CN219161320U

CN219161320U - Miniaturized multisource information positioning sensor and system

Info

Publication number: CN219161320U
Application number: CN202223468204.7U
Authority: CN
Inventors: 袁宇鹏; 李宝林; 李小飞; 杨靖; 张祖伟; 廖崧琳; 王登攀
Original assignee: Cetc Chip Technology Group Co ltd
Current assignee: Cetc Chip Technology Group Co ltd
Priority date: 2022-12-26
Filing date: 2022-12-26
Publication date: 2023-06-09
Anticipated expiration: 2032-12-26

Abstract

The utility model relates to a sensor technology, in particular to a miniaturized multi-source information positioning sensor and a system; comprises an integrated substrate, a shell and a device combination; the device combination is arranged on the upper surface of the integrated substrate; the shell covers the upper surface of the integrated substrate and surrounds the device combination between the integrated substrate and the shell; the device combination comprises an angular velocity sensor, an acceleration sensor, a magnetic sensor, a barometric sensor, an image sensor and a signal processing circuit; the angular velocity sensor, the acceleration sensor, the magnetic sensor, the air pressure sensor and the image sensor are respectively connected with the signal processing circuit; the shell is provided with an opening, and an optical lens is arranged at the position of the opening; compared with the traditional inertial sensor, the inertial sensor has the advantages of higher measurement precision, more fusion data types, more comprehensive sensing information and richer adaptation environment.

Description

Miniaturized multisource information positioning sensor and system

Technical Field

The utility model relates to a sensor technology, in particular to a miniaturized multi-source information positioning sensor and a system.

Background

The inertial sensor is a core sensor for realizing internal motion state measurement in all motion measurement systems and positioning systems. The inertial sensor generally refers to a combination of an angular velocity sensor and an acceleration sensor for measuring basic physical quantities such as motion, acceleration, and angular velocity. The inertial sensor has the characteristics of strong reliability and no influence of interference of weather and other environmental conditions, and is an autonomous measurement sensor. The intelligent system has important functions on the motion state and positioning of an intelligent system for automatic driving of vehicles, unmanned aerial vehicles and the like, and has the characteristics of short-time high dynamic and high precision. However, only the two inertial sensors, namely the angular velocity sensor of the 3 axis and the acceleration sensor of the 3 axis, can only acquire limited information such as three-dimensional angular velocity, three-dimensional acceleration, three-dimensional position, three-dimensional angular position and the like, and can not work with high precision for a long time due to the problems of intrinsic inherent drift and the like of the angular velocity sensor and the acceleration sensor.

Therefore, the ADIS16488 product developed by ADI (Sunnod) corporation in the United states forms a 10-degree-of-freedom composite inertial sensor by integrating a 3-axis angular velocity sensor, a 3-axis acceleration sensor, a 3-axis magnetic sensor and a barometric sensor, and can effectively improve the positioning accuracy of an intelligent system by integrating three-dimensional magnetic information and barometric pressure altitude information of the 3-axis magnetic sensor and the barometric pressure sensor, but still has the problem of long-time positioning accuracy deviation.

Visual positioning depends on the positioning mode of the external environment, and the positioning precision does not diverge with the increase of time. The advantages of the inertia and the visual positioning are brought into play by fusing, so that the inertia fusion visual positioning has the characteristics of good real-time performance, short-time high-dynamic high-precision and the like, and also has the characteristic of keeping the positioning precision for a long time.

However, the conventional inertial fusion visual positioning is often used in a module form, only has the functions of inertial information and visual information acquisition, and also needs to use an operation platform with higher operation capability for data fusion, so that the whole system has larger volume and larger weight, and is not beneficial to being used in scenes with higher load lightweight requirements. Colleagues, conventional inertial fusion visual positioning often uses a visible light image sensor to collect visible light image information, and recognition effects are crossed in severe weather such as dense fog, low light level and the like.

Disclosure of Invention

The utility model provides a miniaturized multisource information positioning sensor and a system, which are used for solving the problems of long-time positioning accuracy, low adaptability to the visual environment of fusion visible light and the like of the existing inertial sensor.

