CN219202054U - Laser scanning positioning device - Google Patents

Laser scanning positioning device Download PDF

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Publication number
CN219202054U
CN219202054U CN202320336672.4U CN202320336672U CN219202054U CN 219202054 U CN219202054 U CN 219202054U CN 202320336672 U CN202320336672 U CN 202320336672U CN 219202054 U CN219202054 U CN 219202054U
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China
Prior art keywords
driver
laser scanning
positioning device
reflecting mirror
mirror
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CN202320336672.4U
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Chinese (zh)
Inventor
何煦
曹军平
李欣
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Suzhou Xuxin Intelligent Technology Co ltd
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Suzhou Xuxin Intelligent Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

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Abstract

The utility model relates to the technical field of positioning devices, and particularly discloses a laser scanning positioning device, which comprises a reflecting mirror, a driver and an angle sensor, wherein the reflecting mirror is used for reflecting laser beams into the air; the driver is configured to drive the mirror to rotate around a rotation axis of the driver; the angle sensor is configured to measure a real-time angle of the mirror; the driver, the reflector and the angle sensor form a simple beam structure. The device sets up driver, speculum and angle sensor coaxial line and forms the simple beam structure, and then, when driver drive speculum rotated, improved the load rigidity of speculum, alleviateed the rocking of speculum skew driver pivot, and then reduced speculum position measurement error, promoted the measurement accuracy of device.

