CN219178722U - Light energy real-time acquisition monitoring system - Google Patents

Light energy real-time acquisition monitoring system Download PDF

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CN219178722U
CN219178722U CN202223425406.3U CN202223425406U CN219178722U CN 219178722 U CN219178722 U CN 219178722U CN 202223425406 U CN202223425406 U CN 202223425406U CN 219178722 U CN219178722 U CN 219178722U
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light energy
real
monitoring system
data
light
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王翀
吴长江
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Wuxi Ysphotech Semiconductor Technology Co ltd
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Wuxi Ysphotech Semiconductor Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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Abstract

The utility model discloses a light energy real-time acquisition monitoring system, and belongs to the technical field of laser direct writing exposure equipment. According to the light energy real-time acquisition monitoring system provided by the utility model, by arranging the multipath light energy acquisition and conversion devices, not only can the conditions of a plurality of light sources be monitored simultaneously, but also the parallel structure can timely feed back the change conditions of all the light sources; the utility model can realize the uninterrupted collection of the light energy signal in real time and feed back the light energy signal to the PC end, greatly improves the overall working efficiency, and solves the problems that the light energy collection real-time performance is low, the exposure time is occupied and the overall working efficiency and the productivity are influenced under the condition of multiple light sources of the existing light energy collection monitoring system.