In a first aspect, the present utility model provides a miniaturized multisource information localization sensor comprising an integrated substrate, a housing and a device combination; the device combination is arranged on the upper surface of the integrated substrate; the shell covers the upper surface of the integrated substrate and surrounds the device combination between the integrated substrate and the shell; the device combination comprises an angular velocity sensor, an acceleration sensor, a magnetic sensor, a barometric sensor, an image sensor and a signal processing circuit; the angular velocity sensor, the acceleration sensor, the magnetic sensor, the air pressure sensor and the image sensor are respectively connected with the signal processing circuit; the shell is provided with an opening at a position corresponding to the image sensor, and an optical lens is arranged at the position of the opening.

Further, the angular velocity sensor is a silicon-based MEMS angular velocity sensor or a quartz MEMS angular velocity sensor; the packaging form of the angular velocity sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

Further, the acceleration sensor is a silicon-based MEMS acceleration sensor; the packaging form of the acceleration sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

Further, the magnetic sensor is a silicon-based MEMS magnetic sensor; the magnetic sensor is packaged in a bare chip, or an analog output package or a digital output package.

Further, the air pressure sensor is a silicon-based MEMS resonant pressure sensor or a silicon-based MEMS piezoresistive pressure sensor; the packaging form of the air pressure sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

Further, the image sensor is a short-range infrared image sensor; the packaging form of the image sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

Further, the signal processing circuit comprises a filter circuit, an analog-to-digital conversion circuit, an isolation circuit and a computing chip.

In a second aspect, based on the sensor of the first aspect, the utility model provides a miniaturized multisource information positioning sensor system, which comprises an angular velocity acquisition module, an acceleration acquisition module, a magnetic acquisition module, an air pressure acquisition module, an image acquisition module and a signal processing module; establishing a space rectangular coordinate system by taking the position of the miniaturized multi-source information positioning sensor system as an origin, wherein the space rectangular coordinate system comprises three axes of x, y and z, and the three axes are as follows:

the angular velocity acquisition module is used for measuring and collecting angular velocity signals in the directions of x, y and z by the acceleration sensor and transmitting the angular velocity signals to the signal processing module;

the acceleration acquisition module is used for measuring and collecting acceleration signals in the directions of x, y and z axes through the acceleration sensor and transmitting the acceleration signals to the signal processing module;

the magnetic acquisition module is used for measuring and collecting magnetic signals in the directions of x, y and z by the magnetic sensor and transmitting the magnetic signals to the signal processing module;

the air pressure acquisition module is used for acquiring an air pressure height signal through the air pressure sensor and transmitting the air pressure height signal to the signal processing module;

the image acquisition module is used for acquiring short-wave infrared image information of an external environment through the image sensor and transmitting the short-wave infrared image information to the signal processing module;

and the signal processing module is used for processing the received signals and analyzing the motion and position information.

The utility model has the beneficial effects that:

aiming at the problems of the existing 10-axis IMU (Inertial MessaurementUnit), the utility model provides a miniaturized multi-source information positioning sensor, which fuses visual image information, the visual image information and parameters of the IMU are mutually influenced, a road mark point observed in vision can be corrected by motion information obtained by the IMU, and the offset of the IMU can be corrected by visual observation, so that the measurement error of a pure inertial measurement module can be reduced to zero, and the reliable working time of the sensor generates leaps of more than 2 orders of magnitude. In addition, compared with the traditional visible light vision 10-axis IMU fusion, the fusion of the short wave infrared and the 10-axis IMU can provide adaptability under severe complex environments such as dense fog, scotopic vision and the like, and all-weather measurement capability is provided.

