CN219311013U

CN219311013U - Position calibration tool

Info

Publication number: CN219311013U
Application number: CN202223606303.7U
Authority: CN
Inventors: 谢凯旋; 吴天松; 魏志杰
Original assignee: Yuexin Semiconductor Technology Co ltd
Current assignee: Yuexin Semiconductor Technology Co ltd
Priority date: 2022-12-29
Filing date: 2022-12-29
Publication date: 2023-07-07
Anticipated expiration: 2032-12-29

Abstract

The application proposes a position calibration tool for calibrating the position of a grinding head and a HCLU arranged up and down of a grinding table. The position correcting tool comprises a shell and a plurality of vernier calipers, wherein a containing groove formed by surrounding the side wall of the shell is fixedly connected with the inner edge of the HCLU, the vernier calipers are arranged at intervals along the surrounding direction of the side wall of the shell, the scale end of each vernier caliper vertically penetrates through the side wall of the shell and extends into the containing groove to be abutted against the grinding head, and the position centering of the grinding head is determined by the fact that the distance between the grinding head measured by each vernier caliper and the side wall of the shell is equal, so that the alignment of the grinding head and the HCLU is determined; whether the grinding head is offset is judged through the readings of a plurality of vernier calipers, the precision is higher, and the structure is simple and the operation is convenient.

Description

Position calibration tool

Technical Field

The application relates to the technical field of grinder position calibration, in particular to a position calibration tool.

Background

The important components of the chemical mechanical polishing machine are polishing units, which are generally composed of a polishing head and a polishing platform, wherein the polishing head mainly acts to drive a wafer to rotate on the polishing platform, move to the polishing platform and provide a downward pressure, the action of adsorbing the wafer on the polishing head is realized by HCLU (Head Clean Load Unload, a module for cleaning the polishing head and adsorbing and releasing the wafer by the polishing head), when the position of the polishing head where the wafer is adsorbed and released by the HCLU is offset, the adsorption and release actions fail to generate an alarm, so that the position of the polishing head can be checked and calibrated periodically, and the conventional checking and calibrating method is to judge whether the offset is caused by visually observing the widths of the edges of the polishing head and the edges of the HCLU.

Disclosure of Invention

In view of the above, the present application provides a position calibration tool for improving the problems of unchanged observation and larger error in the conventional position calibration judgment method of the polishing head and the HCLU.

The application provides a position calibration instrument for the position of grinding head and HCLU that sets up from top to bottom to grinder bench is calibrated, position calibration instrument includes:

the grinding device comprises a shell, a grinding head and an HCLU, wherein a containing groove is formed in the periphery of the side wall of the shell, the containing groove is used for containing the grinding head and the HCLU which are arranged up and down, and the containing groove is fixedly connected with the inner edge of the HCLU;

the vernier calipers are arranged at intervals along the surrounding direction of the side wall of the shell, the scale ends of the vernier calipers vertically penetrate through the side wall of the shell and extend into the accommodating groove to be abutted against the grinding head, and the distance between the grinding head and the side wall of the shell, which is measured by the vernier calipers, is equal to determine that the grinding head is aligned with the HCLU.

Optionally, the shape of the accommodating groove formed by surrounding the side wall of the shell is the same as the shape of the grinding head and the HCLU, and the accommodating groove is round.

Optionally, the shell includes the first sub-shell and the second sub-shell that link to each other, the diameter of second sub-shell is less than the diameter of first sub-shell, the second sub-shell be used for with the internal edge connection of HCLU is fixed, first sub-shell and second sub-shell connection plane with the top of HCLU is connected fixedly, first sub-shell is used for acceping the grinding bit, each slide caliper set up in the first sub-shell of shell.

Optionally, the outer wall of the second sub-housing is attached to the inner edge of the HCLU to be fixedly connected to the HCLU, and the first sub-housing and the second sub-housing connection plane are fixedly connected to the top of the HCLU.

Optionally, the second sub-housing and the first sub-housing are respectively hollow cylindrical structural members.

Optionally, the housing is an integral piece.

Optionally, the housing is a metal piece.

Optionally, the position calibration tool includes four vernier calipers, and the equidistance is set up in the lateral wall of casing.

Optionally, each vernier caliper is detachably arranged or relatively fixed on the side wall of the shell.

As described above, the position calibration tool of the present application includes a housing and a plurality of vernier calipers, where a housing groove formed by surrounding a side wall of the housing is fixedly connected to an inner edge of the HCLU, the plurality of vernier calipers are arranged at intervals along a surrounding direction of the side wall of the housing, and scale ends of the vernier calipers vertically penetrate through the side wall of the housing and extend into the housing groove to abut against the grinding head, and the grinding head is determined to be centered by determining that distances between the grinding head and the side wall of the housing measured by the vernier calipers are equal, so as to determine alignment of the grinding head and the HCLU; whether the grinding head is offset is judged through the readings of a plurality of vernier calipers, the precision is higher, and the structure is simple and the operation is convenient.

Drawings

Fig. 1 is a schematic structural diagram of a position alignment tool according to an embodiment of the present application.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be clearly described below with reference to specific embodiments and corresponding drawings. It will be apparent that the embodiments described below are only some, but not all, of the embodiments of the present application. The following embodiments and technical features thereof may be combined with each other without conflict, and also belong to the technical solutions of the present application.

In the description of the embodiments of the present application, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience in describing the technical solutions of the respective embodiments, and do not indicate or imply that the devices or elements must have a specific orientation, be configured and operated in a specific orientation, and are not to be construed as limiting the present application.

Referring to fig. 1, a position calibration tool 1 provided in an embodiment of the present application is used for calibrating positions of a grinding head and an HCLU disposed above and below a grinding table, where the position calibration tool 1 includes a housing 11 and a plurality of vernier calipers 12.