Description

Light energy real-time acquisition monitoring system
Technical Field
The utility model relates to a light energy real-time acquisition monitoring system, and belongs to the technical field of laser direct writing exposure equipment.
Background
In the laser direct imaging technology, the stability, uniformity and the like of the energy of a laser light source have great influence on the quality of a produced product, so that the monitoring of the light energy is very necessary.
The existing light energy collection and monitoring system generally adopts a mode of collecting light source energy by a single channel, and for the condition that a plurality of light sources need to monitor light energy at the same time, the single channel collection mode often cannot feed back the energy change condition of all the light sources in time.
In addition, the existing light energy collection monitoring system generally uses a method of placing an energy detection device under a light path by a single test to receive light energy signals and feed the light energy signals back to a collection mode of a PC end, real-time feedback of light source energy change in a short time cannot be achieved, and the light source energy collection needs to occupy exposure time to influence the working efficiency of the whole system.
Disclosure of Invention
In order to solve the above problems, the present utility model provides a system for collecting and monitoring optical energy in real time, comprising: the device comprises a data acquisition device 1 and a light energy data conversion device 2, wherein the light energy data conversion device 2 is connected with the data acquisition device 1;
the light energy data conversion device 2 comprises a light energy sensor 2-1, wherein the light energy sensor 2-1 is positioned on the inner wall of the imaging light path 3 and is used for collecting free photoelectrons in the imaging light path 3 in real time.
In one embodiment, the number of the light energy data conversion devices 2 is the same as the number of the light sources, and each light energy data conversion device 2 is connected with the data acquisition device.
In one embodiment, the data acquisition device 1 comprises:
the main control chip 1-1 is connected with the PC end of the main control computer and used for receiving data transmitted by the upper computer and processing analog voltage data transmitted by the light energy data conversion device 2;
the network communication control chip 1-2 is connected with the main control chip 1-1 and transmits the analog voltage data processed by the main control chip 1-1 to the broadband interface 1-5;
the broadband interface 1-5 is connected with the network communication control chip 1-2 and transmits the analog voltage data to the main control PC;
a first power module 1-4 for supplying power to the data acquisition device 1;
the power output module 1-7 is used for supplying power to the light energy data conversion device 2;
the first analog voltage data signal interface 1-3 is used for receiving the analog voltage signal transmitted by the optical energy data conversion device 2;
the communication bus 1-6 is used for communication between the main control chip 1-1 and the network communication control chip 1-2;
the optical energy data conversion device 2 includes:
the light energy sensor 2-1 is used for receiving illumination of an external light source and generating a light energy value signal;
the optical energy signal conversion circuit 2-2 is connected with the optical energy sensor 2-1 and converts optical energy value signals received by the optical energy sensor 2-1 into analog voltage signals in equal proportion;
the second analog voltage data signal interface 2-3 is connected with the optical energy signal conversion circuit 2-2 in the device, and connected with the first analog voltage data signal interface 1-3 of the data acquisition device 1 outside the device to transmit analog voltage signals;
and the second power supply module 2-4 is connected with the power supply output module 1-7 and is used for supplying power to the light energy data conversion device 2.
In one implementation, the main control chip 1-1 is an STM32 chip.
In one embodiment, the network communication control chip 1-2 is a W5500 chip.
In one embodiment, the broadband interface 1-5 is an RJ45 interface.
In one embodiment, the communication buses 1-6 are SPI communication buses.
In one embodiment, the number of the optical energy data conversion devices 2 is 8, so as to realize the collection and monitoring of 8-channel real-time optical energy.
The utility model has the advantages that:
according to the light energy real-time acquisition monitoring system provided by the utility model, by arranging the multipath light energy acquisition and conversion devices, not only can the conditions of a plurality of light sources be monitored simultaneously, but also the parallel structure can timely feed back the change conditions of all the light sources; the utility model can realize the uninterrupted collection of the light energy signal in real time and feed back the light energy signal to the PC end, greatly improves the overall working efficiency, and solves the problems that the light energy collection real-time performance is low, the exposure time is occupied and the overall working efficiency and the productivity are influenced under the condition of multiple light sources of the existing light energy collection monitoring system.
Drawings
Fig. 1 is a diagram of a real-time light energy collection and monitoring system according to the present utility model.
Fig. 2 is a structural view of the data acquisition device.
Fig. 3 is a structural diagram of the optical energy data conversion device.
Fig. 4 is a schematic structural diagram of the working principle of the real-time optical energy monitoring and collecting system.
Wherein, 1: a data acquisition device; 1-1: a main control chip; 1-2: a network communication control chip; 1-3: a first analog voltage data signal interface; 1-4: a first power module; 1-5: a broadband interface; 1-6: a communication bus; 1-7: and a power output module.
2: a light energy data conversion device; 2-1: an optical energy sensor; 2-2: an optical energy signal conversion circuit; 2-3: a second analog voltage data signal interface; 2-4: and a second power module.
3: a light source light path lens for monitoring the light energy intensity; 4: and a main control computer PC.
Detailed Description
The present utility model will be described in detail below.
Example 1
As shown in FIG. 1, the system for collecting and monitoring the light energy in real time solves the problems that the existing system for collecting and monitoring the light energy has low light energy collection instantaneity under the condition of multiple light sources and occupies exposure time to influence the overall working efficiency and productivity.
The following takes 8 light sources, 8 channels as an example:
fig. 1 is a diagram of a system functional link structure in this embodiment, where a light energy data conversion device converts a light energy intensity value into an analog voltage value and transmits the analog voltage value to a data acquisition device, and the data acquisition device transmits 8 analog voltage values to a host computer, so as to complete the real-time monitoring of the light energy of 8 channels.
The embodiment 8-channel real-time light energy monitoring and collecting system based on the STM32 singlechip comprises a data collecting device 1 and a light energy data converting device 2, wherein the number of the light energy data converting devices 2 is consistent with the number of light sources.
As shown in fig. 2, the data acquisition device 1 includes:
STM32 master control chip 1-1, connect with host computer PC end and is used for receiving the data that the upper computer transmits, and process the analog voltage data of 8 channels;
the 100M network communication control chip W5500-2 is connected with the STM32 main control chip and transmits the analog voltage data processed by the main chip to the RJ45 broadband interface.
The RJ45 broadband interfaces 1-5 are respectively connected with the network communication control chip W5500 and the main control computer PC, and transmit analog voltage data to the main control computer PC.
The power supply modules 1-4 are used for supplying power to the data acquisition device 1.
The 8-path power output module 1-7 is used for supplying power to the 8 light energy data conversion devices 2.
A first analog voltage data signal interface 1-3 comprising 8 interfaces for receiving analog voltage signals transmitted by 8 optical energy data conversion means 2.
The on-board SPI communication buses 1-6 are used for high-speed communication between the STM32 main control chip and the 100M network communication control chip W5500.
As shown in fig. 3, the optical energy data conversion device 2 includes:
the light energy sensor 2-1 is used for receiving illumination of an external light source and generating a light energy value signal.
The optical energy signal conversion circuit 2-2 is connected with the optical energy sensor 2-1 and converts optical energy value signals received by the optical energy sensor 2-1 into analog voltage signals in equal proportion.
The second analog voltage data signal interface 2-3 is connected with the optical energy signal conversion circuit 2-2 inside the device, and connected with the first analog voltage data signal interface 1-3 of the data acquisition device 1 outside the device for transmitting analog voltage signals.
The power module 2-4 is connected with the power output module 1-7 of the data acquisition device 1 and is used for supplying power to the light energy data conversion device 2.
Fig. 4 is a schematic structural diagram of the working principle of the real-time optical energy monitoring and collecting system:
the light source optical path lens for monitoring the light energy intensity is shown as 3, and the main control computer PC is shown as 4.
The optical energy data conversion device 2 is positioned outside the optical path of the lens and connected with the optical energy sensor 2-1, the optical energy sensor 2-1 is positioned on the inner wall of the lens barrel of the lens 3, free photoelectrons in the lens are collected in the optical path in real time, the lens barrel is ensured to have no light leakage and no negative influence on the optical path transmission, and the aim of detecting the optical energy in real time is achieved.
While the utility model has been described with reference to the preferred embodiments, it is not limited thereto, and various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the utility model as defined in the appended claims.

