CN219328141U - Control device for preventing cross contamination in clean room - Google Patents

Control device for preventing cross contamination in clean room Download PDF

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Publication number
CN219328141U
CN219328141U CN202223496514.XU CN202223496514U CN219328141U CN 219328141 U CN219328141 U CN 219328141U CN 202223496514 U CN202223496514 U CN 202223496514U CN 219328141 U CN219328141 U CN 219328141U
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China
Prior art keywords
oht
exhaust
clean room
control device
overhead traveling
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CN202223496514.XU
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Chinese (zh)
Inventor
徐瑾睿
张柯
周玉
鲍允州
何滔
吴建华
钱振
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China Electronics System Engineering No2 Construction Co ltd
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China Electronics System Engineering No2 Construction Co ltd
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Abstract

The utility model relates to a cross contamination prevention control device in a clean room, which structurally comprises a clean room which is separated by a partition wall and is internally provided with an overhead floor, wherein a suspended ceiling in the clean room is provided with an FFU, an OHT overhead crane and a contaminant control device, the OHT overhead crane is arranged on an AMHS system track, the AMHS system track passes through a plurality of adjacent clean rooms, a contaminant control device is arranged beside the AMHS system track of each clean room, the contaminant control device comprises an exhaust pipe and an exhaust port which is arranged at the end part of the exhaust pipe and is adjacent to the AMHS system track, the exhaust port is an orifice plate which is connected with the exhaust pipe through a buckle, the edge of the orifice plate is a solid blocking area instead of the orifice plate, the orifice plate is a square plate, and the aperture ratio is 25%. The pollutant carried by the OHT movement can be efficiently removed when the OHT crown block moves, and the pollution to the adjacent clean room is prevented.

