the position feedback component is arranged between the detection equipment and the bearing switching component and is communicated with the industrial personal computer through a circuit.
3. The lift leveling mechanism for a wafer inspection apparatus of claim 1, wherein the load transfer member comprises:
the bearing seat plate is isosceles triangle, the lifting guide member corresponds to the waist line position, and the lifting driving member corresponds to the bottom edge position;
the transfer end is fixed on the surface of the bearing seat plate and can rise or fall along with the bearing seat plate, and the adsorption positioning component is communicated with the vacuum equipment through the bearing seat plate and the transfer end;
the transmission seat block is fixed at the bottom edge of the bearing seat plate and corresponds to the position of the lifting driving member, a strip-shaped transmission chute is formed in the transmission seat block, the extending direction of the transmission chute is parallel to the plane of the bearing seat plate, and the transmission chute is matched with the shape of the lifting driving member.
4. A lift leveling mechanism for a wafer inspection apparatus in accordance with claim 3 wherein the lift guide member comprises:
the guide seat frames are provided with a pair of guide seat frames, and each guide seat frame corresponds to the waist line position of the bearing seat plate and is fixed in the detection equipment through the connecting piece;
the guide sliding rails are provided with a pair of guide sliding rails, each guide sliding rail is respectively arranged on the guide seat frame, and the extending direction of each guide sliding rail is perpendicular to the plane where the bearing seat plate is positioned;
the guide sliding blocks are provided with a pair, and each guide sliding block is respectively arranged on the guide sliding rail and can move along with the guide sliding rail;
the lifting wing plates are provided with a pair of lifting wing plates, and each lifting wing plate is respectively arranged at the waist line part of the bearing seat plate and fixedly connected with the guide sliding block.
5. The lift leveling mechanism for a wafer inspection apparatus as recited in claim 4, wherein the suction positioning member comprises:
the adsorption end pipes are provided with a group, each adsorption end pipe is respectively arranged on the bearing seat plate, extends along the normal direction of the bearing seat plate and is sequentially distributed along the circumferential direction of the bearing seat plate, and each adsorption end pipe is respectively communicated with the vacuum equipment through a pipeline arranged in the bearing seat plate and the switching end head.
6. A lift leveling mechanism for a wafer inspection apparatus in accordance with claim 5 wherein the lift drive member comprises:
the driving motor is fixed in the detection equipment through the mounting seat and corresponds to the bottom edge position of the bearing seat plate;
the transmission rotating block is arranged on a power output shaft of the driving motor and can rotate along with the power output shaft;
the transmission rotating shaft is arranged on the transmission rotating block, the axis of the transmission rotating shaft is parallel to the axis of the power output shaft, and the tail end of the transmission rotating shaft stretches into the transmission sliding groove and is matched with the transmission sliding groove through a transmission bearing.
7. A lift leveling mechanism for a wafer inspection apparatus as set forth in claim 2 wherein the position feedback member comprises:
the feedback sensor is arranged in the detection equipment and is communicated with the industrial personal computer through a circuit;
and the feedback baffle is arranged in the bearing switching component and corresponds to the position of the feedback sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321317387.4U CN219716834U (en) | 2023-05-26 | 2023-05-26 | Lifting leveling mechanism for wafer detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321317387.4U CN219716834U (en) | 2023-05-26 | 2023-05-26 | Lifting leveling mechanism for wafer detection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219716834U true CN219716834U (en) | 2023-09-19 |
Family
ID=87999136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321317387.4U Active CN219716834U (en) | 2023-05-26 | 2023-05-26 | Lifting leveling mechanism for wafer detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219716834U (en) |
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2023
- 2023-05-26 CN CN202321317387.4U patent/CN219716834U/en active Active
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