CN219308003U - Vacuum extraction device - Google Patents

Vacuum extraction device Download PDF

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Publication number
CN219308003U
CN219308003U CN202223503114.7U CN202223503114U CN219308003U CN 219308003 U CN219308003 U CN 219308003U CN 202223503114 U CN202223503114 U CN 202223503114U CN 219308003 U CN219308003 U CN 219308003U
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China
Prior art keywords
vacuum
inlet
pipeline
generator
communicated
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CN202223503114.7U
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Chinese (zh)
Inventor
谢乾坤
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Shanghai Z&h Electronic Co ltd
Shanghai Zhonghong Semiconductor Equipment Co ltd
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Shanghai Z&h Electronic Co ltd
Shanghai Zhonghong Semiconductor Equipment Co ltd
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Abstract

The utility model relates to the technical field of chemical liquid supply, and particularly discloses a vacuum extraction device, wherein a shell is provided with a gas inlet, a vacuum inlet and a gas outlet, and the vacuum inlet is communicated with a container containing chemicals through a first external pipeline; the vacuum generator is arranged in the shell and is provided with an inlet, an outlet and a vacuum port, and the inlet is communicated with the gas inlet; the outlet is communicated with the gas outlet; the first end of the vacuum pipeline is communicated with a vacuum port of the vacuum generator, and the second end of the vacuum pipeline is communicated with the vacuum inlet; the control valve body is arranged on the vacuum pipeline and used for controlling the on-off of the vacuum pipeline; the liquid sensor is used for detecting liquid in the vacuum pipeline, and the control valve body can cut off the vacuum pipeline when the liquid sensor detects the liquid. The vacuum extraction device does not need chemicals to flow through the vacuum extraction device in the whole degassing process, so that the harm to workers is reduced.

