CN219200371U

CN219200371U - Linear motor type wafer detection platform

Info

Publication number: CN219200371U
Application number: CN202320170499.5U
Authority: CN
Inventors: 冯镜超; 朱小瑞; 王长征
Original assignee: Jiangsu Qunke Intelligent Technology Co ltd
Current assignee: Jiangsu Qunke Intelligent Technology Co ltd
Priority date: 2023-02-09
Filing date: 2023-02-09
Publication date: 2023-06-16
Anticipated expiration: 2033-02-09

Abstract

The utility model relates to a linear motor type wafer detection platform which comprises a base, a lower plate, an upper plate and a joint component, wherein the base is provided with a plurality of grooves; the lower plate is movably connected with the base through a first motor, the upper plate is movably connected with the lower plate through a second motor, a positioning sucker for positioning a wafer is arranged on the upper plate, the joint component is connected with the base through a sheet metal part, the first motor and the second motor are all linear motors, the first motor and the second motor are vertical, the side face of the lower plate is movably connected with the base through a sliding rail component, and the side face of the upper plate is movably connected with the lower plate through the sliding rail component. The utility model provides the linear motor type wafer detection platform, which has the advantages of high moving speed of a linear motor, high repeated positioning precision, improved detection speed and reduced detection error.

Description

Linear motor type wafer detection platform

Technical Field

The utility model relates to the field of wafer detection, in particular to a linear motor type wafer detection platform.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the original material of the wafer is silicon, whether the size of the wafer is qualified or not needs to be detected after the wafer is produced, the precision degree of the wafer is high, and the size needing to be detected is very large.

The wafer inspection methods commonly used at present are: placing the wafer in a secondary element detector for detection, and continuously moving a detection head of the secondary element detector in the detection process to detect all the sizes on the wafer; because the moving mechanism of the secondary element detecting head is a screw rod motor component, the moving speed is low, and the detecting speed is reduced.

Disclosure of Invention

The purpose of the utility model is that: the linear motor type wafer detection platform solves the problems.

In order to achieve the above object, the present utility model provides the following technical solutions:

a linear motor type wafer detection platform comprises a base, a lower plate, an upper plate and a joint component; the lower plate is movably connected with the base through a first motor, the upper plate is movably connected with the lower plate through a second motor, a positioning sucker for positioning a wafer is arranged on the upper plate, the joint component is connected with the base through a sheet metal part, the first motor and the second motor are all linear motors, the first motor and the second motor are vertical, the side face of the lower plate is movably connected with the base through a sliding rail component, and the side face of the upper plate is movably connected with the lower plate through the sliding rail component.

Further, the base is provided with a middle groove and a side groove, the lower plate is movably connected with the bottom of the side groove through a sliding rail assembly, a coil part of the first motor is positioned in the middle groove, and a magnetic circuit of the first motor is positioned in the lower groove of the lower plate.

Further, the upper plate is provided with a first groove and a second groove, the lower plate is movably connected with the second groove through a sliding rail assembly, and a coil part of the second motor is positioned in the first groove.

Further, the magnetic circuit of the second motor is positioned in the upper groove of the lower plate.

Further, the positioning sucker is parallel to the first motor and the second motor.

The beneficial effects of the utility model are as follows: the utility model provides a linear electric motor formula wafer testing platform uses through base, hypoplastron, upper plate and joint component mutually support, realizes the preparation and uses linear electric motor as the rotatory platform of power at the in-process that detects the wafer drive wafer fast movement, and the stationary effect that detects the wafer size of detecting head of secondary element detector, linear electric motor's moving speed is fast, and repeated positioning accuracy is high, has improved detection speed, has reduced detection error.

Drawings

Fig. 1 is an isometric view of an overall structure of a linear motor type wafer inspection platform according to the present utility model.

Fig. 2 is an isometric view of another overall structure of a linear motor type wafer inspection platform according to the present utility model.

Fig. 3 is a front view of the overall structure of a linear motor type wafer inspection platform according to the present utility model.

Fig. 4 is a left side view of the overall structure of a linear motor type wafer inspection platform according to the present utility model.

In the figure: 1. a base; 101. a middle groove; 102. a side groove; 2. a first motor; 3. a second motor; 4. a lower plate; 41. a lower groove; 42. an upper groove; 5. an upper plate; 51. a first groove; 52. a second groove; 6. positioning the suction cup.

Detailed Description

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

Referring to fig. 1 to 4, a linear motor type wafer inspection platform includes a base 1, a lower plate 4, an upper plate 5, and a joint member 7; the lower plate 4 is movably connected with the base 1 through the first motor 2 and is used for driving the lower plate 4 to move in the left-right direction, the upper plate 5 is movably connected with the lower plate 4 through the second motor 3 and is used for driving the upper plate 5 to move in the front-back direction, the upper plate 5 is provided with a positioning sucker 6 used for positioning a wafer to be detected and connected with the base 1 through a sheet metal part and used for being connected with the first motor 2, the third motor 3 and the positioning sucker 6, the first motor 2 and the second motor 3 are all linear motors and are used for improving the movement speed and the repeated positioning accuracy, the first motor 2 and the second motor 3 are vertical, the side face of the lower plate 4 is movably connected with the base 1 through a sliding rail assembly, the side face of the upper plate 5 is movably connected with the lower plate 4 through the sliding rail assembly and is used for ensuring the accuracy of a movement path, and the first motor 2, the second motor 3 and the positioning sucker 6 are connected with an external control system through the joint part 7.

The base 1 is provided with a middle groove 101 and a side groove 102, the lower plate 4 is movably connected with the bottom of the side groove 102 through a sliding rail assembly, a coil part of the first motor 2 is positioned in the middle groove 101, and a magnetic circuit of the first motor 2 is positioned in the lower groove 41 of the lower plate 4 for saving space.

The upper plate 5 is provided with a first groove 51 and a second groove 52, the lower plate 4 is movably connected with the second groove 52 through a sliding rail assembly, and a coil part of the second motor 3 is positioned in the first groove 51 and used for saving space.

The magnetic circuit of the second motor 3 is located in the upper slot 42 of the lower plate 4 for space saving.

The positioning sucker 6 is parallel to the first motor 2 and the second motor 3.

The working principle of the utility model is as follows: before starting the detection work, placing the detection platform on a detection plane of a secondary element detector, carrying a wafer to be detected onto a positioning sucker 6 by an external carrying mechanism, and then adsorbing and positioning the wafer by the positioning sucker 6 under the control of an external control system; then, the wafer inspection step is started: the secondary element detector works to enable the detection head to reach the position right above the wafer to start to detect the wafer, and after detection of one part is completed, the first motor 2 and the second motor 3 are mutually matched under the control of an external control system to drive the positioning sucker 6 to move on a plane, and in the process, the detection head of the secondary element detector sequentially detects all the sizes on the wafer, and the working procedures are kept until the work is finished.

The above examples are provided to further illustrate the utility model and do not limit the utility model to these specific embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be construed as being within the protection scope of the present utility model.

Claims

1. A linear motor type wafer detection platform is characterized in that: comprises a base (1), a lower plate (4), an upper plate (5) and a joint part (7); the utility model discloses a lower plate (4) is through first motor (2) and base (1) swing joint, upper plate (5) are through second motor (3) and lower plate (4) swing joint, be provided with on upper plate (5) and be used for locating wafer location sucking disc (6), joint component (7) are connected with base (1) through the sheet metal component, first motor (2) and second motor (3) are linear electric motor, first motor (2) and second motor (3) are perpendicular, slide rail subassembly and base (1) swing joint are passed through to the side of lower plate (4), slide rail subassembly and lower plate (4) swing joint are passed through to the side of upper plate (5).

2. The linear motor type wafer inspection platform according to claim 1, wherein: the base (1) is provided with a middle groove (101) and a side groove (102), the lower plate (4) is movably connected with the bottom of the side groove (102) through a sliding rail assembly, a coil part of the first motor (2) is positioned in the middle groove (101), and a magnetic circuit of the first motor (2) is positioned in a lower groove (41) of the lower plate (4).

3. The linear motor type wafer inspection platform according to claim 1, wherein: the upper plate (5) is provided with a first groove (51) and a second groove (52), the lower plate (4) is movably connected with the second groove (52) through a sliding rail assembly, and a coil part of the second motor (3) is positioned in the first groove (51).

4. A linear motor type wafer inspection platform according to claim 3, wherein: the magnetic circuit of the second motor (3) is positioned in the upper groove (42) of the lower plate (4).

5. The linear motor type wafer inspection platform according to claim 1, wherein: the positioning sucker (6) is parallel to the first motor (2) and the second motor (3).