CN219436805U - Industrial oven capable of preventing motor from being overheated - Google Patents

Industrial oven capable of preventing motor from being overheated Download PDF

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Publication number
CN219436805U
CN219436805U CN202320392037.8U CN202320392037U CN219436805U CN 219436805 U CN219436805 U CN 219436805U CN 202320392037 U CN202320392037 U CN 202320392037U CN 219436805 U CN219436805 U CN 219436805U
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CN
China
Prior art keywords
box
stirring
motor
transmission shaft
air
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Active
Application number
CN202320392037.8U
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Chinese (zh)
Inventor
罗佐军
吴琼
胡远岗
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Changzhou Changyao Semiconductor Technology Co ltd
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Changzhou Changyao Semiconductor Technology Co ltd
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Priority to CN202320392037.8U priority Critical patent/CN219436805U/en
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Publication of CN219436805U publication Critical patent/CN219436805U/en
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Abstract

The utility model provides a prevent overheated industry oven of motor, including box and the stirring subassembly with heating chamber, stirring subassembly is including locating the stirring vane in the box and the stirring motor of drive stirring vane, be equipped with the dust cover on the outer wall of box, the one end of keeping away from the box on the dust cover is installed to the stirring motor, the output of stirring motor is connected with the transmission shaft, the transmission shaft passes behind the lateral wall of box and is connected with stirring vane, the outside of box is equipped with the radiator unit, the radiator unit is including radiator fan and the air-cooled subassembly that corresponds stirring motor and dust cover, the air-cooled subassembly is including connecting the intake pipe on the box, the one end of intake pipe extends to the outside of box, the other end of intake pipe extends to the one end that is close to stirring vane on the transmission shaft. The heat dissipation performance of the equipment is well enhanced, and the service life of the equipment is prolonged.