Description

Vacuum extraction device
Technical Field
The utility model relates to the technical field of chemical liquid supply, in particular to a vacuum extraction device.
Background
In a buffer tank of a liquid supply system of chemicals, residual part of gas in a solvent of the buffer tank can be caused due to the problems of liquid supply speed and pressure, so that the problem of bubbles in a pipeline in the liquid spraying process is caused. For this purpose, the gas needs to be removed, and the existing solutions are: a chemical filtering device is added in the liquid supply pipeline, the filtering device comprises a container and a vacuum generator, the chemical passes through the container, and part of gas in the liquid in the vacuum generator is pumped away in the process of passing through the container. In the degassing process, chemicals need to pass through the whole filtering device, so that pollution is caused to each pipeline, and when the chemicals leak from the filtering device, the safety of workers is threatened.
Therefore, it is necessary to study a vacuum extraction device to realize the degassing of chemicals, and at the same time, to avoid the chemicals from passing through the function of the vacuum extraction device, avoid the pollution to each pipeline, and reduce the harm to the staff.
Disclosure of Invention
The utility model aims to provide a vacuum extraction device, which can realize the function of removing gas from chemicals and simultaneously prevent the chemicals from passing through the vacuum extraction device, thereby avoiding pollution to each pipeline and reducing harm to staff.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the present utility model provides a vacuum extraction device, comprising:
a housing provided with a gas inlet, a vacuum inlet and a gas outlet, the vacuum inlet being capable of communicating with a container containing chemicals through a first external conduit;
the vacuum generator is arranged in the shell and is provided with an inlet, an outlet and a vacuum port, and the inlet is communicated with the gas inlet; the outlet is communicated with the gas outlet;
a vacuum pipeline, wherein a first end of the vacuum pipeline is communicated with a vacuum port of the vacuum generator, and a second end of the vacuum pipeline is communicated with the vacuum inlet;
the control valve body is arranged on the vacuum pipeline and used for controlling the on-off of the vacuum pipeline;
the liquid sensor is used for detecting liquid in the vacuum pipeline, and the control valve body cuts off the vacuum pipeline when the liquid sensor detects the liquid.
Preferably, the control valve body is located between the vacuum generator and the liquid sensor.
Preferably, the vacuum extraction device comprises a vacuum detection member, wherein a test end of the vacuum detection member is communicated with the vacuum pipeline, and the vacuum detection member is used for detecting the vacuum degree in the vacuum pipeline.
Preferably, the vacuum extraction device comprises a detection pipeline, a first end of the detection pipeline is communicated with the vacuum detection piece, and a second end of the detection pipeline is communicated with the vacuum pipeline and is positioned between the vacuum generator and the control valve body.
Preferably, the vacuum extraction device comprises an electromagnetic valve and an air inlet pipeline, wherein a first end of the air inlet pipeline is communicated with the air inlet, a second end of the air inlet pipeline is communicated with the inlet, and the electromagnetic valve is arranged on the air inlet pipeline and used for controlling on-off of the air inlet pipeline.
Preferably, the vacuum extraction device comprises a pressure regulating valve, wherein the pressure regulating valve is arranged on the air inlet pipeline and is positioned on one side of the electromagnetic valve away from the vacuum generator, and the pressure regulating valve is used for regulating the airflow velocity entering the vacuum generator.
Preferably, the control valve body comprises a pneumatic valve, the gas controlling the pneumatic valve being homologous to the gas entering the vacuum generator.
Preferably, the vacuum extraction device comprises a communicating pipe, a first end of the communicating pipe is communicated with the air inlet pipeline, a second end of the communicating pipe is communicated with the air inlet of the pneumatic valve, and the first end of the communicating pipe is positioned between the vacuum generator and the electromagnetic valve.
Preferably, the vacuum extraction device comprises a display for displaying the operating state of the vacuum extraction device.
Preferably, the display member comprises a green light, the vacuum generator is in a normal working state, and the green light is lighted;
and/or
The display piece comprises a red light, the vacuum generator is in a fault working state, and the red light is lightened;
and/or
The display member includes a yellow light, and the liquid sensor detects a state of the liquid, and the yellow light is lighted.
The beneficial effects of the utility model are as follows:
the utility model provides a vacuum extraction device, which is provided with a vacuum generator, wherein the vacuum generator can be communicated with a container containing chemicals through a first external pipeline, gas in the container can be extracted and discharged through a gas outlet when the vacuum generator works, the whole degassing process does not need chemicals to flow through the vacuum extraction device, so that pollution to each pipeline is avoided, and a control valve body and a liquid sensor are arranged on a vacuum pipeline, when the chemicals flow through the vacuum pipeline, the control valve body can cut off the vacuum pipeline, so that the chemicals are prevented from flowing into the vacuum generator, and the safety performance of the vacuum extraction device is further improved.
Drawings
FIG. 1 is a schematic diagram of a vacuum pumping apparatus according to an embodiment of the present utility model;
fig. 2 is an internal schematic diagram of a vacuum pumping apparatus in accordance with an embodiment of the present utility model.
In the figure:
1. a housing; 11. a gas inlet; 12. a gas outlet; 13. a vacuum inlet;
2. a vacuum generator;