Description

Control device for preventing cross contamination in clean room
Technical Field
The utility model relates to a cross-contamination prevention control device in a clean room, and belongs to the technical field of pollution control in the clean room.
Background
In the conventional clean factory building in the prior art, gaseous pollutants in the clean room are removed through a chemical filter on the suspended ceiling, but the prevention and the control of cross contamination in the clean room cannot be realized.
In the prior art, in order to prevent cross contamination of gaseous pollutants, by setting a pressure gradient, that is, the indoor pressure of a high clean grade is larger than the indoor pressure of an adjacent low clean grade, a certain pressure difference can be maintained in the indoor, so that the pollution of the clean room by the adjacent room or the pollution of the adjacent room is effectively avoided. However, due to the wall opening in the clean room and the movement of the OHT overhead travelling crane, the purpose of controlling pollutants is difficult to achieve through pressure difference.
CN112097349a discloses a clean room filter device, which needs to set a buffer area with high pressure between adjacent clean rooms, and correspondingly sets an air conveying device and an air filtering device, so that the structure is complex, and the input cost is too high.
Disclosure of Invention
The utility model provides a cross-contamination prevention control device in a clean room, which aims to overcome the defects in the prior art, and can efficiently remove pollutants carried by OHT movement and prevent the pollution to an adjacent clean room on the premise of not influencing the environmental control in the clean room.
The technical solution of the utility model is as follows: the utility model provides a prevent cross contamination controlling means in toilet, its structure includes the toilet that is separated by the partition wall and the interior bottom is equipped with the raised floor, the indoor furred ceiling of toilet is equipped with FFU, OHT overhead traveling crane and pollutant controlling means, the OHT overhead traveling crane is installed on the AMHS system track, the AMHS system track passes a plurality of adjacent clean rooms, the other pollutant controlling means that is provided with of AMHS system track of every clean room, pollutant controlling means includes the exhaust column and installs the exhaust port that sets up at the exhaust column tip and adjacent AMHS system track, the exhaust port is the orifice plate, pass through the buckle with the exhaust column and be connected, the orifice plate edge is stifled real region, but not orifice plate full-berth formula, the orifice plate is the square plate, the aperture ratio is 25%. The pollutant carried by the OHT movement can be efficiently removed when the OHT crown block moves, and the pollution to the adjacent clean room is prevented.
The pore plate in the exhaust port is provided with a valve, and an electric or manual air port opening width adjusting mechanism is arranged, so that the suction speed of the exhaust port can be adjusted, and the pollutant extraction under different OHT movement speeds can be satisfied.
The pollutant control device is designed to be three types, and when the OHT overhead traveling crane is one, the exhaust port is arranged at one side and the lower part of the path of the OHT overhead traveling crane and is respectively connected with an independent exhaust pipe, the side exhaust pipe and the lower two sides exhaust pipe are adopted, and the size of the exhaust pipe at the lower part is smaller than that of the exhaust pipe at the side surface.
The second is that the OHT overhead traveling crane is two that set up from top to bottom, and two exhaust openings are adjacent to each other from top to bottom and set up in the one side of two OHT overhead traveling crane route, adopt updraft and downdraft.
The third is that the OHT overhead traveling crane is three, including two that the horizontal direction is adjacent set up and set up one in the top between two, the exhaust column sets up in three OHT overhead traveling crane both sides, unilateral exhaust column is protruding concave type, four exhaust port symmetry sets up in the both sides exhaust column tip of three OHT overhead traveling crane through the route, adopts two side updraft and downdraft. The upper exhaust opening is narrower than the lower exhaust opening.
Different pollutant control devices and corresponding different tuyere forms are designed for different OHT crown blocks, so that pollution to adjacent clean rooms can be further prevented.
The utility model has the advantages that: the device can effectively solve the cross contamination caused by the fact that the OHT crown block passes through different clean areas, different pollutant control devices are designed for different OHT crown blocks and are provided with different tuyere forms, and a tuyere orifice plate is preferably provided with a valve, so that the suction speed of a tuyere can be adjusted, the high-efficiency extraction of pollutants under different OHT movement speeds can be satisfied on the premise that the environmental control in a clean room is not affected, and the cross contamination problem between adjacent clean rooms is solved.
Drawings
FIG. 1 is a schematic view showing the construction of a first embodiment of a cross-contamination prevention control apparatus for a clean room according to the present utility model.
Fig. 2 is a front view of fig. 1.
Fig. 3 is a schematic side view of the suction port of fig. 2.
FIG. 4 is a schematic structural view of a first embodiment of the cross-contamination prevention control apparatus for a clean room according to the present utility model.
Fig. 5 is a front view of fig. 4.
Fig. 6 is a schematic side view of the suction port of fig. 5.
FIG. 7 is a schematic view showing the construction of a first embodiment of the cross-contamination prevention control apparatus for a clean room according to the present utility model.
Fig. 8 is a front view of fig. 7.
Fig. 9 is a schematic side view of the suction port of fig. 8.
In the figure, 1 is a clean room, 2 is an FFU (blast filter unit), 3 is an OHT overhead traveling crane, 4 is an exhaust pipe, 5 is an exhaust port, 6 is an elevated floor, and 7 is a partition wall.
Detailed Description
The present utility model will be described in further detail with reference to examples and embodiments.
Example 1
As shown in fig. 1-3, a cross contamination prevention control device in a clean room is structurally characterized by comprising a clean room 1 which is partitioned by a partition wall 7, wherein an elevated floor 6 is arranged at the inner bottom of the clean room 1, an FFU2, an OHT overhead traveling crane 3 and a contamination control device are arranged on a suspended ceiling in the clean room 1, the OHT overhead traveling crane 3 is arranged on an AMHS system track, the AMHS system track penetrates through a plurality of adjacent clean rooms 1, one contamination control device is arranged beside the AMHS system track of each clean room 1, the contamination control device comprises an exhaust pipe 4 and an exhaust port 5 which is arranged at the end part of the exhaust pipe 4 and is arranged adjacent to the AMHS system track, the exhaust port 5 is an orifice plate and is connected with the exhaust pipe 4 through a buckle, the edge of the orifice plate is a solid blocking area instead of the orifice plate, the orifice plate is a square plate, and the aperture ratio is 25%.
The OHT overhead traveling crane 3 is a, and exhaust port 5 sets up in OHT overhead traveling crane 3 one side and below of route, connect solitary exhaust column 4 respectively, adopts side, two sides convulsions down, and the exhaust column 4 size of below is less than the exhaust column 4 size of side.
The exhaust pipe 4 is a galvanized air pipe and is an independent exhaust pipe connected to general exhaust air.
The pore plate in the exhaust port 5 is provided with a valve, and an electric or manual air port opening width adjusting mechanism is arranged, so that the suction speed of the exhaust port 5 is adjusted, and the pollutant extraction under different OHT movement speeds is satisfied.
During operation, FFU2 in clean room 1 provides filtered circulating air flow, so that clean room 1 is maintained in a certain temperature, humidity and pressure range, and the clean grade is maintained to be hundred grades; the OHT overhead traveling crane 3 passes through the pollutant control device at a certain speed under the track of the AMHS system in the clean room 1, and pollutants can be dispersed to the exhaust port 5 along with the movement of the OHT overhead traveling crane 3, and the exhaust pipe 4 discharges pollutants carried by the OHT overhead traveling crane 3 through the exhaust port 5, so that the cross contamination of the OHT overhead traveling crane 3 to the adjacent clean room 1 is avoided.
Example 2
As shown in fig. 4 to 6, a cross contamination prevention control device in a clean room is different from the embodiment 1 in that two OHT overhead traveling vehicles 3 are provided up and down, two exhaust openings 5 are provided up and down adjacently on one side of the path through which the two OHT overhead traveling vehicles 3 pass, and up and down exhaust is adopted.
Example 3
As shown in fig. 7-9, a control device for preventing cross contamination in a clean room is different from embodiments 1 and 2 in that the number of OHT crown blocks 3 is three, including two adjacent horizontally arranged ones and one arranged above the two ones, exhaust pipes 4 are arranged on two sides of the three OHT crown blocks 3, single-side exhaust pipes 4 are convex and concave upwards, and four exhaust ports 5 are symmetrically arranged on the end parts of the two exhaust pipes 4 on the path of the three OHT crown blocks 3, and two-side up-down exhaust is adopted.
The upper suction opening 5 is narrower than the lower suction opening 5.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present utility model.

