CN219201896U - Device for repairing and adjusting probe of probe card - Google Patents

Device for repairing and adjusting probe of probe card Download PDF

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Publication number
CN219201896U
CN219201896U CN202223583159.XU CN202223583159U CN219201896U CN 219201896 U CN219201896 U CN 219201896U CN 202223583159 U CN202223583159 U CN 202223583159U CN 219201896 U CN219201896 U CN 219201896U
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China
Prior art keywords
support column
probe card
flat plate
plate body
probe
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CN202223583159.XU
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Chinese (zh)
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张园
高雪
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Mixin Semiconductor Jiangsu Co ltd
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Mixin Semiconductor Jiangsu Co ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The utility model relates to the technical field of probe cards, in particular to a device for repairing and adjusting probes of a probe card, which comprises a flat plate body, wherein the flat plate body is internally provided with: the first support column, the second support column and the anti-skid block are movably arranged on one side of the flat plate body, and the anti-skid block is fixedly arranged on the first support column and the second support column; the device comprises a flat plate body, a first threaded hole, a second threaded hole and a bolt, wherein the first threaded hole is formed in the flat plate body, the second threaded hole is formed in a first support column and a second support column, and the bolt is movably arranged in the second threaded hole; the adjusting mechanism is used for adjusting the angle and the height for placing the probe card; according to the utility model, the bottom end of the probe card is placed on the cross rod, and the upper ends of the probe card are placed on the anti-slip blocks of the first support column and the second support column, so that the probe card is in an inclined state, and meanwhile, the anti-slip effect of the anti-slip blocks is utilized, so that the firing pin accident caused by the sliding of the probe card from the flat plate body is avoided.