The miniaturized multi-source information positioning sensor provided by the utility model can directly sense 11 sensing information of three-dimensional angular velocity, three-dimensional acceleration, three-dimensional magnetic field, air pressure and short wave infrared images, and can calculate three-dimensional linear acceleration, three-dimensional angular acceleration, three-dimensional linear velocity, three-dimensional angular velocity, three-dimensional position, three-dimensional angular position, height, positioning position and the like through the sensing information; compared with the traditional inertial sensor, the inertial sensor has the advantages of higher measurement precision, more fusion data types, more comprehensive sensing information and richer adaptation environment.

Drawings

FIG. 1 is a block diagram of a miniaturized multisource information localization sensor according to an embodiment of the present utility model;

FIG. 2 is a top view of the internal structure of a miniaturized multisource information localization sensor according to an embodiment of the present utility model;

FIG. 3 is a bottom view of a miniaturized multisource information localization sensor according to an embodiment of the present utility model;

FIG. 4 is a side view of a miniaturized multisource information localization sensor according to embodiment 1 of the present utility model;

FIG. 5 is a side view of a miniaturized multisource information localization sensor according to embodiment 2 of the present utility model;

the device comprises a 1-integrated substrate, a 2-angular velocity sensor, a 3-acceleration sensor, a 4-magnetic sensor, a 5-air pressure sensor, a 6-image sensor, a 7-signal processing circuit, an 8-output pin and a 9-optical lens.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The existing 10-axis IMU (ADIS 16488 product is taken as an example) is a pure inertial measurement module, displacement and rotation of self motion are obtained by integrating acceleration and angular velocity, and the system has higher measurement frequency (more than 100Hz-1 kHz), but is interfered by factors such as self temperature, self bias, vibration and the like, and has the error problems such as zero point offset, long-time signal offset and the like; meanwhile, because the measurement quantities of the accelerometer, the gyroscope, the magnet and the air pressure are different from each other, the self-error self-correction is difficult to carry out, and the method is difficult to be applied to application scenes needing long-term stable work. The utility model provides a miniaturized multi-source information positioning sensor and a system.

The utility model provides a miniaturized multisource information positioning sensor, which is shown in figure 1 and comprises an integrated substrate, a shell and a device combination; the device combination is arranged on the upper surface of the integrated substrate; the shell covers the upper surface of the integrated substrate and surrounds the device combination between the integrated substrate and the shell; the device combination comprises an angular velocity sensor, an acceleration sensor, a magnetic sensor, a barometric sensor, an image sensor and a signal processing circuit; the angular velocity sensor, the acceleration sensor, the magnetic sensor, the air pressure sensor and the image sensor are respectively connected with the signal processing circuit; the shell is provided with an opening at a position corresponding to the image sensor, and an optical lens is arranged at the opening.

Specifically, an angular velocity sensor, also referred to as a gyro, may be employed a silicon-based micro-mechanical (MEMS) angular velocity sensor, a quartz MEMS angular velocity sensor, or other miniaturized angular velocity sensor; the package form of the angular velocity sensor may be a die, an analog output package, a digital output package, or the like.

In particular, the acceleration sensor may be a silicon-based MEMS acceleration sensor or other miniaturized acceleration sensor; the packaging form of the acceleration sensor can be a bare chip, an analog output packaging chip, a digital output packaging chip and the like.

In particular, the magnetic sensor may employ a silicon-based MEMS magnetic sensor or other miniaturized magnetic sensor; the package form of the magnetic sensor can be selected from a bare chip, an analog output package chip, a digital output package chip and the like.

Specifically, the air pressure sensor may be a silicon-based MEMS resonant pressure sensor, a silicon-based MEMS piezoresistive pressure sensor, or other miniaturized pressure sensors; the packaging form of the air pressure sensor can be a bare chip, an analog output packaging chip, a digital output packaging chip and the like.

Specifically, the image sensor is a short wave infrared image sensor; the packaging form of the image sensor can be selected from a bare chip, an analog output packaging chip, a digital output packaging chip and the like.

Specifically, the image sensor can adopt short-wave infrared image sensors such as indium gallium arsenide (InGaAs) based and silicon (Si) based, and the high-precision acquisition of the characteristic information of the environmental image can be realized under the severe weather conditions such as low light level, dense fog, rain and snow according to the characteristic of the short-wave infrared image acquisition.