Description

Laser scanning positioning device
Technical Field
The utility model relates to the technical field of positioning devices, in particular to a laser scanning positioning device.
Background
The laser positioning or scanning device has the characteristics of high positioning speed (hundreds of microseconds to milliseconds), high positioning precision (generally requiring several micro-arcs), and is commonly used for fundus scanning OCT equipment, laser melting additive manufacturing equipment, high-density interconnection printed circuit board interconnection micropore machining and the like. In order to meet the requirement of rapid and accurate laser positioning scanning, according to the second law of rotary motion Newton, the driving driver is generally required to have large torque, namely high torque constant, and simultaneously the driver rotor and the driving load (such as a reflecting mirror) thereof have lower moment of inertia; furthermore, the drive rotor load and its support system should have a high stiffness or a high natural frequency of the system.
To achieve high torque, the drive rotor is typically machined from a permanent magnet material such as a neodymium iron boron material; to achieve lower moment of inertia and high system natural frequencies, laser mirror materials are typically fabricated from silicon/beryllium/silicon carbide, etc. (e.g., U.S. patent No. 10761293B 2).
With the improvement of the laser scanning processing speed and precision requirements, such as the improvement of the productivity requirement and the processing precision requirement of laser melting additive manufacturing and the gradual reduction of the diameter of the laser processing micropore, the system has higher requirements on the laser scanning positioning device.
The conventional laser scanning positioning device is referred to in US 2005/011122A 1. Generally consists of the following parts: the device comprises a driver stator, a driver rotating shaft, a rotor supporting bearing, a reflecting mirror arranged at one end of the driver rotating shaft and a position sensor arranged at the other end of the driver rotating shaft.
Because the reflector and the rotating shaft of the driver form a cantilever beam structure, the reflector easily swings away from the rotating shaft of the driver in the process that the driver drives the reflector to rotate, and the measuring precision is affected.
Disclosure of Invention
The utility model aims at: the laser scanning positioning device is provided to solve the problem that in the related art, as the reflecting mirror and the rotating shaft of the driver form a cantilever beam structure, the reflecting mirror easily swings away from the rotating shaft of the driver in the process that the driver drives the reflecting mirror to rotate, so that the measuring precision is affected.
The utility model provides a laser scanning positioning device, which comprises:
a reflecting mirror for reflecting the laser beam into the air;
a driver configured to drive the mirror to rotate about a rotational axis of the driver;
an angle sensor configured to measure a real-time angle of the mirror;
the driver, the reflecting mirror and the angle sensor are coaxially arranged and form a simple beam structure.
As the preferable technical scheme of the laser scanning positioning device, one end of the reflecting mirror is fixedly connected with the rotating shaft of the driver, and the other end of the reflecting mirror is fixedly connected with the measuring shaft of the angle sensor.
As the preferable technical scheme of the laser scanning positioning device, the laser scanning positioning device further comprises a fixing piece, one end of the fixing piece is in interference fit with the rotating shaft of the driver, and the other end of the fixing piece is in adhesive joint with one end of the reflecting mirror.
As the preferable technical scheme of the laser scanning positioning device, a groove is concavely formed in the end portion of the measuring shaft, and the other end of the reflecting mirror is inserted into the groove and is clamped with the measuring shaft.
As the preferred technical scheme of laser scanning positioner, angle sensor still include the casing with set up in light source, baffle, rotation board and the light receiver of casing inside, the light that the light source will send is directional the light receiver, the baffle sets up the light receiver with between the light source, the baffle is provided with a plurality of light inlets, the measuring shaft drive the rotation board is in rotate and sweep in proper order a plurality of on the baffle light inlet.
As a preferable technical scheme of the laser scanning positioning device, the driver is a galvanometer motor.
As the preferable technical scheme of the laser scanning positioning device, two drivers are arranged, one end of a rotating shaft of each driver is fixedly connected with two ends of the reflecting mirror respectively, and the other end of the rotating shaft of one of the two drivers is fixedly connected with a measuring shaft of the angle sensor.
As the preferable technical scheme of the laser scanning positioning device, two drivers are arranged, and one end of a rotating shaft of each driver is fixedly connected with two ends of the reflecting mirror respectively;
the two angle sensors are arranged, and measuring shafts of the two angle sensors are fixedly connected with the other ends of the rotating shafts of the two drivers respectively.
As a preferable technical scheme of the laser scanning positioning device, the measuring shafts of the two angle sensors form a preset included angle a around the rotating direction of the reflecting mirror.
As a preferable technical scheme of the laser scanning positioning device, the value of the preset included angle a is 90 degrees.
The beneficial effects of the utility model are as follows:
the utility model provides a laser scanning and positioning device, which comprises a reflecting mirror, a driver and an angle sensor, wherein the reflecting mirror is used for reflecting a laser beam into the air; the driver is configured to drive the mirror to rotate around a rotation axis of the driver; the angle sensor is configured to measure a real-time angle of the mirror; the driver, the reflecting mirror and the angle sensor are coaxially arranged and form a simple beam structure. The device forms a simple beam structure with the driver, the reflector and the angle sensor, and then, when the driver drives the reflector to rotate, the load rigidity of the reflector is improved, the shaking of the reflector deviating from the rotating shaft of the driver is reduced, the position measurement error of the reflector is further reduced, and the measurement precision of the device is improved.
Drawings
FIG. 1 is a schematic diagram of a laser scanning positioning device according to a first embodiment of the present utility model;
FIG. 2 is a cross-sectional view of a laser scanning positioning device according to a first embodiment of the present utility model;
FIG. 3 is an exploded view of an angle sensor according to a first embodiment of the present utility model;
FIG. 4 is a schematic diagram of a laser scanning positioning device according to a second embodiment of the present utility model;
FIG. 5 is a schematic diagram of a laser scanning positioning device according to a third embodiment of the present utility model;
fig. 6 is a schematic diagram of a preset angle a between measurement axes of the first angle sensor and the second angle sensor in the third embodiment of the present utility model.
In the figure:
1. a reflecting mirror;
2. a driver;
3. an angle sensor; 31. a measuring shaft; 311. a groove; 32. a bracket; 33. a light source; 34. a baffle; 341. a light inlet hole; 35. a rotating plate; 36. a light receiver;
4. and a fixing piece.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
Example 1
As shown in fig. 1 to 3, the present embodiment provides a laser scanning positioning device including a mirror 1, a driver 2, and an angle sensor 3, the mirror 1 being for reflecting a laser beam into the air; the driver 2 is configured to drive the mirror 1 to rotate about a rotation axis of the driver 2; the angle sensor 3 is configured to measure the real-time angle of the mirror 1; the driver 2, the mirror 1 and the angle sensor 3 form a simple beam structure. The device sets up driver 2, speculum 1 and angle sensor 3 coaxial line and form the simple beam structure, and then, when driver 2 drive speculum 1 rotates, has improved the load rigidity of speculum 1, has alleviateed the rocking of speculum 1 skew driver 2 pivot, and then has reduced speculum 1 position measurement error, has promoted the measurement accuracy of device.
Alternatively, one end of the reflecting mirror 1 is fixedly connected with the rotating shaft of the driver 2, and the other end of the reflecting mirror 1 is fixedly connected with the measuring shaft 31 of the angle sensor 3. In this embodiment, the driver 2 and the angle sensor 3 are both fixed by the fixing member 4, the rotating shaft of the driver 2 drives the mirror 1 to rotate, and the mirror 1 drives the measuring shaft 31 of the angle sensor 3 to rotate, so as to form a simply supported beam structure. In addition, the measuring shaft 31 of the angle sensor 3 is directly connected with the reflecting mirror 1, thereby reducing the position measuring error of the reflecting mirror 1.
Optionally, the laser scanning positioning device further comprises a fixing piece 4, one end of the fixing piece 4 is in interference fit with the rotating shaft of the driver 2, and the other end of the fixing piece 4 is glued with one end of the reflecting mirror 1. In this embodiment, the laser scanning positioning device further includes a pin shaft, and the pin shaft sequentially penetrates through the fixing member 4 and the rotating shaft along a radial direction of the rotating shaft, and this arrangement can prevent the fixing member 4 from rotating around a circumferential direction of the rotating shaft relative to the rotating shaft, and can prevent the rotating shaft from being separated from the fixing member 4. In other embodiments, the insertion portion of the rotating shaft is rectangular along the section perpendicular to the axis, and the insertion portion is inserted in the fixing member 4 in an interference manner, so that the fixing member 4 can be prevented from rotating relative to the rotating shaft around the circumference of the rotating shaft.
Optionally, a groove 311 is concavely formed at the end of the measuring shaft 31, and the other end of the reflecting mirror 1 is inserted into the groove 311 and is clamped with the measuring shaft 31. In other embodiments, the groove 311 is filled with glue, and when the mirror 1 is inserted into the groove 311, the mirror 1 is glued to the measuring shaft 31.
Optionally, the angle sensor 3 further includes a housing, and a light source 33, a baffle 34, a rotating plate 35 and a light receiver 36 disposed inside the housing, wherein the light source 33 directs the emitted light to the light receiver 36, the baffle 34 is disposed between the light receiver 36 and the light source 33, the baffle 34 is provided with a plurality of light inlet holes 341, and the measuring shaft 31 drives the rotating plate 35 to rotate on the baffle 34 and sweep through the plurality of light inlet holes 341 in sequence. In this embodiment, the angle sensor 3 further includes a bracket 32, the bracket 32 is fixedly connected with the housing, and the light source 33 is fixedly arranged on the bracket 32. The fiber optic receptacle 36 is secured to the housing. In the process that the reflector 1 drives the measuring shaft 31 to rotate, the measuring shaft 31 drives the rotating plate 35 to rotate on the baffle 34 so as to sweep a plurality of light inlet holes 341, in the process, the light receiver 36 receives the light emitted by the light source 33 and changes, and therefore the position angle of the reflector 1 can be determined.
Alternatively, the driver 2 is a galvanometer motor. In this embodiment, the galvanometer motor is a high-precision, high-speed oscillating motor that meets the high-speed and high-torque operating requirements of the drive 2.