Description

Device for repairing and adjusting probe of probe card
Technical Field
The utility model relates to the technical field of probe cards, in particular to a device for repairing and adjusting probes of a probe card.
Background
A probe card disclosed by chinese patent publication No. CN208921758U, the apparatus comprising: a plurality of probe seats, each probe seat is provided with at least one probe; the device comprises at least two adjacent probe seats, a support, a plurality of measuring units and a plurality of measuring units, wherein the support is arranged between the at least two adjacent probe seats and is used for adjusting the distance between the corresponding two adjacent probe seats so as to meet the test of a target measuring area on a wafer to be tested; and the refrigeration wafer is connected with the corresponding brackets and used for changing the length between the corresponding brackets. According to the technology, the distance between corresponding probe seats can be automatically adjusted according to the change of the ambient temperature when the wafer to be tested is tested, so that the correction of the probe positions is realized, and the alignment accuracy between the probe and the measurement area can be improved, but the technology still has problems in the use process due to the limited structure:
in the prior art and the prior art, when the probe card needs to be straightened, glued, spaced, and cleaned of fuzzes, the conventional method is to hold the probe card by hands and then use a microscope to maintain the probe card, but the probe card is of a large-volume circular structure and is lifted by only one hand, so that the stability of the probe card in the maintenance process can not be ensured, the probe card is easy to fall off, and then the firing pin accident is caused.
Disclosure of Invention
The utility model aims to solve the problem that the firing pin accident of a probe card is easy to occur in the prior art, and provides a device for repairing and adjusting the probe of the probe card.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides a device for probe card probe is repaiied and is transferred, includes the flat plate body, be provided with in the flat plate body:
the first support column, the second support column and the anti-skid block are movably arranged on one side of the flat plate body, the first support column and the second support column are used for supporting the probe card, and the anti-skid block is fixedly arranged on the first support column and the second support column;
the device comprises a first threaded hole, a second threaded hole and a bolt, wherein the first threaded hole is formed in a flat plate body, the second threaded holes are formed in a first support column and a second support column, and the bolt is movably arranged in the second threaded hole;
the adjusting mechanism is arranged in the flat plate body and is used for adjusting the angle and the height for placing the probe card.
Preferably, the first threaded hole and the second threaded hole are both horizontally arranged, and the bolts are respectively and correspondingly arranged in the first threaded hole and the second threaded hole.
Preferably, the adjusting mechanism includes:
the sliding chute is arranged at the middle end position of the flat plate body, and the long holes are respectively arranged at the two end positions of the flat plate body;
the vertical rod and the cross rod are arranged in the chute, the cross rod is fixedly connected to the vertical rod, and the cross rod is used for placing the bottom end of the probe card;
the long rod and the rotating rod are integrally formed on the vertical rod, and the rotating rod is rotatably arranged on the long rod;
the short yoke is integrally formed on the rotating rod, and the fixing hole is formed in the side end of the flat plate body.
Preferably, the sliding groove is communicated with the long hole, and the vertical rod is sleeved in the sliding groove in a sliding way.
Preferably, the long rod is slidably sleeved in the long hole, and the long rod extends to the outer end of the flat plate body through the long hole.
Preferably, the short yoke is movably sleeved in the fixing hole, and the fixing holes are linearly equidistantly arranged on the flat plate body.
Compared with the prior art, the utility model has the following advantages:
1. according to the utility model, the bottom end of the probe card is placed on the cross rod, and the upper ends of the probe card are placed on the anti-slip blocks of the first support column and the second support column, so that the probe card is in an inclined state, and meanwhile, the anti-slip effect of the anti-slip blocks is utilized, so that the firing pin accident caused by the sliding of the probe card from the flat plate body is avoided.
2. According to the utility model, the long rod is pushed to slide in the long hole, the long rod drives the vertical rod to slide in the chute and drives the cross rod to move, so that the height and the angle of the probe card are adjusted, the probe of the probe card can be conveniently maintained, meanwhile, the rotating rod is rotated to deflect, the short yoke is sleeved in one of the fixing holes, and the position of the cross rod is fixed, so that the state of the probe card is stabilized.
Drawings
FIG. 1 is a schematic diagram of a device for repairing and adjusting probes of a probe card according to the present utility model;
FIG. 2 is an enlarged schematic view of the portion A of FIG. 1 according to the present utility model;
fig. 3 is a top view of a device for repairing and adjusting probes of a probe card according to the present utility model.
In the figure: 1. a flat plate body; 2. a first support column; 3. a second support column; 4. an anti-skid block; 5. a first threaded hole; 6. a second threaded hole; 7. a bolt; 8. a chute; 9. a long hole; 10. a vertical rod; 11. a cross bar; 12. a long rod; 13. a rotating lever; 14. a short yoke; 15. and a fixing hole.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Referring to fig. 1 to 3, an apparatus for probe trimming of a probe card includes a flat plate body 1, in which:
the first support column 2, the second support column 3 and the anti-skid block 4 can be made of materials with larger surface roughness to prevent the placed probe card from sliding to generate firing pin accidents, the first support column 2 and the second support column 3 are movably arranged on one side of the flat plate body 1, the first support column 2 and the second support column 3 are used for supporting the probe card, and the anti-skid block 4 is fixedly arranged on the first support column 2 and the second support column 3;
the first screw hole 5, the second screw hole 6 and the bolt 7, wherein the first screw hole 5 is formed in the flat plate body 1, the second screw hole 6 is formed on the first support column 2 and the second support column 3, and the first support column 2 and the second support column 3 are fixed on the flat plate body 1 by the bolt 7;
the adjusting mechanism is arranged in the flat plate body 1 and adjusts the angle and the height for placing the probe card.
The first threaded hole 5 and the second threaded hole 6 are horizontally arranged, and the bolt 7 is respectively and matched with the first threaded hole 5 and the second threaded hole 6.
The adjusting mechanism comprises:
the sliding chute 8 and the long hole 9, the sliding chute 8 is arranged at the middle end position of the flat plate body 1, and the long hole 9 is respectively arranged at the two end positions of the flat plate body 1;
the vertical rod 10 and the cross rod 11, the vertical rod 10 is arranged in the chute 8, the cross rod 11 is fixedly connected to the vertical rod 10, the cross rod 11 is used for placing the bottom end of the probe card, and the upper end of the probe card is in an inclined state by means of the anti-skid block 4, so that the probe card can be maintained conveniently;
the long rod 12 and the rotating rod 13, the long rod 12 is integrally formed on the vertical rod 10, and the rotating rod 13 is rotatably arranged on the long rod 12; the long rod 12 is pushed to drive the cross rod 11 to move, so that the angle and the height of the probe card are changed, and the probe card is convenient to maintain by using a microscope;
the short yoke 14 and the fixed hole 15, the short yoke 14 is integrally formed on the rotating rod 13, and the fixed hole 15 is formed on the side end of the flat plate body 1.
The chute 8 is communicated with the long hole 9, and the vertical rod 10 is slidably sleeved in the chute 8.
The long rod 12 is slidably sleeved in the long hole 9, and the long rod 12 extends to the outer end of the flat plate body 1 through the long hole 9.
The short yoke 14 is movably sleeved in the fixed hole 15, and the fixed holes 15 are arranged on the flat plate body 1 at equal intervals in a straight line; after the angle of the probe card is adjusted, the rotating rod 13 is rotated, the short yoke 14 is sleeved in the fixing hole 15, and then the position of the cross rod 11 is fixed, so that the state of the probe card is stabilized.
The utility model can explain its functional principle by the following modes of operation:
aligning the first screw hole 5 and the second screw hole 6 of the flat plate body 1, and installing bolts 7 in the first screw hole 5 and the second screw hole 6 respectively, so as to fix the first support column 2 and the second support column 3 with the flat plate body 1;
the bottom end of the probe card is placed on the cross rod 11, the upper end of the probe card is placed on the anti-slip blocks 4 of the first support column 2 and the second support column 3, so that the probe card is in an inclined state, the long rod 12 is pushed to slide in the long hole 9, the long rod 12 drives the vertical rod 10 to slide in the chute 8 and drives the cross rod 11 to move, the height and the angle of the probe card are adjusted, the probe of the probe card is convenient to maintain, meanwhile, the rotating rod 13 is rotated to deflect, the short yoke 14 is sleeved in one of the fixing holes 15, and the position of the cross rod 11 is fixed, so that the state of the probe card is stabilized.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims (6)