Specifically, the signal processing circuit comprises a filter circuit, an analog-to-digital conversion circuit, an isolation circuit, a computing chip and the like; and computing chips include, but are not limited to, single-chip computers, DSP, FPGA, AI chips, application specific integrated circuits, and the like, which may be used to implement combinations of one or more of the code operations.

Specifically, the integrated substrate is used for integrating an angular velocity sensor, an acceleration sensor, a magnetic sensor, a barometric sensor, an image sensor and a signal processing circuit, and can be made of PCB, ceramic, silicon or other materials;

specifically, the optical lens is used for realizing light convergence for the image sensor, and PMMA, polystyrene or other materials can be adopted.

Specifically, the shell is a packaging shell of the miniaturized multisource information positioning sensor, and the shell is provided with an integrated optical lens, and can be made of aluminum alloy, stainless steel, a valve or other materials capable of playing a role in supporting.

Example 1:

the structure of the miniaturized multisource information positioning sensor provided in the embodiment is shown in fig. 2 (top view), fig. 3 (bottom view) and fig. 4 (side view).

The miniaturized multisource information positioning sensor has a square integral structure and consists of an angular velocity sensor 2, an acceleration sensor 3, a magnetic sensor 4, a barometric sensor 5, an image sensor 6, a signal processing circuit 7, an integrated substrate 1, an optical lens 9 and a shell.

Wherein, the angular velocity sensor 2 adopts a triaxial silicon-based MEMS angular velocity sensor with package; the acceleration sensor 3 is a triaxial silicon-based MEMS acceleration sensor with package; the magnetic sensor 4 adopts a triaxial silicon-based MEMS magnetic sensor with package; the air pressure sensor 5 is a silicon-based MEMS pressure sensor with a package; the image sensor 6 adopts an InGaAs short wave infrared image sensor; the signal processing circuit 7 comprises basic circuit components such as a SoC processor, AD, DDR3, an operational amplifier, a power supply, filtering, resistance, capacitance and the like; the integrated integration of the angular velocity sensor 2, the acceleration sensor 3, the magnetic sensor 4, the air pressure sensor 5, the image sensor 6 and the signal processing circuit 7 is realized by adopting a ceramic integrated substrate and adopting the technical modes of welding, reflow welding or conductive material bonding and the like, and the output pin 8 of the integrated circuit realizes signal output in a metal pin manner; a shell made of a metal valve material is adopted, a round hole for light transmission is formed in the shell, and an optical lens is bonded above or below the round hole in a bonding mode; the metal valve shell is connected with the integrated substrate in a bonding or welding mode, so that air tightness is realized, and the stability and reliability of the sensor are improved.

In the embodiment, the image sensor adopts the InGaAs short wave infrared image sensor, so that the characteristic of high-precision image acquisition under the severe weather conditions such as low light level, dense fog, rain and snow can be realized, and finally, the image sensor is integrated with other sensor data to realize all-weather real-time, long-time, high-precision and independent autonomous positioning and motion state sensing of satellites.

Example 2:

the structure of the miniaturized multi-source information positioning sensor provided in this embodiment is shown in fig. 2 (top view), fig. 3 (bottom view) and fig. 5 (side view).

Wherein, the angular velocity sensor 2 adopts a triaxial silicon-based MEMS angular velocity sensor bare chip; the acceleration sensor 3 adopts a triaxial silicon-based MEMS acceleration sensor bare chip; the magnetic sensor 4 adopts a triaxial silicon-based MEMS magnetic sensor bare chip; the air pressure sensor 5 adopts a silicon-based MEMS pressure sensor bare chip; the image sensor 6 adopts an InGaAs shortwave infrared image sensor bare chip; the signal processing circuit 7 comprises a bare chip of basic circuit components such as a SoC processor, AD, DDR3, operational amplifier, power supply, filtering and the like; the integrated integration of the angular velocity sensor 2, the acceleration sensor 3, the magnetic sensor 4, the air pressure sensor 5, the image sensor 6 and the signal processing circuit 7 is realized by adopting a ceramic integrated substrate and adopting the technical modes of welding, reflow welding or adhesive bonding and the like, the output pins 8 of the integrated circuit realize the electric connection of various bare chips and the substrate by adopting metal lead bonding and the like, and the signal output is realized by adopting a bottom solder ball mode; a shell made of a metal valve material is adopted, a round hole for light transmission is formed in the shell, and an optical lens is bonded above or below the round hole in a bonding mode; the metal valve shell is connected with the integrated substrate in a bonding or welding mode, so that air tightness is realized, and the stability and reliability of the sensor are improved.