Example two
As shown in fig. 4, this embodiment is basically the same as the first embodiment except that two drivers 2 are provided, one end of the rotation shaft of each of the two drivers 2 is fixedly connected to both ends of the reflecting mirror 1, and the other end of the rotation shaft of one of the two drivers 2 is fixedly connected to the measuring shaft 31 of the angle sensor 3. The two drivers 2 synchronously drive the mirror 1 to rotate, so that a large torque can be provided for the mirror 1. The angle sensor 3 is located at the end of one of the two drives 2 that is farther from the mirror 1, but still provides a more accurate position measurement due to the high rigidity of the simple beam structure.
Example III
As shown in fig. 5 and 6, this embodiment is basically the same as the first embodiment, except that two drivers 2 are provided, and one ends of the rotating shafts of the two drivers 2 are fixedly connected with two ends of the reflecting mirror 1, respectively; the two angle sensors 3 are arranged, and the measuring shafts 31 of the two angle sensors 3 are respectively fixedly connected with the other ends of the rotating shafts of the two drivers 2. In the embodiment, the structure forms a simple beam structure, so that the rigidity of the reflector 1 is improved; the mirror 1 is jointly driven by the two drivers 2, so that larger torque can be provided; the mirror 1 is measured by two angle sensors 3 simultaneously, and can be determined by using the average value of the measurements of the two angle sensors 3 or other estimated values based on the two, thereby providing higher system measurement accuracy.
Alternatively, the measuring axes 31 of the two angle sensors 3 form a predetermined angle a around the direction of rotation of the mirror 1. In this embodiment, the two angle sensors 3 have a position arrangement with a certain angle, and the average value or other estimated values of the two angle sensors can be used to eliminate or reduce the measurement error caused by radial runout. The preset included angle a can be 30 degrees, 45 degrees, 60 degrees, 90 degrees and the like. Preferably, the value of the preset angle a is 90 °.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. Laser scanning positioner, its characterized in that includes:
a reflecting mirror (1) for reflecting the laser beam into the air;
a driver (2) configured to drive the mirror (1) to rotate about a rotation axis of the driver (2);
an angle sensor (3) configured to measure a real-time angle of the mirror (1);
the driver (2), the reflecting mirror (1) and the angle sensor (3) are coaxially arranged and form a simple beam structure.
2. The laser scanning positioning device according to claim 1, characterized in that one end of the reflecting mirror (1) is fixedly connected with the rotating shaft of the driver (2), and the other end of the reflecting mirror (1) is fixedly connected with the measuring shaft (31) of the angle sensor (3).
3. The laser scanning positioning device according to claim 2, further comprising a fixing member (4), wherein one end of the fixing member (4) is in interference fit with the rotating shaft of the driver (2), and the other end of the fixing member (4) is glued with one end of the reflecting mirror (1).
4. The laser scanning positioning device according to claim 2, wherein a groove (311) is concavely formed at an end of the measuring shaft (31), and the other end of the reflecting mirror (1) is inserted into the groove (311) and is clamped with the measuring shaft (31).
5. The laser scanning positioning device according to claim 2, characterized in that the angle sensor (3) further comprises a housing and a light source (33), a baffle (34), a rotating plate (35) and a light receiver (36) arranged inside the housing, the light source (33) directs emitted light to the light receiver (36), the baffle (34) is arranged between the light receiver (36) and the light source (33), the baffle (34) is provided with a plurality of light inlet holes (341), and the measuring shaft (31) drives the rotating plate (35) to rotate on the baffle (34) and sweep through the plurality of light inlet holes (341) in sequence.
6. The laser scanning positioning device according to claim 1, characterized in that the driver (2) is a galvanometer motor.
7. The laser scanning positioning device according to claim 1, wherein two drivers (2) are provided, one end of a rotating shaft of each of the two drivers (2) is fixedly connected with two ends of the reflecting mirror (1), and the other end of the rotating shaft of one of the two drivers (2) is fixedly connected with a measuring shaft (31) of the angle sensor (3).
8. The laser scanning positioning device according to claim 1, wherein two drivers (2) are provided, and one end of a rotating shaft of each driver (2) is fixedly connected with two ends of the reflecting mirror (1);
the two angle sensors (3) are arranged, and measuring shafts (31) of the two angle sensors (3) are fixedly connected with the other ends of the rotating shafts of the two drivers (2) respectively.
9. The laser scanning positioning device according to claim 8, characterized in that the measuring axes (31) of the two angle sensors (3) form a predetermined angle a around the direction of rotation of the mirror (1).
10. The laser scanning positioning device of claim 9 wherein the predetermined angle a has a value of 90 °.
CN202320336672.4U 2023-02-28 2023-02-28 Laser scanning positioning device Active CN219202054U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320336672.4U CN219202054U (en) 2023-02-28 2023-02-28 Laser scanning positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320336672.4U CN219202054U (en) 2023-02-28 2023-02-28 Laser scanning positioning device

Publications (1)

Publication Number Publication Date
CN219202054U true CN219202054U (en) 2023-06-16

Family

ID=86711850

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320336672.4U Active CN219202054U (en) 2023-02-28 2023-02-28 Laser scanning positioning device

Country Status (1)

Country Link
CN (1) CN219202054U (en)

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