1. The utility model provides a device for probe card probe is repaiied and transferred, includes dull and stereotyped body (1), its characterized in that, be provided with in dull and stereotyped body (1):
the probe card comprises a first support column (2), a second support column (3) and an anti-slip block (4), wherein the first support column (2) and the second support column (3) are movably arranged on one side of a flat plate body (1), the first support column (2) and the second support column (3) are used for supporting a probe card, and the anti-slip block (4) is fixedly arranged on the first support column (2) and the second support column (3);
the device comprises a first threaded hole (5), a second threaded hole (6) and a bolt (7), wherein the first threaded hole (5) is formed in a flat plate body (1), the second threaded holes (6) are formed in a first support column (2) and a second support column (3), and the bolt (7) is movably arranged in the second threaded hole (6);
the adjusting mechanism is arranged in the flat plate body (1) and is used for adjusting the angle and the height for placing the probe card.
2. The device for repairing and adjusting the probe card probe according to claim 1, wherein the first threaded hole (5) and the second threaded hole (6) are horizontally arranged, and the bolt (7) is respectively and correspondingly arranged in the first threaded hole (5) and the second threaded hole (6).
3. The apparatus for probe card probe trimming of claim 1, wherein the adjustment mechanism comprises:
the sliding chute (8) and the long holes (9), wherein the sliding chute (8) is arranged at the middle end position of the flat plate body (1), and the long holes (9) are respectively arranged at the two end positions of the flat plate body (1);
the probe card comprises a vertical rod (10) and a cross rod (11), wherein the vertical rod (10) is arranged in a chute (8), the cross rod (11) is fixedly connected to the vertical rod (10), and the cross rod (11) is used for placing the bottom end of the probe card;
the long rod (12) and the rotating rod (13), wherein the long rod (12) is integrally formed on the vertical rod (10), and the rotating rod (13) is rotatably arranged on the long rod (12);
the short yoke (14) and the fixing hole (15), the short yoke (14) is integrally formed on the rotating rod (13), and the fixing hole (15) is formed in the side end of the flat plate body (1).
4. A device for repairing and adjusting a probe card probe according to claim 3, wherein the sliding groove (8) is communicated with the long hole (9), and the vertical rod (10) is slidably sleeved in the sliding groove (8).
5. A device for probe card probe trimming according to claim 3, wherein the long rod (12) is slidably sleeved in the long hole (9), and the long rod (12) extends to the outer end of the flat plate body (1) through the long hole (9).
6. A device for repairing and adjusting a probe card probe according to claim 3, wherein the short yoke (14) is movably sleeved in the fixing hole (15), and the fixing holes (15) are linearly equidistantly arranged on the flat plate body (1).
CN202223583159.XU 2022-12-31 2022-12-31 Device for repairing and adjusting probe of probe card Active CN219201896U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223583159.XU CN219201896U (en) 2022-12-31 2022-12-31 Device for repairing and adjusting probe of probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223583159.XU CN219201896U (en) 2022-12-31 2022-12-31 Device for repairing and adjusting probe of probe card

Publications (1)

Publication Number Publication Date
CN219201896U true CN219201896U (en) 2023-06-16

Family

ID=86726653

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223583159.XU Active CN219201896U (en) 2022-12-31 2022-12-31 Device for repairing and adjusting probe of probe card

Country Status (1)

Country Link
CN (1) CN219201896U (en)

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