Claims (8)

1. The utility model provides a light energy real-time acquisition monitoring system which characterized in that, light energy real-time acquisition monitoring system includes: the device comprises a data acquisition device (1) and a light energy data conversion device (2), wherein the light energy data conversion device (2) is connected with the data acquisition device (1);
the light energy data conversion device (2) comprises a light energy sensor (2-1), wherein the light energy sensor (2-1) is positioned on the inner wall of the imaging light path (3) and is used for collecting free photoelectrons in the imaging light path (3) in real time.
2. The system according to claim 1, wherein the number of the light energy data conversion devices (2) is the same as the number of the light sources, and each light energy data conversion device (2) is connected with the data acquisition device.
3. The light energy real-time acquisition monitoring system according to claim 1 or 2, characterized in that the data acquisition device (1) comprises:
the main control chip (1-1) is connected with the PC end of the main control computer and used for receiving data transmitted by the upper computer and processing analog voltage data transmitted by the light energy data conversion device (2);
the network communication control chip (1-2) is connected with the main control chip (1-1) and transmits the analog voltage data processed by the main control chip (1-1) to the broadband interface (1-5);
the broadband interface (1-5) is connected with the network communication control chip (1-2) and transmits the analog voltage data to the main control computer PC;
a first power supply module (1-4) for supplying power to the data acquisition device (1);
the power output module (1-7) is used for supplying power to the light energy data conversion device (2);
the first analog voltage data signal interface (1-3) is used for receiving the analog voltage signal transmitted by the optical energy data conversion device (2);
a communication bus (1-6) for communication between the main control chip (1-1) and the network communication control chip (1-2);
the optical energy data conversion device (2) comprises:
a light energy sensor (2-1) for receiving illumination from an external light source and generating a light energy value signal;
the optical energy signal conversion circuit (2-2) is connected with the optical energy sensor (2-1) and converts optical energy value signals received by the optical energy sensor (2-1) into analog voltage signals in equal proportion;
the second analog voltage data signal interface (2-3) is connected with the optical energy signal conversion circuit (2-2) in the device, and is connected with the first analog voltage data signal interface (1-3) of the data acquisition device (1) outside the device to transmit analog voltage signals;
and the second power supply module (2-4) is connected with the power supply output module (1-7) and is used for supplying power to the light energy data conversion device (2).
4. A light energy real-time acquisition monitoring system according to claim 3, characterized in that the main control chip (1-1) is an STM32 chip.
5. A light energy real-time acquisition and monitoring system according to claim 3, wherein the network communication control chip (1-2) is a W5500 chip.
6. A light energy real-time acquisition monitoring system according to claim 3, characterized in that the broadband interface (1-5) is an RJ45 interface.
7. A light energy real-time acquisition monitoring system according to claim 3, characterized in that the communication bus (1-6) is an SPI communication bus.
8. A light energy real-time collection and monitoring system according to claim 3, wherein the number of the light energy data conversion devices (2) is 8, so as to realize the collection and monitoring of 8-channel real-time light energy.
CN202223425406.3U 2022-12-16 2022-12-16 Light energy real-time acquisition monitoring system Active CN219178722U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223425406.3U CN219178722U (en) 2022-12-16 2022-12-16 Light energy real-time acquisition monitoring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223425406.3U CN219178722U (en) 2022-12-16 2022-12-16 Light energy real-time acquisition monitoring system

Publications (1)

Publication Number Publication Date
CN219178722U true CN219178722U (en) 2023-06-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223425406.3U Active CN219178722U (en) 2022-12-16 2022-12-16 Light energy real-time acquisition monitoring system

Country Status (1)

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CN (1) CN219178722U (en)

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