The side wall of the housing 11 is surrounded with a receiving groove 11a, the receiving groove 11a is used for receiving the polishing head and the HCLU which are arranged up and down, and the outer wall of the receiving groove 11a is fixedly connected with the inner edge of the HCLU.

The vernier calipers 12 are arranged at intervals along the surrounding direction of the side wall of the housing 11, and the scale end (i.e. the movable end provided with scales) of each vernier caliper 12 vertically penetrates through the side wall of the housing 11 and can extend into the accommodating groove 11a to be abutted against the outer edge of the grinding head.

The distance between the side wall of the housing 11 and the outer edge of the grinding bit is obtained by reading the scale of each vernier caliper 12. When the distance between the grinding bit and the side wall of the housing 11 measured by each vernier caliper 12 is equal, it can be determined that the grinding bit and the HCLU are aligned, i.e., the grinding bit is not offset. If there is at least one distance between the grinding bit and the side wall of the housing 11 measured by the vernier caliper 12, which is not equal to the distance measured by the other vernier calipers 12, it is determined that the grinding bit is not centered in the housing, and the grinding bit is deviated.

In an actual scenario, the shape of the accommodating groove 11a formed around the side wall of the housing 11 is the same as the shape of the polishing head and the HCLU, and is circular.

Alternatively, the housing 11 includes a first sub-housing 111 and a second sub-housing 112 that are connected up and down, for example, the second sub-housing 112 and the first sub-housing 111 are respectively hollow cylindrical structural members. The diameter of the second sub-housing 112 is smaller than the diameter of the first sub-housing 111.

The second sub-housing 112 is configured to be fixedly coupled to an inner edge of the HCLU. For example, the outer wall of the second sub-housing 112 is attached to the inner edge of the HCLU to be fixedly connected to the HCLU. The connection plane of the first sub-housing 111 and the second sub-housing 112 is fixedly connected with the top of the HCLU.

The first sub-housing 111 is configured to accommodate the polishing head, and each vernier caliper 12 is disposed in the first sub-housing 111 of the housing 11.

The housing 11 of the above-described structure may be an integral piece.

Optionally, the housing 11 is a metal member, and has a high structural strength.

The position calibration tool 1 comprises four vernier calipers 12, and the four vernier calipers 12 can be equidistantly arranged on the side wall of the housing 11.

Alternatively, each of the vernier calipers 12 may be detachably provided or relatively fixed to a side wall of the housing 11. It should be understood that the so-called relative fixation is merely to say that each vernier caliper 12 is integrally fixed to the side wall of the housing 11, but the scale end of each vernier caliper 12 is retractable with respect to the side wall of the housing 11.

As described above, the position calibration tool 1 of the present application includes the housing 11 and the plurality of vernier calipers 12, the housing 11 side wall encloses the outer wall of the formed accommodating groove 11a and the inner edge of the HCLU is connected and fixed, the plurality of vernier calipers 12 are arranged along the enclosing direction of the housing 11 side wall at intervals, and the scale end of each vernier caliper 12

The grinding head is vertically penetrated through the side wall of the shell 11 and extends into the accommodating groove 11a to be abutted against the grinding head, and the center of the grinding head position is determined by the fact that the distance between the grinding head measured by each free 5 standard caliper 12 and the side wall of the shell 11 is equal, so that the alignment of the grinding head and the HCLU is determined; whether the grinding head is offset is judged through the readings of a plurality of vernier calipers 12, and compared with the existing visual inspection mode, the precision is higher, and simple structure and convenient operation.

It should be understood that the foregoing is only a partial example of the present application and is not intended to limit the patent of the present application

Insofar as those skilled in the art can readily utilize the equivalent 0-degree structural transformations of the present specification and drawings, they are intended to be encompassed within the scope of the present application.

Although the terms first, second, etc. are used herein to describe various information, these information should not be limited by these terms. These terms are only used to distinguish one type of information from another. In addition, the singular form

"a", "an" and "the" are intended to include the plural forms as well. The terms "or" and/or "quilt

Is to be construed as inclusive, or meaning any one or any combination. An exception to this definition will occur only when a combination of elements, functions, steps or operations 5 are in some way inherently mutually exclusive.

Claims

1. A position calibration tool for calibrating the position of a grinding bit and a HCLU disposed above and below a grinding table, the position calibration tool comprising:

2. The position calibration tool of claim 1, wherein the housing sidewall defines a receptacle having a shape similar to the shape of the polishing head and the HCLU, and is circular.

3. The position calibration tool of claim 2, wherein the housing comprises a first sub-housing and a second sub-housing connected, the second sub-housing having a diameter smaller than the diameter of the first sub-housing, the second sub-housing being adapted to be fixedly connected to an inner edge of the HCLU, the first sub-housing and the second sub-housing being fixedly connected to a top of the HCLU, the first sub-housing being adapted to receive the grinding bit, each of the vernier calipers being disposed in the first sub-housing of the housing.

4. A position calibration tool according to claim 3, wherein the outer wall of the second sub-housing is fitted to the inner edge of the HCLU to be fixedly connected thereto.

5. A position calibration tool according to claim 3, wherein the second sub-housing and the first sub-housing are each hollow-interior tubular structural members.

6. A position calibration tool according to any one of claims 3 to 5, wherein the housing is a one-piece member.

7. The positional calibration tool of claim 6, wherein the housing is a metal piece.

8. The position calibration tool of claim 2, comprising four of the vernier calipers equidistantly disposed on a side wall of the housing.

9. The position calibration tool of claim 1, wherein each of the vernier calipers is removably disposed or relatively fixed to a side wall of the housing.