Description

Industrial oven capable of preventing motor from being overheated
Technical Field
The utility model relates to the technical field of industrial ovens, in particular to an industrial oven capable of preventing a motor from overheating.
Background
The silicon wafer is subjected to various processes such as cutting, welding and etching during processing, and in order to facilitate processing, the silicon wafer needs to be subjected to heat treatment firstly, and an industrial oven is needed during heat treatment. For example, chinese patent publication No. CN215337401U discloses an oven with a hot air circulation heating system, by setting a fan assembly, a heating element and a circulation air duct, a drying chamber is made to form a hot air circulation, concretely, low-temperature air formed by rotation of the fan assembly is heated to form hot air when passing through the heating assembly, the hot air moves in the drying chamber, enters the circulation air duct through an air inlet of the circulation air duct when moving to one end of the drying chamber far away from the fan assembly, and blows out from an air outlet of the circulation air duct to reenter the drying chamber to form a hot air circulation, thereby heating and drying materials, greatly reducing heat loss, improving temperature uniformity of each part in the drying chamber, greatly improving heat effective utilization rate, and accelerating drying speed. However, during the use process, the motor in the fan assembly is easy to damage due to overheat after long-time operation, and the service life of the equipment is influenced.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: the industrial oven for preventing the motor from overheating has the advantages that the defects of the prior art are overcome, the heat dissipation performance of the equipment is well enhanced, and the service life of the equipment is prolonged.
In order to solve the technical problems, the technical scheme of the utility model is as follows: the utility model provides a prevent overheated industry oven of motor, includes box and stirring subassembly with heating chamber, stirring subassembly is including locating stirring vane and the drive in the box stirring vane's agitator motor is equipped with the dust cover on the outer wall of box, the agitator motor is installed keep away from on the dust cover the one end of box, the output of agitator motor is connected with the transmission shaft, the transmission shaft passes behind the lateral wall of box with stirring vane is connected, the outside of box is equipped with cooling module, cooling module is including corresponding agitator motor with cooling fan and the air-cooled subassembly of dust cover, the air-cooled subassembly is including connecting intake pipe on the box, the one end of intake pipe extends to the outside of box, the other end of intake pipe extends to be close to on the transmission shaft stirring vane's one end.
Further, a notch is formed in one side, close to the cooling fan, of the dust cover, the notch is opposite to the cooling fan, and a plurality of ventilation holes are formed in one side, opposite to the notch, of the dust cover.
Further, a specific structure of the air cooling assembly is provided, the air cooling assembly further comprises an air cooling sleeve arranged between the transmission shaft and the box body, and the air inlet pipe is communicated with the air cooling sleeve.
Further, a fan frame is fixedly installed on the box body, the two rotating shafts of the cooling fans are rotatably arranged on the fan frame, the two rotating shafts of the cooling fans are connected through a belt, a driving motor for providing power for the cooling fans is further arranged on the box body, and the output end of the driving motor is fixedly connected with one of the rotating shafts of the cooling fans.
Further, the box body is further provided with a pneumatic door assembly, the pneumatic door assembly is arranged in front of the heating cavity, the pneumatic door assembly comprises a box door slidably arranged on the box body and a driving cylinder for driving the box door to transversely move relative to the box body, and the box door is used for sealing or opening the heating cavity.
Further, a sliding rail is arranged on the box body, two sliding blocks are respectively arranged at the upper end and the lower end of the box door, the sliding blocks are slidably connected with the sliding rail, and an air rod of the driving air cylinder is fixedly connected with the box door through a connecting block.
Further, the stirring blade is located at the rear of the heating cavity, and the stirring blade is arranged opposite to the box door.
By adopting the technical scheme, the utility model has the following beneficial effects: the dust-proof cover is additionally arranged between the stirring motor and the box body, so that the length of the transmission shaft is increased, the heat radiation performance of the transmission shaft can be enhanced, and the service life of the stirring motor is prolonged; through setting up the air cooling subassembly, reduce the friction between transmission shaft and the box, the one end that is close to stirring vane on the transmission shaft is let in refrigerated gas through the intake pipe simultaneously for the temperature of the one end that is close to stirring vane of transmission shaft reduces, has avoided the heat in the heating chamber to pass through the transmission shaft and has transmitted to the agitator motor, has realized the purpose of cooling; through setting up two radiator fans and aiming at agitator motor and transmission shaft respectively, can further reduce agitator motor and transmission shaft's temperature, promote the radiating effect well, improve agitator motor and transmission shaft's life.
Drawings
FIG. 1 is a schematic view of an industrial oven for preventing overheating of a motor according to the present utility model;
FIG. 2 is a schematic view of the structure of FIG. 1 with the dust cover removed;
fig. 3 is an enlarged view of a portion a of fig. 2;
FIG. 4 is a schematic view of the structure of FIG. 1 from another angle, with the dust cover removed;
fig. 5 is an enlarged view of a portion B of fig. 4;
FIG. 6 is a schematic illustration of the pneumatic door assembly and a portion of the housing of FIG. 2 with the pneumatic door assembly removed;
FIG. 7 is a front view of FIG. 6;
fig. 8 is a schematic partial cross-sectional view of fig. 7 taken along the direction C-C.
Reference numerals: 1 box body, 2 dustproof shell, 3 heating cavity, 4 stirring component, 5 pneumatic door component, 6 radiating component,
11 slide rail, 12 fan frame, 41 stirring motor, 42 stirring blade, 43 transmission shaft, 44 dust cover, 51 box door,
511 slide block, 52 driving cylinder, 521 air bar, 53 connecting block, 61 cooling fan, 611 rotation shaft,
612 belt, 62 air cooling assembly, 621 air cooling sleeve, 622 air inlet pipe, 63 driving motor and 100 silicon wafer
Detailed Description
In order that the utility model may be more readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
As shown in fig. 1 to 8, in the present embodiment, there is provided an industrial oven for preventing overheating of a motor, comprising a housing 1 and a dust-proof case 2 provided outside the housing 1, four heating chambers 3 for placing silicon wafers 100 are provided in the housing 1, four heating members (not shown in the drawings) for heating the four heating chambers 3 respectively and a stirring assembly 4 are provided on the housing 1, a pneumatic door assembly 5 is further provided on the housing 1, and the pneumatic door assembly 5 is provided in front of the heating chambers 3.
When the silicon wafer 100 is processed, the pneumatic door assembly 5 in front of the heating cavity 3 is required to be opened firstly, the silicon wafer 100 to be processed is placed in the heating cavity 3 by a mechanical arm or manually, the pneumatic door assembly 5 is closed, the heating element provides heat for the heating cavity 3, and the silicon wafer 100 is subjected to heat treatment.
As shown in fig. 3, in the present embodiment, the air door assembly 5 includes a door 51 slidably disposed on the case 1 and driving cylinders 52 for driving the door 51 to move laterally with respect to the case 1, the door 51 has four doors, which are disposed in front of the four heating chambers 3, respectively, for sealing or opening the heating chambers 3, the driving cylinders 52 are fixedly mounted on the case 1, and air bars 521 of the driving cylinders 52 are fixedly connected with the door 51 through connection blocks 53.
Specifically, as shown in fig. 3, a sliding rail 11 is disposed on the case 1, two sliding blocks 511 are disposed at the upper and lower ends of the case door 51, and the sliding blocks 511 are slidably connected with the sliding rail 11, so that the driving cylinder 52 can drive the case door 51 to move transversely along the sliding rail 11 relative to the case 1.
In this embodiment, stirring subassembly 4 includes agitator motor 41 and stirring vane 42, agitator motor 41 is fixed to be set up in the outside of box 1, agitator motor 41's output fixedly connected with transmission shaft 43, transmission shaft 43 pass box 1 back and stirring vane 42 fixed connection, stirring vane 42 locates in box 1, stirring vane 42 is located the rear of heating chamber 3 and stirring vane 42 and chamber door 51 set up relatively, after agitator motor 41 starts, agitator motor 41 drives transmission shaft 43 and rotates, transmission shaft 43 drives stirring vane 42 and rotates, can stir the air near heating chamber 3, the heat that makes heat exchange calandria 41 distribute evenly in heating chamber 3.
Specifically, a dust cover 44 is sleeved on the outer side of the transmission shaft 43, the dust cover 44 is fixedly installed on the box body 1, and the stirring motor 41 is installed on one end, far away from the box body 1, of the dust cover 44. The dust cover 44 is provided to increase stability of the stirring motor 41, to support the stirring motor 41, and to prevent dust from adhering to the transmission shaft 43 to affect rotation of the transmission shaft 43. In the present embodiment, by providing the dust cover 44, the stirring motor 41 is mounted on the dust cover 44 instead of being directly mounted on the casing 1, the length of the transmission shaft 43 is lengthened, and the heat radiation performance of the transmission shaft 43 is further improved.
As shown in fig. 4-5, the box 1 is further provided with a heat dissipation component 6 for dissipating heat of the stirring component 4, the heat dissipation component 6 comprises a heat dissipation fan 61 arranged on the box 1 and an air cooling component 62 arranged between the box 1 and the transmission shaft 43, specifically, as shown in fig. 8, the air cooling component 62 comprises an air inlet pipe 622 connected to the box 1, one end of the air inlet pipe 622 extends to the outside of the box 1, and the other end of the air inlet pipe 622 extends to one end of the transmission shaft 43 close to the stirring blade 42. Due to the effect of the heating element in the heating cavity 3, the temperature in the heating cavity 3 is higher, the stirring vane 42 is positioned at the rear of the heating cavity 3, the transmission shaft 43 extends to the rear of the heating cavity 3, the temperature of the heating cavity 3 can be transmitted to the stirring motor 41 through the transmission shaft 43, the temperature of the stirring motor 41 is increased, the cooling gas is introduced to one end, close to the stirring vane 42, of the transmission shaft 43 through the air inlet pipe 622, the temperature of one end, close to the stirring vane 42, of the transmission shaft 43 is reduced, the heat in the heating cavity 3 is prevented from being transmitted to the stirring motor 41 through the transmission shaft 43, and the purpose of cooling is achieved. In this embodiment, the injected cooling gas is preferably nitrogen, so that a low-oxygen environment can be provided for the heating cavity while cooling is realized, and normal operation of the device is ensured.
In this embodiment, a gas cooling jacket 621 is disposed between the driving shaft 43 and the case 1, the gas inlet pipe 622 is communicated with the gas cooling jacket 621, and the gas cooling jacket 621 is close to an opening at one end of the heating cavity 3, so that cooled gas introduced into the gas cooling jacket 621 through the gas inlet pipe 622 can be transmitted to one end of the driving shaft 43 close to the stirring blade 42 through the gas cooling jacket 621, meanwhile, since the driving shaft 43 passes through the case 1, friction collision can occur with the case 1 when the driving shaft 43 rotates, the temperature of the driving shaft 43 is raised, the service life is affected, and friction between the driving shaft 43 and the case 1 is reduced by disposing the gas cooling jacket 621 between the driving shaft 43 and the case 1. Of course, in other embodiments not shown, the air cooling assembly 62 may also include only the air inlet pipe 622, such that the cooling air introduced from the air inlet pipe 622 is directly led to the transmission shaft 43, and may also serve as a cooling function.
As shown in fig. 5, in this embodiment, two cooling fans 61 are provided in each group, the two cooling fans 61 are aligned with the stirring motor 41 and the transmission shaft 43 respectively, the fan frame 12 is fixedly mounted on the case 1, the rotation shafts 611 of the two cooling fans 61 are rotatably disposed on the fan frame 12, the rotation shafts 611 of the two cooling fans 61 are connected by a belt 612, the case 1 is further provided with a driving motor 63 for providing power for the cooling fans 61, the output end of the driving motor 63 is fixedly connected with the rotation shaft 611 of one cooling fan 61, the driving motor 63 is started to drive the two cooling fans 61 to rotate, and the two cooling fans 61 are aligned with the stirring motor 41 and the dust cover 44 respectively, so that the temperature of the stirring motor 41 and the transmission shaft 43 can be further reduced, the heat dissipation effect is well improved, and the service life of the stirring motor 41 and the transmission shaft 43 is prolonged.
As shown in fig. 5, a gap 441 is formed on one side of the dust cover 44 near the cooling fan 61, the gap 441 is opposite to the cooling fan 61, the cooling fan 61 is opposite to the transmission shaft 43 through the gap on the dust cover 44, a plurality of ventilation holes 442 are formed on one side of the dust cover 44 opposite to the gap 441, the cooling fan 61 blows ambient air into the dust cover 44 through the gap 441, the air blown by the cooling fan 61 is blown to the transmission shaft 43 after entering the dust cover 44, and is then discharged through the ventilation holes 442, so that the cooling of the transmission shaft 43 is realized, and the random ventilation of the air in the dust cover 44 is ensured, and the increase of the air pressure in the dust cover 44 is avoided.
In the present embodiment, only one set of the cooling fan 61 and the driving motor 63 is shown, but in practical application, four sets of the cooling fan 61 and the driving motor 63 are provided for cooling the four sets of the stirring motor 41 and the transmission shaft 43, respectively.
The application flow of the utility model is as follows: the driving cylinder 52 works, the air rod 521 of the driving cylinder 52 retracts to drive the box door 51 to move to two sides along the sliding rail 11, so that the heating cavity 3 is opened, the silicon wafer 100 is placed in the heating cavity 3, the driving cylinder 52 is started again, the air rod 521 of the driving cylinder 52 stretches out to drive the box door 51 to move to the middle along the sliding rail 11, and the heating cavity 3 is closed; the heating piece works to generate heat, the air near the heating piece is heated, the stirring motor 41 is started, the stirring motor 41 drives the stirring blade 42 to rotate, the air near the heating piece can be stirred, the heat emitted by the heating piece is uniformly distributed in the heating cavity 3, and the silicon wafer 100 in the heating cavity 3 is uniformly heated; the driving motor 63 is started, the driving motor 63 drives the two cooling fans 61 to rotate, the two cooling fans 61 are aligned to the stirring motor 41 and the transmission shaft 43 respectively, so that the temperature of the stirring motor 41 and the temperature of the transmission shaft 43 can be reduced, and meanwhile, cooled gas is injected into the air cooling jacket 621 through the air inlet pipe 622, so that the temperature of one end, close to the stirring blades 42, of the transmission shaft 43 is reduced, and the heat in the heating cavity 3 is prevented from being transmitted to the stirring motor 41 through the transmission shaft 43; after the heat treatment of the silicon wafer 100 is completed, the driving cylinder 52 is started, the air rod 521 of the driving cylinder 52 is retracted, the box door 51 is driven to move to two sides along the sliding rail 11, the heating cavity 3 is opened, the processed silicon wafer 100 is taken out, and a new silicon wafer 100 is put into for processing.
The technical problems, technical solutions and advantageous effects solved by the present utility model have been further described in detail in the above-described embodiments, and it should be understood that the above-described embodiments are only illustrative of the present utility model and are not intended to limit the present utility model, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present utility model should be included in the scope of protection of the present utility model.