31. a vacuum pipeline; 32. an air intake line; 33. an air outlet pipeline;
4. a control valve body; 41. a communicating pipe;
5. a liquid sensor;
6. a vacuum detection member; 61. detecting a pipeline; 62. a display screen;
71. an electromagnetic valve; 72. a pressure regulating valve; 73. a display member; 74. and (3) a switch.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
As shown in fig. 1-2, the present embodiment provides a vacuum extraction device comprising a housing 1, a vacuum generator 2, a vacuum line 31, a control valve body 4 and a liquid sensor 5, wherein the housing 1 is provided with a gas inlet 11, a gas outlet 12 and a vacuum inlet 13, the vacuum inlet 13 being capable of communicating with a container containing chemicals through a first external line; the vacuum generator 2 is arranged in the shell 1, the vacuum generator 2 is provided with an inlet, an outlet and a vacuum port, and the inlet is communicated with the gas inlet 11; the outlet communicates with the gas outlet 12; the first end of the vacuum pipeline 31 is communicated with a vacuum port of the vacuum generator 2, and the second end of the vacuum pipeline 31 is communicated with the vacuum inlet 13; the control valve body 4 is arranged on the vacuum pipeline 31 and is used for controlling the on-off of the vacuum pipeline 31; the liquid sensor 5 is used to detect the liquid in the vacuum line 31, and the control valve body 4 can shut off the vacuum line 31 when the liquid sensor 5 detects the liquid.
It should be noted that, the vacuum extraction device further includes a controller, the controller is connected with the liquid sensor 5 in a communication manner, the controller is connected with the control valve body 4 in a communication manner, the liquid sensor 5 detects the liquid to generate a liquid signal, the controller receives the liquid signal to control the control valve body 4 to act, and the vacuum pipeline 31 is cut off, so that the chemical is prevented from entering the vacuum generator 2. The control principle of the controller is well known to those skilled in the art, and thus will not be described in detail herein.
This vacuum extraction device is through setting up vacuum generator 2, can communicate with the container that holds the chemical through first outside pipeline, and vacuum generator 2 during operation can take out the gas in the container, and discharge through gas outlet 12, whole degasification process does not need the chemical to flow through vacuum extraction device, avoid causing the pollution to each pipeline, and through setting up control valve body 4 and liquid sensor 5 on vacuum pipeline 31, when having the chemical to flow through vacuum pipeline 31, then control valve body 4 can cut off vacuum pipeline 31, avoid the chemical to flow into vacuum generator 2, and then improved vacuum extraction device's security performance.
Optionally, a control valve body 4 is located between the vacuum generator 2 and the liquid sensor 5. This arrangement prevents chemicals from passing through the control valve body 4 and prevents the chemicals from eroding the control valve body 4.
The vacuum extraction device comprises a vacuum detection piece 6, a testing end of the vacuum detection piece 6 is communicated with a vacuum pipeline 31, and the vacuum detection piece 6 is used for detecting the vacuum degree in the vacuum pipeline 31. Specifically, the vacuum detection member 6 includes a vacuum detection gauge. Further, the vacuum detecting member 6 displays the vacuum degree through the display screen 62.
The vacuum extraction device comprises a detection pipeline 61, wherein a first end of the detection pipeline 61 is communicated with the vacuum detection piece 6, and a second end of the detection pipeline 61 is communicated with the vacuum pipeline 31 and is positioned between the vacuum generator 2 and the control valve body 4. This arrangement also prevents chemicals from entering the vacuum detector 6.
In order to improve the automation degree, in this embodiment, the vacuum pumping device includes a solenoid valve 71 and an air inlet pipe 32, a first end of the air inlet pipe 32 is communicated with the air inlet 11, a second end of the air inlet pipe 32 is communicated with the inlet of the vacuum generator 2, and the solenoid valve 71 is disposed in the air inlet pipe 32 for controlling the on-off of the air inlet pipe 32.
The vacuum extraction device includes a manual switch 74, the manual switch 74 being used to control the on-off of the solenoid valve 71. After the manual switch 74 is opened, the solenoid valve 71 is energized and external gas can enter the vacuum generator 2 from the gas inlet 11. Wherein a first end of the gas outlet line 33 communicates with the outlet of the vacuum generator 2 and a second end of the gas outlet line 33 communicates with the gas outlet 12.
To achieve the adjustable pumping rate of the vacuum generator 2, in this embodiment, the vacuum pumping device includes a pressure adjusting valve 72, where the pressure adjusting valve 72 is disposed on the air inlet pipe 32 and on a side of the electromagnetic valve 71 away from the vacuum generator 2, and the pressure adjusting valve 72 is used to adjust the airflow rate entering the vacuum generator 2.
The control valve body 4 comprises a pneumatic valve, the gas controlling the pneumatic valve being homologous to the gas entering the vacuum generator 2. The arrangement ensures that the whole vacuum extraction device only needs one air inlet source, simplifies the operation flow, and only accesses external high-pressure air from the air inlet 11.
Specifically, the vacuum drawing device includes a communication pipe 41, a first end of the communication pipe 41 being communicated with the intake pipe 32, and a second end being communicated with an intake port of the air-operated valve, the first end of the communication pipe 41 being located between the vacuum generator 2 and the electromagnetic valve 71.
The vacuum extractor includes a display member 73, and the display member 73 is used for displaying the operating state of the vacuum extractor. So as to visually observe the working state of the vacuum extraction device. Specifically, the display 73 includes a green light, which lights up, in the normal operating state of the vacuum generator 2. The display 73 includes a red light, which lights up, for example, in the case of a faulty operating state of the vacuum generator 2. The display 73 includes a yellow light, and the liquid sensor 5 detects the state of the liquid, and the yellow light is turned on.