Claims (6)

1. The utility model provides a cross contamination control device is prevented in toilet, its structure includes clean room (1) that separates and interior bottom is equipped with raised floor (6) by partition wall (7), furred ceiling is equipped with FFU (2) and OHT overhead traveling crane (3) in clean room (1), OHT overhead traveling crane (3) are installed on the AMHS system track, the AMHS system track passes a plurality of adjacent clean rooms (1), its characterized in that, every clean room (1) AMHS system track side be provided with a pollutant controlling means, pollutant controlling means includes exhaust column (4) and installs exhaust port (5) that set up at exhaust column (4) tip and adjacent AMHS system track, exhaust column (4) connect to general exhaust.
2. A control device for preventing cross contamination in a clean room as claimed in claim 1, wherein the OHT overhead travelling crane (3) is one, the exhaust openings (5) are arranged at one side and below the path of the OHT overhead travelling crane (3) and are respectively connected with a single exhaust pipe (4), and the size of the exhaust pipe (4) at the lower side is smaller than that of the exhaust pipe (4) at the side.
3. The control device for preventing cross contamination in clean room according to claim 1, wherein the number of the OHT overhead traveling vehicles (3) is two, and the two exhaust openings (5) are arranged adjacently on one side of the path through which the two OHT overhead traveling vehicles (3) pass.
4. The indoor cross contamination prevention control device according to claim 1, wherein the number of the OHT overhead traveling crane (3) is three, the two overhead traveling crane (3) comprises two adjacent horizontal traveling crane units and one overhead traveling crane unit arranged between the two overhead traveling crane units, the exhaust pipes (4) are arranged on two sides of the three OHT overhead traveling crane units (3), the single-side exhaust pipes (4) are in a convex-concave shape, the four exhaust ports (5) are symmetrically arranged at the end parts of the exhaust pipes (4) on two sides of the path of the three OHT overhead traveling crane units (3), and the upper exhaust ports (5) are narrower than the lower exhaust ports (5) by adopting double-side up-down exhaust.
5. A control device for preventing cross-contamination in a clean room as claimed in any one of claims 1-4, wherein the suction pipe (4) is a galvanized air pipe, the suction opening (5) is a hole plate, the hole plate is a square plate, and the opening ratio is 25% through fastening connection with the suction pipe (4).
6. The device for controlling the cross-contamination prevention in the clean room according to claim 5, wherein the orifice plate of the air suction opening (5) is provided with an electric or manual opening width adjusting mechanism.
CN202223496514.XU 2022-12-26 2022-12-26 Control device for preventing cross contamination in clean room Active CN219328141U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223496514.XU CN219328141U (en) 2022-12-26 2022-12-26 Control device for preventing cross contamination in clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223496514.XU CN219328141U (en) 2022-12-26 2022-12-26 Control device for preventing cross contamination in clean room

Publications (1)

Publication Number Publication Date
CN219328141U true CN219328141U (en) 2023-07-11

Family

ID=87067675

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223496514.XU Active CN219328141U (en) 2022-12-26 2022-12-26 Control device for preventing cross contamination in clean room

Country Status (1)

Country Link
CN (1) CN219328141U (en)

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