Claims (7)

1. Prevent overheated industry oven of motor, including box (1) and stirring subassembly (4) that have heating chamber (3), stirring subassembly (4) are including locating stirring vane (42) and the drive in box (1) stirring motor (41) of stirring vane (42), its characterized in that: be equipped with dust cover (44) on the outer wall of box (1), agitator motor (41) are installed keep away from on dust cover (44) one end of box (1), the output of agitator motor (41) is connected with transmission shaft (43), transmission shaft (43) pass behind the lateral wall of box (1) with stirring vane (42) are connected, the outside of box (1) is equipped with radiator unit (6), radiator unit (6) are including corresponding agitator motor (41) with radiator fan (61) and air-cooled subassembly (62) of dust cover (44), air-cooled subassembly (62) are including connecting intake pipe (622) on box (1), the one end of intake pipe (622) extends to the outside of box (1), the other end of intake pipe (622) extends to be close to on transmission shaft (43) stirring vane (42) one end.
2. An industrial oven for preventing overheating of a motor according to claim 1, wherein: a notch (441) is formed in one side, close to the cooling fan (61), of the dust cover (44), the notch (441) is opposite to the cooling fan (61), and a plurality of ventilation holes (442) are formed in one side, opposite to the notch (441), of the dust cover (44).
3. An industrial oven for preventing overheating of a motor according to claim 1, wherein: the air cooling assembly (62) further comprises an air cooling sleeve (621) arranged between the transmission shaft (43) and the box body (1), and the air inlet pipe (622) is communicated with the air cooling sleeve (621).
4. An industrial oven for preventing overheating of a motor according to claim 1, wherein: the fan frame (12) is fixedly installed on the box body (1), the rotating shafts (611) of the two radiating fans (61) are rotatably arranged on the fan frame (12), the rotating shafts (611) of the two radiating fans (61) are connected through a belt (612), the box body (1) is further provided with a driving motor (63) for providing power for the radiating fans (61), and the output end of the driving motor (63) is fixedly connected with one of the rotating shafts (611) of the radiating fans (61).
5. An industrial oven for preventing overheating of a motor according to claim 1, wherein: the box body (1) is further provided with a pneumatic door assembly (5), the pneumatic door assembly (5) is arranged in front of the heating cavity (3), the pneumatic door assembly (5) comprises a box door (51) which is slidably arranged on the box body (1) and a driving air cylinder (52) which drives the box door (51) to move transversely relative to the box body (1), and the box door (51) is used for sealing or opening the heating cavity (3).
6. An industrial oven for preventing overheating of a motor according to claim 5, wherein: the box body (1) is provided with a sliding rail (11), the upper end and the lower end of the box door (51) are respectively provided with two sliding blocks (511), the sliding blocks (511) are slidably connected with the sliding rail (11), and an air rod (521) of the driving air cylinder (52) is fixedly connected with the box door (51) through a connecting block (53).
7. An industrial oven for preventing overheating of a motor according to claim 5, wherein: the stirring blade (42) is positioned behind the heating cavity (3), and the stirring blade (42) is arranged opposite to the box door (51).
CN202320392037.8U 2023-03-06 2023-03-06 Industrial oven capable of preventing motor from being overheated Active CN219436805U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320392037.8U CN219436805U (en) 2023-03-06 2023-03-06 Industrial oven capable of preventing motor from being overheated

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320392037.8U CN219436805U (en) 2023-03-06 2023-03-06 Industrial oven capable of preventing motor from being overheated

Publications (1)

Publication Number Publication Date
CN219436805U true CN219436805U (en) 2023-07-28

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ID=87334763

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320392037.8U Active CN219436805U (en) 2023-03-06 2023-03-06 Industrial oven capable of preventing motor from being overheated

Country Status (1)

Country Link
CN (1) CN219436805U (en)

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