The liquid sensor 5 comprises a photoelectric sensor. The photosensor can generate a liquid signal after detecting the chemical. Of course, in other embodiments, the liquid sensor 5 may also be a liquid level sensor, and the liquid level sensor is arranged in a vertical section of the vacuum line 31.
The external high-pressure gas is transmitted through a second external pipeline, and the outlet of the second external pipeline is communicated with the gas inlet 11, wherein a plurality of types of inlet connectors can be reserved, and one inlet connector which can be matched with the second external pipeline is selected to be in threaded connection with the side wall of the gas inlet 11.
The third external conduit may communicate with the gas outlet 12 via an outlet fitting to vent the gas. The number of the outlet connectors can be multiple, and one outlet connector which can be matched with the third external pipeline is selected to be in threaded connection with the side wall of the gas outlet 12 in use.
The number of vacuum connectors can be multiple, and in use, one vacuum connector capable of being matched with the first external pipeline is selected to be in threaded connection with the side wall of the vacuum inlet 13.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. Vacuum extraction device, characterized in that it comprises:
a housing (1), the housing (1) being provided with a gas inlet (11), a vacuum inlet (13) and a gas outlet (12), the vacuum inlet (13) being communicable with a container containing a chemical through a first external conduit;
the vacuum generator (2), the vacuum generator (2) is arranged in the shell (1), the vacuum generator (2) is provided with an inlet, an outlet and a vacuum port, and the inlet is communicated with the gas inlet (11); said outlet being in communication with said gas outlet (12);
a vacuum line (31), a first end of the vacuum line (31) being in communication with a vacuum port of the vacuum generator (2), a second end of the vacuum line (31) being in communication with the vacuum inlet (13);
the control valve body (4) is arranged on the vacuum pipeline (31) and is used for controlling the on-off of the vacuum pipeline (31);
and a liquid sensor (5), wherein the liquid sensor (5) is used for detecting the liquid in the vacuum pipeline (31), and the control valve body (4) cuts off the vacuum pipeline (31) when the liquid sensor (5) detects the liquid.
2. Vacuum extractor device according to claim 1, characterized in that the control valve body (4) is located between the vacuum generator (2) and the liquid sensor (5).
3. Vacuum extractor according to claim 1, characterized in that the vacuum extractor comprises a vacuum detection member (6), the test end of the vacuum detection member (6) being in communication with the vacuum line (31), the vacuum detection member (6) being adapted to detect the vacuum level in the vacuum line (31).
4. A vacuum extractor according to claim 3, characterized in that it comprises a detection conduit (61), a first end of which detection conduit (61) communicates with the vacuum detection member (6), and a second end of which detection conduit (61) communicates with the vacuum conduit (31) and is located between the vacuum generator (2) and the control valve body (4).
5. Vacuum pumping device according to claim 1, characterized in that the vacuum pumping device comprises a solenoid valve (71) and an air inlet pipe (32), a first end of the air inlet pipe (32) is communicated with the air inlet (11), a second end of the air inlet pipe (32) is communicated with the inlet, and the solenoid valve (71) is arranged in the air inlet pipe (32) for controlling the on-off of the air inlet pipe (32).
6. Vacuum extractor according to claim 5, characterized in that the vacuum extractor comprises a pressure regulating valve (72), the pressure regulating valve (72) being provided in the inlet line (32) and being located on the side of the solenoid valve (71) remote from the vacuum generator (2), the pressure regulating valve (72) being adapted to regulate the flow rate of the air flow into the vacuum generator (2).
7. Vacuum extractor device according to claim 5, characterized in that the control valve body (4) comprises a pneumatic valve, the gas of which is controlled in homology with the gas entering the vacuum generator (2).
8. The vacuum pumping apparatus as defined in claim 7, wherein the vacuum pumping apparatus includes a communication pipe (41), a first end of the communication pipe (41) communicates with the air intake pipe (32), a second end of the communication pipe (41) communicates with the air intake port of the air-operated valve, and the first end of the communication pipe (41) is located between the vacuum generator (2) and the electromagnetic valve (71).
9. Vacuum extractor according to any of claims 1-8, characterized in that the vacuum extractor comprises a display element (73), which display element (73) is adapted to display the operating state of the vacuum extractor.
10. Vacuum extractor device according to claim 9, characterized in that said display (73) comprises a green light, said vacuum generator (2) being in normal operation, said green light being illuminated;
and/or
The display (73) comprises a red light, and the vacuum generator (2) is in a fault working state, and the red light is lighted;
and/or
The display member (73) includes a yellow lamp, and the liquid sensor (5) detects the state of the liquid, and the yellow lamp is lighted.
CN202223503114.7U 2022-12-27 2022-12-27 Vacuum extraction device Active CN219308003U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223503114.7U CN219308003U (en) 2022-12-27 2022-12-27 Vacuum extraction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223503114.7U CN219308003U (en) 2022-12-27 2022-12-27 Vacuum extraction device

Publications (1)

Publication Number Publication Date
CN219308003U true CN219308003U (en) 2023-07-07

Family

ID=87026801

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223503114.7U Active CN219308003U (en) 2022-12-27 2022-12-27 Vacuum extraction device

Country Status (1)

Country Link
CN (1) CN219308003U (en)

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