In this embodiment, core components such as an angular velocity sensor, an acceleration sensor, a magnetic sensor, a barometric sensor, an image sensor, a signal processing circuit and the like all adopt bare chips, and an integrated substrate adopts bottom bonding pad output, so that the overall volume of the sensor can be remarkably reduced, and miniaturization is realized.

The utility model also provides a miniaturized multisource information positioning sensor system, which comprises an angular velocity acquisition module, an acceleration acquisition module, a magnetic acquisition module, an air pressure acquisition module, an image acquisition module and a signal processing module; establishing a space rectangular coordinate system by taking the position of the miniaturized multi-source information positioning sensor system as an origin, wherein the space rectangular coordinate system comprises three axes of x, y and z, and the three axes are as follows:

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "configured," "connected," "secured," "rotated," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other or in interaction with each other, unless explicitly defined otherwise, the meaning of the terms described above in this application will be understood by those of ordinary skill in the art in view of the specific circumstances.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A miniaturized multisource information positioning sensor is characterized by comprising an integrated substrate, a shell and a device combination; the device combination is arranged on the upper surface of the integrated substrate; the shell covers the upper surface of the integrated substrate and surrounds the device combination between the integrated substrate and the shell; the device combination comprises an angular velocity sensor, an acceleration sensor, a magnetic sensor, a barometric sensor, an image sensor and a signal processing circuit; the angular velocity sensor, the acceleration sensor, the magnetic sensor, the air pressure sensor and the image sensor are respectively connected with the signal processing circuit; the shell is provided with an opening at a position corresponding to the image sensor, and an optical lens is arranged at the opening.

2. The miniaturized multisource information localization sensor of claim 1, wherein the angular velocity sensor is a silicon-based MEMS angular velocity sensor or a quartz MEMS angular velocity sensor; the packaging form of the angular velocity sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

3. The miniaturized multisource information positioning sensor according to claim 1, wherein the acceleration sensor is a silicon-based MEMS acceleration sensor; the packaging form of the acceleration sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

4. A miniaturized multisource information localization sensor as claimed in claim 1, wherein the magnetic sensor is a silicon-based MEMS magnetic sensor; the magnetic sensor is packaged in a bare chip, or an analog output package or a digital output package.

5. The miniaturized multisource information positioning sensor according to claim 1, wherein the barometric pressure sensor is a silicon-based MEMS resonant pressure sensor or a silicon-based MEMS piezoresistive pressure sensor; the packaging form of the air pressure sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

6. A miniaturized multisource information localization sensor according to claim 1, characterized in that the image sensor is a short wave infrared image sensor; the packaging form of the image sensor is a bare chip, or an analog output packaging chip, or a digital output packaging chip.

7. The miniaturized multisource information localization sensor of claim 1, wherein the signal processing circuit comprises a filter circuit, an analog to digital conversion circuit, an isolation circuit and a computing chip.

8. The miniaturized multisource information positioning sensor system is characterized by comprising an angular velocity acquisition module, an acceleration acquisition module, a magnetic acquisition module, an air pressure acquisition module, an image acquisition module and a signal processing module; establishing a space rectangular coordinate system by taking the position of the miniaturized multi-source information positioning sensor system as an origin, wherein the space rectangular coordinate system comprises three axes of x, y and z, and the three axes are as follows: